• 한국재료학회지
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• 제5권1호
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• pp.63-74
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• 1995

클러스터형의 다중 공정용 장치에 부착키 위해 제작된 콘택 산화막 식각용 공정모듈에 대한 적정 식각 공정조건을 확립하기 위해, Taguchi 방법을 활용하여 공정최적화 실험을 수행하였다. Taguchi 실험은 2회에 걸쳐 시행되었는데, 제1차 실험은 장비변수에 대한 식각공정변수의 개괄적 거동을 타진하기 위함이었고, 제2차 실험은 상세 공정조건 확립을 위해서였다. 실험 및 분석 결과 $CHF_{3}/CF_{4}$ 가스유량은 72/8sccm, 공정압력은 50 mTorr, RF 전력은 500 Watts, 자계강도는 90 Gauss일때 최적 공정 성능을 발휘함을 알 수 있다.

• 천문학회보
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• 제37권1호
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• pp.96.1-96.1
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• 2012

Various electromagnetic fluctuations are observed in the upstream of Earth's bow shock. Properties of plasmas are important in determining the development of the fluctuations. In this study we analyze the phase space distribution functions of plasmas measured by the Cluster spacecraft to understand how the fluctuations develop. Plasmas in the upstream of Earth's bow shock often consist of multiple components, especially when the fluctuations exist. In addition to the solar wind beams, backstreaming ion beams and diffuse ions are also often observed separately or simultaneously. The solar wind beams are not much perturbed even within the fluctuations. The diffuse ions are more than 10 times hotter than the solar wind beams and the backstreaming beams intermediate between them. The distribution functions of the diffuse and backstreaming ions are anisotropic to the magnetic field. Thus, they may be responsible for the fluctuations associated with temperature anisotropy. We will discuss about the thermalization processes and the relationship between the fluctuations and plasmas.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.41-41
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• 2011

Flash memory에서 tunnel oxide film은 electron tunnelling 현상을 이용하여 gate에 전하를 전달하는 통로로 사용되고 있다. 특히, tunnel oxide film 내부의 charge trap 현상과 불순물이 소자 특성에 직접적인 영향을 주고 있어, 후속 N2O/NO 열처리 공정에서 SiO2/Si 계면에 nitrogen을 주입하여 tunnel oxide film 특성을 개선하고 있다. 따라서 N2O/NO 열처리 공정 최적화를 위해서는 tunnel oxide film 내 N 농도와 분포에 대한 정확한 평가가 필수적이다[1]. 본 실험에서는 low energy magnetic SIMS를 이용하여 N2O로 열처리된 tunnel oxide film 내의 N농도를 보다 정확하게 평가하고자 하였다. 사용된 시료는 Si substrate에 oxidation 이후 N2O 열처리를 진행하여 tunnel oxide를 형성시켰으며, 분석 impact energy는 surface effect최소화와 최상의 depth resolution 확보를 위해 250eV를 사용하였으며, matrix effect와 mass interference를 방지하기 위해 MCs+ cluster mode[2]로 CsN signal를 검출하였다. 실험 결과, 특정 primary beam 입사각도에서 nitrogen depth resolution 저하 현상이 발생하였고, SIMS crater 표면이 매우 거칠게 나타났다. 이에, Depth resolution 저하 현상을 개선하기 위해 극한의 glancing 입사각 조건으로 secondary extraction voltage 변화를 통해 depth resolution이 개선되는 최적의 impact energy와 primary beam 입사각 조건을 확보하였다. 그 결과 nitrogen의 depth resolution은 1.6nm의 depth resolution을 확보하였으며, 보다 정확한 N 농도와 분포를 평가할 수 있게 되었다.

