Design of Precision Position Measuring System using Laser Interferometry

광간섭법을 이용한 정밀 위치측정 시스템 설계

A laser mesurement system, a modified Michelson interferometer,which can accurately measure high speed length and position of servomechanisms by detecting a phase shift in the measurement beam using an optical interference was developed. A frequency stabilized laser source and a 20 fold frequency interpolation and digitizing circuit were applied to the system. The refractive index of the ambient air was calibrated through the Edlen's formula. The system achieved a resolution of .lambda./40,16nm, a maximum allowable measurement speed of 600 mm/sec, and a length measurement range of 1500mm. Performance of the system was evaluated on the machining center in short and long length measurements