• Journal of the Microelectronics and Packaging Society
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• v.10 no.3
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• pp.57-65
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• 2003

In this study, we carry out reliability tests and investigate the failure mechanisms of the anodically bonded wafer level vacuum packaging (WLVP) MEMS gyroscope sensor. There are three failure mechanisms of WLVP: leakage, permeation and out-gassing. The leakage is caused by small dimension of the leak channel through the bonding interface and internal defects. The larger bonding width and the use of single crystalline silicon can reduce the leak rate. Silicon and glass wafer itself generates a large amount of outgassing including $H_2O$, $C_3H_5$, $CO_2$, and organic gases. Epi-poly wafer generates 10 times larger amount of outgassing than SOI wafer. The sandblasting process in the glass increases outgassing substantially. Outgassing can be minimized by pre-baking of the wafer in the vacuum oven before bonding process. An optimum pre-baking temperature of the wafers would be between $400^{\circ}C$ and $500^{\circ}C$.

• Journal of the Korean Society of Marine Environment & Safety
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• v.25 no.5
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• pp.617-626
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• 2019

This study analyzes the optimal location of gas detectors through the gas dispersion in a cargo compressor room of a 174K LNG carrier equipped with high-pressure cargo handling equipment; in addition, we propose a reasonable method for determining the safety regulations specified in the new International Code of the Construction and Equipment of Ships Carrying Liquefied Gases in Bulk (IGC). To conduct an LNG gas dispersion simulation in the cargo compressor room-equipped with an ME-GI engine-of a 174 K LNG carrier, the geometry of the room as well as the equipment and piping, are designed using the same 3D size at a 1-to-1 scale. Scenarios for a gas leak were examined under high pressure of 305 bar and low pressure of 1 bar. The pinhole sizes for high pressure are 4.5, 5.0, and 5.6mm, and for low pressure are 100 and 140 mm. The results demonstrate that the cargo compressor room will not pose a serious risk with respect to the flammable gas concentration as verified by a ventilation assessment for a 5.6 mm pinhole for a high-pressure leak under gas rupture conditions, and a low-pressure leak of 100 and 140 mm with different pinhole sizes. However, it was confirmed that the actual location of the gas detection sensors in a cargo compressor room, according to the new IGC code, should be moved to other points, and an analysis of the virtual monitor points through a computational fluid dynamics (CFD) simulation.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.15 no.6
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• pp.209-215
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• 2015

Following the semiconductor industry's growing, various types of toxic gases and caustic chemicals, HF(Hydrofluoric acid), HCI (Hydochloric acid), $H_2O_2$ (Hydrogen peroxide), $H_2SO_4$ (Sulfuric acid), and Piranha, were using on the semiconductor manufacturing process. Therefore many gas leakage accidents that produce huge losses of lives were caused by the processes. This research deeply considers two basic solutions that the necessity of MSDS education on university for reducing damage of lives and protecting life from chemical leak accidents such as a HF accident in Gumi, Korea and the use of GHS, REACH and the comprehension of propriety about using MSDS for keeping safety from conflagrations by released poison chemical materials.

• Journal of the Korean Institute of Gas
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• v.23 no.1
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• pp.27-35
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• 2019

In order to solve the global warming and reduce greenhouse gas emissions, $CO_2$ capture technology was developed by applying oxy-fuel combustion. But there has been such a problem that its economic efficiency is low due to the high price of oxygen gases. ASU is known to be most suitable method to produce large quantity of oxygen, to reduce the oxygen production cost, the efficiency of ASU need to be improved. To improve the efficiency of ASU, exergy analysis can be used. The exergy analysis provides the information of used energy in the process, the location and size of exergy destruction. In this study, the exergy analysis was used for process developing and optimization of large scale ASU. The process simulation of ASU was conducted, the results were used to calculate the exergy. As a result, to reduce the exergy loss in the cold box of ASU, a lower operating pressure process was suggested. It was confirmed the importance of heat leak and heat loss reduction of cold box. Also, the unit process of ASU which requires thermal integration was confirmed.

• Journal of the Korean Institute of Gas
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• v.21 no.5
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• pp.16-26
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• 2017

In chemical industry plants, the raw material, intermediate and final products can leak from unstable joints of flanges and valves as well as cracks of storage tanks. From the safety and economic standpoints, it is very important to understand whether leaks or not and leakage rate. The OGI(optical gas image) technique can tell gas leakages, but cannot give the leakage rate. Some special OGI devices can show the kind of gas in different color concentration in different darkness. Therefore the research on quantification of OGI is necessary. In this research, we have developed the practical method to quantify OGI of methane leakage. To estimate 3-dimensional gas leakages distribution from 2-dimensional OGI, the Monte Carlo Probability technique was applied. First the number of points in the area of width(2.54 cm) and length(2.54 cm) in OGI was counted. Total no of each experiment was compared with the measured flow rate. The correlation average between total points and measured flow rate was found to be 0.980. Reversely we estimated the leakage rate of OGI by use of the correlation table. The results showed good agreement between the estimation value and the measured value.

