• Title/Summary/Keyword: interface pressure

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Silicon/Pad Pressure Measurements During Chemical Mechanical Polishing

  • Danyluk, Steven;Ng, Gary;Yoon, In-Ho;Higgs, Fred;Zhou, Chun-Hong
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.433-434
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    • 2002
  • Chemical mechanical polishing refers to a process by which silicon and partially-processed integrated circuits (IC's) built on silicon substrates are polished to produce planar surfaces for the continued manufacturing of IC's. Chemical mechanical polishing is done by pressing the silicon wafer, face down, onto a rotating platen that is covered by a rough polyurethane pad. During rotation, the pad is flooded with a slurry that contains nanoscale particles. The pad deforms and the roughness of the surface entrains the slurry into the interface. The asperities contact the wafer and the surface is polished in a three-body abrasion process. The contact of the wafer with the 'soft' pad produces a unique elastohydrodynamic situation in which a suction force is imposed at the interface. This added force is non-uniform and can be on the order of the applied pressure on the wafer. We have measured the magnitude and spatial distribution of this suction force. This force will be described within the context of a model of the sliding of hard surfaces on soft substrates.

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A Study on Development of Expert System for Dimension and Weld Designs of Horizontal-Type Pressure Vessel (횡형압력용기의 치수 및 용접설계를 위한 전문가시스템의 개발에 관한 연구)

  • 서철웅;나석주
    • Journal of Welding and Joining
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    • v.10 no.4
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    • pp.199-212
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    • 1992
  • Expert system is a practical application part of the artificial intelligence and can be generally described as a computer-based system designed to simulate the knowledge and reasoning of a human expert, and to make that knowledge conveniently available to other people in a useful way. Expert systems consist of three major components, knowledge base, inference engine and user interface. In this paper, it is aimed to construct a prototype system to design the horizontal-typed pressure vessel. To do this, a representative artificial programming language, Turbo Prolog, was employed, and the knowledge representation was mainly done by the production rule such as "If(condition), than (action)" style and by the predicate logic. In the developed system, it was quite easy to represent the knowledge of "If(condition), then (action)"style and by the predicate logic. In the developed system, it was quite easy to represent the knowledge of "If(condition). then(action)" style and the various table-like data. It was also effective to represent the graphics. Though this expert system is by now small and incomplete, it is possible to expand it to a larger and refined system later.rger and refined system later.

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A Study on the Properties in Friction Weldability of SCNCrM-2B and SM25C (SCNCrM-2B와 SM25C의 마찰용접특성에 관한 연구)

  • Lee Se-Gyoung;Sim Young-Man;Min Taeg-Ki
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.15 no.4
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    • pp.49-55
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    • 2006
  • This study deals with the friction welding of SM25C and SCNCrM-2B; The friction time was variable conditions under the conditions of spindle revolution 2,000rpm, friction pressure of 100MPa, upset pressure of l50MPa, and upset time of 4.0 seconds. Under these conditions, the microstructure of weld interface, tensile fracture surface and mechanical tests were studied, and so the results were as follows. 1. When the friction time is 2.0 seconds, the tensile strength of friction welds was 874MPa, which is around as much as 117% of the tensile strength of base metal(SM25C), the bending strength of friction welds was 1,354MPa, which is around as much as 108.9% of the bending strength of base metal(SM25C). 2. At the same condition, the maximum vickers hardness was Hv443 at SCNCrM-2B nearby weld interface, which is higher Hv20 than condition of the friction time 0.5 seconds. 3. The results of microstructure analysis show that the structures of two base materials have fractionated and rearranged along a column due to heating and axial force during friction, which has affected in raising hardness and tensile strength.