• Journal of Magnetics
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• 제12권4호
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• pp.149-151
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• 2007

The AlCrN films were grown by RF reactive sputtering method under the selected conditions. The Cr concentration was varied by the number of Cr pieces placed on the Al target. The sample quality has been studied by XRD, Auger spectroscopy, optical absorption and electrical resistant measurements. The XRD and Auger results show that the samples consist of a major phase with the $Al_{1-x}Cr_xN$ formula, which has a hexagonal structure, and a few percents at. of oxygen, which may form $Al_2O_3$. There exist the Cr clusters in the samples with high concentration of Cr. The optical absorption measurement provides the information about the band gap that relates strongly to the quality of samples. The quality of samples is also clearly reflected in electrical measurement, i.e., the temperature dependence of resistance exhibits a semiconductor characteristic only for the samples that have no Cr cluster. In these cases, the values of ionization energies $E_a$ can be derived from R(T) plots by using the function R(T) = Ro exp $(E_a/k_BT)$.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2009년도 한국우주과학회보 제18권2호
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• pp.26.2-26.2
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• 2009

The Solar and Space Weather Research Group (SOS) in Korea Astronomy and Space Science Institute (KASI) is constructing the Space Weather Prediction Center since 2007. As a part of the project, we are developing automatic real-time system of the global 3-D magnetohydrodynamics (MHD) simulation. The MHD simulation model of earth's magnetosphere is designed as modified leap-frog scheme by T. Ogino, and it was parallelized by using message passing interface (MPI). Our work focuses on the automatic processing about simulation of 3-D MHD model and visualization of the simulation results. We used PC cluster to compute, and virtual reality modeling language (VRML) file format to visualize the MHD simulation. The system can show the variation of earth's magnetosphere by the solar wind in quasi real time. For data assimilation we used four parameters from ACE data; density, pressure, velocity of solar wind, and z component of interplanetary magnetic field (IMF). In this paper, we performed some initial tests and made a animation. The automatic real-time system will be valuable tool to understand the configuration of the solar-terrestrial environment for space weather research.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1998년도 제13차 학술회의논문집
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• pp.35-40
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• 1998

A nonlinear attitude model of a satellite with thrusters, magnetic torquers and a reaction wheel cluster is developed. Then the linearized version of this satellite attitude model is derived far the attitude hold mode. For comparison purpose, various control methods are considered for attitude control of a satellite. We consider a proportional derivative controller which is actually used in the remote sensing satellite, KOMPSAT. Then a comparison is made with an H$_2$controller, an H$\sub$$\infty$/ controller, and a mixed H$_2$/ H$\sub$$\infty$/ controller. The analysis and numerical studies show that the proportional derivative controller's performance is limited in the sense that the pitch angle cannot approach zero. The simulations also show that among three control methods (H$_2$control, H$\sub$$\infty$/ control, and mixed H$_2$/ H$\sub$$\infty$/ control) H$_2$control has the fastest response time, H$\sub$$\infty$/ control has the slowest and mixed H$_2$/ H$\sub$$\infty$/ control comes in between the first two control methods. On the other hand, H$\sub$$\infty$/ control used least amount of control effort while H$_2$control required the most.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.355-355
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• 2010

The epitaxial growth of MgO film on Fe(001) has been investigated by scanning tunneling microscopy (STM). After confirming the clean Fe(001)-c($2{\times}2$) substrate by STM, Mg was deposited at room temperature (RT) under $O_2$ partial pressure of $10^{-7}\;Torr$. The MgO was grown as clusters, not as an epilayer even after postannealing at $400^{\circ}C$, as shown in Figure (a). On the contrary, when Mg was deposited on Fe(001)-c($2{\times}2$) at RT and post-oxidized through exposing $O_2$ at partial pressure $10^{-7}\;Torr$, the thin-layered film with some clusters was formed. Extended-annealing at $400^{\circ}C$ reduced the cluster density, and finally the single and epitaxial MgO-c($2{\times}2$) film was formed on Fe(001)-c($2{\times}2$) as shown in Figure (b). This ultrathin MgO film formed on Fe is expected to be applied to many technological applications, such as catalysis, microelectronics, and magnetic devices.

