• Title/Summary/Keyword: liquid film thickness

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Metallizations and Electrical Characterizations of Low Resistivity Electrodes(Al, Ta, Cr) in the Amorphous Silicon Thin Film Transistor (비정질 실리콘 박막 트랜지스터 소자 특성 향상을 위한 저 저항 금속 박막 전극의 형성 및 전기적 저항 특성 평가)

  • Kim, Hyung-Taek
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.05a
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    • pp.96-99
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    • 1993
  • Electrical properties of the Thin Film Transistor(TFT) electrode metal films were investigated through the Test Elements Group(TEG) experiment. The main purpose of this investigation was to characterize the electrical resistance properties of patterned metal films with respect to the variations of film thickness and TEG metal line width. Aluminum(Al), Tantalum(Ta) and Chromium(Cr) that are currently used as TFT electrode films were selected as the probed metal films. To date, no work in the electrical characterizations of patterned electrodes of a-Si TFT was accomplished. Bulk resistance$(R_b)$, sheet resistance$(R_s)$, and resistivities($\rho$) of TEG patterned metal lines were obtained. Electrical continuity test of metal film lines was also performed in order to investigate the stability of metallization process. Almost uniform-linear variations of the electrical properties with respect to the metal line displacements was also observed.

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Optical and electrical property of Indium-doped ZnO (IZO) grown by Atomic Layer Deposition (ALD) using Et2InN(TMS)2 as In precursor and H2O oxidant

  • Jo, Yeong-Jun;Jang, Hyo-Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.421.1-421.1
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    • 2016
  • We studied indium-doped zinc oxide (IZO) film grown by atomic layer deposition (ALD) as transparent conductive oxide (TCO). A variety of TCO layer, such as ZnO:Al (AZO), InSnO2(ITO), Zn (O,S) etc, has been grown by various method, such as ALD, chemical vapor deposition (CVD), sputtering, laser ablation, sol-gel technique, etc. Among many deposition methods, ALD has various advantages such as uniformity of film thickness, film composition, conformality, and low temperature deposition, as compared with other techniques. In this study, we deposited indium-doped zinc oxide thin films using diethyl[bis(trimethylsilyl)amido]indium [Et2InN(TMS)2] as indium precursor, DEZn as zinc precursor and H2O as oxidant for ALD and investigated the optical and electrical properties of IZO films. As an alternative, this liquid In precursor would has several advantages in indium oxide thin-film processes by ALD, especially for low resistance indium oxide thin film and high deposition rate as compared to InCp, InCl3, TMIn precursors etc. We found out that Indium oxide films grown by Et2InN(TMS)2 and H2O precursor show ALD growth mode and ALD growth window. We also found out the different growth rate of Indium oxide as the substrate and investigated the effect of the substrate on Indium oxide growth.

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Chip-on-Glass Process Using the Thin Film Heater Fabricated on Si Chip (Si 칩에 형성된 박막히터를 이용한 Chip-on-Glass 공정)

  • Jung, Boo-Yang;Oh, Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.3
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    • pp.57-64
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    • 2007
  • New Chip-on-glass technology to attach an Si chip directly on the glass substrate of LCD panel was studied with local heating method of the Si chip by using thin film heater fabricated on the Si chip. Square-shaped Cu thin film heater with the width of $150\;{\mu}m$, thickness of $0.8\;{\mu}m$, and total length of 12.15 mm was sputter-deposited on the $5\;mm{\times}5\;mm$ Si chip. With applying current of 0.9A for 60 sec to the Cu thin film heater, COG bonding of a Si chip to a glass substrate was successfully accomplished with reflowing the Sn-3.5Ag solder bumps on the Si chip.

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A Study on the Breakdown Characteristics of Electrodeposited Polyimide Film at High Temperature (전착된 폴리이미드 박막의 고온영역에서 절연파괴 특성에 관한 연구)

  • Yu, Y.B.;Sin, D.K.;Kim, B.J.;Kim, J.S.;Pak, K.S.;Kim, S.K.;Cho, D.H.;Han, S.O.
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1498-1501
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    • 1996
  • To evaluate insulating properties of polyimide thin film on high temperature over $100\;^{\circ}C$, polyimide film were prepared by electrophoretic deposition onto metal surface from nonaqueous emulsion. The emulsion is made by adding a solution of the resin to a precipitant, which is an organic liquid compeltely miscible with the solvent of the organic resin solution, but which does not dissolve the resin. The polyimide film obtained by annealing shows good insulation properties of 5.8 MV/cm at elevated temperature and breakdown strength of the film reveals thickness dependence.

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A Fundamental Study on Development of a Rotating Horizontal Heat Pipe (회전식 수평 Heat Pipe의 개발에 관한 기초 연구)

  • 임광빈;이진성
    • Journal of Energy Engineering
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    • v.8 no.2
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    • pp.325-332
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    • 1999
  • When a rotating heat pipe is in operation, liquid condensate returns from the condenser to the evaporator along the inside surface by both components of gravitational and centrifugal forces. It was known that its performance was largely dependent on how to increase the flow rates of condensate and keep the condensate film thickness as thin as possible. Most of research works were focussed on this goal, and various inner wall structures such as tapered wall, stepped wall or coil inserted pipe etc. were developed. In the present study, a stepped wall structure with 3 internal grooves in the condenser and adiabatic zone was examined. For this system, the condensate would flow down to the evaporator through the grooves, resulting a reduced film thickness over the condenser surface. Experimental data showed an enhancement of heat transfer coefficient in the condenser zone. An analytical solution to the condensate film thickness showed that the analytically calculated values of heat transfer coefficient were considerably higher than the experimental data.

