• Title/Summary/Keyword: leak rate

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A Study on the Explosion Hazardous Area in the Secondary Leakage of Vapor Phase Materials Based on the Test Results and the Leak Rate According to SEMI S6 in the Semiconductor Industry (반도체 산업의 SEMI S6에 따른 실험결과 및 누출률을 기준으로 한 증기 상 물질의 2차 누출 시 폭발위험장소에 관한 연구)

  • Kim, Sang Ryung;Lim, Keun Young;Yang, Won Baek;Rhim, Jong Guk
    • Journal of the Korean Institute of Gas
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    • v.24 no.2
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    • pp.15-21
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    • 2020
  • Currently, in KS C IEC 60079-10-1, the leakage hole radius of secondary leakage is expressed as a recommendation. Underestimation of leak hole size can lead to underestimation of the calculated values for leak rates, and conservative calculations of leak hole sizes, which are considered for safety reasons, can be overestimated, resulting in an overestimated risk range. This too should be avoided. Therefore, a careful and balanced approach is necessary when estimating the size of leaking holes.Based on this logic, this study examines the stability by grasping the concentration inside the gas box when leaking dangerous substances as a result of experiments based on SEMI S6, an international safety standard applied in the semiconductor industry and The scope of explosion hazardous area was determined by applying the formula of KS C IEC 60079-10-1 according to SEMI F15 leak rate criteria and SEMI S6 leak rate criteria. Based on this, we will examine whether the exhaust performance needs to be improved as an alternative to FAB facilities that are difficult to apply to explosion hazards such as semiconductor industry.

Leak rate 표준확립

  • 신용현;홍승수;정광화
    • Proceedings of the Korean Vacuum Society Conference
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    • 1996.02a
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    • pp.82-82
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    • 1996
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Estimation of Elastic Fracture Mechanics Parameters for Slanted Axial Through-Wall Cracks for Leak-Before-Break and Crack Growth Analysis (파단전누설 해석 및 균열거동 평가를 위한 축방향 경사관통균열의 탄성 응력확대계수 및 균열열림변위)

  • Huh, Nam-Su;Shim, Do-Jun;Choi, Suhn;Park, Keun-Bae
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.725-726
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    • 2008
  • This paper proposes elastic stress intensity factors and crack opening displacements (CODs) for a slanted axial through-wall cracked cylinder under an internal pressure based on detailed 3-dimensional (3-D) elastic finite element (FE) analyses. Based on the elastic FE results, the stress intensity factors along the crack front and CODs through the thickness at the center of the crack were provided. These values were also tabulated for three selected points, i.e., the inner and outer surfaces and at the mid-thickness. The present results can be used to evaluate the crack growth rate and leak rate of a slanted axial through-wall crack due to stress corrosion cracking and fatigue. Moreover, the present results can be used to perform a detailed Leak-Before-Break analysis considering more realistic crack shape development.

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Modification of Current Leak Before Break Criteria for Nuclear Piping System (원자력 발전소 배관에 대한 파단전누설 개념 적용기준의 수정)

  • Yu, Yeong-Jun;Kim, Yeong-Jin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.6
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    • pp.1862-1871
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    • 1996
  • The puopose of this paper is sto modify the current LBB criteria. The validity of current LBB criteria and current standard LBB analysis mehtod are evaluated using linear elastic fracture mechanics and elastic-plastic fracture mechanics. The results of evaluation demonstrate that the current LBB driteria are very conservative and some level of margins already exist in the standard LBB analysis method. Thus, the margin on load .root. and margin on crack size 2 can be eliminated to extend LBB application for the samller diameter pipe.

Performance of Roots-type Vacuum Pump with Cassini Oval Lobe Shape (Cassini 형 루츠 진공 펌프의 성능에 관한 연구)

  • Kim, H.J.;Cho, J.H.;Kim, Youn-J.
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.813-818
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    • 2000
  • The objective of this study is to elucidate the characteristic performance of Roots-type vacuum pump with Cassini oval lobe shape. The modelled lobe shape of Roots-type vacuum pump is two-lobe spur gear. The numerical analyses are performed fer leak flows, using 4th-order Runge-Kutta method and are compared with experimental results. Results show that for the case of involute lobe shape the total amount of the leak flow conductance is greater than that of cycloid and Cassini oval lobe shapes.

