• Title/Summary/Keyword: incident energy

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3-D resist profile simulation using string model on E-beam lithography (전자빔 리토그라피에서 스트링모델을 이용한 3차원 리지스트 프로파일 시뮬레이션)

  • 서태원;함영목;전국진;이종덕
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.6
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    • pp.144-150
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    • 1996
  • The purpose of this paper is to develop a simulation program to predict resist prifile in electron-beam lithography, where the main issue is proximity effect. The simualtion program composes of monte-carlo simulation, exposure simulation and development simulation. In nonte-carlo simulation, the absorbed energy in the resist is calculated when one electron is incident into resist, using hybrid model on the basis of the rutherford differential scattering cross section and moller theory. In exposure simulation, the absorbed energy in the resist is calculated when electrons are incident in exposure pattern. In the program, the developed profile depending on time is obtained by string model. The 0.2$\mu$m and the 0.3$\mu$m line and space patterns are experimentally delineated and compared to the simulation results to check the relevance of the program.

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Comparison of Alpha Particle Signals with respect to Incident Direction onto n-Si:H pin diodes

  • Kim, Ho-Kyung;Gyuseong Cho;Hur, Woo-Sung;Lee, Wanno;Hong, Wan-Shick
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05d
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    • pp.133-138
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    • 1996
  • For the application of hydrogenated amorphous silicon (a-Si:H) p-i-n structural diode as the alpha particle spectroscopy, the induced charge collection was simulated based on a relevant non-uniform charge generation model. The simulation was accomplished for two extreme cases of the incident direction of alpha particle, p-and n-side, respectively. As expected, for the complete charge collection, the hole collection should be severely considered due to its poor mobility and the full depletion bias required. For the comparison of signal corresponding to the detector configuration or structure, although n-i-p configuration shows a wider range of linearity to the energy, p-i-n configuration is more suitable in the viewpoint of linearity and signal value for the considering energy range.

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Influence of soil-structure interaction on seismic responses of offshore wind turbine considering earthquake incident angle

  • Sharmin, Faria;Hussan, Mosaruf;Kim, Dookie;Cho, Sung Gook
    • Earthquakes and Structures
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    • v.13 no.1
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    • pp.39-50
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    • 2017
  • Displacement response and corresponding maximum response energy of structures are key parameters to assess the dynamic effect or even more destructive structural damage of the structures. By employing them, this research has compared the structural responses of jacket supported offshore wind turbine (OWT) subjected to seismic excitations apprehending earthquake incidence, when (a) soil-structure interaction (SSI) has been ignored and (b) SSI has been considered. The effect of earthquakes under arbitrary angle of excitation on the OWT has been investigated by means of the energy based wavelet transformation method. Displacement based fragility analysis is then utilized to convey the probability of exceedance of the OWT at different soil site conditions. The results show that the uncertainty arises due to multi-component seismic excitations along with the diminution trend of shear wave velocity of soil and it tends to reduce the efficiency of the OWT to stand against the ground motions.

Diamond-based neutron scatter camera

  • Alghamdi, Ahmed;Lukosi, Eric
    • Nuclear Engineering and Technology
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    • v.54 no.4
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    • pp.1406-1413
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    • 2022
  • In this study, a diamond-based neutron scatter camera (DNSC) was developed for neutron spectroscopy in high flux environments. The DNSC was evaluated experimentally and through simulations. It was simulated using several Monte Carlo codes in a two-array layout. The two-array model included two diamond detectors. The simulation reconstructed the spectra of 252Cf and 239Pu-Be neutron sources with high accuracy (~93%). The two-diamond array system was experimentally evaluated, demonstrating the neutron spectroscopy capabilities of the DNSC. The reconstructed spectrum of the 239Pu-Be source manifested the characteristic peaks of the source. The advantage of a DNSC over a NSC is its ability to define any neutron double-scattering events without the need to absorb incident neutrons in the second detector, and atomic recoil energy information is not needed to determine the incident neutron energy.

