• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.41.2-41.2
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Metal Oxide Semiconductor) based electronic devices become much faster speed and smaller size than ever before. However, very narrow interconnect line width causes some drawbacks. For example, deposition of conformal and thin barrier is not easy moreover metallization process needs deposition of diffusion barrier and glue layer. Therefore, there is not enough space for copper filling process. In order to overcome these negative effects, simple process of copper metallization is required. In this research, Cu-V thin alloy film was formed by using RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane $SiO_2$/Si bi-layer substrate with smooth and uniform surface. Cu-V film thickness was about 50 nm. Cu-V layer was deposited at RT, 100, 150, 200, and $250^{\circ}C$. XRD, AFM, Hall measurement system, and XPS were used to analyze Cu-V thin film. For the barrier formation, Cu-V film was annealed at 200, 300, 400, 500, and $600^{\circ}C$ (1 hour). As a result, V-based thin interlayer between Cu-V film and $SiO_2$ dielectric layer was formed by itself with annealing. Thin interlayer was confirmed by TEM (Transmission Electron Microscope) analysis. Barrier thermal stability was tested with I-V (for measuring leakage current) and XRD analysis after 300, 400, 500, 600, and $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However V-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Thus, thermal stability of vanadium-based thin interlayer as diffusion barrier is good for copper interconnection.

• 한국재료학회지
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• 제27권7호
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• pp.386-391
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• 2017

Using a customized diffusion bonder, we executed diffusion bonding for ring shaped white gold and red gold samples (inner, outer diameter, and thickness were 15.7, 18.7, and 3.0 mm, respectively) at a temperature of $780^{\circ}C$ and applied pressure of 2300 N in a vacuum of $5{\times}10^{-2}$ torr for 180 seconds. Optical microscopy, field emission scanning electron microscopy (FE-SEM), and energy-dispersive X-ray spectroscopy (EDS) were used to investigate the microstructure and compositional changes. The mechanical properties were confirmed by Vickers hardness and shear strength tests. Optical microscopy and FE-SEM confirmed the uniform bonding interface, which was without defects such as micro pores. EDS mapping analysis confirmed that each gold alloy was 14K with the intended composition; Ni and Cu was included as coloring metals in the white and red gold alloys, respectively. The effective diffusion coefficient was estimated based on EDS line scanning. Individual values of Ni and Cu were $5.0{\times}10^{-8}cm^2/s$ and $8.9{\times}10^{-8}cm^2/s$, respectively. These values were as large as those of the melting points due to the accelerated diffusion in this customized diffusion bonder. Vickers hardness results showed that the hardness values of white gold and red gold were 127.83 and 103.04, respectively, due to solid solution strengthening. In addition, the value at the interface indicated no formation of intermetallic compound around the bonding interface. From the shear strength test, the sample was found not to be destroyed at up to 100,000 gf due to the high bonding strength. Therefore, these results confirm the successful diffusion bonding of 14K white-red golds with a diffusion bonder at a low temperature of $780^{\circ}C$ and a short processing time of 180 seconds.

• 대한전자공학회논문지SP
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• 제41권4호
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• pp.87-92
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• 2004

계조영상을 이진영상으로 변환하는 해프토닝 방법 중 오차확산법은 다른 방법에 비해 우수한 화질을 보이지반 웜 현상, 샤프닝 현상 등의 단점이 있다. 이런 단점을 보완하는 방법으로 Kite는 임계값 변조 방식에 샤프닝 조절 파라미터를 추가하는 방법을 제안하였다. 그러나 여전히 계조값의 변화가 큰 경계부근에서 뭉쳐짐 현상이 남아있다. 따라서 본 논문에서는 국부적으로 존재하는 경계부분의 에지성분의 크기에 따라 파라미터의 양을 조절하는 방법을 제안하였다. 제안방법을 컴퓨터 시뮬레이션으로 검사한 견과 해프톤 영상의 샤프닝이 감소하였으며, 특히 계조의 변화가 큰 경계부분에서 탁월한 화질 개선을 볼 수 있었다.

• Corrosion Science and Technology
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• 제2권1호
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• pp.53-57
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• 2003

The MarM247 based superalloy (8wt.%Cr- 9wt.%Co- 3wt.%Ta- 1.5wt.%Hf- 5.6%wt.Al- 9.5wt.%W- Bal. Ni) specimens were diffusion aluminized by for types of pack cementation methods, and their coating structure and their high temperature oxidation resistance were investigated. The coated specimens treated at 973K in high aluminum concentration pack had a coating layer containing large hafunium rich precipitates, which were originally included in substrate alloy. After the high temperature oxidation test in air containing 30 vol.% $H_2O$ at 1273K ~ 323K, the deep localized corrosion which reached to the substrate were observed along with these hafnium rich precipitates. On the other hand, the coated specimens treated at 1323K using low aluminum concentration pack showed the coating layer without the large hafunium rich precipitates, and after the high temperature oxidation test at 1273K for 1800 ksec, it did not show the deep localized corrosion. The nickel electroplating before the aluminizing forms thick hafnium free area, and its high temperature oxidation resistance were comparable to platinum modified aluminizing coatings at 1273K.

