• Title/Summary/Keyword: lubrication layer

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Development of Ceria-Based Slurry with High Selectivity for STI CMP

  • Lim, G.;Kim, T.E.;Kim, J.;Lee, J.H.;Lee, H.W.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.439-440
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    • 2002
  • Nano-Crystalline $CeO_2$ particles were dispersed in deionized water with controlled slurry chemicals for CMP test. According to the CMP test, the removal rate of $SiO_2$ layer was mainly controlled by the size and crystallinity of $CeO_2$ particles which can be controlled by the heat-treatment condition during $CeO_2$ synthesis. In contrast, the removal rate of $Si_3N_4$ layer was significantly influenced by the passivation reagent which protects the $Si_3N_4$ surface layer from excessive dissolution during CMP.

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A Study on the Contact Stress Analysis of the Coating Layer Using Finite Element Method (유한요소법을 이용한 Coating Layer의 접촉응력 해석에 관한 연구)

  • 김청균;오병택
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1996.10a
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    • pp.183-188
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    • 1996
  • Films and coatings are used for an enormous and diverse set of applications including mechanical, electronic and optical devices, protection at high temperature, cutting tools enhancement and automotive use. Many of these applications require the various properties associated with inorganic and metallic / non-metallic materials; i.e., with ceramics. Therefore, a large number of coatings have been developed and used for a long time in the various fields, especially in mechanical one. As one of the mutual surface actions, the problems of contact stresses are complex. The relationship between load and stress are nonlinear. Besides, the material is often apt to deform plastically under low load. However, analytical solutions exist only for some simple problems. If a material has a complicated shape or inhomogeneous properties, numerical method must be used. In this paper, the analysis of the contact stress of the coating layer was solved, using the finite element method.

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얇은 layer가 존재하는 접촉표면의 열적 거동에 대한 연구

  • 안효석
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1988.11a
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    • pp.35-48
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    • 1988
  • 상대 접촉하고 있는 물체에 미끄럼 운동이 가해질 경우 마찰에 의해 발생되는 거의 모든 에너지는 열로써 나타나게 된다. 이러한 마찰열은 주로 adhered junctions의 파괴 및 표면돌기(surface asperities)들의 소성 변형에 의한 열역할적 비가역 반응의 결과로 발생된다. 접촉부위의 발생열은 양 접촉제의 접촉면에 전달되어 접촉표면 온도의 급격한 증가를 초래하며 그 결과로 여러가지 surface phenomena, 즉 마찰, 마모, 산화(oxidation), 부식 및 구조적 열화(structural degradation) 금속학적 상변화등에 큰 영향을 미치게 된다. 딸서 볼 및 로울링 엘레먼트 베어링, 기어, 캠과 태핏, 브레이크 등 기계요소의 설계를 위한 주인자로서 근래에 들어 접촉표면의 온도가 주목받고 있다. 표면에 존재하는 layer로서는 금속표면에 응착시킨 coating layers, contaminant films, physisorbed 또는 chemisorbed films, oxide layers 또는 마찰열에 의해 형성되는 경도가 아주 높은 내마모층(hard wear-resistant layers) 등이 고려될수 있다. 낮은 열전도성을 가진 oxide film이 접촉 표면이 온도를 증가시킨다는 것이 Jaeger에 의해 지적되었으며 Ling과 Lai는 moving heat sjource가 가해지는 layered surface의 표면온도분포를 구하면서 substrate와 thermal property가 다른 layer가 존재하게 되면 그 두께가 아주 얇더라도 (1 마이크론 정도) 표면온도는 크게 변화됨을 보였다.

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The Effects of Spray Conditions on Sliding Wear Characteristics of Plasma Sprayed $Al_2O_3-40%TiO_2$Coating (Plasma용사한 $Al_2O_3-40%TiO_2$의 미끄럼마모특성에 미치는 용사조건의 영향)

  • 이한영;노정균;배상규
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2000.11a
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    • pp.80-88
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    • 2000
  • The plasma spray technics has known as one of the surface modification methods to improve the mechenical properties or the functional charactristics of materials. This paper has been aimed to investigate the effects of plasma sprayed conditions, such as spray distance and arc power level, on sliding wear properties of plasma sprayed $Al_2$O$_3$-40%TiO$_2$coating layer. The sliding wear test using pin-on-disc type wear machine, has been conducted in several sliding speed for coating layer sparyed under different conditions. The result of this paper is that the wear resistance of plasma sprayed $Al_2$O$_3$-40%TiO$_2$coating layer is fluctuated with tile spray distance and the arc power level. The wear resiatance could be improved with decreasing the spray distance and with increasing the arc power level.

