Synthesis and Quality of Cr-doped AIN Thin Films Grown by RF Sputtering |
Quang, Pham Hong
(Faculty of Physics, Hanoi University of Science)
Hung, Tran Quang (Department of Materials Science and Engineering, Chungnam National University) Dai, Ngo Xuan (Faculty of Physics, Hanoi University of Science) Thanh, Tran Hoai (Faculty of Physics, Hanoi University of Science) Kim, Cheol-Gi (Department of Materials Science and Engineering, Chungnam National University) |
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