Confinement evaluation of concrete-filled box-shaped steel columns

  • Susantha, K.A.S.;Ge, Hanbin;Usami, Tsutomu
    • Steel and Composite Structures
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    • v.1 no.3
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    • pp.313-328
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    • 2001
  • This paper presents a three-dimensional finite element analysis methodology for a quantitative evaluation of confinement in concrete-filled box-shaped unstiffened steel columns. The confinement effects of concrete in non-circular sections can be assessed in terms of maximum average lateral pressure. A brief review of a previous method adopted for the same purpose is also presented. The previous method is based on a two-dimensional finite element analysis method involving a concrete-steel interaction model. In both the present and previous methods, average lateral pressure on concrete is computed by means of the interaction forces present at the concrete-steel interface. Subsequently, the strength enhancement of confined concrete is empirically related to the maximum average lateral pressure. The results of the former and latter methods are then compared. It is found that the results of both methods are compatible in terms of confined concrete strengths, although the interaction model yields a somewhat overestimated estimation of confinement than those of the present method when relatively high strength concrete is used. Furthermore, the confinement in rectangular-shaped sections is investigated and the reliability of previously adopted simplifications in such cases is discussed.

Adhesion Properties of UV-curable Pressure Sensitive Adhesives for Dicing Tape (다이싱 테이프용 자외선 경화형 점착제의 접착 물성)

  • Do, Hyun-Sung;Kim, Sung-Eun;Kim, Hyun-Joong
    • Journal of Adhesion and Interface
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    • v.5 no.4
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    • pp.1-8
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    • 2004
  • UV-curable pressure sensitive adhesives were prepared by blending acrylic copolymer, copolymerized with butyl acrylate, acrylic acid and methyl methacrylate by solution polymerization, and trimethylolpropane triacrylate. The PSAs were evaluated by adhesion strength with varying UV dose, and also glass transition temperature ($T_g$) of PSAs were measured. When exposed on UV irradiation, the PSAs showed the decreased adhesion strength and increased $T_g$. And following UV irradiation, the PSAs did not leave any residue on wafer after peel off PSA.

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Conjugate Heat Transfer Analysis of High Pressure Turbine with Secondary Flow Path and Thermal Barrier Coating (2차유로 및 열차폐 코팅을 고려한 고압터빈의 열유동 복합해석)

  • Kang, Young-Seok;Rhee, Dong Ho;Cha, Bong Jun
    • The KSFM Journal of Fluid Machinery
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    • v.18 no.6
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    • pp.37-44
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    • 2015
  • Conjugate heat analysis on a high pressure turbine stage including secondary flow paths has been carried out. The secondary flow paths were designed to be located in front of the nozzle and between the nozzle and rotor domains. Thermal boundary conditions such as empirical based temperature or heat transfer coefficient were specified at nozzle and rotor solid domains. To create heat transfer interface between the nozzle solid domain and the rotor fluid domain, frozen rotor with automatic pitch control was used assuming that there is little temperature variation along the circumferential direction at the nozzle solid and rotor fluid domain interface. The simulation results showed that secondary flow injected from the secondary flow path not only prevents main flow from penetrating into the secondary flow path, but also effectively cools down the nozzle and rotor surfaces. Also thermal barrier coating with different thickness was numerically implemented on the nozzle surface. The thermal barrier coating further reduces temperature gradient over the entire nozzle surface as well as the overall temperature level.

A Study on the Properties in Friction Weldability of Ni-Cr-Mo and SM45C (Ni-Cr-Mo과 SM45C의 마찰용접특성(摩擦熔接特性)에 관한 연구(硏究))

  • Lim, Hyung-Taek;Min, Taeg-Ki
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.6
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    • pp.29-36
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    • 2007
  • The present study examined the mechanical properties of the friction welding of Ni-Cr-Mo to SM45C. Friction welding was conducted at welding conditions of 2,000 rpm, friction pressure of 100MPa, friction time of 0.8, 1.0, 1.2, 1.4, 1.6, 1.8, 2.0 seconds, upset pressure of 150MPa, and upset time of 3.0 seconds. When the friction time was 1.6 seconds, the maximum tensile strength of the friction weld happened to be 1,020MPa, which is 120% of the base material's tensile strength(850MPa). At the same condition, the maximum shear strength was 438MPa, which is equivalent to 103% of the base material's shear strength(425MPa). At the same condition, the maximum vickers hardness was Hv490 at Ni-Cr-Mo nearby weld interface, which is higher Hv40 than condition of the friction time 0.8 seconds, and the maximum vickers hardness was Hv305 from weld interface of SM45C, which is higher Hv12 than condition of the friction time 0.8 seconds. The results of microstructure analysis show that the structures of two base materials have fined and rearranged along a column due to heating and axial force during friction, which has affected in raising hardness and tensile strength.

