• Title/Summary/Keyword: laser ablation

Search Result 531, Processing Time 0.027 seconds

Effect of Nano Buffer Layer on Property and Growth of Carbon Thin Film (탄소계 박막의 성장과 특성에 대한 나노 Buffer Layer의 영향)

  • ;Takashi lkuno;Kenjirou Oura
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.16 no.1
    • /
    • pp.53-59
    • /
    • 2003
  • Using Platinum-silicide (PtSi) formed between silicon substrate and carbon film, we have improved the field emission of electrons from carbon films. Pt films were deposited on n-Si(100) substrates at room temperature by DC sputter technique. After deposition, these PtSi thin films were annealed at 400 ~ $600^{\circ}C$ in a vacuum chamber, and the carbon films were deposited on those Pt/Si substrates by laser ablation at room temperature. The field emission property of C/Pt/Si system is found to be better than that of C/Si system and it is showed that property was improved with increasing annealing temperature. The reasons why the field emission from carbon film was improved can be considered as follows, (1)the resistance of carbon films was decreased due to graphitization, (2)electric field concentration effectively occurred because the surface morphology of carbon film deposited on Pt/si substrates with rough surface, (3)it is showed that annealing induced reaction between Pt film and Si substrate, as a consequence that the interfacial resistance between Pt film and Si substrate was decreased.

Micro Metal Powder Injection Molding in the W-Cu System (W-Cu의 마이크로 금속분말사출성형)

  • 김순욱;양주환;박순섭;김영도;문인형
    • Journal of Powder Materials
    • /
    • v.9 no.4
    • /
    • pp.267-272
    • /
    • 2002
  • The production of micro components is one of the leading technologies in the fields of information and communiation, medical and biotechnology, and micro sensor and micro actuator system. Microfabrication (micromachining) techniques such as X-ray lithography, electroforming, micromolding and excimer laser ablation are used for the production of micro components out of silicon, polymer and a limited number of pure metals or binary alloys. However, since the first development of microfabrication technologies there have been demands for the cost-effective replication in large scale series as well as the extended range of available material. One such promising process is micro powder injection molding (PIM), which inherits the advantages of the conventional PIM technology, such as low production cost, shape complexity, applicability to many materials, applicability to many materials, and good tolerance. This paper reports on a fundamental investigation of the application of W-Cu powder to micro metal injection molding (MIM), especially in view of achieving a good filling and a safe removal of a micro mold conducted in the experiment. It is absolutely legitimate and meaningful, at the present state of the technique, to continue developing the micro MIM towards production processes for micro components.

New mechanism of thin film growth by charged clusters

  • Hwang, Nong-Moon;Kim, Doh-Yeon
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.9 no.3
    • /
    • pp.289-294
    • /
    • 1999
  • The charged clusters or particles, which contain hundreds to thousands of atoms or even more, are suggested to from in the gas phase in the thin film processes such as CVD, thermal evaporation, laser ablation, and flame deposition. All of these processes are also phase synthesis of the nanoparticels. Ion-induced or photo-induced nucleation is the main mechanism for the formation of these nanoclusters or nanoparticles in the gas phase. Charge clusters can make a dense film because of its self-organizing characteristics while neutral ones make a porous skeletal structure because of its Brownian coagulation. The charged cluster model can successfully explain the unusual phenomenon of simultaneous deposition and etching taking place in diamond and silicon CVD processes. It also provides a new interpretation on the selective deposition on a conducting material in the CVD process. The epitaxial sticking of the charged clusters on the growing surface is getting difficult as the cluster size increases, resulting in the nanostructure such as cauliflower or granular structures.

  • PDF

Magnetic Properties of Multilayered and Mixed $Pr_{0.65}$Ca_{0.35}MnO_3/La_{0.7}Sr_{0.3}MnO_3$ Films

  • V. G. Prokhorov;Lee, Y. P.;V. S. Flis;Park, J. S.
    • Journal of the Korean Vacuum Society
    • /
    • v.12 no.S1
    • /
    • pp.67-69
    • /
    • 2003
  • The magnetic properties of single- and poly-crystalline $La_{0.7}Sr_{0.3}MnO_3/Pr_{0.65}Ca_{0.35}MnO_3$ multilayered (ML) films, and composite (CP) $(La_{0.7}Sr_{0.3})_{0.5}(Pr_{0.65}Ca_{0.35}_{0.5}MnO_3$ films, prepared by laser ablation, have been investigated in a wide temperature range. It was shown that the transformation from an incoherent to a coherent interface in the ML films leads to an enhancement of the ferromagnetic coupling between layers and to a single-phase magnetic transition. The amorphous CP films demonstrate a paramagnetic behavior of the magnetization with a sharp peak at $T_{G}\approx$45 K, which was interpreted as the formation of Griffiths phase. A short-term annealing at $750^{\circ}C$ induced the complete crystallization of film, and a recovery of the ferromagnetic and the metal-insulator transitions.

