• Title/Summary/Keyword: hydrogen plasma

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Removal of Interface State Density of SiO2/Si Structure by Nitric Acid Oxidation Method (질산산화법을 이용한 SiO2/Si 구조의 계면결함 제거)

  • Choi, Jaeyoung;Kim, Doyeon;Kim, Woo-Byoung
    • Korean Journal of Materials Research
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    • v.28 no.2
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    • pp.118-123
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    • 2018
  • 5 nm-thick $SiO_2$ layers formed by plasma-enhanced chemical vapor deposition (PECVD) are densified to improve the electrical and interface properties by using nitric acid oxidation of Si (NAOS) method at a low temperature of $121^{\circ}C$. The physical and electrical properties are clearly investigated according to NAOS times and post-metallization annealing (PMA) at $250^{\circ}C$ for 10 min in 5 vol% hydrogen atmosphere. The leakage current density is significantly decreased about three orders of magnitude from $3.110{\times}10^{-5}A/cm^2$ after NAOS 5 hours with PMA treatment, although the $SiO_2$ layers are not changed. These dramatically decreases of leakage current density are resulted from improvement of the interface properties. Concentration of suboxide species ($Si^{1+}$, $Si^{2+}$ and $Si^{3+}$) in $SiO_x$ transition layers as well as the interface state density ($D_{it}$) in $SiO_2/Si$ interface region are critically decreased about 1/3 and one order of magnitude, respectively. The decrease in leakage current density is attributed to improvement of interface properties though chemical method of NAOS with PMA treatment which can perform the oxidation and remove the OH species and dangling bond.

Fabrication of Highly Efficient Nanocrystalline Silicon Thin-Film Solar Cells Using Flexible Substrates (유연기판을 이용한 고효율 나노결정질 실리콘 박막 태양전지 제조)

  • Jang, Eunseok;Kim, Sol Ji;Lee, Ji Eun;Ahn, Seung Kyu;Park, Joo Hyung;Cho, Jun-Sik
    • Current Photovoltaic Research
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    • v.2 no.3
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    • pp.103-109
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    • 2014
  • Highly efficient hydrogenated nanocrystalline silicon (nc-Si:H) thin-film solar cells were prepared on flexible stainless steel substrates using plasma-enhanced chemical vapor deposition. To enhance the performance of solar cells, material properties of back reflectors, n-doped seed layers and wide bandgap nc-SiC:H window layers were optimized. The light scattering efficiency of Ag back reflectors was improved by increasing the surface roughness of the films deposited at elevated substrate temperatures. Using the n-doped seed layers with high crystallinity, the initial crystal growth of intrinsic nc-Si:H absorber layers was improved, resulting in the elimination of the defect-dense amorphous regions at the n/i interfaces. The nc-SiC:H window layers with high bandgap over 2.2 eV were deposited under high hydrogen dilution conditions. The vertical current flow of the films was enhanced by the formation of Si nanocrystallites in the amorphous SiC:H matrix. Under optimized conditions, a high conversion efficiency of 9.13% ($V_{oc}=0.52$, $J_{sc}=25.45mA/cm^2$, FF = 0.69) was achieved for the flexible nc-Si:H thin-film solar cells.

Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition

  • Kim, Y.;Song, W.;Lee, S.Y.;Jung, W.;Kim, M.K.;Jeon, C.;Park, C.Y.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.80-80
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    • 2010
  • Graphene has attracted tremendous attention for the last a few years due to it fascinating electrical, mechanical, and chemical properties. Up to now, several methods have been developed exclusively to prepare graphene, which include micromechanical cleavage, polycrystalline Ni employing chemical vapor deposition technique, solvent thermal reaction, thermal desorption of Si from SiC substrates, chemical routes via graphite intercalation compounds or graphite oxide. In particular, polycrystalline Ni foil and conventional chemical vapor deposition system have been widely used for synthesis of large-area graphene. [1-3] In this study, synthesis of mono-layer graphene on a Ni foil, the mixing ratio of hydrocarbon ($CH_4$) gas to hydrogen gas, microwave power, and growth time were systemically optimized. It is possible to synthesize a graphene at relatively lower temperature ($500^{\circ}C$) than those (${\sim}1000^{\circ}C$) of previous results. Also, we could control the number of graphene according to the growth conditions. The structural features such as surface morphology, crystallinity and number of layer were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM), transmission electron microscopy (TEM) and resonant Raman spectroscopy with 514 nm excitation wavelength. We believe that our approach for the synthesis of mono-layer graphene may be potentially useful for the development of many electronic devices.

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Antioxidant Action of Ginseng : An hypothesis (인삼의 항산화 작용)

