• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.106.2-106.2
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• 2013

본 논문은 반도체 및 평판 디스플레이 생산공정에서 가동되고 있는 건식 진공펌프들의 정밀 상태진단 및 예지 보수를 위한 pump monitoring system (PMS)의 제품화에 필요한 프로그램의 개발 내용을 소개한다. 본 연구에서 소개하는 건식 진공펌프들의 정밀 상태진단 및 예지보수기법은 PCT 특허 2 건으로 이미 등록된 내용이며, 본 논문은 이들 기법의 실제 구현에서 직면하는 기술적 문제점과 극복 방안을 제시한다. 본 논문에서는 현재 반도체 공정에 사용되고 있는 건식 진공펌프들로부터 측정하는 다중 상태변수들의 조사 결과를 소개한다. 이들 상태변수 측정치들이 갖는 개략적 특성을 통계적 분포함수로 분석한 결과를 우선 보인다. 특히 펌프 구동모터들의 소비 전류신호는 두 평균값에 대한 분포 즉 두 종의 분포함수를, 그리고 온도, purge gas 유량, 배기구 압력 등은 정상적 평균값에 대한 한나의 분포를 보였다. 따라서 구동모터들의 소비전류의 분포 즉 두 상하 수준('low and high' current level)에 따라 batch data를 구분하는 방법의 개발이 필요하였다. 본 연구에서는 step 함수형 eigenvector를 적용하여 소비전류 신호의 상하수준 천이 영역과 방향을 동시에 인식할 수 있는 기법을 개발 적용하였으며, 3300회의 배출가스 부하에 변화에 대한 천이 영역과 방향을 인식에 하나의 실패도 보이지 않음을 확인하였다. 기존의 측정 상태변수에는 회전기계류의 정밀 상태진단 및 예지보수에 핵심적인 기계진동 측정용 진동센서를 포함하고 있지 않은 기술적 문제점이 발견되었다. 기존 진동센서들의 높은 가격 뿐 아니라 진동센서의 출력신호를 저/중/고역 주파수 대역의 실효치로 환산하는 기술적 한계 때문에 진공펌프 상태진단에 아직 사용하고 있지 않고 있다. 본 연구에서는 진동선서 비용의 저감화 방안뿐 아니라 로터 회전 대역(250Hz 이하 저주파 영역), 베어링 진동 대역(250 Hz~2.5 kHz의 중간 주파수 영역), 그리고 기어 진동 대역(2.5 kHz~10 kHz 주파수 영역)별 실효치를 실 시간 측정할 수 있는 진동측정 모듈의 제품화 모델을 개발하였다. 개발 제품의 성능 뿐 아니라 현장 시험결과를 소개한다. 마지막으로 본 연구팀이 개발한 PCT 특허 2 건에 포함된 건식 진공펌프들의 정밀 상태진단 및 예지보수기법에 대한 현장 시험결과를 간략히 소개한다.

• Journal of the Optical Society of Korea
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• v.17 no.5
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• pp.423-427
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• 2013

We present the preparation and characteristics of liquid-phase sensors based on nano-porous silicon multilayer structures for determination of organic content in gasoline. The principle of the sensor is a determination of the cavity-resonant wavelength shift caused by refractive index change of the nano-porous silicon multilayer cavity due to the interaction with liquids. We use the transfer matrix method (TMM) for the design and prediction of characteristics of microcavity sensors based on nano-porous silicon multilayer structures. The preparation process of the nano-porous silicon microcavity is based on electrochemical etching of single-crystal silicon substrates, which can exactly control the porosity and thickness of the porous silicon layers. The basic characteristics of sensors obtained by experimental measurements of the different liquids with known refractive indices are in good agreement with simulation calculations. The reversibility of liquid-phase sensors is confirmed by fast complete evaporation of organic solvents using a low vacuum pump. The nano-porous silicon microcavity sensors can be used to determine different kinds of organic fuel mixtures such as bio-fuel (E5), A92 added ethanol and methanol of different concentrations up to 15%.

• Journal of Korean Society for Atmospheric Environment
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• v.26 no.6
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• pp.690-696
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• 2010

Abatement of perfluorocompounds (PFCs) used in semiconductor and display industries has received an attention due to the increasingly stricter regulation on their emission. In order to meet this circumstance, we have developed a radio frequency (RF) driven plasma reactor with multiple annular shaped electrodes, characterized by an easy installment between a processing chamber and a vacuum pump. Abatement experiment has been performed with respect to $CF_4$, a representative PFCs widely used in the plasma etching process, by varying the power, $CF_4$ and $O_2$ flow rates, $CF_4$ concentration, and pressure. The influence of these variables on the $CF_4$ abatement was analyzed and discussed in terms of the destruction & removal efficiency (DRE), measured with a Fourier transform infrared (FTIR) spectrometer. The results revealed that DRE was enhanced with the increase in the discharge power and pressure, but dropped with the $CF_4$ flow rate and concentration. The addition of small quantity of $O_2$ lead to the improvement of DRE, which, however, leveled off and then decreased with $O_2$ flow rate.

