• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.591-596
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• 2006

Lead zirconate titanate(PZT) thin films have been attracting worldwide interests in exploring their potential properties [1-3] or the origins [4-6] of their excellent dielectic, ferroelectric and piezoelectric properties near the morphotropic phase boundary (MPB). PZT thin films are expected to apply to the memory devices, micro electro mechanical systems (MEMS), and display because of their superior ferroelectric, pyroelectric, piezoelectric and electron emission properties. In this study, high- performance piezoelectric PZT thin films for actuated mirror array and optical scanner were developed by controlling the several factors, such as molecular-designed precursor, seeding layer and the residual stress in films, by a chemical solution deposition (CSD).

• Journal of the Korean Ceramic Society
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• v.25 no.1
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• pp.54-58
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• 1988

In order to depress PbO vaporization during calcination and improve sinterability in low temperature, a method for preparing homogeous Lead-Zirconate-Titanate (PZT) powder from aqueous salt solution by precipitation is described. In this method, single phae PZT fine powders are formed at above 500$^{\circ}C$. PZT-ceramics using these powders have high sinterability, and good sintering characteristics relatively low temp. (-high apparent density, low porosity, low water adsorption etc.)

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.177-181
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• 1997

A new piezoelectreic transformer is proposed as a key device for high power transimssion. The piezoelectric transformer made of lead titanate solid solution creamic is operated with a thickness extensional vibration mode. This transformer can operate at high frequency aver several megahertz with about 90% high efficiency.

• Proceedings of the KIEE Conference
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• 1995.07a
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• pp.104-106
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• 1995

A curious resistivity anomaly in high curie point barium-lead-titanate materials with positive temerature coefficient of resistivity (PTCR) has been observed just below the curie point, besides the normal PTCR anomaly. The additional resistivity anomaly was observed in the resistivity-temperature characteristics.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.132.4-132
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• 1998

• Transactions on Electrical and Electronic Materials
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• v.12 no.5
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• pp.193-196
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• 2011

Lead zirconate titanate (PZT)/ bismuth ferrite (BFO) multilayer thin films have been fabricated by the spin-coating method on Pt(200 nm)/Ti(10 nm)/$SiO_2$(100 nm)/p-Si(100) substrates using $BiFeO_3$ and $Pb(Zr_{0.52}Ti_{0.48})O_3$ metal alkoxide solutions. The PZT/BFO multilayer thin films show a uniform and void-free grain structure, and the grain size is smaller than that of PZT single films. The reason for this is assumed to be that the lower BFO layers play an important role as a nucleation site or seed layer for the formation of homogeneous and uniform upper PZT layers. The dielectric constant and dielectric losses decreased with increasing number of coatings, and the six-layer PZT/BFO thin film has good properties of 162 (dielectric constant) and 0.017 (dielectric losses) at 1 kHz. The remnant polarization and coercive field of three-layer PZT/BFO thin films were 13.86 ${\mu}C/cm^2$ and 37 kV/cm respectively.

• Transactions on Electrical and Electronic Materials
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• v.11 no.5
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• pp.206-211
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• 2010

Piezoelectric energy harvesting uses piezoelectric, which is able to convert unused mechanical vibration energy to electrical energy, such as with motor and machinery. The piezoelectric energy harvester was constructed with a cantilever made of lead zirconate titanate with a metal plate. The primary material was soft lead zirconium titanate (PZT-5H) due to the large strain availability, acceptable mechanical strength and high piezoelectric constant. This technique's drawback is that the energy efficiency is lower than the other energy harvesting methods, but this study increases the output electric power efficiency by analyzing a finite element method for the structure of the piezoelectric energy harvester. We manufactured two cantilever types as follows: the L-60 and L-33 bimorph piezoelectric energy harvesters. Their resulting energy harvesters were able to obtain high voltage values as follows: 27.4 mV and 40.6 mV. Moreover, these results have a similar band of resonance frequency it comparison to the simulation. Consequently, this study was confirmed with validity. The output electric powers of the L-60 and L-33 types have 3.1 mW/s and 5.8 mW/s with 47 Hz and 148 Hz of resonance frequency and then, the load resistivities were $100k\Omega$ and $10k\Omega$, respectively.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2002.10a
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• pp.216-219
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• 2002

