• Journal of the Korean Society of Safety
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• v.14 no.3
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• pp.134-139
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• 1999

In this study, PSII(plasma source ion implantation) was used to improve the biocompatibility of bone-anchored Ti implant. According to potentiodynamic anodic polarization test in deaerated Hank's solution, open circuit potential of ion implanted specimens were increased compare to that of unimplanted specimen ; besides, passive current density and critical anodic current density of ion implanted specimens were lower than unimplanted specimen.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.19-23
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• 2003

Extended unbalanced magnetron sputtering system based on the cylindrical magnetron with a rotating cathode was developed. The unbalanced configuration of magnetic field was realized by means of additional lines of permanent magnets, placed along both sides of a 89 mm outer diameter and 600 mm long cylindrical cathode. The performance of the unbalanced magnetron was assessed in terms of the ion current density and the ion-to-atom ratio incident at the substrate. Furthermore, the paper presents the comparison of the internal plasma parameters, such as the electron temperature, electron density, plasma and floating potentials, measured by a Langmuir probe in various positions from the cathode, for conventional and unbalanced constructions of the cylindrical magnetron. The plasma density and ion current density are about 3-5 times higher than those of conventional one, in the unbalanced magnetron in a 0.24 Pa Ar atmosphere with a DC cathode power of 3 kW.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.310-311
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• 2011

Dual-frequency (DF) capacitively coupled plasmas (CCP) are used to separately control the mean ion energy and flux at the electrodes [1]. This separate control in capacitively coupled radio frequency discharges is one of the most important issues for various applications of plasma processing. For instance, in the Plasma Enhanced Chemical Vapor Deposition processes such as used for solar cell manufacturing, this separate control is most relevant. It principally allows to increase the ion flux for high deposition rates, while the mean ion energy is kept constant at low values to prevent highly energetic ion bombardment of the substrate to avoid unwanted damage of the surface structure. DF CCP can be analyzed in a fashion similar to single-frequency (SF) driven with effective parameters [2]. It means that DF CCP can be converted into SF CCP with effective parameters such as effective frequency and effective current density. In this study, comparison of DF CCP and its converted effective SF CCP is carried out through particle-in-cell/Monte Carlo (PIC-MCC) simulations. The PIC-MCC simulation shows that DF CCP and its converted effective SF CCP have almost the same plasma characteristics. In DF CCP, the negative resistance arises from the competition of the effective current and the effective frequency [2]. As the high-frequency current increases, the square of the effective frequency increases more than the effective current does. As a result, the effective voltage decreases with the effective current and it leads to an increase of the ion flux and a decrease of the mean ion energy. Because of that, the negative resistance regime can be called the preferable regime for solar cell manufacturing. In this preferable regime, comparison of DF (13.56+100 or 200 MHz) CCP and SF (60 MHz) CCP with the same effective current density is carried out. At the lower effective current density (or at the lower plasma density), the mean ion energy of SF CCP is lower than that of DF CCP. At the higher effective current density (or at the higher plasma density), however, the mean ion energy is lower than that of SF CCP. In this case, using DF CCP is better than SF CCP for solar cell manufacturing processes.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.12
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• pp.2173-2178
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• 2007

Dynamics of plasma sheath was analyzed using simple ion fluid model with poison equation. Incident ion current, energy, potential distribution and space charge density profile were calculated as a function of time. The effects of initial floating sheath on the evolution of biased sheath were compared with ideal matrix sheath. The effects of finite rising time of pulse bias voltage on the ion current and energy was studied. The influence of surface charging on the evolution of sheath was also investigated

• Korean Journal of Materials Research
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• v.32 no.11
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• pp.474-480
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• 2022

