• Title/Summary/Keyword: isolation performance

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3D feature profile simulation for nanoscale semiconductor plasma processing

  • Im, Yeon Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.61.1-61.1
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    • 2015
  • Nanoscale semiconductor plasma processing has become one of the most challenging issues due to the limits of physicochemical fabrication routes with its inherent complexity. The mission of future and emerging plasma processing for development of next generation semiconductor processing is to achieve the ideal nanostructures without abnormal profiles and damages, such as 3D NAND cell array with ultra-high aspect ratio, cylinder capacitors, shallow trench isolation, and 3D logic devices. In spite of significant contributions of research frontiers, these processes are still unveiled due to their inherent complexity of physicochemical behaviors, and gaps in academic research prevent their predictable simulation. To overcome these issues, a Korean plasma consortium began in 2009 with the principal aim to develop a realistic and ultrafast 3D topography simulator of semiconductor plasma processing coupled with zero-D bulk plasma models. In this work, aspects of this computational tool are introduced. The simulator was composed of a multiple 3D level-set based moving algorithm, zero-D bulk plasma module including pulsed plasma processing, a 3D ballistic transport module, and a surface reaction module. The main rate coefficients in bulk and surface reaction models were extracted by molecular simulations or fitting experimental data from several diagnostic tools in an inductively coupled fluorocarbon plasma system. Furthermore, it is well known that realistic ballistic transport is a simulation bottleneck due to the brute-force computation required. In this work, effective parallel computing using graphics processing units was applied to improve the computational performance drastically, so that computer-aided design of these processes is possible due to drastically reduced computational time. Finally, it is demonstrated that 3D feature profile simulations coupled with bulk plasma models can lead to better understanding of abnormal behaviors, such as necking, bowing, etch stops and twisting during high aspect ratio contact hole etch.

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Design and Implementation of the Hi인 Power Ka-band Waveguide Diplexer with an E-plane T-junction (고전력 전송이 가능한 Ka 대역 E-평면 T형 분기 도파관 다이플렉서의 설계 및 구현)

  • Yun So-Hyeun;Uhm Man-Seok;Yom In-Bok
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.16 no.7 s.98
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    • pp.732-739
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    • 2005
  • In this paper, the design and implementation of the Ka-band(20/30 GHz) waveguide diplexer with an E-plane T-junction are described. The waveguide diplexer consists of a transmit filter and a receive filter combined to the antenna port via an E-plane T-junction. The reason why the E-plane T-junction structure was selected is to reduce PIM(Passive Intermodulation) level as the split-plane is located in the low electrical current zone. The optimization was performed using the equivalent circuit so that the computation time might reduce. The structure of the diplexer was designed to handle high power and the multipaction analysis was performed. The multipaction margin was greater than 12 dB and satisfied with ESA/ESTEC recommendation. The manufactured diplexer shows minimum return loss of 22 dB, maximum insertion loss of 0.20 dB and maximum isolation of -40 dB for both transmitted receive bands. Those mean the analysis results of the waveguide diplexer were well agreed with the electrical performance test.

A Study of Cutting Methods by Comparing the Contents of Cinnamic acid and Cinnamaldehyde in Different Parts of Cinnamomi Ramulus (Cinnamic acid, Cinnamaldehyde의 부위별 정량을 통한 계지(桂枝)의 음편(飮片) 규격 연구)

  • Kim, Young-Sik;Lee, Guem-San;Kim, Jung-Hoon;Choi, Go-Ya;Jeong, Seung-Il;Cho, Su-In;Ju, Young-Sung;Kim, Hong-Jun
    • The Korea Journal of Herbology
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    • v.26 no.2
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    • pp.11-15
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    • 2011
  • Objectives : In the present study, the contents of cinnamic acid and cinnamaldehyde in three different parts of Cinnamomi Ramulus (CR) (the whole body, the bark part, and the wood part) was evaluated using UPLC (ultra performance liquid chromatography) in order to investigate a suitable cutting method. Methods : Analysis was performed on SMART LC with UV detector. Reference compounds were separated on Inertsil ODS-4 column ($2.1mm{\times}50mm$, $3{\mu}m$, GL Science, Japan) using isolation elution with water and acetonitrile each containing acetic acid at a flow rate of $500{\mu}L/min$. Additionally, samples of CR were purchased from pharmacy of medicinal herb. Results : The correlation coefficients of the cinnamic acid and cinnamaldehyde levels showed good linearity ($r^2{\geq}0.9999$) over the linear ranges. Furthermore, the bark part exhibited higher concentration levels of reference compounds than the wood part in all samples. In addition the bark exfoliation rates in oblique and perpendicular-long cut samples of CR were lower than the perpendicular-short cut samples. Conclusions : These results suggested that the optimal cutting method would be able to reduce the bark exfoliation. Therefore, the oblique or perpendicular-long cutting method is considered to be a better cutting type than the perpendicular-short cutting method.