Dielectric Characteristics of $Al_2O_3$ Thin Films Deposited by Reactive Sputtering

  • Park, Jae-Hoon;Park, Joo-Dong;Oh, Tae-Sung
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2000.02a
    • /
    • pp.100-100
    • /
    • 2000
  • Aluminium oxide (Al2O3) films have been investigated for many applications such as insulating materials, hard coatings, and diffusion barriers due to their attractive electrical and mechanical properties. In recent years, application of Al2O3 films for dielectric materials in integrated circuits as gates and capacitors has attracted much attention. Various deposition techniques such as sol-gel, metalorganic decomposition (MOD), sputtering, evaporation, metalorganic chemical vapor deposition (MOCVD), and pulsed laser ablation have been used to fabricate Al2O3 thin films. Among these techniques, reactive sputtering has been widely used due to its high deposition rate and easy control of film composition. It has been also reported that the sputtered Al2O3 films exhibit superior chemical stability and mechanical strength compared to the films fabricated by other processes. In this study, Al2O3 thin films were deposited on Pt/Ti/SiO/Si2 and Si substrates by DC reactive sputtering at room temperature with variation of the Ar/O2 ratio in sputtering ambient. Crystalline phase of the reactively sputtered films was characterized using X-ray diffractometry and the surface morphology of the films was observed with Scanning election microscopy. Effects of Th Ar/O2 ratio characteristics of Al2O3 films were investigated with emphasis on the thickness dependence of the dielectric properties. Correlation between the dielectric properties and the microstructure was also studied

  • PDF

A Study on the Improvement of Optical Characteristics for Cellular Phone LGP Considering Replication ratio (전사성을 고려한 휴대폰용 도광판의 광특성 향상에 관한 연구)

  • Do, Y.S.;Kim, J.S.;Hwang, C.J.;Yoon, K.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2008.05a
    • /
    • pp.269-272
    • /
    • 2008
  • LGP is a key component of LCD back light unit because it determines the brightness and sharpness of display image. Usually, it has optical patterns fabricated on the bottom surface. In the present paper the LiGA-reflow method was applied to fabricate the LGP mold. Furthermore, the optical simulation considering the replication ratio of pattern height was applied to the pattern design. The optical simulation through systematic correction scheme helped find the optimum distribution of pattern density. Finally, the stamper fabricated by this method was installed in the mold and LGP was produced by injection molding. As a result of luminance measurement for the final product, the average luminance and luminance uniformity was measured 3,180 nit and 84%, respectively. Consequently, the mold fabrication method using the LiGA-reflow and optical simulation(CAE) can save the expense and time compared with the existing fabrication methods(laser ablation and chemical etching).

  • PDF

Multi-scale modelling of the blood chamber of a left ventricular assist device

  • Kopernik, Magdalena;Milenin, Andrzej
    • Advances in biomechanics and applications
    • /
    • v.1 no.1
    • /
    • pp.23-40
    • /
    • 2014
  • This paper examines the blood chamber of a left ventricular assist device (LVAD) under static loading conditions and standard operating temperatures. The LVAD's walls are made of a temperature-sensitive polymer (ChronoFlex C 55D) and are covered with a titanium nitride (TiN) nano-coating (deposited by laser ablation) to improve their haemocompatibility. A loss of cohesion may be observed near the coating-substrate boundary. Therefore, a micro-scale stress-strain analysis of the multilayered blood chamber was conducted with FE (finite element) code. The multi-scale model included a macro-model of the LVAD's blood chamber and a micro-model of the TiN coating. The theories of non-linear elasticity and elasto-plasticity were applied. The formulated problems were solved with a finite element method. The micro-scale problem was solved for a representative volume element (RVE). This micro-model accounted for the residual stress, a material model of the TiN coating, the stress results under loading pressures, the thickness of the TiN coating and the wave parameters of the TiN surface. The numerical results (displacements and strains) were experimentally validated using digital image correlation (DIC) during static blood pressure deformations. The maximum strain and stress were determined at static pressure steps in a macro-scale FE simulation. The strain and stress were also computed at the same loading conditions in a micro-scale FE simulation.