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The Development of 12.1' SVGA Reflective Color Thin Film Transistor Liquid Crystal Display with The New Structured Reflector and Optimized Optical Films

  • Shin, Jong-Eup;Joo, Young-Kuil;Jang, Yong-Kyu;Kang, Myeon-Koo;Souk, Jun-Hyung
    • 한국정보디스플레이학회:학술대회논문집
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    • 2000.01a
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    • pp.19-20
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    • 2000
  • We have developed the 12.1" SVGA reflective type color TFT-LCD(Thin Film Transistor - Liquid Crystal Display) with the high aperture ratio and well designed reflector for the applications such as mini note PC, Note PC and electronic book. The panel shows the high reflectance(30%) and contrast ratio(20:1) resulted from optimizing the optical films and designing the embossing shaped reflector. By improving the chromacity, the color reproducibility was increased up to 20%. As removing the backlight unit, we reduced the power consumption, thickness and weight of the panel to 0.8W, 2.2mm, and 250gram, respectively. According to the above performances, we have obtained fabrication process for mass production, and furthermore, could have access to fast market launching.

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Quantifying the Variation of Mass Flow Rate generated by Pressure Fluctuation (압력섭동에 의한 유량변동 측정 정량화)

  • Khil, Tae-Ock;Kim, Dong-Jun;Cho, Seong-Ho;Ahn, Kyu-Bok;Han, Yeoung-Min;Yoon, Young-Bin
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2007.04a
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    • pp.152-156
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    • 2007
  • It is very important to understand about mass flow rate variations of propellants generated by pressure fluctuation in the combustion chamber. Therefore, we have studied quantifying the variation of mass flow rate generated by pressure fluctuation. The flow velocity in orifice is acquired through theoretical approach after measuring the pressure in orifice and the flow area in orifice is measured by film thickness measuring device. Our results agreed with it in the very small error range comparing our results with velocity and mass flow rate in steady state. Thus, our result based on theoretical approach will help about measuring mass flow rate in non-steady state.

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Application of NiOx Anode for Bottom Emission Organic Light Emitting Diode

  • Kim, Young-Hwan;Kim, Jong-Yeon;Kim, Byoung-Yong;Han, Jeong-Min;Moon, Hyun-Chan;Park, Kwang-Bum;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.448-448
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    • 2007
  • OLED has many advantages of low voltage operation, self radiation, light weight, thin thickness, wide view angle and fast response time to overcome existing liquid crystal display (LCD)'s weakness. Therefore, It draws attention as promising display and has already developed for manufactured goods. Also, OLED is regarded as a only substitute of flexible display with a thin display. However, Indium tin oxide(ITO) thin film for electrode of OLED shows a low electrical properties and is impossible to deposit at high thermal condition because electrical characteristics of ITO is getting worse. One of the ways to realize an improved flexible OLED is to use high internal efficiency electrodes, which have higher work function than those single layer of ITO films of the same thickness. The high internal efficiency electrodes film is developed with structure of nickel oxide for bottom Emission Type of OLED.

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Experimental Study of Spray Characteristics on the Throttleable Dual Manifold Injector (이중 매니폴드 가변추력 분사기의 분무 특성에 관한 실험적 연구)

  • Youn, Jung-Soo;Kim, Sung-Hyuk;Yoon, Young-Bin
    • Journal of the Korean Society of Propulsion Engineers
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    • v.15 no.3
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    • pp.22-30
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    • 2011
  • There is a many way of LPRE throttling methods, high-pressure-drop systems, dual-manifold injector, gas injection, multiple chambers, pulse modulation and movable injector components. Especially dual-manifold injector is essentially combines two fixed-area injectors into a common structure, with independent feed systems controlling flow to each injector manifold. In this paper, using indirect photography and liquid film thickness measurement with various injection pressure and tangential entry diameter to decide stability of spray over a wide thrust range in dual manifold injector.

Spray Characteristics of Closed-type Swirl Injectors with Varying Swirl Chamber Geometry (Closed-type 스월 인젝터의 스월 챔버 형상에 따른 분무특성 연구)

  • Chung, Yunjae;Jeong, Seokkyu;Oh, Sukil;Yoon, Youngbin
    • Journal of the Korean Society of Propulsion Engineers
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    • v.19 no.4
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    • pp.8-14
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    • 2015
  • This study has been done as a preliminary work in the process of confirming the modeling and calculation results on the dynamic characteristics of closed-type swirl injector which were performed by Ismailov et al. in Purdue university. Closed-type swirl injectors with replaceable swirl chamber parts were designed and manufactured. The steady state spray characteristics of closed-type swirl injector with varying swirl chamber length and diameter were verified. Mass flow rate was measured with a mass flow meter installed in front of the injector, and liquid film thickness was measured by Lefebvre's method with electrodes installed at the orifice of the injector. Variation of spray cone angle and break-up length were investigated from the spray images captured under different manifold pressure conditions.