• Title/Summary/Keyword: lift-off length

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Fabrication of MEMS Test Socket for BGA IC Packages (MEMS 공정을 이용한 BGA IC 패키지용 테스트 소켓의 제작)

  • Kim, Sang-Won;Cho, Chan-Seob;Nam, Jae-Woo;Kim, Bong-Hwan;Lee, Jong-Hyun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.47 no.11
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    • pp.1-5
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    • 2010
  • We developed a novel micro-electro mechanical systems (MEMS) test socket using silicon on insulator (SOI) substrate with the cantilever array structure. We designed the round shaped cantilevers with the maximum length of $350{\mu}m$, the maximum width of $200{\mu}m$ and the thickness of $10{\mu}m$ for $650{\mu}m$ pitch for 8 mm x 8 mm area and 121 balls square ball grid array (BGA) packages. The MEMS test socket was fabricated by MEMS technology using metal lift off process and deep reactive ion etching (DRIE) silicon etcher and so on. The MEMS test socket has a simple structure, low production cost, fine pitch, high pin count and rapid prototyping. We verified the performances of the MEMS test sockets such as deflection as a function of the applied force, path resistance between the cantilever and the metal pad and the contact resistance. Fabricated cantilever has 1.3 gf (gram force) at $90{\mu}m$ deflection. Total path resistance was less than $17{\Omega}$. The contact resistance was approximately from 0.7 to $0.75{\Omega}$ for all cantilevers. Therefore the test socket is suitable for BGA integrated circuit (IC) packages tests.

The Effects of Velocity and Concentration in the Oxidizer of Heptane Pool Fires on the Flame Stability (헵탄 풀화재 화염안정성에 관한 산화제 유속 및 농도 효과)

  • Jeong, Tae-Hee;Lee, Eui-Ju
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.3
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    • pp.309-314
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    • 2012
  • Flame flickering occurs mainly because of the buoyancy force for pool fires under ambient air. The cup-burner flame was used for experimental investigation of the effect of the oxidizer velocity on the gravitational instability. The results showed that the flickering frequency decreased with increasing oxidizer velocity. The frequency-buoyancy relation with nondimensional variables coincided with that of the buoyant flume and pool fires when the characteristic velocity was defined as the difference between the fuel and oxidizer velocities, which implies that the origin of the gravitational instability is the Kelvin-Helmholtz instability in the shear layer. The effect of the oxidizer composition on the instability was also examined through nitrogen dilution in the oxidizer stream. As the concentration of inert gas increased, the length of the blue flame increased and lift-off behavior was observed. The oscillation frequency was independent of the dilution ratio, but was related to the local flame structure.

Investigation of Effective Contact Resistance of ZTO-Based Thin Film Transistors

  • Gang, Yu-Jin;Han, Dong-Seok;Park, Jae-Hyeong;Mun, Dae-Yong;Sin, So-Ra;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.543-543
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    • 2013
  • Thin-film transistors (TFTs) based on oxide semiconductors have been regarded as promising alternatives for conventional amorphous and polycrystalline silicon TFTs. Oxide TFTs have several advantages, such as low temperature processing, transparency and high field-effect mobility. Lots of oxide semiconductors for example ZnO, SnO2, In2O3, InZnO, ZnSnO, and InGaZnO etc. have been researched. Particularly, zinc-tin oxide (ZTO) is suitable for channel layer of oxide TFTs having a high mobility that Sn in ZTO can improve the carrier transport by overlapping orbital. However, some issues related to the ZTO TFT electrical performance still remain to be resolved, such as obtaining good electrical contact between source/drain (S/D) electrodes and active channel layer. In this study, the bottom-gate type ZTO TFTs with staggered structure were prepared. Thin films of ZTO (40 nm thick) were deposited by DC magnetron sputtering and performed at room temperature in an Ar atmosphere with an oxygen partial pressure of 10%. After annealing the thin films of ZTO at $400^{\circ}C$ or an hour, Cu, Mo, ITO and Ti electrodes were used for the S/D electrodes. Cu, Mo, ITO and Ti (200 nm thick) were also deposited by DC magnetron sputtering at room temperature. The channel layer and S/D electrodes were defined using a lift-off process which resulted in a fixed width W of 100 ${\mu}m$ and channel length L varied from 10 to 50 ${\mu}m$. The TFT source/drain series resistance, the intrinsic mobility (${\mu}i$), and intrinsic threshold voltage (Vi) were extracted by transmission line method (TLM) using a series of TFTs with different channel lengths. And the performances of ZTO TFTs were measured by using HP 4145B semiconductor analyzer. The results showed that the Cu S/D electrodes had a high intrinsic field effect mobility and a low effective contact resistance compared to other electrodes such as Mo, ITO and Ti.