FE-SEM Image Analysis of Junction Interface of Cu Direct Bonding for Semiconductor 3D Chip Stacking

  • Byun, Jaeduk;Hyun, June Won
    • Journal of the Korean institute of surface engineering
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    • v.54 no.5
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    • pp.207-212
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    • 2021
  • The mechanical and electrical characteristics can be improved in 3D stacked IC technology which can accomplish the ultra-high integration by stacking more semiconductor chips within the limited package area through the Cu direct bonding method minimizing the performance degradation to the bonding surface to the inorganic compound or the oxide film etc. The surface was treated in a ultrasonic washer using a diamond abrasive to remove other component substances from the prepared cast plate substrate surface. FE-SEM was used to analyze the bonding characteristics of the bonded copper substrates, and the cross section of the bonded Cu conjugates at the sintering junction temperature of 100 ℃, 150 ℃, 200 ℃, 350 ℃ and the pressure of 2303 N/cm2 and 3087 N/cm2. At 2303 N/cm2, the good bonding of copper substrate was confirmed at 350 ℃, and at the increased pressure of 3087 N/cm2, the bonding condition of Cu was confirmed at low temperature junction temperature of 200 ℃. However, the recrystallization of Cu particles was observed due to increased pressure of 3087 N/cm2 and diffusion of Cu atoms at high temperature of 350 ℃, which can lead to degradation in semiconductor manufacturing.

Analysis of Coating Flow Characteristics in Wet-on-Wet Optical Fiber Liquid Coating Process (광섬유 WOW 액상코팅 공정의 코팅액 유동특성 해석연구)

  • Kim, Kyoungjin;Park, Joong-Youn
    • Journal of the Semiconductor & Display Technology
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    • v.16 no.4
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    • pp.91-96
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    • 2017
  • In this computational study of optical fiber manufacturing, WOW (wet-on-wet) double coating process on freshly drawn glass fiber has been numerical modelled and simulated using a simplified geometry of typical optical fiber coating apparatus. The numerical domain includes primary and secondary coating dies along with secondary coating cup and the interface between primary and secondary coating liquids are investigated using level set method. Coating liquid viscosity is an important parameter and its dependence on temperature is also considered. Since there would be possibility for pressure and temperature of primary coating liquid to be increased substantially at high fiber drawing speed, the effects of increased pressure and temperature of primary coating liquid are examined on flow patterns of coating liquids in secondary coating cup. In case that both pressure and temperature of primary coating liquid are high enough, liquid interface becomes noticeably unstable and this flow instability could adversely affect the uniform coatings and final quality of produced optical fiber.

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Analysis of the flow distribution and mixing characteristics in the reactor pressure vessel

  • Tong, L.L.;Hou, L.Q.;Cao, X.W.
    • Nuclear Engineering and Technology
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    • v.53 no.1
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    • pp.93-102
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    • 2021
  • The analysis of the fluid flow characteristics in reactor pressure vessel is an important part of the hydraulic design of nuclear power plant, which is related to the structure design of reactor internals, the flow distribution at core inlet and the safety of nuclear power plant. The flow distribution and mixing characteristics in the pressurized reactor vessel for the 1000MWe advanced pressurized water reactor is analyzed by using Computational Fluid Dynamics (CFD) method in this study. The geometry model of the full-scaled reactor vessel is built, which includes the cold and hot legs, downcomer, lower plenum, core, upper plenum, top plenum, and is verified with some parameters in DCD. Under normal condition, it is found that the flow skirt, core plate holes and outlet pipe cause pressure loss. The maximum and minimum flow coefficient is 1.028 and 0.961 respectively, and the standard deviation is 0.019. Compared with other reactor type, it shows relatively uniform of the flow distribution at the core inlet. The coolant mixing coefficient is investigated with adding additional variables, showing that mass transfer of coolant occurs near the interface. The coolant mainly distributes in the 90° area of the corresponding core inlet, and mixes at the interface with the coolant from the adjacent cold leg. 0.1% of corresponding coolant is still distributed at the inlet of the outer-ring components, indicating wide range of mixing coefficient distribution.