Jung, S.M.;Choi, Y.S.;Lim, D.G.;Park, Y.;Song, J.T.;Yi, J.
Journal of the Korean Crystal Growth and Crystal Technology
/
v.8
no.4
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pp.599-604
/
1998
We have investigated Pt and $RuO_2$ as a bottom electrode for ferroelectric capacitor applications. The bottom electrodes were prepared by using an RF magnetron sputtering method. Some of the investigated parameters were a substrate temperature, gas flow rate, RF power for the film growth, and post annealing effect. The substrate temperature strongly influenced the surface morphology and resistivity of the bottom electrodes as well as the film crystallographic structure. XRD results on Pt films showed a mixed phase of (111) and (200) peak for the substrate temperature ranged from RT to $200^{\circ}C$, and a preferred (111) orientation for $300^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of $300^{\circ}C$ and RF power 80W for the Pt bottom electrode growth. With the variation of an oxygen partial pressure from 0 to 50%, we learned that only Ru metal was grown with 0~5% of $O_2$ gas, mixed phase of Ru and $RuO_2$ for $O_ 2$ partial pressure between 10~40%, and a pure $RuO_2$ phase with $O_2$ partial pressure of 50%. This result indicates that a double layer of $RuO_2/Ru$ can be grown in a process with the modulation of gas flow rate. Double layer structure is expected to reduce the fatigue problem while keeping a low electrical resistivity. As post anneal temperature was increased from RT to $700^{\circ}C$, the resistivity of Pt and $RuO_2$ was decreased linearly. This paper presents the optimized process conditions of the bottom electrodes for memory device applications.
Circulatory and respiratory activities were observed in men exposed to the environment of engine room of a cruising Republic of Korea Navy ship and compared to the control values obtained in an ordinary laboratory room on land. The environment of an engine room of cruising navy ship was presumed to be a multiple stress acting on men. The environment of the engine room included high temperature $(35-42^{\circ}C)$, low relative humidity (20-38% saturation), vibration (about 7 cycles per second), rolling and pitching of ship and noises. Sixteen men were divided into two groups consisted of each 8 subjects. Subjects of sea duty group had experience of continuous on board duty averaging 3.5 years. Men of land duty group had no experience of on board activity. On land observations were made on one day prior to the boarding and leaving the port and four days after landing. In between observations in the engine room were made on the first, 5 th, 9 th, 12 th, and 14 th day of on board activity. The whole experimental period lasted for 20 days. Measurements on circulatory and respiratory parameters were at standing resting state (after 30 minutes standing in the case of on land study and 15 minutes in engine room study) and within one minute after cessation of on the spot running of which rhythm was 30/min. and lasted for 5 minutes. Oxygen consumption and pulmonary function test were done in the period of two minutes from the 3rd to 5th minutes of running. The following results were obtained. 1. Body temperature showed no change regardless of group difference or on land or on board measurements. 2. Pulse rate increased markedly after boarding the ship id both groups. Pulse rate increased from the first day on board at rest and after exercise as compared to the on land control value. This increase in pulse rate was more marked after exercise. Sea duty group showed less increase in pulse rate at rest than the land duty group. Standing and resting pulse rate of sea duty group on lam was 81 and increased to 87 at the 5th day on board and remained smaller than the land duty group throughout the period on board. Control standing and resting pulse rate of land duty group on land was 76 and reached 89 at the 9th day on board and thereafter decreased a little. Pulse rate of land duty group at rest on board remained greater than that of sea duty group throughout the period on board. 3. Systolic blood pressure of sea duty group increased after boarding the ship and remained higher than the control value on land. In the land duty group, however, systolic blood pressure decreased during the period on board the ship. Diastolic blood pressure decreased in both groups. 4. Resting breathing rate of land duty group increased and remained higher than the control value on land. In sea duty group, however, resting breathing rate showed a transient increase on the 1st day on board and decreased thereafter to the control value on land and kept the same level throughout the period of cruise. Absolute value of breathing rate in the sea duty group was greater than the land duty group both at rest and after exercise. 5. There was a lowering of breathing efficiency in both groups. Thus, increases in tidal volume and minute ventilation volume and decreases in maximum breathing capacity, vital capacity, capacity ratio and air velocity Index were observed after boarding the ship. An increase in ventilation equivalent was also observed in both groups. The lowering of breathing efficiency was more marked in the land duty group than the sea duty group. 6. Energy expediture increased in both groups during their stay on the ship and was more marked in the sea duty group. 7, Lactate concentration in venous blood at rest and after exercise increased after boarding the ship and no group difference was observed.
