• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.419-422
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• 1999

We prepared CoCr thin film for perpendicular magnetic recording media by facing targets sputtering system(FTS system) which can deposit a high quality thin films in plasma-free state and wide range of working pressure. In this study, we investigated that the effect of sputtering condition , that Argon gas pressure and substrate temperature, on magnetic and crystallographic characteristic of CoCr thin film as well as the variation perpendicular coercivity in changing of film's thickness. Crystallographic and magnetic characteristic of prepared thin films were evaluated by x-ray fractometry(XRD), vibrating sample magnetometer(VSM) and kerr hysteresis loop measurement.

• 한국전기전자재료학회논문지
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• 제23권2호
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• pp.153-158
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• 2010

The crystallization of FePt/MgO(001) magnetic thin films of various thicknesses has been studied using synchrotron x-ray scattering, atomic force microscope, and vibrating sample magnetometer. In film with a 499-$\AA$-thick, face-centered tetragonal, ordered FePt phase was dominantly crystallized into perpendicular (001) grains keeping the magnetically easy c-axis normal to the film plane during annealing. In film with a 816-$\AA$-thick, however, longitudinal (110) grains keeping the c-axis parallel to the film plane were grown on top of the perpendicular (001) grains. The behavior of the magnetic properties was consistent with the thickness dependence of the crystallization. We attribute the thickness dependence of the crystallization to the substrate effect, which prefers the growth of the c-axis oriented perpendicular grains near the film/substrate interfacial area.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 1998년도 춘계학술대회 및 발표대회 강연 및 발표논문 초록집
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• pp.6-6
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• 1998

In 1957, the first magnetic disk drive compatible with a movable head was introduced as an external file memory device for computer system. Since then, magnetic disks have been improved by increasing the recording density, which has brought about the development of a high performance thin film magnetic head. The thin film magnetic head has a magnetic circuit on a ceramic substrate using IC technology. The physical property of the substrate material is very important because it influences the tribology of head/disk interface and also manufacturing process of the head. $Al_{2}O_{3}$-TiC ceramics, so called ALTIC, is known to be one of the best substrate materials which satisfies this property requirement. Even though the head is not in direct contact with the disk, frequent instantaneous contacts are unavoidable due to its high rotating speed and the close gap between them. This may cause damage in the magnetic recording media and, thus, it is very important that the magnetic head has a good wear resistance. $Al_{2}O_{3}$-TiC ceramics has an excellent tribological property in head/disk interface. Manufacturing process of thin film head is similar to that of IC, which requires extremely smooth and flat surface of the substrate. The substrate must be readily sliced into the heads without chipping. $Al_{2}O_{3}$-TiC ceramics has excellent machineability and mechanical properties. $Al_{2}O_{3}$-TiC ceramics was first developed at Nippon Tungsten Co. as cutting tool materials in 1968, which was further developed to be used as the substrate materials for thin film head in collaboration with Sumitomo Special Metals Co., Ltd. in 1981. Today, we supply more than 60% of the substrates for thin film head market in the world. In this paper, we would like to present the sintering process of $Al_{2}O_{3}$-TiC ceramics and its property in detail.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.478-480
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• 2001

Fe-base amorphous films exhibit large saturation magnetostriction and soft magnetic Properties, which make them suitable for strain sensor applications. Most important material properties for the performance of these elements are the superior soft magnetic properties, such as high permeability and small coercive force, as well as magnetoelastic properties. It is well known that the strain generated in film deposition and/or post-heat treatment processes is one of important material properties, which effects on the soft magnetic properties of the film via magnetoelastic coupling. In this study, the effect of an isotropic strain in plane of magnetic films have been performed experimently. Amorphous films with the composition of (F $e_{90}$ $Co_{10}$)$_{78}$S $i_{l2}$ $B_{10}$ were employed in this study. The film with 5${\mu}{\textrm}{m}$ thick was deposed onto the polyimide substrate with 50${\mu}{\textrm}{m}$ thick by virtue of RF sputtering. The film was subject to post annealing with a static magnetic field with 500Oe magnetic field intensity at 35$0^{\circ}C$ for 1 hour. The polyimide substrate with the film was bonded with an adhesive on PZT piezoelectric substrate with 600${\mu}{\textrm}{m}$ thick in applying voltage of 500V. The change in MH loops of films due to the isotropic strain was measured by using VSM. The coercive force was evaluated from MH loops. It has shown in the results that M-H loops of films are subject to change considerably with a dc voltage, resulting of the magnetization rotation from normal to plane direction as the applied voltage is changed from 500V to 250V.50V.V.

• 한국해양공학회지
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• 제15권2호
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• pp.1-5
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• 2001

A study on the new active type oil-water separation system including the oil-water separation system of magnetic film was carried out. Separation system is composed of several active types of circulating oil separation steps and one magnetic film separation step at final stage. At the magnetic separation step, ferrofluid easily forms a weak magnetic mixture with oil, which is from the water by magnetic field gradient. The vessel has been designed to run at the maximum speed of 25 knots. And two typical forms of SWATH and Catamaran have been studied as a new type of oil recovery vessel.