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Effect of Silver Particle Introduction on Rolling Friction (구름거동에 미치는 은 입자 투여의 영향에 대한 실험적 고찰)

  • 양승호;공호성;윤의성;김대은
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.06a
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    • pp.105-113
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    • 2001
  • The effect of silver particle introduction on the rolling friction of AISI 52100 steel pairs has been investigated. Experiments were performed in dry conditions using a thrust bearing-type rolling test rig at a load range of 12 - 960 N and a sliding velocity range of 8 - 785 mm/sec with pure(99.99%) silver particles. Results showed that the introduced silver particles formed transfer layer, which protected virgin bearing surfaces and resulted in low rolling friction. By changing the quantity of silver particles, transitions in the rolling friction wear found. Results also showed that the variations in normal load and rolling speed also affected the rolling friction behavior. Analyses using SEM and EPMA showed that tile formation of transfer layer was mainly governed by the silver particle quantity, normal load and rolling speed, and this resulted in the different behavior of rolling friction. In this study, it was found that the low and stable rolling friction was resulted from the shakedown phenomena occurred at the silver transfer layer.

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Wear Test for Rotary Compressor using Alternative Refrigerants (대체냉매를 사용한 로타리 압축기의 마모시험)

  • 좌성훈;백충국;장선태;오상경
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1995.06b
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    • pp.28-37
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    • 1995
  • To protect the ozone layer depeletion the CFC (chlorofluorocarbon). HCFC(hydrochlorofluorocarbon) refrigerants will be replaced with HFCs (hydro-fluorocarbon) as an alternative refrigerant. In recent years a good deal of effort has been made to develop new compressors which are compatible to the new referigent. This paper focused on developing accelerated screening test for predicting tribological characteristics of the rotary compressor in atmosphere of R407C as an alternative refrigerant with polyolester lubricant. Falex wear test machine with high pressure chamber has been used to simulate friction and wear behavior of the common contact geometries found in rotary compressors.

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Tribological Behavior of the Alumina Reinforced with Unidirectionally Oriented SiC whiskers (일방향성 배열을 가잔 SiC whisker에 의해 강화된 알루미나 복합체의 마모마찰 특성)

  • 간태석;임대순;한병동
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1998.10a
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    • pp.25-29
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    • 1998
  • Sliding wear test and surface characterization techniques such as micro-Raman spectroscopy were employed to determine the effect of whisker content and orientation on the friction and wear behavior of SiC whisker reinforced alumina. Composites containing unidirectionally oriented whiskers were fabricated by novel technique Addition of SiC whiskers up to 20 vol.% lowered the friction and improved wear resistance. The results of this study indicated that highly disordered graphite and size of the layer behind the whiskers were responsible for variation of wear rate and friction coefficient.

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Tribological characteristics of silicon nitride on elevated temperature (고온하에서 질화규소의 트라이볼로지적 특성)

  • 김대중;채영훈;김석삼
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1999.11a
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    • pp.84-93
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    • 1999
  • Sliding friction and wear tests for silicon nitride(Si$_3$N$_4$) was carried out with a ball-on-disk specimen configuration. The material used in this study was HIPed silicon nitride. The tests was carried out from room temperature to 1000"I with self mated couples of slicon nitride in laboratory air. Worn surfaces were observed by SEM and debris particles from worn surfaces were analyzed degree of oxidation by XPS. XPS.

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Physics of the Coefficient of Friction in CMP

  • Borucki, Len;Philipossian, Ara;Zhuang, Yun
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.2
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    • pp.79-83
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    • 2007
  • The implications of a theory of lubricated pad asperity wafer contact are traced through several fundamental areas of chemical-mechanical polishing. The hypothesized existence of a nanolubrication layer underlies a high accuracy model of polish rates. It also provides a quantitative explanation of a power law relationship between the coefficient of friction and a measure of pad surface flattening. The theory may further be useful for interpreting friction changes during polishing, and may explain why the coefficient of friction is sometimes observed to have a temperature or velocity dependence.

The study on the tribological characteristics of the Electro spark alloyed layer and solid lubricant (전기방전코팅층과 고체윤활제를 도포한 복합층의 마찰마모특성 연구)

  • 유인석;류병진;김성규;양승호;유영석
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1996.04b
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    • pp.41-44
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    • 1996
  • 고하중, 저속에서의 마찰마모특징을 나타내는 건설기계의 작업장치 연결부의 핀/부싱 조인트의 개발 적용성 검토를 위해 기존의 사용방법인 표면경화처리 후 그리이스 급유하는 경우와 ESA(전기방전코팅)처리후 고체윤활제를 도포한 경우의 마찰마모특징을 시험 분석하여 기존 방법보다 ESA처리후 고체윤활제를 도포하는 경우의 마찰마모 특성이 매우 우수한 적을 확인하였다.

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