• 한국정밀공학회지
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• 제14권1호
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• pp.185-193
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• 1997

This paper presents the on-line monitoring of the surface roughness in a face milling operation. The cut- ting force was used to monitor the surface roughness, since the insert run-outs not only deteriorate surface roughness but also change cutting force. AR model and band energy method were taken to extract the fea- tures from the cutting force. The features extracted from AR modelling are more accurate about the moni- toring than those from band energy method, whereas, the computing speed of the former is slow. An artifi- cal neural network discriminated the level of the surface roughness by using the features extracted via signal processing.

• 한국기계가공학회지
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• 제1권1호
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• pp.23-28
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• 2002

Fused deposition modelling(FDM) is a rapid prototyping(RP) process that fabricates part layer by layer by deposition of molte thermoplastic material extrude from a nozzle. RP system has benefits. Benefit would be the ability to experiment with physical objects of any complexity m a relatively short period of time. But it has a matter of surface roughness and geometric accuracy. We study on Influence of tangent line angle on surface roughness at fused deposition.

• 지질공학
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• 제25권2호
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• pp.165-178
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• 2015

Physical and chemical weathering degrades rock, affecting its structural properties and thus the stability of stone buildings or other structures. Confocal laser scan microscopy (CLSM) is used here to observe temporal changes in the surface roughness of rock samples under simulated accelerated weathering. Samples were pressurized to 50, 55, or 70 MPa using a pressure frame, and subjected to freeze/thaw cycling controlled by a thermostat. The temperature was cycled from -20℃ to 40℃ and back. After each 20 cycles, CLSM was used to assess the change in surface roughness, and roughness factors were calculated to quantify the progression of the surface condition over time. Variations in cross-section line-roughness parameters and surface-roughness parameters were analyzed for specific parts of the sample surfaces at 5× and 50× magnification. The result reveals that the highest and lowest values of the roughness factors are changed according to elapsed time. Freezing/thawing at high pressure caused larger changes in the roughness factor than at low pressure.

• 한국공작기계학회논문집
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• 제14권2호
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• pp.21-26
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• 2005

From on the machining center cutting work of 5534, the characteristics such as spindle speed and feed speed fir the third point height, average spacing of roughness peaks, bearing ratio, center line average, ten point height. experiments is roughness for sampling length determine to measuring length of cutting feed speed 200, 400, 600, 800mm/min and spindle speed 800, 1000, 1200, 1400rpm. Third point height is spindle speed with most suitable cutting condition 1000rpm. Third point height is feed speed with most suitable cutting condition 400mm/min. Average spacing of roughness peaks are spindle speed with most suitable cutting condition feed speed increased to average spacing of roughness Peaks are increased. Spindle speed increased to average spacing of roughness peaks are decreased. Bearing ratio is spindle speed with feed speed increased to bearing ratio decreased. Center line average is spindle speed with most suitable cutting condition at 1200rpm feed speed with most suitable cutting condition at 200mm/min to cutting foe roughness suddenly decreased. Ten point height is spindle speed with most suitable cutting condition 1200rpm at ten point height cutting face roughness to decreased and feed speed with most suitable cutting condition 800mm/min at ten point height cutting face roughness to decreased.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권1호
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• pp.61-69
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• 2014

With the extreme ultraviolet (EUV) lithography, the performance limit of chemically amplified resists has recently been extended to 16- and 11-nm nodes. However, the line edge roughness (LER) and the line width roughness (LWR) are not reduced automatically with this performance extension. In this paper, to investigate the impacts of the EUVL mask and the EUVL exposure process on LER, EUVL is modeled using multilayer-thin-film theory for the mask structure and the Monte Carlo (MC) method for the exposure process. Simulation results demonstrate how LERs of the mask transfer to the resist and the exposure process develops the resist LERs.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.1067-1070
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• 2002

Fused deposition modelling(FDM) is a rapid prototyping(RP) process that fabricates part layer by layer by deposition of molten thermoplastic material extrude from a nozzle. RP system has many benefit. One of the benefit would be the ability to experiment with physical objects of any complexity in a relatively short period of time. But it has a matter of surface roughness and geometric accuracy. We study on Influence of tangent line angle on surface roughness at fused deposition

• 한국정밀공학회지
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• 제30권12호
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• pp.1335-1340
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• 2013

Herein the water film was introduced to the hydrophilic area on the line patterned surface to solve the contradiction caused by surface roughness (high different wettability has advantage to control the droplet but high roughness for that high wettability difference causes obstruction of droplet moving). Thus the droplet on the water film could not be hindered to line direction but restricted to orthogonal direction, effectively. In addition, droplet behaviors according to droplet volume and line thickness were studied. Droplet fell off the line with narrowing the interface between the droplet and the water film on the line. When the droplet fell off the line, the plate angle was designated as a critical plate angle and it used as an indicator of surface capability to control the droplet. As a result critical plate angle increases as droplet volume decreases and line thickness increases.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2005년도 춘계 학술발표회 논문집
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• pp.1205-1210
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• 2005

The behavior of rock mass and solute(e.g. groundwater, radioactivity) flow in fractured rock can be directly influenced by joint roughness. The characteristics of joint roughness is also a main factor for the rock classification(e.g. RMR, Q system) which is usually used in tunnel design. Nevertheless, most of JRC estimation has been carried out only by the examination with the naked eye. This JRC estimation has a lack of objectivity because each investigator judges JRC by his subjective opinion. Therefore, it will be desirable that the assessment of JRC is performed by a numerical analysis which can give a quantitative value corresponding to the characteristics of a roughness curve. Meanwhile, roughness curves for joint surfaces which are observed in drill cores have been obtained only along linear profiles. Although roughness curves are measured in the same joint surface, they can frequently show diverse aspects in a standpoint of roughness characteristics. If roughness curves can be measured along the elliptical circumferences of joint surfaces from core scanning images or Televiewer images, they will certainly be more comprehensive than those measured along linear profiles for roughness characteristics of joint surfaces. This study is focus on dealing with (1) extracting automatically roughness curves from core scan image or Televiewer image, (2) improving the accuracy of quantitative assessment of JRC using fractal dimension concept.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권5호
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• pp.511-515
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• 2013

A Monte Carlo (MC) simulation study has been done in order to investigate the effects of line-edge-roughness (LER) induced by either 1P1E (single-patterning and single-etching) or 2P2E (double-patterning and double-etching) on fully-depleted silicon-on-insulator (FDSOI) tri-gate metal-oxide-semiconductor field-effect transistors (MOSFETs). Three parameters for characterizing the LER profile [i.e., root-mean square deviation (${\sigma}$), correlation length (${\zeta}$), and fractal dimension (D)] are extracted from the image-processed scanning electron microscopy (SEM) image for each photolithography method. It is experimentally verified that two parameters (i.e., ${\sigma}$ and D) are almost the same in each case, but the correlation length in the 2P2E case is longer than that in the 1P1E case. The 2P2E-LER-induced $V_TH$ variation in FDSOI tri-gate MOSFETs is smaller than the 1P1E-LER-induced $V_TH$ variation. The total random variation in $V_TH$, however, is very dependent on the other major random variation sources, such as random dopant fluctuation (RDF) and work-function variation (WFV).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.124-130
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• 2003

Zinc Oxide(ZnO) thin films on Si (100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance. To analyze a crystallographic properties of the films, $\theta/2\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity. and surface roughness highly depended on $Ar/O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7{\Omega}cm$ was obtained at a working pressure of 10 mTorr with $Ar/O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with $Ar/O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.