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Combustion Characteristics of Methane-Oxygen Diffusion Flame Formed by Swirl-coaxial Injector (스월 동축형 인젝터에 의해 형성되는 메탄-산소 확산화염의 연소특성)

  • Bae, Seong Hun;Hong, Joon Yeol;Kim, Heuy Dong;Kim, Jeong Soo
    • Journal of the Korean Society of Propulsion Engineers
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    • v.21 no.2
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    • pp.1-8
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    • 2017
  • In order to analyze combustion characteristics of methane-oxygen diffusion flame in a model combustor, combustion experiments were carried out under various spray conditions of propellant scrutinizing combustion stability limit and flame shapes. As the propellant approached the theoretical equivalence ratio condition, a stable detached flame was observed even under high oxygen Reynolds number. And the length of the visible flame increased and the lift-off distance of the flame exhibited a tendency toward decrease. Due to the swirl effect of the propellant by the swirl-coaxial injector, a wide and short flame was produced. Thus, it may be appropriate to employ the swirl-coaxial injector in thrusters having a limited physical dimension.

Measurement of Retaining Tensile Load with the Relative Displacement Detector of Ground Anchors (상대변위측정기를 이용한 지반앵커의 보유인장력 측정)

  • Jeong, Hyeon-Sik;Han, Kwang-Suk;Lee, Yeong-Saeng
    • Journal of the Korean Geotechnical Society
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    • v.33 no.10
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    • pp.59-69
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    • 2017
  • The tension load of the ground anchor inserted in the ground gradually changes over time. In this regard the change of the initial tension load is primarily decreased by the fixation condition of the fixing head and the mechanical characteristics of the tensile material. The subsequent additional tension load is a time-dependent loss mostly due to the fixing conditions of the bonded length and the surrounding ground properties of the field. In this paper, therefore, a measurement system using a relative displacement detector that can relatively easily measure the change of tension load is discussed. As a result of the review, it was confirmed that the results using the relative displacement detector are similar to those of the real scale model test, and it was also confirmed that similar results were obtained with the result of the pull-out test conducted on the ground anchors fixed to weathered rocks condition. In addition, a pull-out test was conducted on the test anchors whose initial tension load loss was relatively large and through this test pull-out behavior of the tension type ground anchors was verified.

Estimation Method of the Interchangeability Using Equivalent Gases in a Partial Premixed Gas Appliance (등가가스를 이용한 부분예혼합 가스기기의 호환성 판정법)

  • Kim, Jong-Min;Lee, Seung-Ro;Ha, Young-Cheol;Lee, Sung-Min;Lee, Chang-Eon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.34 no.8
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    • pp.761-766
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    • 2010
  • The estimation method of the interchangeability in a partial premixed appliance about various compositions of natural gases using equivalent gases, experimentally. The results of the experiment in which equivalent gases were used compared with those obtained in experiments in which natural gases were used; Images of flames, lift-off limits, CO emissions, and incomplete combustion indices in KS standard for the domestic gas range were considered. From the comparison, it was observed that the length and color of the flame of the equivalent gases were almost the same as those of imported natural gases. Further, in the case of gases with Wobbe indices greater than 51 MJ/$m^3$, the KS standard for lifting limits was satisfied. Furthermore, in the case of gases with Wobbe indices less than 56.3 MJ/$m^3$, the CO mole fractions are in the range 95-100 ppm. Hence, the range of Wobbe indices 51-56.3 MJ/$m^3$ was proposed to be the range for interchangeability from the points of view of lifting limits and incomplete combustion, as prescribed in the domestic gas range in the case of imported natural gases.