The Beonam deposits which is located in south-western part of Sobaeksan massif are emplaced along $N20{\sim}30^{\circ}E$ trending fissures in Precambrian Sobaeksan gneiss complex. Surrounding granites are inferred to be differentiated and formed from calc-alkaline magma which was generated from remelting or partial melting of the crustral material having igneous composition. The Sr isotope data of ore minerals showing significantly low initial Sr value relative to those of surrounding granite batholiths suggest that the ore-bearing fluid formed the Beonam Au-Ag mine are isotopically distinct from those of the wall rocks, and it indicates that there is no evidence of genetic relationship between ore-bearing fluids and surrounding granites, although further study should be needed. The results of paragenetic studies suggest three stages of hydrothermal mineralization; stage I: base-metal sulfides stage, stage II: late base-metal sulfides, electrum and silver-bearing sulfosalts stage, stage III: minor silverbearing minerals, barren quartz and carbonates stage. The temperature, salinity and pressure of the Beonam deposits estimated from mineral assemblage, chemical composition, fluid inclusion and sulfur isotope geothermometry are as follows; stage I: $200{\sim}315^{\circ}C$, 3.5~6.5 NaCl eq. wt%, 0.28~0.61 Kbar, stage II: $150{\sim}235^{\circ}C$, 4.5~7.4 NaCl eq. wt%, 0.11~0.15 Kbar. The estimated oxygen and sulfur fugacity during first stage mineralization, based on phase relation of associated minerals, range from $10^{35.1}{\sim}10^{-39.7}$ atm. and $10^{-11.0}{\sim}10^{-13.4}$ atm., respectively. All these evidences suggest that the Beonam deposits are polymetallic meso-epithermal ore deposits.
The purpose of this work was to assess and quantify whether the beneficial effects in long-term gas exchange at exciting frequency were obtained at different frequencies as well and then to develop a vibrating intravascular lung assist device(VIVLAD), for Patients suffering from acute respiratory distress syndrome(ARDS) or chronic respiratory problems. We investigate the optimal condition of the frequency band excited with new vibrator at state of limit hemolysis when blood hemolysis came to through a membrane vibration action. The experimental design and procedures were given for a device used to assess the effectiveness of membrane vibrations. Quantitative experimental measurements were performed to evaluate the performance of the device . and to identify membrane vibration dependence on blood hemolysis. We developed an analytical solution for the hydrodynamics of flow through a bundle of sinusoidally vibrated hollow fibers that is used to provide some insight into how wall vibrations might enhance the performance of the VIVLAD. In the result, it was measured that the effect of various excited frequencies in gas transfer rate and hemolysis from the maximum gas transfer rate at no vibration when the maximum gas transfer rates showed at module type 6, module type 6 consisted of 675 hollow fiber membranes The maximum oxygen transfer rate was caused by the occurrence of maximum amplitude and transfer of vibration to hollow fiber membranes when it was excited by the frequency band of 7Hz at each blood flow rate. because this frequency became the End mode resonance frequency of the flexible in blood flow. Also, when module type 6 was excited at an excited frequency of 7Hz. blood hemolysis was low. Therefore, we decided that the limit of hemolysis frequency is 7Hz . because maximum amplitude occurred at this frequency.