Effect of Wave Focusing Structures in Combined Waves and a Current (파랑과 흐름의 혼합하에서 파랑집적구조물의 영향)

  • Lee, J.W.;Cheung, K.F.
    • Journal of Korean Port Research
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    • v.8 no.2
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    • pp.67-77
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    • 1994
  • A time-domain numerical model is developed to examine the performance of a wave energy focusing structure in combined waves and a current. With the current assumed to be slow and the structure fully submerged, the wave-current interaction problem is reduced to a wave scattering problem in a uniform current. The diffraction of incident waves around a narrow berm is considered. The shape of the berm is defined by a parabola, imitating that of an optical reflector. The energy focus is achieved by reflecting the incident waves through a predetermined focal point. Through the numerical simulations, the numerical model is shown to be effective in modeling the wave-current interaction problem, and the current speed and direction are shown to affect significantly the location, amplitude and sharpness of the focus.

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Control of Tilt Angle on Homeotropic Polyimide Surface by Ion Beam Alignment (이온빔 배향을 이용한 수직 폴리이미드 표면에서의 틸트 각 제어)

  • Kang, Dong-Hun;Kim, Byoung-Yong;Kim, Sang-Hoon;Hwang, Jeoung-Yeon;Han, Jin-Woo;Kim, Jong-Hwan;Kang, Hee-Jin;Ok, Chul-Ho;Oh, Yong-Cheul;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.288-289
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    • 2006
  • The tilt angle generation of nematic liquid crystal(NLC) on the homeotropic polyimide(PI) surface by the new Ion beam alignment method is studied. The tilt angle of NLC on the homeotropic PI surface for all incident angle is about 38and this has a stabilization trend. And the good LC alignment of the NLC on the PI surface by ion beam exposure of 45Incident angle was observed. Also the tilt angle of NLC on the homeotropic PI surface by ion beam exposure of 45Incident angle had a tendency to decrease as ion beam energy density increase. So we had known that pretilit angle could be controlled from verticality to horizontality.

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The Characteristic Analysis of the Dye-sensitized Solar Cells as the Change of Incident Angle (광 입사각에 따른 염료감응형 태양전지의 발전특성 분석)

  • Seo, Hyun-Woong;Son, Min-Kyu;Lee, Kyoung-Jun;Jang, Jin-Ju;Hong, Ji-Tae;Kim, Hee-Je
    • 한국신재생에너지학회:학술대회논문집
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    • 2008.10a
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    • pp.124-127
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    • 2008
  • Dye-sensitized solar cells (DSCs) have been proposed as a substitute for overcoming the limitation of Si solar cells because DSC has the various applications using advantages of DSC such as low cost, transparency and flexibility. Although some people point out low efficiency of DSC as the important problem at present, general views say that actually cumulative power is not insufficient as compared with Si solar cell. Therefore, we analyzed the characteristics of both cells according to the change of incident angle in this study. The insensibility about the incident angle has more developable time. Finally, DSC is able to fill a shortage of power caused from low efficiency of DSC for same time by developing during impossible time to develop in Si solar cell. As a result, DSC has 75% and 210% cumulative power of Si solar cell in summer and winter under the standard sunshine duration.

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Field Observation and Quasi-3D Numerical Modeling of Coastal Hydrodynamic Response to Submerged Structures

