• Journal of Magnetics
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• 제11권2호
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• pp.77-82
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• 2006

The structure and magnetic properties of Fe-Ni films, deposited by DC magnetron sputtering on Si(111) wafer, have been studied. The spin wave stiffness constant is determined by Brillouin light scattering (BLS) and compared with the value obtained from magnetization measurements. The range of exchange interaction was determined as 0.4 atomic distances in the film deposited in a bias magnetic field, which is 1/2 that in the film grown in no bias magnetic field. The results show that the dimensions of exchange coupling increased by the sputtering in the magnetic field.

• 마이크로전자및패키징학회지
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• 제11권3호
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• pp.31-36
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• 2004

연자성 차폐필름에 대하여 ASTM 방법 및 2-port flanged coaxial line 방법으로 RF (radio-frequency) 영역에서 전자기파 차폐특성을 측정하여 원역장에서의 차폐요인을 정량적으로 분석하였다. 4-13.5 GHz의 고주파 영역에서 연자성 차폐필름의 차폐효과는 반사손실에 의한 효과가 아니라 주로 흡수손실에 의한 차폐효과를 가졌다.

• 한국재료학회지
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• 제28권3호
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• pp.159-165
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• 2018

In order to increase the efficiency of the sputtering method widely used in thin film fabrication, a dc sputtering apparatus which supplies both high frequency and magnetic field from the outside was fabricated, and cobalt thin film was fabricated using this apparatus. The apparatus can independently control the applied voltage, the target-substrate distance, and the target current, which are important parameters in the sputtering method, so that a stable glow discharge is obtained even at a low gas pressure of $10^{-3}$ Torr. The fabrication conditions using the sputtering method were mainly performed in $Ar+O_2$ mixed gas containing about 0.6 % oxygen gas under various Ar gas pressures of 1 to 30 mTorr. The microstructure of Co thin films deposited using this apparatus was examined by electron diffraction pattern and X-ray techniques. The magnetic properties were investigated by measuring the magnetization curves. The microstructure and magnetic properties of Co thin films depend on the discharge gas pressure. The thin film fabricated at high gas pressure showed a columnar structure containing a large amount of the third phase in the boundary region and the thin film formed at low gas pressure showed little or no columnar structure. The coercivity in the plane was slightly larger than that in the latter case.

• Journal of Magnetics
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• 제12권1호
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• pp.21-26
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• 2007

Si-based electromagnetic noise suppressors on coplanar waveguide transmission lines incorporated with a $SiO_2$ dielectric layer and a nanogranular Co-Fe-Al-O magnetic thin film are reported. Unlike glass-based devices, large signal attenuation is observed even in the bare structure without coating the magnetic thin film. Much larger signal attenuation is achieved in fully integrated devices. The transmission scattering parameter ($S_{21}$) is as small as -90 dB at 20 GHz at the following device dimensions; the thicknesses of the $SiO_2$ and Co-Fe-Al-O thin films are 0.1 $\mu$m and 1 $\mu$m, respectively, the length of the transmission line is 15 mm, and the width of the magnetic thin film is 2000 $\mu$m. In all cases, the reflection scattering parameter ($S_{11}$) is below -10 dB over the whole frequency band. Additional distributed capacitance formed by the Cu transmission line/$SiO_2$/Si substrate is responsible for these characteristics. It is considered that the present noise suppressors based on the Si substrate are a first important step to the realization of MMIC noise suppressors.

• 한국자기학회지
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• 제5권5호
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• pp.710-715
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• 1995

Magnetic domains were observed using an image lock-in technique for backscattered electron contrast (Type II) with a 200 kV scanning electron microscope. Backscattered electrons indicate a difference in magnetic domain structures at the upper and lower parts of the upper pole in thin-film heads, changing the acceleration voltage. With this method, it is also possible to observe the domain structure of the thin-film head pole through a 10 to $20\;\mu\textrm{m}$ protective layer, and the upper shield of the MR head through the coil in the resist, alumina overcoat, and upper pole.

