• Title/Summary/Keyword: ion probe

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2-D & 3-D Observations on the Microstructure of Super Bainite TRIP Steels using Total Analysis System (TAS(Total Analysis System)을 이용한 SB-TRIP강에서의 2-D & 3-D 미세구조 분석 연구)

  • Seol, J.B.;Lee, B.H.;Park, C.G.
    • Transactions of Materials Processing
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    • v.19 no.1
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    • pp.44-49
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    • 2010
  • It has been widely reported that carbide-free bainitic steels or super-bainite TRIP (SB-TRIP) steels for the automotive industry are a new family of steels offering a unique combination of high strength and ductility. Hence, it is important to exactly evaluate the volume fraction of RA and to identify the 3-D morphology of constituent phases, because it plays a crucial role in mechanical properties. Recently, as electron back-scattered diffraction (EBSD) equipped with focused ion beam (FIB) has been developed, 3-D EBSD technique for materials science are used to these steels. Moreover, newly developed atom probe tomography (APT) technique can provide the exact distribution and chemical concentration of alloying elements in a sub-nm scale. The APT analysis results indicate exactly the distribution and composition of alloying elements in the austenite and bainite phases of SB-TRIP steels with the atomic-scale resolution. And thus, no partitioning of aluminum and manganese atoms was showed between the austenite containing $7.73{\pm}0.39$ at% C and the bainitic ferrite associated with $0.22{\pm}0.06$ at% C in SB-TRIP steel.

Multivariate Analysis of Pyrolysis Mass Spectra of Scutellaria baicalensis to Identify its Origin (열분해질량스펙트럼에 의한 황금의 원산지 판별법 연구)

  • Lee, Jin-Gyun;Park, Min-Seok;Lim, Jo-Han;Park, Jeong-Hill;Kwon, Sung-Won
    • Korean Journal of Pharmacognosy
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    • v.41 no.4
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    • pp.303-307
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    • 2010
  • To overcome the limit of morphological method for classification of herbal drug, a novel method to discriminate its origin using pyrolysis mass spectrometry-multivariate analysis was developed. This method was applied successfully to Scutellaria baicalensis Georgi, one of the most popular herbal drug in oriental countries. The ethylacetate soluble fractions were prepared by sonication from pulverized roots of S. baicalensis which were collected from various regions including Korea and China, and subjected to direct insertion probe (DIP) mass spectrometry to achieve mass spectra of pyrolizates of extracts. The probe temperature was elevated from $30^{\circ}C$ to $320^{\circ}C$ at increasing rate $64^{\circ}C/min$, and the average mass spectrum calculated from total ion chromatography (TIC) was obtained. The relative peak intensities versus m/z were subjected to SAS program, and the training set (9 from Korea origin and 22 from China origin) was clustered two groups as its origin. In the test set, 11 samples among total 13 test sample were successfully classified according to their origin by developed method with accuracy of 85%.

이중 주파수를 사용하는 펄스 플라즈마 특성에 관한 연구

  • Choe, Sang-Uk;Seo, Jin-Seok;Kim, Tae-Hyeong;Kim, Gyeong-Nam;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.219.1-219.1
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    • 2014
  • 전자소자 산업의 미세화 및 대형화에 따라 플라즈마 밀도, 전위, 온도, 균일도 등 과 같은 플라즈마 특성을 제어하는 것은 차세대 플라즈마 장치 개발에 있어 매우 중요한 요소라고 할 수 있다. 특히, 급격한 소자의 미세화에 따라 플라즈마 공정을 통해 발생할 수 있는 damage는 큰 issue가 되어 왔고, 많은 연구자들은 이를 해결하기 위해서 다각적인 노력을 진행해 왔다. 그중 높은 전자 온도는 높은 전자 에너지에 의해 공정 중 소자를 손상 시키는 주된 원인이라고 보고되고 있으며, 이에 대한 제어기술은 매우 중요하다고 할 수 있다. 본 연구에서는 서로 다른 두 개의 내/외측으로 나뉘어진 나선형 모양의 ICP 안테나를 이용 하여 연구를 진행하였다. 내측의 안테나에는 2 MHz를 연결 하였으며, 외측의 안테나에는 13.56 MHz를 연결 하였으며, 내/외측 안테나에 각각 pulse mode로 입력전력을 인가해 줌으로써 플라즈마의 특성을 관찰하였다. Pulse / CW (Continuous Wave) mode에 있어서 전자온도의 측정을 위해 emissive probe 를 이용하여 plasma potential과 floating potential을 측정하였으며, 이를 통하여 전자온도를 계산하여 구할 수 있었다. Duty ratio 및 pulsing frequency의 변화에 따른 전자온도의 변화를 확인 할 수 있었으며, 그에 따른 플라즈마 균일도를 ion saturation current를 측정함으로써 관찰할 수 있었다. 실제 식각 공정에 있어서 Pulsing 조건에 따른 식각 특성을 관찰하기 위해, SiO2, ACL (Amorphous Carbon Layer)에 대해 식각을 진행하였으며, 식각 메커니즘 분석을 위해 이온에너지 분포의 변화를 PSM (Plasma Sampling Mass-spectroscopy)을 이용하여 측정하였다.