Hall Effect of High $T_{c}$ superconductor $Y_{1}Ba_{2}Cu_{3}O_{7-\delta}$ Thin Film (고온초전도체 $Y_{1}Ba_{2}Cu_{3}O_{7-\delta}$ 박막의 Hall 효과)

  • 허재호;류제천;김형국;김장환
    • Journal of the Korean Magnetics Society
    • /
    • v.4 no.1
    • /
    • pp.44-47
    • /
    • 1994
  • High $T_{c}$ superconducting $Y_{1}Ba_{2}Cu_{3}O_{7-\delta}$ thin film was grown up for c-axis orientation by epitaxial growth method on $LaAlO_{3}$ single crystal substrate. The crystal structures of this thin film were found to be c-axis orientation by X-ray diffraction patterns. Hall effect and resistivity measurements were made by van der Pauw method. Hall resistivity was calculated from the magnetoresistivity by considering thermomagnetic effect. The relation was $pH=p_{s}tan{\alpha}_{n}-QBT\frac{S_s}{K_s}$ The measured Hall resistivity and the calculated one are in good agreement each other.

  • PDF

Comparison of Clinical Results of Excimer Laser Correction of Myopia and Compound Myopic Astigmatism Using VISX 20/20B $VisionKey^{TM}$ (VISX 20/20B $VisionKey^{TM}$ 엑시머레이저의 version 4.01 software를 이용한 근시교정술 및 근시성난시교정술의 임상성적 비교)

  • Lee, Sang-Bumm;Bae, Sang-Bok
    • Journal of Yeungnam Medical Science
    • /
    • v.17 no.1
    • /
    • pp.55-65
    • /
    • 2000
  • Purpose: To compare the efficacy, predictability, stability and safety of excimer laser photorefracive keratectomy(PRK) for myopia and photoastigmatic refractive keratectomy(PARK) for compound myopic astigmatism. Methods: Two-hundred and three eyes(l18 eyes < -7D spherical equivalent, 85 eyes ${\geq}$ -7D spherical equivalent) received excimer laser correction for compound myopic astigmatism and 152 eyes(116 eyes < -7D, 36 eyes ${\geq}$ -7D) for simple myopia. A VISX 20/20B $VisionKey^{TM}$ excimer laser was used to perform either PARK or PRK. Visual acuity with and without correction, refraction, IOP, corneal haze, and topography were evaluated at 1, 3, 6, and 12 months postoperatively. All patients were followed up for more than 12 months. Results: Postoperative refraction were generally stable after 3 months without significant early overcorrection. At 12 months, 110(94.8%) eyes that underwent PRK and 104(88.1%) eyes that underwent PARK achieved UCVA of 20/30 or better in the group who had lower than -7D correction. For eyes treated with -7D or more, these figures were 31(86.1%) eyes after PRK and 57(67.1%) eyes after PARK. The incidences of within 1D of plano refraction at 1 year follow-up were 97.4% after PRK and 93.2% after PARK in the group who had lower than -7D correction. For eyes treated with -7D or more, these figures were 80.6% after PRK and 70.6% after PARK. Conclusions Myopia with or without astigmatism was successfully treated in most of the eyes using PRK or PARK with VISX 20/20B $VisionKey^{TM}$ excimer laser. The predictability and stability of the postoperative refraction during the first 12 months seem to be quite reliable. Further improvement of excimer laser system and software should increase the clinical outcomes and safety of refractive procedures.

  • PDF

Otolith microchemistry reveals the migration patterns of the flathead grey mullet Mugil cephalus (Pisces: Mugilidae) in Korean waters

  • Bae, Seung Eun;Kim, Jin-Koo
    • Journal of Ecology and Environment
    • /
    • v.44 no.3
    • /
    • pp.185-195
    • /
    • 2020
  • Background: The flathead grey mullet Mugil cephalus has the widest distribution among mugilid species. Recent studies based on mitochondrial DNA sequences showed that the species comprises at least 14 different groups, three of which occur in the northwest Pacific. We analyzed the otolith microchemistry of M. cephalus at several locations in Korea to improve understanding of migration pattern and population origin. Results: We collected 123 sagittal otoliths from seven locations and determined their concentrations of eight elements (7Li, 24Mg, 55Mn, 57Fe, 60Ni, 63Cu, 88Sr, and 138Ba) using laser ablation inductively coupled plasma mass spectrometry. Mean otolith elemental ratios differed significantly among the locations. The Sr:Ca, Fe:Ca, and Ba:Ca ratios were significantly higher than others, and useful chemical signatures for investigating the habitat use of M. cephalus populations. We identified five diverse and complicated migration patterns using the otolith data that we collected: estuarine resident (type I), freshwater migrant (type II), estuarine migrant (type III), seawater resident (type IV), and seawater migrant (type V). A canonical discriminant analysis plot revealed separation of two groups (type II in the Yellow Sea vs. other types in remaining locations). Two locations on Jeju Island, despite their close proximity, had fish with quite different migration patterns, corroborating previous molecular studies that distinguished two groups of fishes. Conclusion: We successfully showed that the migration patterns of the Korean mullet varied by location. Only fish from the western sector of Jeju had a unique migration pattern, which is likely confined population in this area. Among the eight otolith elements measured, the Sr:Ca ratio was found to be the best indicator of migration pattern and population origin.