• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.61.5-61
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• 2001

The laser tracking system(LTS) presents the most promising technique for dynamic position measurement of industrial robots. This system combine the advantage of high accuracy with a contactless measurement technique. It is the measurement system of position in three dimensions using distance data obtained by laser interferometer and real time angle by tracking mirror assembly. After measuring the tracking error of the beam projected on the center of retroreflector in robot end effector, this system tracks the end effector continuously by adjusting tracking mirror angle to minimize this error ...

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.375-378
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• 1995

Although laser interferometer measurement system has the advantage of range and accuracy, the traditional error measurement methods for geometric errors(two straightness and three angular errors) of a machine tool measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric error of a moving body, an on-line measurement system for simultaneous detection of the five error components of a moving axis is required. An on-line measurement system with 5 degrees of freedom was developed for geometric error detection. Performance verification of the system was performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a side of machine tool.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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• pp.125-129
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• 2006

The analysis of the depth measurement system with multi-sensors (laser, camera, mirror) has been done and the parameter calibration technique has been proposed. In the proposed depth measurement system, the laser beam is reflected to the object by the rotating mirror and again the position of the laser beam is observed through the same mirror by the camera. The depth of the object pointed by the laser beam is computed depending on the pixel position on the CCD. There involved several number of internal and external parameters such as inter-pixel distance, focal length, position and orientation of the system components in the depth measurement error. In this paper, it is shown through the error sensitivity analysis of the parameters that the most important parameters in the sense of error sources are the angle of the laser beam and the inter pixel distance.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 춘계학술대회 논문집
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• pp.265-271
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• 2003

This study is for the stable optical source in order to get the precision measurement, which contributes to help the laser frequency and the output to be settled. The laser optical frequency is changed by the length of resonance cavity. The length variation of the laser resonance amplitude is affected by the thermal expansion of that system. So, we try not only to adjust the temperature of the laser tube using the heater for fine length of resonance cavity, but also to maintain the fixed temperature of the resonance cavity for outputting the safe laser optical frequency. Therefore, we must take materials with the thermal expansion of the supporting system, which is closer to it of the laser resonance cavity. Using the materials, we can promote to stabilize the temperature of it. In advance, we also plan to get the settlement of the laser frequency and the output in the long km, optimizing and stabilizing the system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.145-149
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• 1997

A laser mesurement system, a modified Michelson interferometer,which can accurately measure high speed length and position of servomechanisms by detecting a phase shift in the measurement beam using an optical interference was developed. A frequency stabilized laser source and a 20 fold frequency interpolation and digitizing circuit were applied to the system. The refractive index of the ambient air was calibrated through the Edlen's formula. The system achieved a resolution of .lambda./40,16nm, a maximum allowable measurement speed of 600 mm/sec, and a length measurement range of 1500mm. Performance of the system was evaluated on the machining center in short and long length measurements

• 한국정밀공학회지
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• 제14권10호
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• pp.151-156
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• 1997

A laser measurement system, a modified Michelson interferometer, which can accurately measure high speed length and displacement of servomechanisms by detecting a phase shift in the measurement beam using an optical interference was developed. A frequency stabilized laser source and a 20 fold frequency interpolation and digitizing circuit were applied to the system. The refra- ctive index of the ambient air was calibrated through the Edlens formula. The system achieved a resolution of /40, 16nm, a maximum allow-able measurement speed of 600nm/sec, and a length measure- ment range of 1500 mm. Performance of the system was evaluated on the machining center in short and long length measurements.

• 한국기계가공학회지
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• 제12권5호
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• pp.141-148
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• 2013

There are several problems in the conventional 2-D image processing and 3-D measurement systems. In the case of the 2-D image processing system, it is not possible to detect elevation data. In a 3-D measurement system, it requires a skillful operator and a lot of time for measuring data. Also, there exist data errors depending on operators. The limitation of detecting elevation data in the 2-D image processing system can be solved by laser diodes. In this study an algorithm that measures the accurate data in a subject face to be detected by combining laser diodes and a commercial CCD camera is developed. In the development process, a planar equation is developed using laser diodes and the equation is used to obtain a normal vector. Based on the results, an algorithm that transforms commercial CCD camera coordinates to 3-D coordinates is proposed. The completed measurement method will be applied to replace a manual measurement system for vehicle bodies and parts by an automated system.

• 한국정밀공학회지
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• 제12권10호
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• pp.69-77
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• 1995

This laser measurement system has been developed using He-Ne laser and photodiode. The laser beam intensity transmitted on a photodiode was disturbed by eccentrically rotating disk cam with various speeds. The photodiode and an amplifier were used to change the detected beam intensity into voltage. The digitized data through the developed system were recorded on a micro-computer by using a signal analysis program. Its reliability was ascertained by using FFT analyzer. The vibration of rotating disk cam can be analyzed by measureing the intensity change of laser beam which the results by FFT analyzer were similar to. The amplifier was devised to be able to modulate the fluctuations of laser beam. The voltage could be linearly recorded with the change of the laser beam intensity.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.