• Tunnel and Underground Space
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• v.28 no.4
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• pp.372-386
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• 2018

The air quality near the backfilled site area is significantly deteriorated during and even after the curing period of the backfill materials. Hazardous gases such as NH3 and CO2 may leak out prolongedly from the mined-out sites backfilled with the composite carbonate-based material; leakage can be observed at the underground working sites as well as on the surface. At operating mines, underground gas leakage will severely aggravate the workplace environment. The ventilation schemes should supply sufficient air to dilute the contaminated air, and control the toxic gas leakage and dispersion. This study shows the applicability of pressurization ventilation system to control gas leakage and dispersion at the backfilled underground mine site.

• Journal of the Korean Ceramic Society
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• v.45 no.12
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• pp.802-806
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• 2008

A proper sealant for low temperature SOFCs should show zero or low leak rates to avoid direct mixing of the fuel and oxidant gases or leakage of fuel gas during the operation of SOFCs. Furthermore, it should be chemically and/or mechanically stable in both oxidizing and reducing environments and chemically compatible with other fuel cell components. In the present work, we developed a novel compressed seal gasket of glass-based composite reinforced with ceramic particulate particles, which can efficiently control the viscous flow of glass matrix as well as the crystallization of glass phase. This novel sealing gasket showed excellent gas tightness under very low compressive load which would be suitable for the operation of SOFCs in the temperature range $600{\sim}650^{\circ}C$.

• Journal of the Korean Electrochemical Society
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• v.9 no.3
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• pp.118-123
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• 2006

Degradation of polymer electrolyte membrane fuel cell (PEMFC) that is facilitated by on/off cycles is one of the most important issues for commercialization of fuel cell vehicles. When a PEMFC stack is shut down, residual hydrogen and induce high voltage equivalent to open circuit voltage to the cathode side that might cause sintering of Pt catalyst and facilitate formation of hydrogen peroxide at the anode side that might decompose $Nafionc\'{A}$ membrane. In this study, degradation of PEMFC exposed to repetitive on/off cycles was investigated by measuring i-V characteristics, ac impedance, cyclic voltammograms, gas leak, cross-sectional SEM images, and TEM images. To prevent degradation of PEMFC caused by the residual gases, hydrogen was removed from anode gas channel by gas-purging and by using a dummy resistance, that were found to be a very effective method.

• Journal of the Korean Institute of Gas
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• v.23 no.5
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• pp.35-43
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• 2019

The safety of industrial valves, which are the core parts of plant facilities, are managed by manpower and there are difficulties because of side area for inspection and limited accessibility due to the nature of facilities. The industrial valves used in plant facilities cause problems such as interrupted production; a loss of life due to leak or explosion of poisonous material and flammable gases, and difficulty in locating accident positions in the event of leakage or failure. Therefore, safety management and control systems based on IoT technology are needed. This study is about the development of risk factor prediction technique among the safety management of industrial valves through IoT- based wireless communication and the development of actuator control system. We have developed IoT-based industrial valve safety management techniques to prevent accidents caused by main risk factors by conducting an analysis of the structural characteristics of valves and an analysis of the causes of main risk factors through review of failure data and literature and an analysis of accident scenarios.

• Applied Chemistry for Engineering
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• v.32 no.1
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• pp.102-109
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• 2021

Recently, an interest in risk calculation methods has been increasing in Korea due to the establishment of classification code for explosive hazardous area on gas facility (KGS CODE GC101), which is based on the international standard of classification of areas - explosive gas atmospheres (IEC 60079-10-1). However, experiments to check for leaks of combustible or toxic gases are very difficult. These experiments can lead to fire, explosion, and toxic poisoning. Therefore, even if someone tries to provide a laboratory for this experiment, it is difficult to install a gas leakage equipment. In this study we find out differences among actual experiments, CFD by using FLACS and calculation based on classification code for explosive hazardous area on gas facility (KGS CODE GC101) by comparing to each other. We develpoed KGS HAC (hazardous area classification) program which based on KGS GC101 for convenience and popularization. As a result, actual gas leak, CFD and KGS HAC are showing slightly different results. The results of dispersion of 1.8 to 2.7 m were shown in the actual experiment, and the CFD and KGS HAC showed a linear increase of about 0.4 to 1 m depending on the increase in a flow rate. In the actual experiment, the application of 3/8" tubes and orifice to take into account the momentum drop resulted in an increase in the hazardous distance of about 1.95 m. Comparing three methods was able to identify similarities between real and CFD, and also similarities and limitations of CFD and KGS HAC. We hope these results will provide a good basis for future experiments and risk calculations.