Kim, Hong-Ryul;Han, Seung-Kyu;Rha, Seung-Woon;Kim, Hyon-Surk;Kim, Woo-Kyung
Archives of Plastic Surgery
/
v.37
no.2
/
pp.148-152
/
2010
Purpose: In treating diabetic foot ulcers, satisfactory vascularity is an essential prerequisite. To improve vascularity, a bypass graft has long been carried out. Recently, however, percutaneous transluminal angioplasty (PTA) has also been tried since the PTA is less invasive than the bypass graft. However, publication demonstrating the improvement of vascularity after the PTA are lacking. Therefore, this study was designed to show usefulness of the PTA in treating vasculopathy of diabetic foot. Materials: and Methods This study included 30 feet of 24 ischemic diabetic foot patients. Inclusion criteria were diabetes (duration > 5 years) and a significant lower extremity ischemia, as determined by a transcutaneous oxygen pressure ($TcpO_2$) < 30 mmHg. The PTA was carried out in 61 arteries. PTA procedure was considered successful, when residual stenosis was less than 30%. The procedure was considered failed when residual stenosis was more than 50%. Residual stenosis between 30% and 50% was considered acceptable. For evaluation of PTA effect, foot $TcpO_2$ and infrared thermography were measured before and 7th day after PTA. Results: Immediately after PTA performed in 61 arteries, 58 and 3 arteries were evaluated as being successful and acceptable, respectively. Before PTA, average foot $TcpO_2$ was $12.6{\pm}8.8$ mmHg and its value was increased to $44.2{\pm}23.9$ on 7th day after PTA (p<0.01). Average skin temperature was $31.8{\pm}1.2^{\circ}C$ before PTA and it was increased to $33.5{\pm}1.1^{\circ}C$ on 7th day after PTA (p<0.01). Conclusion: PTA procedure increases tissue oxygenation of ischemic diabetic feet which do not have wound healing potential due to low tissue oxygenation, to the level of possible wound healing. In addition, PTA increases skin temperature of ischemic diabetic feet which can imply an improvement of peripheral circulation.
The fluorine doped silicon oxide (SiOF) intermetal dielectric (IMD) films have been of interest due to their lower dielectric constant and compatibility with existing process tools. However instability issues related to bond and increasing dielectric constant to water absorption when the SiOF films was exposured to atmospheric ambient. Therefore, the purpose of this research is to study the effect of post oxygen plasma treatment on the resistance of moisture absorption and reliability of SiOF film. Improvement of moisture absorption resistance of SiOF film is due to the forming of thin SiO₂layer at the SiOF film surface. It is thought that the main effect of the improvement of moisture absorption resistance was densification of the top layer and reduction in the number of Si-F bonds that tend to associate with OH bonds. However, the dielectric constant was increased when plasma treatment time is above 5 min. In this study, therefore, it is thought that the proper plasma treatment time is 3 min when plasma treatment condition is 700 W of microwave power, 3 mTorr of process pressure and 300℃ of substrate temperature.
Kim, Dong-Kun;Lee, Yun-Jie;Yu, Myong-Jin;Pak, Dae-Won;Kim, Mi-Sun;Sang, Byoung-In
Journal of Korean Society of Environmental Engineers
/
v.28
no.4
/
pp.362-367
/
2006
Waste activated sludge(WAS) collected from domestic wastewater treatment plant is biomass that contains large quantities of organic matter. However, relevant literature show that the bio-hydrogen yield using WAS was too low. In this study, the effect of pretreatment of WAS on hydrogen yield was investigated. Pretreatment includes acid and alkali treatments, grinding, heating, ozone and ultrasound methods. After pretreatment organic matters of WAS were solubilized and soluble chemical oxygen demand(SCOD) was increased by 14.6 times. Batch experiments were conducted to investigate the effects of pre-treatment methods and buffer solution, hydrogen partial pressure, and sodium ion on hydrogen production from WAS by using heated anaerobic mixed cultures. Experimental results showed that addition of buffer solution, efficient pre-treatment method with alkali solution, and gas sparging condition markedly increased the hydrogen yield to 0.52 mmol $H_2/g$-DS.