• Korean Journal of Ecology and Environment
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• v.54 no.4
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• pp.272-279
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• 2021

A pump-type eDNA filtering system that can control voltage and hydraulic pressure respectively has been developed, and applied a filter case that can filter out without damaging the filter. The filtering performance of the developed system was evaluated by comparing the eDNA concentration with the conventional vacuum-pressured filtering method at the catchment conduit intake reservoir. The developed system was divided into a voltage control (manual pump system) method and a pressure control (automatic pump system) method, and the pressure was measured during filtering and the pressure change of each system was compared. The voltage control method started with 65 [KPa] at the beginning of the filtering, and as the filtering time elapsed, the amount of filtrate accumulated in the filter increased, so the pressure gradually increased. As a result of controlling the pressure control method to maintain a constant pressure according to the designed algorithm, there was a difference in the width of the hydraulic pressure fluctuation during the filtering process according to the feedback time of the hydraulic pressure sensor, and it was confirmed that the pressure was converged to the target pressure. The filtering performance of the developed system was confirmed by measuring the eDNA concentration and comparing the voltage control method and the hydraulic control method with the control group. The voltage control method obtained similar results to the control group, but the hydraulic control method showed lower results than the control group. It is considered that the low eDNA concentration in the hydraulic control method is due to the large pressure deviation during filtering and maintaining a constant pressure during the filtering process. Therefore, rather than maintaining a constant pressure during filtering, it was confirmed that a voltage control method in which the pressure is gradually increased as the filtrate increases with the lapse of filtering time is suitable for collecting eDNA. As a result of comparing the average concentration of eDNA in lentic zone and lotic zone as a control group, it was found to be 96.2 [ng µL^-1] and 88.4 [ng µL^-1l], respectively. The result of comparing the average concentration of eDNA by the pump method was also high in the lentic zone sample as 90.7 [ng µL^-1] and 74.8 [ng µL^-1] in the lentic zone and the lotic zone, respectively. The high eDNA concentration in the lentic zone is thought to be due to the influence of microorganisms including the remaining eDNA.

• Ocean and Polar Research
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• v.38 no.4
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• pp.339-345
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• 2016

Stable water vapor isotopes have been utilized as a tracer for studying atmospheric global circulations, climate change and paleoclimate with ice cores. Recently, since laser spectroscopy has been available, water vapor isotopes can be measured more precisely and continuously. Studies of water vapor isotopes have been conducted over the world, but it is the early stage in south Korea. For vapor isotopes study, a cryogenic sampling device for water vapor isotopes has been developed. The cryogenic sampling device consists of the dewar bottle, filled with extremely low temperature material and impinger connected with a vacuum pump. Impinger stays put in the dewar bottle to change the water vapor which passes through the inside of impinger into the solid phase as ice. The fact that water vapor has not sampled completely leads to isotopic fractionation in the impinger. To minimize the isotopic fractionation during sampling water vapor, we have tested the method using a serial connection with two sets of impinger device in the laboratory. We trapped 98.02% of water vapor in the first trap and the isotopic difference of the trapped water vapor between two impinger were about 20‰ and 6‰ for hydrogen and oxygen, respectively. Considering the amount of water vapor trapped in each impinger, the isotopic differences for hydrogen and oxygen were 0.33‰ and 0.06‰, respectively, which is significantly smaller than the precision of isotopic measurements. This work can conclude that there is no significant fractionation during water vapor trapping.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.273-273
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• 2013