• Current Applied Physics
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• 제18권11호
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• pp.1196-1200
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• 2018

We have experimentally demonstrated circular polarization generation from linear polarized soft X-ray at synchrotron by adopting a thin magnetic film polarizer. Polarizer is composed of Co/Pt multilayer with a perpendicular magnetic anisotropy, which allows us to easily accommodate without needing any tilting angle into the measurement setup since the circular polarization is generated for the X-ray with normal incidence and transmission. Generated circular polarization is examined by observing magnetic domain features based on the X-ray magnetic circular dichroism, where~11% of circular component is estimated compared to the case of full circular polarization.

• Transactions on Electrical and Electronic Materials
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• 제8권1호
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• pp.32-35
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• 2007

In this article, a novel annealing technique using alternating magnetic field (AMF) is adopted to improve the electrical characteristics of pentacene film, thereby enhancing the performance of pentacene-based organic thin film transistors (OTFTs). According to the investigation results, the electrical conductivity in the pentacene film could be increased from 0.32 to 1.18 S/cm by annealing the pentacene film using AMF. And also, OTFTs with the pentacene film annealed by AMF exhibited an improved performance compared to the device without annealing. These results suggest that an annealing using AMF can be an effective method to improve the performance of devices based on organic semiconductors.

• 한국자기학회지
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• 제13권5호
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• pp.198-203
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• 2003

경자성박막을 이용한 자기임피던스센서의 바이어스 자계 인가의 유용성을 알아보기 위해서, SmCo 경자성박막의 조성에 따른 자기적 특성과 이 박막이 아몰퍼스 CoZrNb 연자성박막에 미치는 바이어스 효과에 대하여 조사하였다. 아몰퍼스상을 가지는 SmCo 경자성박막의 포화자화는 Sm 조성이 증가함에 따라 감소하였으며, 보자력은 Sm 조성의 증가에 따라 증가하다가 28 at% 부근에서 약 500 Oe를 나타낸 후 다시 감소하였다. SmCo 박막에 의해서 발생된 바이어스 자계가 CoZrNb 박막에 미치는 효과는 자화곡선과 투자율의 측정, 그리고 자구관찰을 통하여 조사되었다. MI센서로 사용이 가능한 3${\times}$0.5 $\textrm{mm}^2$ 크기의 박막시료에 있어서, 약 60 Oe의 바이어스 자계가 얻어졌으며, 센서의 감도를 최적화하기에 충분한 바이어스 자계를 경자성박막을 이용하여 발생시킬 수 있음을 입증하였다.

• 한국재료학회지
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• 제20권12호
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• pp.629-635
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• 2010

Abstract In this study characteristics of Al-doped ZnO thin film by HIPIMS (High power impulse sputtering) are discussed. Deposition speed of HIPIMS with conventional balanced magnetic field is measured at about 3 nm/min, which is 30% of that of conventional RF sputtering process with the same working pressure. To generate additional magnetic flux and increase sputtering speed, electromagnetic coil is mounted at the back side of target. Under unbalanced magnetic flux from electromagnet with 1.5A coil current, deposition speed of AZO thin film is increased from 3 nm/min to 4.4 nm/min. This new value originates from the decline of particles near target surface due to the local magnetic flux going toward substrate from electromagnet. AZO film sputtered by HIPIMS process shows very smooth and dense film surface for which surface roughness is measured from 0.4 nm to 1 nm. There are no voids or defects in morphology of AZO films with varying of magnetic field. When coil current is increased from 0A to 1A, transmittance of AZO thin film decreases from 80% to 77%. Specific resistance is measured at about $2.9{\times}10-2\Omega{\cdot}cm$. AZO film shows C-axis oriented structure and its grain size is calculated at about 5.3 nm, which is lower than grain size in conventional sputtering.

• 마이크로전자및패키징학회지
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• 제9권3호
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• pp.37-41
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• 2002

본 연구에서는 자기 공명 특성을 이용한 박막 센서의 멤브레인 및 박막 센서의 특성을 알아보았다. 멤브레인으로 유망한 물질로 $Si_xN_y$과 SiC가 있으며, 최적의 멤브레인 형성 조건을 알고자 박막의 잔류 응력 및 물성을 비교 분석하였다. 그 중에서 박막 센서에 적용 가능한 멤브레인으로 SiC보다 적절한 인장응력과 낮은 열팽창 계수를 가지는 $Si_xN_y$이 센서의 구조층으로 우수하였으며, $Si_xN_y$위에 박막 센서 물질을 증착 및 패턴닝(patterning)을 함으로써 센서의 자기 이력 곡선 및 자기 공진 주파수를 분석하였다. 센서에 인가되는 외부 자기장을 제거하면 자장에 의해 형성된 자화(magnetization)가 탄성 모드로 바뀌면서 에너지 방출에 의해 센서에서 전압이 발생하는데 이때 전압 발생 구간이 길어지면 기계적 진동이 야기되어 신호가 발생한다. 그리고 센서의 길이 및 폭이 증가할수록 자기공명 주파수가 감소하는 것을 볼 수 있다.