Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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CHARACTERIZATION AHD FORMATION OF METAL/FEERRO-ELECTRIC/INSULAT0R/SEMICONDUCTOR(MFIS) STRUCTURE WITH A SPIN-ON GLASS AND $Ta_2O_3$ FILM AS THE BUFFER LAYER

  • Choi, Yeon-H. (Dept. of Electronic Engineering, The University of Seoul) ;
  • Kim, C.J. (Dept. of Electronic Engineering, The University of Seoul)
  • Published : 1998.08.01
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