• Journal of Mechanical Science and Technology
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• 제16권5호
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• pp.591-598
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• 2002

Leakage magnetic flux is occurred in the cracked area of magnetized specimens, and also it changes the magnetic domain area of the magneto-optical film positioned on the specimen. It causes the change of the optical permeability of the magnetic domain on the crack area. So crack images can be obtained easily using this principle. On the other hand, utilizing a laser in this method makes possible to perform a remote sensing by detecting the light intensity contrast between cracked area and normal area. This paper shows the application of non-destructive inspection system taking advantage of magneto-optical method for micro-cracks and presents examples applied to the several types of specimens having fatigue cracks and fabricated cracks using this method. Also the authors prove the possibility of this method as a remote sensing system under the oscillation load considering application to real fields.

• 한국표면공학회지
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• 제44권6호
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• pp.255-259
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• 2011

The thickness dependence of magnetic properties was experimentally investigated in nanocrystalline Fe-Hf-N thin films fabricated by a RF magnetron sputtering method. In order to investigate the thickness effect on their magnetic properties, the films are prepared with different thickness ranges from 90 nm to 330 nm. It was revealed that the coercivity of the thin film increased with film thickness. On the contrary, the saturation magnetization decreased with film thickness. On the basis of the SEM and TEM, an amorphous phase forms during initial growth stage and it changes to crystalline structure after heat treatment at $550^{\circ}C$. Nanocrystalline Fe-Hf-N particles are also generated.

• E2M - 전기 전자와 첨단 소재
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• 제10권8호
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• pp.813-818
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• 1997

In this study the thin film air core and magnetic core inductors consisting of planar coil and/or CoNbZr amorphous magnetic layers on a Si substrate were fabricated as spiral type by using rf magnetron sputtering and wet etching methods. The etchant solution was achieved by iron chloride solution(17.5 mol%) mixed with HF (20 mol%) during 150 sec which etched Cu films and CoNbZr/Cu/CoNbZr multi-layer films. They were about 10${\mu}{\textrm}{m}$ of thickness and 10$\times$10 mm$^2$of size. The properties of thin film magnetic core inductor were 400 nH of Q value at 10 MHz and the resonance frequency was about 300 MHz.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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• pp.212-214
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• 1994

At recent time, superconducting technology makes it possible to develop various devices using strong magnetic fields. As increasing with devices using high magnetic fields, magnetic shielding technology is essential in order to get high efficiency. Therefore it is necessary to establish production method and clear characteristics of suitable shielding materials. Usually, ferromagnetic metal has been used for shielding of high magnetic fields up to the present time. Instead of heavy ferromagnetic metal, we can acquire better upgraded shielding system by using of very light superconducting thin film that has a perfect diamagnetism. We would like to study basic characteristics of NbTi thin film produced by RF sputtering, investigated morphology and crystal structure of NbTi thin film by SEM and XRD, identified superconductivity measuring by critical current.

• 한국자기학회지
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• 제7권6호
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• pp.314-320
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• 1997

폴리에스터 film 위에 자성도료를 도포 후 자성체의 배향 거동을 살펴보았다. static orientation 처리하여 평가한 결과 자성도료가 도포된 film이 배향자석을 통과할 때 배향자석의 입구측과 출구측에서 배향성이 최대로 나타나나 출구측이 약간 낮게 나타났으며 배향자석의 출구를 지나면서 static energy의 감소와 entropy의 증가에 의하여 도막의 건조과정 중 배향성은 서서히 감소되다가 완전히 건조되면서 일정한 수준으로 유지되었다. 그리고 film의 중심부보다 양쪽의 edge 부위에서의 배향성은 떨어지는데 그 원인은 배향자석의 형태에 기인하는 것으로 생각된다. Dynamic orientation 처리하여 평가한 결과 자기 tape에서 자성도막의 배향성이 향상됨에 따라 전 대역에서의 출력 특성은 향상되었으며 건조 조건에 따라서도 tape의 배향성이 변하였다. 따라서 자기 tape의 출력특성을 향상시키기 위하여는 배향자석의 설계 및 자성도료의 건조 조건 등의 검토가 필요하다고 생각한다.