Low Resistance Indium-based Ohmic Contacts to N-face n-GaN for GaN-based Vertical Light Emitting Diodes (GaN계 수직형 발광 다이오드를 위한 N-face n-GaN의 인듐계 저저항 오믹접촉 연구)

  • Kang, Ki Man;Park, Min Joo;Kwak, Joon Seop;Kim, Hyun Soo;Kwon, Kwang Woo;Kim, Young Ho
    • Korean Journal of Metals and Materials
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    • v.48 no.5
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    • pp.456-461
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    • 2010
  • We investigated the In-based ohmic contacts on Nitrogen-face (N-face) n-type GaN, as well as Ga-face n-type GaN, for InGaN-based vertical Light Emitting Diodes (LEDs). For this purpose, we fabricated Circular Transfer Length Method (CTLM) patterns on the N-face n-GaN that were prepared by using a laser-lift off method, as well as on the Ga-face n-GaN that were prepared by using a dry etching method. Then, In/transparent conducting oxide (TCO) and In/TiW schemes were deposited on the CTLM in order for low resistance ohmic contacts to form. The In/TCO scheme on the Ga-face n-GaN showed high specific contact resistance, while the minimum specific contact resistance was only 3${\times}$10$^{-2}$ $\Omega$-cm$^{2}$ after annealing at 300${^{\circ}C}$, which can be attributed to the high sheet resistance of the TCO layer. In contrast, the In/TiW scheme on the Ga-face n-GaN produced low specific contact resistance of 2.1${\times}$10$^{5}$ $\Omega$-cm$^{2}$ after annealing at 500${^{\circ}C}$ for 1 min. In addition, the In/TiW scheme on the N-face n-GaN also resulted in a low specific contact resistance of 2.2${\times}$10$^{-4}$ $\Omega$-cm$^{2}$ after annealing at 300${^{\circ}C}$. These results suggest that both the Ga-face n-GaN and N-face n-GaN.

FES Exercise Program for Independent Paraplegic Walking (하반신 마비환자의 FES 독립보행을 위한 근육 강화 프로그램)

  • Khang, Seon-Hwa;Khang, Gon;Choi, Hyun-Joo;Kim, Jong-Moon;Chong, Soon-Yeol;Chung, Jin-Sang
    • Journal of Biomedical Engineering Research
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    • v.19 no.1
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    • pp.69-80
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    • 1998
  • This research was designed to investigate how the exercise program affects paraplegic standing and walking employing functional electrical stimulation(FES). Emphasis was also given to fatigue of major lower extremity muscles induced by different types of electrical stimulation. We applied continuous and intermittent rectangular pulse trains to quadriceps of 10 normal subjects and 4 complete paraplegic patients. The frequencies were 20Hz and 80Hz, and the knee angle was fixed at 90$^{\circ}$and 150$^{\circ}$to investigate how muscle fatigue is related to muscle length. The knee extensor torque was measured and monitored. We have been training quadriceps and gastrocnemius of a male paraplegic patient by means of electrical stimulation for the past two year. FES standing was initiated when the knee extensors became strong enough to support the body weight, and then the patient started FES walking utilizing parallel bars and a walker. We used an 8-channel constant-voltage stimulator and surface electrodes. The experimental results indicated that paralyzed muscles fatigued rapidly around the optimal length contrary to normal muscles and confirmed that low frequency and intermittent stimulation delayed fatigue. Our exercise program increased muscle force by approximately 10 folds and decreased the fatigue index to half of the initial value. In addition, the exercise enabled the patient to voluntarily lift each leg up to 10cm, which was of great help to the swing phase of FES walking. Both muscle force and resistance to fatigue were significantly enhanced right after the exercise was applied every day instead of 6 days a week. Up to date, the patient can walk for more than two and half minutes at 10m/min while controlling the on/off time of the stimulator by pushing the toggle switch attached to the walker handle.

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