• International Journal of Computer Science & Network Security
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• 제21권5호
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• pp.1-8
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• 2021

Prostate cancer is one of the most diagnosed malignancies found across the world today. American cancer society in recent research predicted that over 174,600 new prostate cancer cases found and nearly 31,620 death cases recorded. Researchers are developing modest and accurate methodologies to detect and diagnose prostate cancer. Recent work has been done in radiology to detect prostate tumors using ultrasound imaging and resonance imaging techniques. Transrectal ultrasound and Magnetic resonance images of the prostate gland help in the detection of cancer in the prostate gland. The proposed paper is based on comparison and analysis between two novel image segmentation approaches. Seed region growing and cluster based image segmentation is used to extract the region from trans-rectal ultrasound prostate and MR prostate images. The region of extraction represents the abnormality area that presents in men's prostate gland. Detection of such abnormalities in the prostate gland helps in the identification and treatment of prostate cancer

• 우주기술과 응용
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• 제3권1호
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• pp.1-25
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• 2023

In this paper, I briefly introduce recently terminated, current, and future scientific spacecraft missions for in situ and remote-sensing observations of Earth's and other planetary magnetospheres as of February 2023. The spacecraft introduced here are Geotail, Cluster, Time History of Events and Macroscale Interactions during Substorms / Acceleration, Reconnection, Turbulence, and Electrodynamics of the Moon's Interaction with the Sun (THEMIS / ARTEMIS), Magnetospheric Multiscale (MMS), Exploration of energization and Radiation in Geospace (ERG), Cusp Plasma Imaging Detector (CuPID), and EQUilibriUm Lunar-Earth point 6U Spacecraft (EQUULEUS) for recently terminated or currently operated missions for Earth's magnetosphere; Lunar Environment Heliospheric X-ray Imager (LEXI), Gateway, Solar wind Magneto-sphere Ionosphere Link Explorer (SMILE), HelioSwarm, Solar-Terrestrial Observer for the Response of the Magnetosphere (STORM), Geostationary Transfer Orbit Satellite (GTOSat), GEOspace X-ray imager (GEO-X), Plasma Observatory, Magnetospheric Constellation (MagCon), self-Adaptive Magnetic reconnection Explorer (AME), and COnstellation of Radiation BElt Survey (CORBES) approved for launch or proposed for future missions for Earth's magnetosphere; BepiColombo for Mercury and Juno for Jupiter for current missions for planetary magnetospheres; Jupiter Icy Moons Explorer (JUICE) and Europa Clipper for Jupiter, Uranus Orbiter and Probe (UOP) for Uranus, and Neptune Odyssey for Neptune approved for launch or proposed for future missions for planetary magnetospheres. I discuss the recent trend and future direction of spacecraft missions as well as remaining challenges in magnetospheric research. I hope this paper will be a handy guide to the current status and trend of magnetospheric missions.

• 한국세라믹학회지
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• 제42권7호
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• pp.475-482
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• 2005

Zn$_{l-x}$Co$_{x}$O (x = 0.05 - 0.20) films were grown on Coming 7059 glass by sol-gel process. A homogeneous and stable Zn$_{l-x}$Co$_{x}$O sol was prepared by dissolving zinc acetate dihydrate (Zn(CH$_{3}$COO)$_{2}$$\cdot$2H$_{2}$O), cobalt acetate tetrahydrate ((CH$_{3}$)$_{2}$$\cdot$CHOH) and aluminium chloride hexahydrate (AlCl$_{3}$ $\cdot$ 6H$_{2}$O) as solute in solution of isopropanol ((CH$_{3}$)$_{2}$$\cdot$CHOH) and monoethanolamine (MEA:H$_{2}$NCH$_{2}$CH$_{2}$OH). The films grown by spin coating method were postheated in air at 650°C for 1 h and annealed in the condition of vacuum (5 $\times$ 10$^{-6}$ Torr) at 300$^{\circ}C$ for 30 min and investigated the nature of c-axis preferred orientation and physical properties with different Co concentrations. Znl_xCOxO thin films with different Co concentrations were well oriented along the c-axis, but especially a highly c-axis oriented Zn$_{l-x}$Co$_{x}$O thin film was grown at 10 at$\%$ Co concentration. The transmittance spectra showed that Zn$_{l-x}$Co$_{x}$O thin films occur typical d-d transitions and sp-d exchange interaction became activated with increasing Co concentration. The electrical resistivity of the films at 10 at$\%$ Co had the lowest value due to the highest c-axis orientation. X-ray photoelectron spectroscopy and alternating gradient magnetometer analyses indicated that no Co metal cluster was formed, and the ferromagnetic properties appeared, respectively. The characteristics of the electrical resistivity and room temperature ferromagnetism of Zn$_{l-x}$Co$_{x}$O thin films suggested the possibility for the application to dilute magnetic semiconductors.