Strengthening Families: The Re-structuring of Family Services in Hong Kong

  • Leung, Joe C.B.
    • 한국사회복지학회:학술대회논문집
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    • 2002.10a
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    • pp.3-19
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    • 2002
  • The problems and needs of families in Hong Kong are becoming more complex. Traditional family structures and functions are rapidly eroding. Moreover, family problems are further exacerbated by a growing number of socio-economic issues including rising divorce rates and extra-marital affairs. continuous family reunion migration from Mainland China, emotional and financial cost of caring for the older people and the changing economy which has pushed more families into hardship. In effect, more and more families are becoming vulnerable to risk. Traditional family services in Hong Kong are varied in mode, operation and provision, often overlapping in service boundaries with other family-oriented programs. In many instances, family service centers are stretched far beyond their capacity. As a consequence, they become too reactive, remedial and casework dominated. The University of Hong Kong Consultant Team recommended that family service programs have to protect vulnerable families and strengthen family capacities to promote maximum independence. The direction of family services is summarized as: strengthening families; child-centered, family-focused and community-based. New integrative family service centers aim at attaining the principles of promoting accessibility to users with minimum physical, psychological and administrative barriers; early identification of needs and intervention before the further deterioration of problems; integration of services cutting across program boundaries, and partnership between service providers to achieve efficient and effective use of scarce resources. Under the new model, multi-skilled teams can respond more proactively to a wide range of social needs, rather than addressing needs in isolation. To demonstrate the effectiveness of the new model, the consultant team has been commissioned by the government to evaluate the performance of these two-year pilot projects. More importantly, a coherent and family-friendly social policy should be formulated to strengthen family capacity against family-related problems.

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Design and Implementation of True Random Noise Radar System

  • Min, Woo-Ki;Kim, Cheol-Hoo;Lukin, Constantin A.;Kim, Jeong-Phill
    • Journal of electromagnetic engineering and science
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    • v.9 no.3
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    • pp.130-140
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    • 2009
  • The design theory and experimental results of a true random noise radar system are presented in this paper. Target range information can be extracted precisely by correlation processing between the delayed reference and the signal received from a target, and the velocity information by the Doppler processing with successive correlation data. A K-band noise radar system was designed using random FM noise signal, and the characteristics of the fabricated system were examined with laboratory and outdoor experiments. A C-band random FM noise signal was generated by applying a low-frequency white Gaussian noise source to VCO(Voltage Controlled Oscillator), and a K-band Tx noise signal with 100 MHz bandwidth was obtained by using a following frequency multiplier. Two modified wave-guide horn arrays were designed and fabricated, and used for the Tx and Rx antennas. The required amount of Tx/Rx isolation was attained by using a coupling cancellation circuit as well as keeping them apart with predetermined spacing. A double down-conversion scheme was used in the Rx and reference channels, respectively, for easy post processing such as correlation and Doppler processing. The implemented noise radar performance was examined with a moving bicycle and a very high-speed target with a velocity of 150 m/s. The results extracted by the Matlab simulation using the logging data were found to be in a reasonable agreement with the expected results.

Design and Implementation of a Internal Mobile Antenna for TDMB and KPCS (TDMB와 KPCS 대역을 지원하는 내장형 휴대폰 안테나의 설계 및 구현)

  • Park, Jun-Han;Lee, Chi-Woo;Yang, Myo-Geun;Seong, Won-Mo
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.20 no.2
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    • pp.161-166
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    • 2009
  • In this paper, we propose the internal mobile antenna for TDMB and KPCS. The proposed antenna is made of different dielectric substrate and it has small size ($45{\times}8{\times}8\;mm$, about 2.8 cc) for mobile device. TDMB antenna is designed spiral structure that makes maximum current for each cell and KPCS antenna is PIFA that is usually used for internal antenna. In order to compensate length of resonance TDMB antenna has a large inductor above 100 nH. In this case, the inductor isolate KPCS signal at TDMB by cutting high frequency. Also the antenna has good isolation because TDMB radiator is parasitic element in KPCS band. We simulated the antenna by using CST microwave studio and measured performance of the antenna in anechoic chamber Proposed antenna has $-6{\sim}-14\;dBi$ gain for TDMB and $-3.5{\sim}-5\;dBi$ gain for KPCS.

Development of Xenon Feed System for a Hall-Effect Thruster to Space-propulsion Applications (우주추진용 홀방식의 전기추력기를 위한 제논연료공급장치 개발)

  • Kim, Youn-Ho;Kang, Seong-Min;Jung, Yun-Hwang;Seon, Jong-Ho;Wee, Jung-Hyun;Yoon, Ho-Sung;Choe, Won-Ho;Lee, Jong-Sub;Seo, Mi-Hui
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.39 no.1
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    • pp.84-89
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    • 2011
  • A Xenon Feed System (XFS) has been developed for hall-effect thruster to small satellite space-propulsion system applications. The XFS delivers low pressure gas to the Anode and Cathode of thruster head unit from a xenon storage tank. Accurate throttling of the propellant mass flow rate is independently required for each channel of the thruster head unit. The mass flow rate to each channel is controlled using the accumulator tank pressure regulation through a micron orifice and isolation valve. This paper discusses the Xenon Feed System design including the component selections, performance estimation and functional test.

