• 한국진공학회지
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• 제9권2호
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• pp.172-178
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• 2000

반도체 제조공정 중 플라즈마 반응기 내에서 입자오염을 유발하는 입자들의 거동과 성장을 모델식을 사용하여 이론적으로 고찰하였다. 플라즈마 반응기 내에서 입자 거동에 영향을 미치는 힘들로 유체 대류, 입자 확산 및 외부힘 (ion drag force, electrostatic force, 중력) 등을 고려하였다. 플라즈마 벌크 영역에서 전하를 가진 입자들간의 충돌에 의한 입자 성장을 고려하기 위해 모델식에 입자 전하 분포를 고려하였다. 대부분의 입자들은 ion drag force와 electrostatic force가 균형을 이루고 있는 두 sheath 경계 영역에 존재하였으며 두 sheath 영역과 벌크 플라즈마에서의 입자 농도는 0에 접근하였다. 시간이 지남에 따라 입자 충돌로 인한 입자들의 크기는 증가하였으며 입자가 성장함에 따라 입자 표면적의 증가와 더불어 입자가 가지는 평균 전하량도 증가하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2002년도 학술대회지
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• pp.459-462
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• 2002

Many active and passive flow control methods have been studied since decades, but there are only few works about flow control methods using ion wind. This paper presents an experimental study on the wake control behind a circular cylinder using ion wind, a bulk motion of neutral molecules driven by locally ionized air of corona discharge. Experiments are done f3r different electrohydrodynamic numbers - the ratio of an electrical body farce to a fluid Inertial force - from 0 to 2 and for the Reynolds number ranging from $4{\times}10^3\;to\;8{\times}10^3$. Pressure distributions over a cylinder surface are measured and flow visualizations are carried out by smoke wire method. Flow visualizations confirm that ion wind affects significantly the wake structure behind a circular cylinder and pressure drag could be dramatically reduced by the superimposing ion wind.

• Journal of Astronomy and Space Sciences
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• 제25권4호
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• pp.415-424
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• 2008

곽영실 등(2008)의 연구로부터 고위도 하부 열권의 평균 수평바람 형태는 발산적인 흐름보다는 회전적인 흐름에 더 강하게 지배된다는 것이 확인되었다. 이 연구에서는, 곽영실 등(2008)의 연구의 연장으로, 회전적인 흐름의 척도인 소용돌이도(vorticity)를 유지시켜주는 강제(forcing)항들을 정량화하고 서로 비교 분석함으로써, 고위도 하부 열권에서의 전체 수평 바람장의 강한 회전 흐름을 유발시키는 주된 물리적인 과정을 규명하였다. 이 연구를 위하여 미 국립대기연구소(NCAR)의 열권-이온권 전기역학적 대순환 모델(Thermosphere-ionosphere Electrodynamic General Circulation Model, TIEGCM)을 이용하였다. 고위도 하부 열권의 소용돌이의 변화를 결정하고 유지시켜 주는 주된 강제항은 이온항력(ion drag)항과 수평 이류(horizontal advection)항으로 확인되었다. 늘림(stretching)항 또한 뚜렷한 기여를 하는 것으로 확인되었다. 소용돌이도 강제에 대한 IMF의 영향이 고도 105-110km부근까지 뚜렷하게 나타남이 확인되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• 한국입자에어로졸학회지
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• 제5권3호
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• pp.123-131
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• 2009

This paper presents simulation results of particle transport in low-pressure, low-temperature plasma environment. The size dependent transport of particles in the plasma is investigated with a two-dimensional simulation tool developed in-house for plasma chamber analysis and design. The plasma model consists of the first two and three moments of the Boltzmann equation for ion and electron fluids respectively, coupled to Poisson's equation for the self-consistent electric field. The particle transport model takes into account all important factors, such as gravitational, electrostatic, ion drag, neutral drag and Brownian forces, affecting the motion of particles in the plasma environment. The particle transport model coupled with both neutral fluid and plasma models is simulated through a Lagrangian approach tracking the individual trajectory of each particle by taking a force balance on the particle. The size dependant trap locations of particles ranging from a few nm to a few ${\mu}m$ are identified in both electropositive and electronegative plasmas. The simulation results show that particles are trapped at locations where the forces acting on them balance. While fine particles tend to be trapped in the bulk, large particles accumulate near bottom sheath boundaries and around material interfaces, such as wafer and electrode edges where a sudden change in electric field occurs. Overall, small particles form a "dome" shape around the center of the plasma reactor and are also trapped in a "ring" near the radial sheath boundaries, while larger particles accumulate only in the "ring". These simulation results are qualitatively in good agreement with experimental observation.

• 한국유체기계학회 논문집
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• 제15권1호
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• pp.27-35
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• 2012

A numerical simulation for particle collection efficiency in a wire-plate electrostatic precipitator (ESP) has been performed. Method of characteristics and finite differencing method (MOC-FDM) were employed to obtain electric field and space charge density, and lattice boltzmann method (LBM) was used to predict the Electrohydrodynamic (EHD) flow according to the ion convection. Large eddy simulation (LES) was considered for turbulent flow and particle simulation was performed by discrete element method (DEM) which considered field charging, electric force, drag force and wall-collision. One way coupling from FDM to LBM was used with small and low density particle assumption. When the charged particle collided with the collecting plate, particle-wall collision was calculated for re-entertainment effect and the effect of gravity force was considered.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.198-201
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• 2006

In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2008년 영문 학술대회
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• pp.561-565
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• 2008

Generally, reaction wheels or thrusters are used for attitude control of a satellite. There is a potential method for the attitude control utilizing the plasma flow on the Low Earth Orbit. In the present study, experiments which simulate attitude control of a Low Earth Orbit Satellite using the ionosphere were conducted. In this experiment, a plasma flow was generated by a steady-state Hall type accelerator. However it is known that the Hall type accelerator, which is used as plasma source, produces a torque around its axis called "swirl torque". This torque would affect the attitude control in the above-mentioned experiments. First of all, we conducted the measurement of the swirl torque. Secondly, experiments using a satellite model with negative electrodes were conducted. The negative electrodes generated torque around the axis, and controlled the attitude of the satellite model by changing the applied voltage.