Conventional piezoelectric lead-zirconate-titanate (PZT) senor has high sensitivity, but it is very brittle. Recently polymer films such as polyvinylidene fluoride (PVDF) have been used use as a sensor. The advantages of PVDF are the flexibility and mechanical toughness. Simple process and possible several shapes are also additional advantages. PVDF sensor can be directly embedded and attached to a structure. In this study, PVDF sensor was embedded in single glass fiber/epoxy composites whereas PZT sensor with AE was attached to single fiber composites (SFC). Piezoelectric sensor responds to interfacial damage of SFC. The signals measured by PVDF sensor were compared to PZT sensor. PZT sensor detected the signals of fiber fracture, matrix crack, interfacial debonding and even sensor delamination, whereas PVDF sensor only detected fiber fracture signals so far, because PZT sensor is much more sensitive than current PVDF sensor. Wave voltage of fiber fracture measured by PVDF sensor was lower than that of PZT sensor, but the results of fast Fourier transform (FFT) analysis were same. Wave velocity using two PZT sensors was also studied to know the internal and surface damage effect of epoxy specimens.

• Smart Structures and Systems
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• v.17 no.2
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• pp.167-194
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• 2016

This paper investigates the Synergetics based Damage Detection Method (SDDM) for frame structures by using surface-bonded PZT (Lead Zirconate Titanate) patches. After analyzing the mechanism of pattern recognition from Synergetics, the operating framework with cooperation-competition-update process of SDDM was proposed. First, the dynamic identification equation of structural conditions was established and the adjoint vector (AV) set of original vector (OV) set was obtained by Generalized Inverse Matrix (GIM).Then, the order parameter equation and its evolution process were deduced through the strict mathematics ratiocination. Moreover, in order to complete online structural condition update feature, the iterative update algorithm was presented. Subsequently, the pathway in which SDDM was realized through the modified Synergetic Neural Network (SNN) was introduced and its assessment indices were confirmed. Finally, the experimental platform with a two-story frame structure was set up. The performances of the proposed methodology were tested for damage identifications by loosening various screw nuts group scenarios. The experiments were conducted in different damage degrees, the disturbance environment and the noisy environment, respectively. The results show the feasibility of SDDM using piezoceramic sensors and actuators, and demonstrate a strong ability of anti-disturbance and anti-noise in frame structure applications. This proposed approach can be extended to the similar structures for damage identification.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.178-181
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• 2003

In this work, we etched PZT films with various additive gases ($O_2$ and Ar) in $Cl_2/CF_4$ plasmas, while mixing ratio was fixed at 8/2. After the etching, the plasma induced damages are characterized in terms of hysteresis curves, leakage current, retention properties, and switching polarization. When the electrical properties of PZT etched in $O_2$ or Ar added $Cl_2/CF_4$ were compared, the value of remanent polarization in $O_2$ added $Cl_2/CF_4$ plasma is higher than that in Ar. added plasma. The maximum etch rate of the PZT thin films was 145 nm/min for 30% Ar added $Cl_2/CF_4$ gas having mixing ratio of 8/2 and 110 nm/min for 10% $O_2$ added to that same gas mixture. In order to recover the ferroelectic properties of the PZT thin films after etching, we annealed the etched PZT thin films at $550^{\circ}C$ in an $O_2$ atmosphere for 10 min. From the hysteresis curves, leakage current, retention property and switching polarization, the reduction of the etching damage and the recovery via the annealing was turned out to be more effective when $O_2$ was added to $Cl_2/CF_4$ than Ar. X-ray diffraction (XRD) showed that the structural damage was lower when $O_2$ was added to $Cl_2/CF_4$. And the improvement in the ferroelectric properties of the annealed samples was consistent with the increased intensities of the (100) and the (200) PZT peaks.