Jo, Jin-Oh;Lee, Sang Baek;Jang, Dong Lyong;Mok, Young Sun
Applied Chemistry for Engineering
/
v.24
no.4
/
pp.433-437
/
2013
Electrical discharge plasma created in a multi-channel porous ceramic membrane-supported catalyst was applied to the decomposition of a volatile organic compound (VOC). For the purpose of improving the oxidation capability, the ceramic membrane used as a low-pressure drop catalyst support was loaded with zinc oxide photocatalyst by the incipient wetness impregnation method. Alternating current-driven discharge plasma was created inside the porous ceramic membrane to produce reactive species such as radicals, ozone, ions and excited molecules available for the decomposition of VOC. As the voltage supplied to the reactor increased, the plasma discharge gradually propagated in the radial direction, creating an uniform plasma in the entire ceramic membrane above a certain voltage. Ethylene was used as a model VOC. The ethylene decomposition efficiency was examined with experimental variables such as the specific energy density, inlet ethylene concentration and zinc oxide loading. When compared at the identical energy density, the decomposition efficiency obtained with the zinc oxide-loaded ceramic membrane was substantially higher than that of the bare membrane case. Both nitrogen and oxygen played an important role in initiating the decomposition of ethylene. The rate of the decomposition is governed by the quantity of reactive species generated by the plasma, and a strong dependence of the decomposition efficiency on the initial concentration was observed.
In this study, performance (particle removal efficiency and breathing resistance) of several commercially available face masks (electrostatic filter masks (KF80 certified), a nanofiber filter mask (KF80 certified), and an uncertified mask) with their filter structure and composition were evaluated. Also, effects of relative humidity (RH) of incoming air, water and alcohol exposure, and reusability on performance of face masks were examined. Monodisperse and polydisperse sodium chloride particles were used as test aerosols. Except the uncertified mask filter, PM2.5 removal efficiency was found to be higher than 90%, and the nanofiber filter mask had the highest quality factor due to the low pressure drop and high removal efficiency (nanofibers were arranged in a densely packed pore structure and contained a significant amount of fluorine in addition to carbon and oxygen). In the case of the KF80 certified mask, the removal efficiency was little affected when the RH of incoming air increased. When the mask filters were soaked in water, the removal efficiency of mask filters was degraded. In particular, the uncertified mask filter showed the highest removal efficiency degradation (26%). When the mask was soaked in alcohol, the removal efficiency also decreased with the greater degree than the water soaking case. The nanofiber mask filter showed the strongest resistance to alcohol exposure among tested mask filters. During evaluation of reusability of masks in real life, the removal efficiency of certified mask filter was less than 4% for 5 consecutive days (2 hours per day), while the removal efficiency of uncertified mask filter significantly decreased by 30% after 5 days.
Jo, Gwang-Min;Lee, Gi-Chang;Seong, Sang-Yun;Kim, Se-Yun;Kim, Jeong-Ju;Lee, Jun-Hyeong;Heo, Yeong-U
Proceedings of the Korean Vacuum Society Conference
/
2010.08a
/
pp.170-170
/
2010
Thin-film transistors (TFT) have become the key components of electronic and optoelectronic devices. Most conventional thin-film field-effect transistors in display applications use an amorphous or polycrystal Si:H layer as the channel. This silicon layers are opaque in the visible range and severely restrict the amount of light detected by the observer due to its bandgap energy smaller than the visible light. Therefore, Si:H TFT devices reduce the efficiency of light transmittance and brightness. One method to increase the efficiency is to use the transparent oxides for the channel, electrode, and gate insulator. The development of transparent oxides for the components of thin-film field-effect transistors and the room-temperature fabrication with low voltage operations of the devices can offer the flexibility in designing the devices and contribute to the progress of next generation display technologies based on transparent displays and flexible displays. In this thesis, I report on the dc performance of transparent thin-film transistors using amorphous indium tin zinc oxides for an active layer. $SiO_2$ was employed as the gate dielectric oxide. The amorphous indium tin zinc oxides were deposited by RF magnetron sputtering. The carrier concentration of amorphous indium tin zinc oxides was controlled by oxygen pressure in the sputtering ambient. Devices are realized that display a threshold voltage of 4.17V and an on/off ration of ${\sim}10^9$ operated as an n-type enhancement mode with saturation mobility with $15.8\;cm^2/Vs$. In conclusion, the fabrication and characterization of thin-film transistors using amorphous indium tin zinc oxides for an active layer were reported. The devices were fabricated at room temperature by RF magnetron sputtering. The operation of the devices was an n-type enhancement mode with good saturation characteristics.
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