• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.986-992
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• 2007

This paper presents the fabrication and characterization of carbon films pyrolyzed with various photoresists for bioMEMS applications. To verify the usefulness of pyrolyzed carbon films as an electrode material in an electrochemical biosensor developed by the authors, interactions between avidin and biotin on the pyrolyzed carbon film were studied via electrochemical impedance spectroscopy based on electrostatic interactions between avidin and negatively-charged ferricyanide. The pyrolyzed carbon films were characterized using a surface profiler, a precision semiconductor parameter analyzer, a nanoindentor, scanning electron microscopy, and atomic force microscopy. Amine conjugated biotin was immobilized on the electrode using EDC/NHS as crosslinkers after $O_2$ plasma treatment to enhance functional groups on the carbon electrode pyrolyzed at $1000^{\circ}C$ with AZ9260. The detection of avidin binding with different concentrations in a range of 0.75 nM to $7.5\;{\mu}M$ to the pyrolyzed carbon electrode modified with biotin was carried out by measuring the electrochemical impedance change. The results show that avidin binds to the biotin on the electrode not by non-specific interaction but by specific interaction, and that EIS successfully detects this binding event. Pyrolyzed carbon films are a promising material for miniaturization, integration, and low-cost fabrication in electrochemical biosensors.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.11
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• pp.1133-1137
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• 2011

A novel technique for the fabrication of a glass micropipette-based thermal sensor was developed utilizing inexpensive thermocouple materials. Thermal fluctuation with a resolution of ${\pm}0.002$ K was measured using the fabricated thermal probe. The sensors comprise unleaded low-melting point solder alloy (Sn) as a core metal inside a borosilicate glass pipette coated with a thin film of Ni, creating a thermocouple junction at the tip. The sensor was calibrated using a thermally insulated calibration chamber, the temperature of which can be controlled with a precision of ${\pm}0.1$ K and the thermoelectric power (Seebeck coefficient) of the sensor was recorded from 8.46 to $8.86{\mu}V$/K. The sensor we have produced is both cost-effective and reliable for thermal conductivity measurements of micro-electromechanical systems (MEMS) and biological temperature sensing at the micron level.

• Current Research on Agriculture and Life Sciences
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• v.32 no.3
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• pp.159-163
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• 2014

Agricultural unmanned helicopters have become a new paradigm for aerial application. Yet, such agricultural helicopters require easy and affordable attitude control systems. Therefore, this study presents an affordable attitude measurement system using a DCM (direction cosine matrix) algorithm that would be applied to agricultural unmanned helicopters. An IMU using a low-cost MEMS and an algorithm to estimate the attitude of the helicopter were applied in a gimbals structure to evaluate the accuracy of the attitude measurements. The estimation errors in the attitude were determined in comparison with the true angles determined by absolute position encoders. The DCM algorithm and sensors showed an accuracy of about 1.1% for the roll and pitch angle estimation. However, the accuracy of the yaw angle estimation at 3.7% was relatively larger. Such errors may be due to the magnetic field of the stepping motor and encoder system. Notwithstanding, since the intrinsic behavior of the agricultural helicopter remains steady, the determination of attitude would be reliable and practical.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.24 no.4
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• pp.529-535
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• 2020

It is important to secure the driver's external field view in armored vehicles surrounded by iron armor for preparation for the enemy's firepower. For this purpose, a 360 degree rotatable surveillance camera is mounted on the vehicle. In this case, the key idea is to recognize the head of the driver wearing a helmet so that the external camera rotated in exactly the same direction. In this paper, we introduce a method that uses a MEMS-based AHRS sensor and a illuminance sensor to compensate for the disadvantages of the existing optical method and implements it with low cost. The key idea is to set the direction of the camera by using the difference between the Euler angles detected by two sensors mounted on the camera and the helmet, and to adjust the direction with illuminance sensor from time to time to remove the drift error of sensors. The implemented prototype will show the camera's direction matches exactly in driver's one.