• 전기학회논문지
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• 제58권5호
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• pp.891-897
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• 2009

This paper presents a novel load management technique that can lower the peak demand caused by package airconditioner loads in large apartment complex. An intelligent hierarchical load management system composed of a Central Intelligent Management System(CIMS) and multiple Local Intelligent Management Systems(LIMS) is proposed to implement the proposed technique. Once the required amount of the power reduction is set, CIMS issues tokens, which can be used by each LIMS as a right to turn on the airconditioner. CIMS creates and maintains a queue for fair and proper allocation of the tokens among the LIMS requesting tokens. By adjusting the number tokens and queue management policies, desired power reduction can be achieved smoothly. The Markov Birth and Death process and the Balance Equations utilizing the Diffusion Model are employed for evaluation of queue performances during transient periods until the static balances among the states are achieved. The proposed technique is tested using a summer load data of a large apartment complex and give promising results demonstrating the usability in load management while minimizing the customer inconveniences.

• 설비공학논문집
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• 제14권9호
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• pp.699-705
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• 2002

The present study discusses the deviation from the pure dead-time model of passive scalars such as temperature and concentration in the Poiseulle flow Even in the case of no thermal diffusion, there exists a substantial amount of damping and large deviation of phase lag from that computed by the traditional dead-time model after only 10 diameter downstream. These are caused by the phase difference of temperature in the radial direction due to the nonuniform velocity distribution. In the presence of thermal diffusion, damping is more pronounced.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1609-1611
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• 1994

In ECR and helicon reactors for plasma processing, a high density plasma is generated in a source region which is connected to a diffusion region where the processing takes place. Large density and potential gradients can develop at the orifice of the source which drive ion currents into the diffusion region. The average ion velocity may become the order of the sound velocity. Measurements of the ion saturation current to a Langmuir probe are used as a standard method of determining the plasma density in laboratory discharges. However, the analysis becomes difficult in a steaming plasma. We have used the HAMLET plasma simulator to simulate the ion flow to a large langmuir probe in an ECR plasma. The collection surface was aligned with the Held upstream, normal to the field, and downstream. ion trajectories through the electric and magnetic fields were calculated including ion-neutral collisions. We examines the ratio of ion current density to plasma density as a function of magnetic field and pressure.

• 대한수학회논문집
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• 제21권3호
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• pp.543-558
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• 2006

We consider a type of large deviation Principle(LDP) using Freidlin-Wentzell exponential estimates for the solutions to perturbed stochastic differential equations(SDEs) driven by Martingale measure(Gaussian noise). We are using exponential tail estimates and exit probability of a diffusion process. Referring to Freidlin-Wentzell inequality, we want to show another approach to get LDP for the solutions to SDEs.

• 한국응용과학기술학회지
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• 제20권4호
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• pp.332-340
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• 2003

Crosslinked poly(methyl methacrylate) particles from 2.4 to $8.1{\mu}m$ in diameter were prepared by homogenized suspension polymerization. The effect of polymerization parameters such as homogenizing speed, homogenizing time and stabilizer concentration on the particle size were examined. Optical diffusion films were prepared with the crosslinked poly(methyl methacrylate) particles. The effect of film thickness, particle size, and particle size distribution on transmittance and haze of optical diffusion film was examined. Transmittance of optical diffusion film increased with increasing particle size and decreasing film thickness. Haze increased with increasing film thickness and decreasing particle size. We also found the existence of an optimum ratio for optical performance when the mixture of small particle and large particle was used.

• 한국항만학회지
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• 제13권2호
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• pp.419-426
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• 1999

It is essential for port planning, coastal zone management and environmental impact study to analyze the variation of current and water quality due to the development of water area and discharged water from estuary barrage and basin etc. Mokpo sea area downstreams from a long river and two large basins, the Yongsan river and Yongam-Kumho basins discharging much of water through water gates for the purpose of flood control and prohibition of salt intrusion to the inland fresh water area. In this study, the numerical calculations were carried out for the analysis of diffusion characteristics due to discharging operation, adapting the results of tidal current simulation ADI methord is applied to the governing equation for the movement of sea water and diffusion and 6-point method to the advection terms of diffusion equation. As the results of this study, it is known that the discharging operation causes increasing and/or decreasing of current velocity and enlarging and/or depressing of pollutant diffusion limits depending on the distance from the discharging gates and the mode of discharging operation. To utilize these result, the linked gate operation and the method increasing exchange of sea water must be considered.