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Proton Temperature Anisotropy vs Parallel Beta in the Solar Wind

  • Yoon, Peter H.
    • The Bulletin of The Korean Astronomical Society
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    • v.36 no.2
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    • pp.92.2-92.2
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    • 2011
  • In view of the planned NASA's and ESA's Solar Probe Plus and Solar Orbiter missions, respectively, to probe the inner heliosphere and the Sun's corona, it is timely to investigate outstanding problems associated with the solar wind. Among them is the temperature anisotropy problem. As the solar wind expands into the interplanetary space, the density and magnetic field decreases radially, thus leading to temperature anisotropy ($T_{\parallel}{\gg}T_{\perp}$). However, the measured temperature anisotropy can at times be characterized by $T_{\perp}$ > $T_{\parallel}$, while at other times the measured $T_{\parallel}/T_{\perp}$ is much milder than predicted by adiabatic theory. Physical reasons remain poorly understood. This notwithstanding, it is known from plasma physics that for $T_{\perp}$ > $T_{\parallel}$ electromagnetic ion-cyclotron (EMIC) and mirror instabilities are excited, while for $T_{\parallel}$ > $T_{\perp}$, fire-hose instability is excited. By constructing the threshold conditions for various instabilities, one may construct a closure relation that may be useful for modeling the solar wind. In the present paper we discuss theoretical construction of the anisotropy-beta relation by means of quasi-linear theories of these instabilities. The present work complements previous efforts on the basis of linear theory, hybrid simulations, and empirical fits of observations.

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Dry Etching of BST using Inductively Coupled Plasma

  • Kim, Gwan-Ha;Kim, Kyoung-Tae;Kim, Dong-Pyo;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.6 no.2
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    • pp.46-50
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    • 2005
  • BST thin films were etched with inductively coupled CF$_{4}$/(Cl$_{2}$+Ar) plasmas. The etch characteristics of BST thin films as a function of CF$_{4}$/(Cl$_{2}$+Ar) gas mixtures were analyzed using optical emission spectroscopy (OES) and Langmuir probe. The BST films in CF$_{4}$/Cl$_{2}$/Ar plasma is mainly etched by the formation of metal chlorides which depends on the emission intensity of the atomic Cl and the bombarding ion energy. The maximum etch rate of the BST thin films was 53.6 nm/min because small addition of CF$_{4}$ to the Cl$_{2}$/Ar mixture increased chemical and physical effect. A more fast etch rate of BST films can be obtained by increasing the DC bias and the RF power, and lowering the working pressure.

Manufacturing and characterization of ECR-PECVD system (ECR-PECVD 장치의 제작과 특성)

  • 손영호;정우철;정재인;박노길;황도원;김인수;배인호
    • Journal of the Korean Vacuum Society
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    • v.9 no.1
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    • pp.7-15
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    • 2000
  • An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

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One-pot synthesis of highly fluorescent amino-functionalized graphene quantum dots for effective detection of copper ions

  • Tam, Tran Van;Choi, Won Mook
    • Current Applied Physics
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    • v.18 no.11
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    • pp.1255-1260
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    • 2018
  • In this work, a green and simple one-pot route was developed for the synthesis of highly fluorescent aminofunctionalized graphene quantum dots (a-GQDs) via hydrothermal process without any further modification or surface passivation. We synthesized the a-GQDs using glucose as the carbon source and ammonium as a functionalizing agent without the use of a strong acid, oxidant, or other toxic chemical reagent. The as-obtained aGQDs have a uniform size of 3-4 nm, high contents of amino groups, and show a bright green emission with high quantum yield of 32.8%. Furthermore, the a-GQDs show effective fluorescence quenching for $Cu^{2+}$ ions which can serve as effective fluorescent probe for the detection of $Cu^{2+}$. The fluorescent probe using the obtained aGQDs exhibits high sensitivity and selectivity toward $Cu^{2+}$ with the limit of detection as low as 5.6 nM. The mechanism of the $Cu^{2+}$ induced fluorescence quenching of a-GQDs can be attributed to the electron transfer by the formation of metal complex between $Cu^{2+}$ and the amino groups on the surface of a-GQDs. These results suggest great potential for the simple and green synthesis of functionalized GQDs and a practical sensing platform for $Cu^{2+}$ detection in environmental and biological applications.

