CHARACTERIZATION AHD FORMATION OF METAL/FEERRO-ELECTRIC/INSULAT0R/SEMICONDUCTOR(MFIS) STRUCTURE WITH A SPIN-ON GLASS AND $Ta_2O_3$ FILM AS THE BUFFER LAYER
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- Proceedings of the Materials Research Society of Korea Conference
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- 1998.08a
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- pp.133.4-133
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- 1998