Recently, Point-of-care (POC) testing microdevices enable to do the patient monitoring, drug screening, pathogen detection in the outside of hospital. Immunochromatographic strip (ICS) is one of the diagnostic technologies which are widely applied to POC detection. Relatively low cost, simplicity to use, easy interpretations of the diagnostic results and high stability under any circumstances are representative advantages of POC diagnosis. It would provide colorimetric results more conveniently, if the genetic analysis microsystem incorporates the ICS as a detector part. In this work, we develop a reverse transcriptase-polymerase chain reaction (RT-PCR) microfluidic device integrated with a ROSGENE strip for colorimetric influenza H1N1 virus detection. The integrated RT-PCR- ROSGENE device is consist of four functional units which are a pneumatic micropump for sample loading, 2 ${\mu}L$ volume RT-PCR chamber for target gene amplification, a resistance temperature detector (RTD) electrode for temperature control, and a ROSGENE strip for target gene detection. The device was fabricated by combining four layers: First wafer is for RTD microfabrication, the second wafer is for PCR chamber at the bottom and micropump channel on the top, the third is the monolithic PDMS, and the fourth is the manifold for micropump operation. The RT-PCR was performed with subtype specific forward and reverse primers which were labeled with Texas-red, serving as a fluorescent hapten. A biotin-dUTP was used to insert biotin moieties in the PCR amplicons, during the RT-PCR. The RT-PCR amplicons were loaded in the sample application area, and they were conjugated with Au NP-labeled hapten-antibody. The test band embedded with streptavidins captures the biotin labeled amplicons and we can see violet colorimetric signals if the target gene was amplified with the control line. The off-chip RT-PCR amplicons of the influenza H1N1 virus were analyzed with a ROSGENE strip in comparison with an agarose gel electrophoresis. The intensities of test line was proportional to the template quantity and the detection sensitivity of the strip was better than that of the agarose gel. The test band of the ROSGENE strip could be observed with only 10 copies of a RNA template by the naked eyes. For the on-chip RT-PCR-ROSGENE experiments, a RT-PCR cocktail was injected into the chamber from the inlet reservoir to the waste outlet by the micro-pump actuation. After filling without bubbles inside the chamber, a RT-PCR thermal cycling was executed for 2 hours with all the microvalves closed to isolate the PCR chamber. After thermal cycling, the RT-PCR product was delivered to the attached ROSGENE strip through the outlet reservoir. After dropping 40 ${\mu}L$ of an eluant buffer at the end of the strip, the violet test line was detected as a H1N1 virus indicator, while the negative experiment only revealed a control line and while the positive experiment a control and a test line was appeared.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.28 no.6
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• pp.256-268
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• 2016

This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2015. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering were carried out in the areas of flow, heat and mass transfer, cooling and heating, and air-conditioning, the renewable energy system and the flow inside building rooms. Research issues dealing with air-conditioning machines and fire and exhausting smoke were reduced. CFD seems to be spreading to more research areas. (2) Research works on heat transfer area were carried out in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the economic analysis of GHG emission, micro channel heat exchanger, effect of rib angle on thermal performance, the airside performance of fin-and-tube heat exchangers, theoretical analysis of a rotary heat exchanger, heat exchanger in a cryogenic environment, the performance of a cross-flow-type, indirect evaporative cooler made of paper/plastic film. In the area of pool boiling and condensing, the bubble jet loop heat pipe was studied. In the area of industrial heat exchangers, researches were performed on fin-tube heat exchanger, KSTAR PFC and vacuum vessel at baking phase, the performance of small-sized dehumidification rotor, design of gas-injection port of an asymmetric scroll compressor, effect of slot discharge-angle change on exhaust efficiency of range hood system with air curtain. (3) In the field of refrigeration, various studies were carried in the categories of refrigeration cycle, alternative refrigeration/energy system, system control. In the refrigeration cycle category, a cold-climate heat pump system, $CO_2$ cascade systems, ejector cycles and a PCM-based continuous heating system were investigated. In the alternative refrigeration/energy system category, a polymer adsorption heat pump, an alcohol absorption heat pump and a desiccant-based hybrid refrigeration system were investigated. In the system control category, turbo-refrigerator capacity controls and an absorption chiller fault diagnostics were investigated. (4) In building mechanical system research fields, eighteen studies were reported for achieving effective design of the mechanical systems, and also for maximizing the energy efficiency of buildings. The topics of the studies included energy performance, HVAC system, ventilation, and renewable energies, piping in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment was mostly focused on indoor environment and building energy. The main researches of indoor environment were related to the user and location awareness technology applied dimming lighting control system, the lighting performance evaluation for light-shelves, the improvement evaluation of air quality through analysis of ventilation efficiency and the evaluation of airtightness of sliding and LS window systems. The subjects of building energy were worked on the energy saving estimation of existing buildings, the developing model to predict heating energy usage in domestic city area and the performance evaluation of cooling applied with economizer control. The studies were also performed related to the experimental measurement of weight variation and thermal conductivity in polyurethane foam, the development of flame spread prevention system for sandwich panels, the utilization of heat from waste-incineration facility in large-scale horticultural facilities.