  • Yejin Hwang;Kideok Do;Inho Kim;Sungyeol Chang
    • Journal of Ocean Engineering and Technology
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    • v.37 no.2
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    • pp.68-79
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    • 2023
  • Even though submerged breakwater reduces incident wave energy, it redistributes the coastal area's wave-induced current, sediment transport, and morphological change. This study examines the coastal hydrodynamics and the morphological response of a wave-dominated beach with submerged breakwaters installed through field observation and quasi-3D numerical modeling. The pre-and post-storm bathymetry, water level, and offshore wave under storm forcing were collected in Bongpo Beach on the East coast of Korea and used to analyze the coastal hydrodynamic response. Four vertically equidistant layers were used in the numerical simulation, and the wave-induced current was examined using quasi-3D numerical modeling. The shore normal incident wave (east-northeast) generated strong cross-shore and longshore currents toward the hinterland of the submerged breakwater. However, the oblique incident wave (east-southeast) induced the southeastward longshore current and the sedimentation in the northeast area of the beach. The results suggested that the incident wave direction is a significant factor in determining the current and sediment transport patterns in the presence of the submerged breakwaters. Moreover, the quasi-3D numerical modeling is more appropriate for estimating the wave transformation, current, and sediment transport pattern in the coastal area with the submerged breakwater.

Vertical Alignment of Liquid Crystal by Ion Beam Irradiation (이온빔 배향에 의한 수직 배향막의 액정 배향)

  • Kang, Dong-Hoon;Kim, Byoung-Yong;Kim, Young-Hwan;Ok, Chul-Ho;Han, Jeong-Min;Kim, Jong-Hwan;Lee, Sang-Keuk;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.414-414
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    • 2007
  • In this study, Liquid Crystal (LC) alignment and tilt angle generation in Nematic Liquid Crystal (NLC) with negative dielectric anisotropy on the homeotropic PI surface with new ion beam exposure are reported. Also. high density of ion beam energy (DuoPIGatron type Ar ion gun) is used in this study. The tilt angle of NLC on the homeotropic Polyimide (PI) surface for all incident angles is measured about 38 degree and this has a stabilization trend. And the good LC alignment of NLC on the PI surface with ion beam exposure of $45^{\circ}$ incident angle was observed. Also the tilt angle of NLC on the homeotropic PI surface with ion beam exposure of $45^{\circ}$ had a tendency to decrease as ion beam energy density increase. The tilt angle could be controlled from verticality to horizontality. Also, the LC aligning capabilities of NLC on the homeotropic PI surface according to ion beam energy has the goodness in case of more than 1500 eV. Finally. the superior LC alignment thermal stability on the homeotropic PI surface with ion beam exposure can be achieved. For OCB(Optically Compensated Bend) mode driving, we can need pretilt angles control for fast response time. In this study, We success pretilt angles control. Consequently, this result can be applied for OCB mode.

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Effects of Bias Voltage and Ion-incident Angle on the Etching of Photoresist in a High-density CHF3 Plasma (고밀도 CHF3 플라즈마에서 바이어스 전압과 이온의 입사각이 Photoresist의 식각에 미치는 영향)

  • Kang, Se-Koo;Min, Jae-Ho;Lee, Jin-Kwan;Moon, Sang Heup
    • Korean Chemical Engineering Research
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    • v.44 no.5
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    • pp.498-504
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    • 2006
  • The etch rates of photoresist (PR) and the etch selectivity of $SiO_2$ to PR in a high density $CHF_3$ plasma were investigated at different ion-incident angles and bias voltages. A Faraday cage was employed for the accurate control of ion-incident angles. The ion energy was controlled by changing bias voltages. The etch rate of $SiO_2$ continuously decreased with ion-incident angles but the etch rate of PR remained constant up to the middle angle region and decreased afterwards. The etch rates of $SiO_2$ normalized to those at $0^{\circ}$ incident angle changed with the ion-incident angle following a cosine(${\theta}$) curve. On the other hand, the normalized etch rates of the PR changed showing a drastic over-cosine shape in the middle angle region. The etch selectivity of $SiO_2$ to PR decreased with an increase in the ion-incident angle because the etch yields of PR were enhanced by physical sputtering in the middle angle region compared to the case of $SiO_2$ etching. The etch selectivity of $SiO_2$ to PR decreased with an increase in the bias voltage at nearly all ion-incident angles.