Quenching Effect in an Optical Fiber Type Small Size Dosimeter Irradiated with 290 MeV·u-1 Carbon Ions

  • Hirata, Yuho;Watanabe, Kenichi;Uritani, Akira;Yamazaki, Atsushi;Koba, Yusuke;Matsufuji, Naruhiro
    • Journal of Radiation Protection and Research
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    • v.41 no.3
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    • pp.222-228
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    • 2016
  • Background: We are developing a small size dosimeter for dose estimation in particle therapies. The developed dosimeter is an optical fiber based dosimeter mounting an radiation induced luminescence material, such as an OSL or a scintillator, at a tip. These materials generally suffer from the quenching effect under high LET particle irradiation. Materials and Methods: We fabricated two types of the small size dosimeters. They used an OSL material Eu:BaFBr and a BGO scintillator. Carbon ions were irradiated into the fabricated dosimeters at Heavy Ion Medical Accelerator in Chiba (HIMAC). The small size dosimeters were set behind the water equivalent acrylic phantom. Bragg peak was observed by changing the phantom thickness. An ion chamber was also placed near the small size dosimeters as a reference. Results and Discussion: Eu:BaFBr and BGO dosimeters showed a Bragg peak at the same thickness as the ion chamber. Under high LET particle irradiation, the response of the luminescence-based small size dosimeters deteriorated compared with that of the ion chamber due to the quenching effect. We confirmed the luminescence efficiency of Eu:BaFBr and BGO decrease with the LET. The reduction coefficient of luminescence efficiency was different between the BGO and the Eu:BaFBr. The LET can be determined from the luminescence ratio between Eu:BaFBr and BGO, and the dosimeter response can be corrected. Conclusion: We evaluated the LET dependence of the luminescence efficiency of the BGO and Eu:BaFBr as the quenching effect. We propose and discuss the correction of the quenching effect using the signal intensity ratio of the both materials. Although the correction precision is not sufficient, feasibility of the proposed correction method is proved through basic experiments.

Plasma source ion implantations for shallow $p^+$/n junction

  • Jeonghee Cho;Seuunghee Han;Lee, Yeonhee;Kim, Lk-Kyung;Kim, Gon-Ho;Kim, Young-Woo;Hyuneui Lim;Moojin Suh
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.180-180
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    • 2000
  • Plasma source ion implantation is a new doping technique for the formation of shallow junction with the merits of high dose rate, low-cost and minimal wafer charging damage. In plasma source ion implantation process, the wafer is placed directly in the plasma of the appropriate dopant ions. Negative pulse bias is applied to the wafer, causing the dopant ions to be accelerated toward the wafer and implanted below the surface. In this work, inductively couples plasma was generated by anodized Al antenna that was located inside the vacuum chamber. The outside wall of Al chamber was surrounded by Nd-Fe-B permanent magnets to confine the plasma and to enhance the uniformity. Before implantation, the wafer was pre-sputtered using DC bias of 300B in Ar plasma in order to eliminate the native oxide. After cleaning, B2H6 (5%)/H2 plasma and negative pulse bias of -1kV to 5 kV were used to form shallow p+/n junction at the boron dose of 1$\times$1015 to 5$\times$1016 #/cm2. The as-implanted samples were annealed at 90$0^{\circ}C$, 95$0^{\circ}C$ and 100$0^{\circ}C$during various annealing time with rapid thermal process. After annealing, the sheet resistance and the junction depth were measured with four point probe and secondary ion mass spectroscopy, respectively. The doping uniformity was also investigated. In addition, the electrical characteristics were measured for Schottky diode with a current-voltage meter.

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Periodontally Diseased Root and Normal Root as Studied by Electron Probe Microanalysis & SEM (정상 치근과 치주질환에 이환된 치근면의 Electron Probe Microanalysis와 주사전자 현미경에 의한 연구)

  • Kim, Jong-Sig;Kim, Chong-Yeo;Lim, Sung-Bin;Chung, Chin-Hyung
    • Journal of Periodontal and Implant Science
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    • v.29 no.2
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    • pp.401-415
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    • 1999
  • Root surfaces affected by periodontal disease undergo various forms of changes. Cementum exposure from gingival recession may result in absorption of calcium, phosphorus, and fluoride and subsequent hypermineralization and increased radiodensity. Although some reports have suggested that inorganic content with root cementum might show various changes depending upon age or extent of periodontal disease, but no consensus can be reached regarding the the distribution of various elements. The present study examines the difference in mineral content between healthy and periodontal diseased roots by analyzing three areas per tooth along the root surface in cervico-apical direction using electron probe and scanning electron microscope. Healthy tooth that was extracted for orthodontic purpose was used as control. Experimental teeth include those with periodontal pocket depth exceeding 6mm and those with gingival recession and periodontal pocket depth of 2-4mm. Levels of Ca, P, Mg and Na were measured using wavelength dispersive x-ray spectrometer at three areas per tooth. The examined areas were located apical to cemento-enamel junction in control and periodontal ligament-depleted areas in experimental teeth. The corresponding areas were also examined with scanning electron microscope(x70) The results are as follows. 1. Minerals were detected in order of Ca, P, Mg and Na. In all root surfaces, levels of Ca and P were higher in dentin than in cementum. 2. Level of Mg was twice as high in dentin than in cementum. There was no significant difference in the level of Mg and Na between normal and periodontal diseased roots or between the various locations in the same root. 3. Level of Ca and P in the surface cementum showed no difference between normal and periodontal diseased root, although the areas in dentin with high level of either ion also showed high level of corresponding ion in cementum. 4. Difference in the Ca and P content between various locations within the same root was noted, although no coherent pattern existed. These results suggest that although the mineral content of the root cementum in periodontitis-affected tooth is affected by exogenous ions from saliva and food, but there was no difference in the mineral contents between normal and periodontally diseased root.

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