• Journal of the Microelectronics and Packaging Society
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• v.14 no.3
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• pp.29-36
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• 2007

The main objectives of this study are to investigate the micro-scale energy transfer mechanism for silicon wafer and to find an efficient way for fabrication of silicon wafer through-hole by using the femtosecond pulse laser ablation. In addition, the electron-phonon interactions during laser irradiation are discussed and the carrier number density and temperatures are estimated. In particular, the present study observes the shapes of silicon wafer through-hole with $100\;{\mu}m$ diameter and it also measures the heat-affected area and the ablation depths fur different laser fluences by using the optic microscope and the three-dimensional profile measurement technique. First, from numerical investigation, it is found that the nonequilibrium state exists between electrons and phonons during laser irradiation. From experimental results, it should be noted that the heat-affected area increases with laser fluence, and the optimal conditions for through-hole formation with minimum heat affected zone are finally obtained.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.29 no.9 s.240
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• pp.1022-1031
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• 2005

Temporal behavior of the laser induced incandescence (LII) signal is often used for soot particle sizing, which is possible because the cooling behavior of a laser heated particle is dependent on the particle size. In present study, LII signals of soot particles are modeled using two non-linear coupled differential equations deduced from the energy- and mass-balance of the process. The objective of this study is to obtain an appropriate calibration curve for determining primary particle size by comparing the gated signal ratio and double-exponential curve fitting methods. Not only the effects of laser fluence and gas temperature on the cooling behavior but also heat transfer mechanisms of heated soot particle have been investigated. The second-order exponential curve fitting showed better agreements with the LII signals than the gated signal ratio method which was based on the lust-order exponential curve fit. And the temporal decay rate of the LII signal and primary particle size showed nearly linear relationship, which was little dependent on the laser fluence. And it also could be reconfirmed that vaporization was dominant process of heat loss during first loons after laser pulse, then heat conduction played most important role while thermal radiation had little influence all the time.

• Bulletin of the Korean Chemical Society
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• v.10 no.1
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• pp.96-101
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• 1989

The infrared multiphoton decomposition of trichloroethylene-H(TCE-H) and trichloroehtylene-D(TCE-D) was studied by using the high power $CO_2$ laser. The pressure dependence of TCE-H decomposition showed that the HCl elimination channel to form ClC ≡ CCl was the major step at high pressures, while the HC ≡ CCl formation step became important at low pressures. $Cl_2C$ = CHCl ${\rightarrow}$ (high pressure) ClC ${\equiv}$ CCl + HCl ${\rightarrow}$ (low pressure) HC ${\equiv}$ CCl + 2Cl${\cdot}$($Cl_2$) The IRMPD of TCE-H and TCE-D mixtures with 10P(20) laser line showed that optimum conditions of large isotope selectivity were the low system pressures and high laser powers. The experimentally observed dependence of the branching ratios on the pressure and laser fluence, and the isotope selectivity coefficients were quantitatively explained by using the modified energy grained master equations (EGME) model.

• Journal of Advanced Marine Engineering and Technology
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• v.20 no.5
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• pp.93-102
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• 1996

Laser-induced plume and laser-target interaction during pulsed laser deposition are demonstrated for a lead zirconate titanate (PZT). A KrF excimer laser (wavelength 248nm) was used and the laser was pulsed at 20Hz, with nominal pulse width of 20ns. The laser fluence was~$16J/cm^2,$ with 100mJ per pulse. The laser-induced plasma plume for nanosecond laser irradiation on PZT target has been investigated by optical emission spectra using an optical multichannel analyzer(OMA) and by direct observation of the plume using an ICCD high speed photography. OMA analysis showed two distinct ionic species with different expansion velocities of fast or slow according to their ionization states. The ion velocity of the front surface of the developing plume was about $10^7$cm/sec and corresponding kinetic energy was about 100eV. ICCD photograph showed another kind of even slower moving particles ejected from the target. These particles considered expelled molten parts of the target. SEM morphologies of the laser irradiated targets showed drastic melting and material removal by the laser pulse, and also showed the evidence of the molten particle ejection. The physics of the plasma(plume) formation and particle ejection has been discussed.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.1
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• pp.41-47
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• 2012

The LDS(Laser Direct Structuring) is one of the new direct writing methods to fabricate conductive patterns by energy beam. It uses thermoplastic polymers with an additive compound that serves as plating seed after the activation by laser. The advantages of LDS include the miniaturization of electrical components, design flexibility, and a reduced number of production steps. The purpose of this study is to investigate the fundamental mechanism for LDS and the characteristics of conductive patterns by laser parameters. These results were studied by SEM, EDX, and XPS analysis. We have used a 20W pulse-modulated fiber laser and copper electroless plating to fabricate conductive patterns on polymer. The result showed that electroless copper plating seed caused the laser cracking of additive compound. In particular, the additive compound contained in copper metal oxides atoms will be changed to copper metal elements. Also, the characteristics of conductive patterns were dependent on laser parameter, especially laser fluence.

