CHARACTERIZATION AHD FORMATION OF METAL/FEERRO-ELECTRIC/INSULAT0R/SEMICONDUCTOR(MFIS) STRUCTURE WITH A SPIN-ON GLASS AND $Ta_2O_3$ FILM AS THE BUFFER LAYER
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- 한국재료학회:학술대회논문집
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- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- pp.133.4-133
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- 1998