Lithium-ion batteries (LIBs) are powerful energy storage devices with several advantages, including high energy density, large voltage window, high cycling stability, and eco-friendliness. However, demand for ultrafast charge/discharge performance is increasing, and many improvements are needed in the electrode which contains the carbon-based active material. Among LIB electrode components, the conductive additive plays an important role, connecting the active materials and enhancing charge transfer within the electrode. This impacts electrical and ionic conductivity, electrical resistance, and the density of the electrode. Therefore, to increase ultrafast cycling performance by enhancing the electrical conductivity and density of the electrode, we complexed Ketjen black and graphene and applied conductive agents. This electrode, with the composite conductive additives, exhibited high electrical conductivity (12.11 S/cm), excellent high-rate performance (28.6 mAh/g at current density of 3,000 mA/g), and great long-term cycling stability at high current density (88.7 % after 500 cycles at current density of 3,000 mA/g). This excellent high-rate performance with cycling stability is attributed to the increased electrical conductivity, due to the increased amount of graphene, which has high intrinsic electrical conductivity, and the high density of the electrode.

• Carbon letters
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• v.2 no.1
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• pp.72-75
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• 2001

The performance of Li-ion system based on $LiCoO_2$ and Graphite is well optimized for the 3C applications. The charge-discharge mode, the manufacturing process, the cell performance and the thermal reactions affecting safety has been explained in the engineering point of view. The energy density of the current LIB system is in the range of 300~400 Wh/l. In order to achieve the energy density higher than 500 Wh/l, the active materials should be modified or changed. Adopting new high capacity anode materials would be effective to improve energy density.

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.381-389
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• 1998

The time variation of an ion current density has been analyzed based on the plasma particle dynamic model for the plasma immersion ion implantation. The implanted ion current density has its maximum value at a particular time after sheath formation, and decays. The influence of the particle collisions, the capacitive time of the substrate, and the pulse formula has been represented on the implanted ion current.

• Korean Chemical Engineering Research
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• v.56 no.1
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• pp.1-5
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• 2018

In this work, we study the ion conductivity by analyzing the impedance to the high current density range that the PEMFC (Proton Exchange Membrane Fuel Cell) is actually operated. The effect of GDL (Gas Diffusion Layer)presence on impedance was investigated indirectly by measuring hydrogen permeability. When the RH (Relative Humidity)was higher than 60% in the low current range (< $80mA/cm^2$), the moisture content of the polymer membrane was sufficient and the ion conductivity of the membrane was not influenced by the current change. However, when RH was low, ion conductivity increased due to water production as current density increased. The ion conductivity of the membrane obtained by HFR (High Frequency Resistance) in the high current region ($100{\sim}800mA/cm^2$)was compared with the measured value and simulated value. At RH 100%, both experimental and simulated values showed constant ion conductivity without being influenced by current change. At 30~70% of RH, the ionic conductivity increased with increasing current density and tended to be constant.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.11
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• pp.2035-2040
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• 2008

The electrical discharge of high voltage direct current(HVDC) overhead transmission line generate audible noise, radio noise, electric field, ion current and induced voltage on the ground. These items are major factors to design environmentally friendly configuration of DC transmission line. Therefore, HVDC transmission lines must be designed to keep all these corona effects within acceptable levels. Several techniques have been used to assess interference caused by ions on HVDC overhead transmission line. In this study, to assess the ion characteristic of DC line, the ion current density and induced voltage caused by ion flow were measured by plate electrodes manufactured from a metal flat board and charged bodies, respectively. The charged body has two types of cylinder and cylindrical plate. From the results of calibration experiments, the sensitivity of flat electrode and charged body can be obtained. At present, the developed system is used to investigate the ion generation characteristics of Kochang DC ${\pm}500kV$ test line.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.41 no.5
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• pp.492-501
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• 1992

In this paper, an ion analyzer is used in conjunction with a Langmuir probe to study the chracteristics of ECR plasma such as the ion temperature, ion current density and electron temperature as the operating pressure, ${\mu}$-wave power and axial position change, Silicon etching has been performed with RF-biasing and its etching chracteristics have been discussed in terms of the ion energy distribution function. The maximum value of ion current density appears in the range of 10S0-3T mbar and the broadening of ion energy distribution function increases as pressure increases. Therefore, as pressure decreases, anisotropy increases but selectivity to photoresist decreases.