Evaluation of Design Variables to Improve Sound Radiation and Transmission Loss Performances of a Dash Panel Component of an Automotive Vehicle (방사소음 및 투과소음에 대한 승용차량 대시패널의 설계인자 별 영향도 분석)

  • Yoo, Ji-Woo;Chae, Ki-Sang;Park, Chul-Min;Suh, Jin-Kwan;Lee, Ki-Yong
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.22 no.1
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    • pp.22-28
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    • 2012
  • While a dash panel component, close to passengers, plays a very important role to protect heat and noise from a power train, it is also a main path that transfers vibration energy and eventually radiates acoustic noise into the cavity. Therefore, it is important to provide optimal design schemes incorporating sound packages such as a dash isolation pad and a floor carpet, as well as structures. The present study is the extension of the previous investigation how design variables affect sound radiation, which was carried out using the simple plate and framed system. A novel FE-SEA hybrid simulation model is used for this study. The system taken into account is a dash panel component of a sedan vehicle, which includes front pillars, front side members, a dash panel and corresponding sound packages. Design variables such as panel thicknesses and sound packages are investigated how they are related to two main NVH indexes, sound radiation power(i.e. structure-borne) and sound transmission loss(i.e. air borne). In the viewpoint of obtaining better NVH performance, it is shown that these two indexes do not always result in same tendencies of improvement, which suggests that they should be dealt with independently and are also dependent on frequency regions.

Progress on Phytochemical and Atopic Dermatitis-related Study of the Root of Lithospermum erythrorhizon (자초 뿌리의 함유성분 및 아토피피부염 관련 연구현황)

  • Ju, Ji-Hoon;Cho, Hyun-Hwan;Lee, Yong-Sup
    • Korean Journal of Pharmacognosy
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    • v.41 no.2
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    • pp.73-88
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    • 2010
  • Traditionally, the root of Lithospermum erythrorhizon Sieb. et Zucc(L.E) has been used as efficacious therapy for inflammation, burns, frostbite and skin ailments (e.g eczema and psoriasis). It contains isohexenylnaphthoquinone derivatives (shikonin and its esters) and furylhydroquinones (shikonofurans) in lipophilic fractions and caffeic acid oligomers (rosmarinic acid, lithospermic acid B) in polar fractions. Recently, new preparative isolation and analysis procedures of shikonin along with its oligomers from the extract of L. erythrorhizon by the combination of high-speed counter-current chromatography with high-performance liquid chromatography-diode array detection have also been introduced. Although there have been many reports on the wound healing, antiinflammatory, and anticancer effects, the research on the effects of anti-atopic dermatitis of the root of L. erythrorhizon were relatively scarce. However, in recent years, new information gathered from research efforts, on the anti-atopic dermatitis properties of the extract or constituents of L. erythrorhizon has been accumulated. In this paper, the findings and advance on the in vitro and in vivo activities of L. erythrorhizon and its constituents especially focused on antiinflammatory and anti-atopic dermatitis effects are summarized. The phytochemical constituents of L. erythrorhizon or its tissue cultures are also presented. Although there are few to verify or refute its activity in human, one result of clinical study of the extract of L. erythrorhizon on the atopic dermatitis patients was introduced to assess the possibility of its clinical use. The reported mechanisms of action and in vivo pharmacological studies in different animal models for the various types of extracts or constituents of L. erythrorhizon are supportive of its therapeutic potential or dietary supplement, however, more evidence from clinically relevant models, as well as systemic studies on the active constituents or the various types of standardized extracts at the cellular and molecular level, are required.

Caprine Dermatitis Caused by Trichophyton mentagrophytes (Trichophyton mentagrophytes에 의한 염소의 피부염)

  • Pal Mahendra;Sukumaran K.;Sejra Anand Ram;Lee Chang Woo
    • Journal of Veterinary Clinics
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    • v.8 no.2
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    • pp.147-152
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    • 1991
  • Trichophyton mentagrophytes was described as a primary cause of mycotic dermatitis in two young goats housed together in a humid, ill-ventilated and unhygienic byre. The diagnosis in both the cases was established on the detection of fungal element in the skin scrapings by potassium hydroxide technique and isolation of the pathogen in pure growth on mycological medium at 30$^{\circ}C$. The lesions were found on the face of one kid and on the neck and ear of another one. Two adult goats housed in the same enclosure were found to be free from this disease. Further, there was no evidence of ringworm in the goat owner and his family members. Genetic crossing of both the isolates on modified sunflower seed medium indicated that they belonged to (―) mating type. Hair performation test revealed the keratolytic activity of both the strains of T. mentagrophytes. The public health significance and chemotherapy are also discussed. The question of source of infection could not be emphatically established.

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