• Journal of Soil and Groundwater Environment
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• v.10 no.2
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• pp.35-43
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• 2005

Bioslurping combines the three remedial approaches of bioventing, vacuum-enhanced free-product recovery, and soil vapor extraction. Bioslurping is less effective in tight (low-permeability) soils. The greatest limitation to air permeability is excessive soil moisture. Optimum soil moisture is very soil-specific. Too much moisture can reduce air permeability of the soil and decrease its oxygen transfer capability. Too little moisture will inhibit microbial activity. So Modified Fenton reaction as chemical treatment which can overcome the weakness of Bioslurping was experimented for simultaneous treatment. Although the diesel removal efficiency of SVE process increased in proportion to applied vacuum pressure, SVE process was difficulty to remediation quickly semi- or non-volatile compounds absorbed soil strongly. And SVE process had variation of efficiency with distance from the extraction well and depth a air flow form of hemisphere centering around the well. Below 0.1 % hydrogen peroxide shows the potential of using hydrogen peroxide as oxygen source but the co-oxidation of chemical and biological treatment was impossible because of the low efficiency of Modified Fenton reaction at 0.1 % (wt) hydrogen peroxide. NTA was more efficiency than EDTA as chelating agent and diesel removal efficiency of Modified Fenton reaction increased in proportion to hydrogen peroxide concentration. Hexadecane as typical aliphatic compound was removed less than Toluene as aromatic compound because of its structural stability in Modified Fenton reaction. What minimum 10% hydrogen peroxide concentration has good remediation efficiency of diesel contaminated groundwater may show the potential use of Modified Fenton reaction after bioslurping treatment.

• Journal of the Korean Vacuum Society
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• v.17 no.1
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• pp.16-22
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• 2008

We studied plasma etching of polycarbonate in $O_2/SF_6$, $O_2/N_2$ and $O_2/CH_4$. A capacitively coupled plasma system was employed for the research. For patterning, we used a photolithography method with UV exposure after coating a photoresist on the polycarbonate. Main variables in the experiment were the mixing ratio of $O_2$ and other gases, and RF chuck power. Especially, we used only a mechanical pump for in order to operate the system. The chamber pressure was fixed at 100 mTorr. All of surface profilometry, atomic force microscopy and scanning electron microscopy were used for characterization of the etched polycarbonate samples. According to the results, $O_2/SF_6$ plasmas gave the higher etch rate of the polycarbonate than pure $O_2$ and $SF_6$ plasmas. For example, with maintaining 100W RF chuck power and 100 mTorr chamber pressure, 20 sccm $O_2$ plasma provided about $0.4{\mu}m$/min of polycarbonate etch rate and 20 sccm $SF_6$ produced only $0.2{\mu}m$/min. However, the mixed plasma of 60 % $O_2$ and 40 % $SF_6$ gas flow rate generated about $0.56{\mu}m$ with even low -DC bias induced compared to that of $O_2$. More addition of $SF_6$ to the mixture reduced etch of polycarbonate. The surface roughness of etched polycarbonate was roughed about 3 times worse measured by atomic force microscopy. However examination with scanning electron microscopy indicated that the surface was comparable to that of photoresist. Increase of RF chuck power raised -DC bias on the chuck and etch rate of polycarbonate almost linearly. The etch selectivity of polycarbonate to photoresist was about 1:1. The meaning of these results was that the simple capacitively coupled plasma system can be used to make a microstructure on polymer with $O_2/SF_6$ plasmas. This result can be applied to plasma processing of other polymers.

• Horticultural Science & Technology
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• v.31 no.2
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• pp.153-158
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• 2013

This research was carried out to investigate silicon (Si) uptake levels by six potted plant species from a nutrient solution supplemented with $K_2SiO_3$. Uniform rooted plants of Dendranthema grandiflorum Ramat., Spathiphyllum patinii N.E. BR., Kalanchoe blossfeldiana, Hedera helix L., Dianthus caryophyllus L., and Euphorbia pulcherrima Willd. were grown in 350 mL boxes, one plant per box, containing a nutrient solution supplemented with either 0, 2.7, or 5.4 mM Si as $K_2SiO_3$. The nutrient solution in each container was adjusted to EC $1.5mS{\cdot}cm^{-1}$ and pH 5.6. The solution in each container was aerated by an 1 m-long polyethylene tube, all connected to a vacuum pump. After 15 days of cultivation in a glasshouse Si contents in the roots and shoots were measured using the colorimetric molybdate method and amount of remaining Si in the nutrient solution was measured using the ICP-AES to calculate the amount of absorption. A simple regression analysis was performed to observe the changes in Si contents in the roots and shoots as affected by concentration of Si supplied to the solution. Among the six species tested, carnation had the greatest and poinsettia the lowest tissue levels of Si concentration in the root, whereas carnation had the greatest and kalanchoe the lowest tissue levels of Si concentration in the shoot. Based on the Si content in the whole plant, Si uptake levels by poinsettia, kalanchoe, and chrysanthemum were low, whereas those by spathiphyllum were intermediate, and those of English ivy and carnation were high. These results indicated that the uptake level of Si by the plant vary depending on plant species.