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The performance evaluation of Stirling cryocooler for thermal imaging system (IV) : Vibration, Noise, Leak test (열상장비용 스터링 극저온 냉동기 특성평가 (IV) : 진동, 소음, 누설시험)

  • 박성제;홍용주;김효봉;김양훈;최상규;나종문
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.10a
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    • pp.167-170
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    • 2003
  • This paper presents the results of a series of performance tests for the Stilting cryocooler. A free piston and free displacer(FPFD) Stilting cryocooler for cooling infrared and cryo-sensors is currently under development at KIMM. Our coolers are specifically designed to work in the thermal imaging device and to meet requirements such as cooling capacity, COP and high reliability. In this work, Stilting cryocooler is designed, manufactured and fabricated, and performance characteristics for the vibration, acoustic noise, EMI and leak rate are evaluated. Vibration outputs are measured to 20KHz for compressor and expander, respectively. And, the objective of noise test is a noise level, less than 30㏈ at 5 m. EMI tests are carried out according to the standard MIL-STD-461C tests RE01 and RE02. Leak test for the Stilting cryocooler is performed by bombing method.

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AN ARTIFICIAL NEURAL NETWORK BASED SENSOR SYSTEMS FOR GAS LEAKAGE MONITORING

  • Ahn, Hyung-Il;Kim, Eung-Sik;Lee, June-Ho
    • Proceedings of the Korea Institute of Fire Science and Engineering Conference
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    • 1997.11a
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    • pp.282-288
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    • 1997
  • The purpose of this paper is to predict the situation of leak in closed space using an Artificial Neural Network (ANN). The existing system can't monitor the whole He situations with on/off signals. Especially the first stage of data determines the leak spot and intensity is disregarded in gas accidents. To complement these faults, a new prototype of monitoring system is proposed. Ihe system is composed of'sensing systenL data acquisition system computer, and ANN implemented in software and is capable of identifying the leak spot and intensity in closed space. The concentration of gas is measured at the 4 different places. The network has 3 layers that are composed of 4 input Processing Element (PE),24 hidden PEs, md 4 output PEs. The ANN has optimum condition through several experiments and as a consequence the recognition rate of93.75% is achieved finally

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Noise Generation by Water-Sodium Reaction and its Absorption on Hydrogen Bubbles for KALIMER Steam Generator (칼리머 증기발생기에서 물-소듐 반응에 의한 소음 발생과 수소 기포의 소음 흡수)

  • Kim, Tae-Joon;Yughay, Valeri S.;Hwang, Sung-Tai
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2000.06a
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    • pp.1829-1835
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    • 2000
  • The experimental results of sodium-water reaction noise measurement in frequency range $1{/sim}200kHz$ are presented. The experiments of noise generation under the condition of sodium test facility, water leak rate $0.01{\sim}1.2g/s$ and temperature of sodium $250{\sim}500^{\circ}C$, were carried out. From theoretical study it is noted that the noise resonant attenuation on hydrogen bubbles in liquid sodium plays the significant role for leak noise spectra formation. Interaction of leak noise and hydrogen bubbles in sodium being accompanied by thermal, emission and viscosity energy dissipation was studied. Acoustic noise spectra were investigated from point of view of water leak detection in sodium/water steam generator. The results of sodium-water reaction noise absorption on hydrogen bubbles in liquid sodium by temperature $250{\sim}500^{\circ}C$ are presented. The theoretical model of noise absorption using the coefficients of attenuation was developed. From calculation the coefficients of attenuation were estimated.

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Study on Plugging Criteria for Thru-wall Axial Crack in Roll Transition Zone of Steam Generator Tube (증기발생기 전열관 확관천이부위 축방향 관통균열의 관막음 기준에 관한 연구)

  • Park, Myeong-Gyu;Kim, Yeong-Jong;Jeon, Jang-Hwan;Kim, Jong-Min;Park, Jun-Su
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.9
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    • pp.2894-2900
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    • 1996
  • The stream generator tubes represent an integral part of a major barrier against the fission product release to the environment. So, the rupture of these tubes could permit flow of reactor coolant into the secondary system and injure the safety of reactor coolant system. Therefore, if the crack was detected during In-Service Inspection of tubes the cracked tube should be evaluated by the pulgging criteria and plugged or not. In this study, the fracture mechanics evaluation is carried out on the thru-wall axial crack due to Primary Water Stress Corrosion Cracking in the roll transition aone of steam generator tube to help the assurence the integrity of tubes and estabilish the plugging criteria. Due to the Inconel which is used as tube material is more ductile than others, the plastic instability repture theory was used to calculate the critical and allowable crack length. Based on Leak Before Break concept the leak rate for the critical crack length and the allowable leak rate are compared and the safety of tubes was given.