• Journal of the Korean Society of Combustion
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• v.1 no.1
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• pp.75-82
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• 1996

Laser induced incandescence, LII, recently developed technique for measuring soot concentration in flames, can overcome most of limitations of conventional laser extinction measurement. In this study, experiments were performed to investigate the effect of laser intensity, detection wavelength, and also laser beam quality on both LII signal at a particular position and peak-to-centerline LII signal ratio. The results of LII signal with increasing laser intensity shows its near-independence of laser intensity once threshold level of laser intensity has been reached. However, this near-independence depends on laser beam quality and the incident optical setup. The peak-to-centerline LII signal ratio slowly but continuously increases with laser power. This fact is due to the dependence of LII signal on particle mean diameter. LII signal is attenuated during it passes through the flame containing soot particles. The attenuation rate is inversely proportional to detection wavelength. In this study, LII signal at 680 nm band is 10% greater than the signal at 400 nm band.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.886-888
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• 1998

By irradiating photoresist on Si or glass with $Ar^+$ (${\lambda}$=514 nm, CW) and Nd:YAG (${\lambda}$=266 and 532nm, pulse) laser beam, the photoresist was etched masklessly in air. Using a fourth harmonic Nd:YAG laser beam, the etching threshold of energy fluence was $25\;J/cm^2$ and the damage of substrate was appeared over $40\;J/cm^2$.

• Laser Solutions
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• v.18 no.1
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• pp.12-17
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• 2015

This work performed numerical analysis of electromagnetic field and thermal phenomena occurring in femtosecond laser irradiation of silver nanowires. The local electric field enhancement was computed to calculate the optical energy dissipation as a Joule heating source and the thermal transport was analysed based on the two-temperature model (TTM). Electron temperature increased up to 1000K after 50fs and its spatial distribution became homogeneous after 80fs at the fluence of 100mJ/cm2. The result of this work is expected to contribute to revealing the photothermal effects on silver nanowires induced by femtosecond laser irradiation. Although the highest increase of lattice temperature was substantially below the melting point of silver, the experimental results showed resolidification and fragmentation of the silver nanowire into nanoparticles, which cannot be explained by the photothermal mechanism. Further studies are thus needed to clarify the physical mechanisms.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.80-80
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• 1999

플라즈마 디스플레이 패널(PDP)의 공정을 간단히 하기 위하여 포토레지스트, ITO, 격벽재료를 Ar+ laser(λ-514 nm, CW)와 Nd:YAG laser(λ=532, 266nm, pulse)로 직접 패터닝 하였다. 레이저에 의한 포토레지스트의 패턴결과, 아르곤 이온 레이저의 포토레지스트 가공의 반응 메카니즘은 레이저 빔의 열에 의한 시료 표면의 국부적인 온도상승에 의한 용융작용이며, 그 결과 식각 후 형성된 패턴의 단면 모양도 레이저빔의 profile과 같은 가우시안 형태를 나타낸다. Nd:YAG 레이저의 4고조파(532nm)를 이용한 경우 200$\mu\textrm{m}$/sce의 주사속도에서 포토레지스트를 패턴하기 위한 임계에너지(threshold energy fluence) 값은 25J/cm2이며, 약 40J/cm2의 에너지 밀도에서 하부기판의 손상이 발생하기 시작하였다. 글미 1은 Nd:YAG 레이저 4고조파를 이용하여 포토레지스트를 식각한 경우 SEM 표면사진(위)과 단차특정기에 의한 단면형상(아래)이다. ITO 막의 레이저에 의한 직접 패턴 결과, ITO 막은 레이저 펄스에 의한 급속 가열 및 증발에 의한 메커니즘으로 식각이 이루어지며, 레이저 파장에 따른 광흡수 정도의 차이에 의해 2고조파 (532nm)에서 ITO 막의 가공 품질이 4고조파(266nm)에 비해 우수하며 패턴의 폭도 출력에 따라 제어가 용이하였다. 그림 2는 Nd:YAG 레이저 2고조파를 이용하여 ITO를 식각한 경우 SEM표면 사진(위)과 단차측정기에 의한 단면형상(아래)이다. 격벽 재료의 레이저에 의한 직접 패턴 결과, Ar+ 레이저(514nm)는 출력 밀도 32NW/cm2에서 격벽을 유리 기판의 경계면까지 식각하였다. Nd:YAG 레이저(532nm)는 laser fluence가 6.5mJ/cm2에서 격벽을 식각하기 시작하였으며, 19.5J/cm2에서 유리기판의 rudraus(격벽 두께 130$\mu\textrm{m}$)까지 식각하였다.

• Journal of the Optical Society of Korea
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• v.13 no.1
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• pp.15-21
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• 2009

High-order harmonic generation from a solid surface affected by the contrast of a laser pulse was studied using an oscillating mirror model. High-order harmonics generated from solid surfaces have unusual properties such as spectral redshift, and an intensity difference between even- and odd-order harmonics which is not reported for high-order harmonics generated by a gas medium. We confirmed that high-order harmonics from solid surfaces have selectivity of polarization as well as cut-off extension and the enhancement of conversion efficiency proportional to laser intensity. And the principle of operation and the characteristics of a plasma mirror system developed for achieving high contrast laser pulses to pursue the experimental realization of high-harmonic generation from solid surfaces are reported. Energy fluence on the plasma mirrors is tunable between $10\;J/cm^2$ and $1000\;J/cm^2$ and around 1000 shots are available before the plasma mirrors require replacement.