• Journal of Astronomy and Space Sciences
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• 제22권2호
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• pp.147-174
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• 2005

본 연구에서는 미 국립대기연구소(NCAR)의 열권-이온권 전기역학적 대순환 모델(TIEGCM)을 이용하여 행성간 자기장(IMF)의 방향과 세기 그리고 고도에 따라 여름철 남반구 고위도 하부 열권의 바람에 작용하는 운동량 강제력을 정량적으로 구하였다. 그리고 이들을 서로 비교 분석함으로써 IMF 조건과 고도에 따른 고위도 하부 열권의 풍계(wind system)를 유지시켜주는 주된 물리적인 과정을 살펴보았다. 고위도 하부 열권(<180km)에서 양($B_y$ > 0.8|$\overline{B}_z$|)또는 음($B_y$ < -0.8|$\overline{B}_z$|)의 IMF By 조건인 경우에 운동량 강제력 차이, 즉 IMF 기준치 ${\neq}$ 0 일 때와 IMF 기준치=0 일 때의 운동량 강제력 차이(difference momentum force)는 자기위도 -80$^{\circ}$에서 최대값을 가지면서 극관과 오로라 영역에 국한된 단순한 형태의 분포를 보인다. 그리고 IMF $B_z$ 성분이 양과 음일 때 강제력 차이의 세기는 비슷하지만 분포양상은 반대방향을 취한다. 한편 IMF $B_z$가 양($B_z$ > 0.3125|$\overline{B}_y$|) 또는 음($B_z$ < -0.3125|$\overline{B}_y$|)인 조건인 경우에는 강제력 차이가 아오로라(subauroral) 위도까지 분포하며 IMF $B_z$가 양 또는 음의 조건일 때 보다 복잡한 구조를 보인다. 그리고 IMF $B_z$가 음인 경우의 강제력 차이가 양인 경우보다 더 크며 반대방향으로 작용한다. 125km 보다 더 높은 고도(>125km)에서 바람차이를 결정하는 주된 강제력은 기압경도력, 전향력, 수평이류 그리고 비발산 성분이 강한 Pedersen 이온항력인 것으로 확인되었다. 고도 약 125km 에서는 이 네 가지 힘에 더불어 비회전 성분이 강한 Hall 이온향력과 극관내 의 연직 이류가 지역과 시간에 따라 바람차이의 형성에 작용한다. 한편 고도 108-125km 에서는 IMF $B_z$ 조건일 경우의 극관영역을 제외하고는 기압경도력, 전향력 그리고 Hall 이온항력이 이 고도에서의 바람차이를 유발시키는 주된 강제력으로 작용한다. 고도 108km 이하에서는 기압경도력과 전향력이 균형을 이루어 지균 운동을 유지시킨다. IMF-$\overline{B}_y$의존 MLT 평균 운동량 강제력들은 이온항력을 제외한 다른 모든 남북성분이 동서성분에 비해 더 강하게 중성대기에 작용하는 것으로 확인되었다. 108-125km의 고도에서 IMF B?가 음인 경우에 이온항력은 하강운동 및 단열압축가열과 관련된 시계방향의 온난순환(warm circulation)을 극관 내에 형성시킨다. 반면 IMF $B_y$가 양인 경우에는 극관 내에 상승운동 및 단열팽창냉각과 관련된 반시계방향의 한랭순환(cold circulation)을 형성시킨다. 이온항력은 IMF $B_z$가 음인 경우에는 새벽영역에 상승운동과 관련된 반시계방향의 한랭순환을, 반면에 IMF $B_z$가 양인 경우에는 새벽영역에 하강운동과 관련된 시계방향의 온난순환을 형성시킨다.

• The Korean Journal of Ceramics
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• 제5권1호
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• pp.1-11
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• 1999

The effect of aliovalent dopents, $Nb_3O_5$ and MnO, on the grain growth kinetics of 12 mol% ceria stabilized tetragonal zirconia polycrystals (Ce-TZP) was studied. All specimens were sintered at $1550^{\circ}C$ for 20 minutes prior to annealing at different temperatures to study grain growth kinetics. Grain growth kinetics of Ce-TZP and 1 mol% $Nb_2O_5$ doped Ce-TZP (Ce-TZP/$Nb_3O_5$) during annealing at 1475, 1550, and $1600^{\circ}C$ adequately matched with square law $(D^2-D_\;o^2=k_at)$. However, grain growth in 1 mol% MnO suppressed grain growth in Ce-TZP by drag force exerted by $Mn^{+2}$ ions which segregated strongly to the positively-charged grain boundaries of Ce-TZP, $Nb_2O_5$ enhanced grain growth by increasing the concentration of vacancies of $Zr^{+4}$ ion and $Ce^{+4}$ ions. Surface analysis with X-ray photoelectron spectroscopy (XPS) showed the segregation of Mn+2 ions to grain boundaries. The kinetics of grain growth obtained in the base Ce-TZP and the Ce-TZPs with the aliovalent dopants were examined in the context of impurity drag effect and space charge effect.