• Journal of Institute of Control, Robotics and Systems
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• v.18 no.7
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• pp.632-637
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• 2012

This paper introduces a simple and efficient calibration method for three-axis accelerometers and three-axis gyroscopes using three-axis motion rate table. Usually, the performance of low cost MEMS-based inertial sensors is affected by scale and bias errors significantly. The calibration of these errors is a bothersome problem, but the previous calibration methods cannot propose simple and efficient method to calibrate the errors of three-axis inertial sensors. This paper introduces a new simple and efficient method for the calibration of accelerometer and gyroscope. By using a three-axis motion rate table, this method can calibrate the accelerometer and gyroscope simultaneously and simply. Experimental results confirm the performance of the proposed method.

• ETRI Journal
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• v.38 no.4
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• Transactions of Materials Processing
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• v.14 no.5 s.77
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.184-189
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• 2005

An experimental study of the femtosecond laser machining of Si materials was carried out. Direct laser machining of the materials for the feature size of a few micron scale has the advantage of low cost and simple process comparing to the semiconductor process, E-beam lithography, ECM and other machining process. Further, the femtosecond laser is the better tool to machine the micro parts due to its characteristics of minimizing the heat affected zone(HAZ). As a result of line cutting of Si, the optimal condition had the region of the effective energy of 2mJ/mm-2.5mJ/mm with the power of 0.5mW-1.5mW. The polarization effects of the incident beam existed in the machining qualities, therefore the sample motion should be perpendicular to the projection of the electric vector. We also observed the periodic ripple patterns which come out in condition of the pulse overlap with the threshold energy. Finally, we could machined the groove with the linewidth of below $2{\mu}m$ for the application of MEMS device repairing, scribing and arbitrary patterning.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.6 no.1
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• pp.229-240
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• 2012

Advances in MEMS and CMOS technologies have motivated the development of low cost/power sensors and wireless multimedia sensor networks (WMSN). The WMSNs were created to ubiquitously harvest multimedia content. Such networks have allowed researchers and engineers to glimpse at new Machine-to-Machine (M2M) Systems, such as remote monitoring of biosignals for telemedicine networks. These systems require the acquisition of a large number of data streams that are simultaneously generated by multiple distributed devices. This paradigm of data generation and transmission is known as event-streaming. In order to be useful to the application, the collected data requires a preprocessing called data fusion, which entails the temporal alignment task of multimedia data. A practical way to perform this task is in a centralized manner, assuming that the network nodes only function as collector entities. However, by following this scheme, a considerable amount of redundant information is transmitted to the central entity. To decrease such redundancy, data fusion must be performed in a collaborative way. In this paper, we propose a collaborative data alignment approach for event-streaming. Our approach identifies temporal relationships by translating temporal dependencies based on a timeline to causal dependencies of the media involved.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.4
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• pp.106-112
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• 2021

Thermoplastic microfluidic devices are used in BioMEMS for medical and biotechnology applications, such as gene extraction, DNA analysis, and virus detection. In this research, a simple fabrication protocol with a commercially available pneumatic hot press is proposed and demonstrated for polycarbonate microfluidic devices. Microfluidic channels with a width of 200 ㎛ and a height of 10 ㎛ were designed and machined onto a brass plate as a mold insert using a CNC milling machine. The resulting microfluidic channels on the mold insert were assessed and found to have an actual width of 198 ㎛ and a height of 10 ± 0.25 ㎛. The microfluidic channels were replicated on a polycarbonate sheet using the proposed replication technique at 146℃ for 20 minutes under a constant load of 2400 kgf. The devices were then naturally cooled to 100℃ while maintaining the same pressure. It was found that the microchannels were successfully replicated in the polycarbonate, with a width of 198 ㎛ and a height of 10.07 ㎛. The proposed replication technique thus offers the rapid mass production of high-quality microfluidic devices at a low cost with a process that, unlike conventional photolithography systems, does not require expensive equipment.