  • Lee, D.W.;Sohn, H.O.;Lim, H.B.;Lee, Y.G.;Aprikian, A.G.;Aprikian, G.V.
    • Journal of Ginseng Research
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    • v.19 no.1
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    • pp.31-38
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    • 1995
  • Antioxidant effect of Korean ginseng (Panax ginseng C.A. Meyer) was investigated in rats. Long-term administration of ginseng water extract protected the activity of liver cytosotic SOD, catalase and glutathione peroxidase from being significantly decreased with advancing age (p<0.05). It was more effective toward glutathione peroxidase than other antioxidant enzymes. However, the level of sulfhydryl compounds and its related enzymes such as glutathione reductase and glutathione-5-transferase was not significantly changed by the administration of ginseng. Liver microsomal formation of reactive oxygen species such as superoxide and hydrogen peroxide did not show a significant difference between two groups although it was slightly decreased with age, but lipid peroxidizability of microsomal membrane induced by a prooxidant was slightly lower in ginseng-treated rats. Interestingly, antioxidant capacity of plasma from ginseng treated rats on autooxidation of ok-brain homogenates was much higher than that of normal ones. However, resistance of RBC membrane against oxidative stress showed a similar tendency. The content of serum TBA reactive substances lowered consistently in the rats treated with r ginseng at all corresponding age and a significant difference between two groups was found at 24 months of age (p<0.05). Ginseng extract protected lipid peroxidation in brain and liver. This protection was more effective in the stressed rats imposed by immobilization than normal ones. In conclusion, ginseng water extract protected the age related deterioration of major antioxidant enzymes, and this effect was more striking with increasing duration of treatment. This comprehensive antioxidant action of ginseng seems to be bra certain action of ginseng other than a direct antioxidant action, which might be a long term normalizing effect through the harmony of various components.

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Conversion of Cellulose into Polyols over Noble Metal Catalysts Supported on Activated Carbon (활성탄에 담지된 귀금속 촉매를 이용한 셀룰로우스의 폴리올로의 전환)

  • You, Su-Jin;Kim, Saet-Byul;Kim, Yong-Tae;Park, Eun-Duck
    • Clean Technology
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    • v.16 no.1
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    • pp.19-25
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    • 2010
  • In this work, the conversion of crystalline cellulose into polyols in the presence of hydrogen was examined over noble metal (Pt, Ru, Ir, Rh, and Pd) catalysts supported on activated carbon. For comparison, Pt/${\gamma}-Al_2O_3$ and Pt/H-mordenite were also investigated. Several techniques: $N_2$ physisorption, X-ray diffraction(XRD), inductively-coupled plasma-atomic emission spectroscopy (ICP-AES), temperature-programmed reduction with $H_2$ ($H_2$-TPR) and CO chemisorption were employed to characterize the catalysts. The cellulose conversion was not strongly dependent on the types of the catalyst used. Pt/AC showed the highest yields to polyols among activated carbon-supported noble metal catalysts, viz. Pt/AC, Ru/AC, Ir/AC, Rh/AC and Pd/AC.

Nanostructure Control of PtNiN/C Catalysts for Oxygen Reduction Reaction by Regulating Displacement Rate of Precursor (전구체 치환 속도 조절을 통한 산소환원반응용 PtNiN/C 촉매의 나노구조 제어)

  • Dong-gun Kim;Seongseop Kim;Sung Jong Yoo;Pil Kim
    • Clean Technology
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    • v.30 no.1
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    • pp.55-61
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    • 2024
  • Efforts are actively underway to address the issues related to the high cost of Pt-based catalysts for oxygen reduction reactions by designing high-performance Pt-based alloys through the control of their nanostructures. In this study, a method was proposed to control the nanostructure of Pt-based alloys, either hollow or core-shell, by adjusting the pH of the solution during the galvanic replacement reaction between the carbon-supported nickel-nickel nitride composite and the Pt ions. The physical characteristics, including the state, quantity, and morphology of the metal particles under different preparation conditions, were evaluated through X-ray diffraction, transmission electron microscopy, and inductively coupled plasma. When the prepared catalysts were employed for the oxygen reduction reaction, they exhibited an improvement in area specific-activity compared to a commercial Pt/C, with a 1.7 and 1.9-fold enhancement for the hollow and core-shell structured catalysts, respectively.

Ethanol Induced Leucocytic and Hepatic DNA Strand Breaks Are Prevented by Styela clava and Styela plicata Supplementation in Male SD Rats (알코올로 인한 흰쥐의 백혈구 및 간 DNA 손상에 미치는 미더덕과 오만둥이 분말의 보충섭취 효과)

  • Kim, Jung-Mi;Park, Hae-Ryoung;Lee, Seung-Cheol;Park, Eun-Ju
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.36 no.10
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    • pp.1271-1278
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    • 2007
  • In this study, the ability of Styela clava or Styela plicata to reduce ethanol-induced hepatotoxicity and hepatic and leucocytic DNA damages was evaluated. Twenty four male SD rats were given 25% ethanol containing water (ad lib, p.o.) and divided into 3 groups; ethanol treated control group (EtOH), ethano1+3% S. clava (EtOH+SC), and ethano1+3% S. plicata (EtOH+SP). After 6 weeks, the supplementation of S. clava reduced the plasma ALT, ALP and LDH activities significantly (p<0.05), while S. plicata induced significant decrease in the plasma LDH activity only. The comet assay was employed to quantify the alcohol-induced DNA damage in rat hepatocytes and leucocytes. A significant protective effect on hepatic and leucocytic DNA damages was observed in S. clava or S. plicata supplemented groups compared to the EtOH control group. The hepatic DNA damage was correlated positively with plasma ALP and LDH activities. These results demonstrated that S. clava or S. plicata supplementation protected alcohol-induced hepatic and leucocytic DNA damage.

The measurement of oxygen and metal ratio of simulated spent fuels by wet and dry chemical analysis (습식 및 건식법에 의한 모의 사용후핵연료의 O/M비 측정)

  • Choi, Ke Chon;Lee, Chang Heon;Kim, Won Ho
    • Analytical Science and Technology
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    • v.16 no.2
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    • pp.117-124
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    • 2003
  • Oxygen to metal ratio has been measured by wet and dry chemical analysis to study the properties of sintered $UO_2$ pellets and $U_3O_8$ in the lithium reduction process of spent pressurized water reactor fuels. Uranium dioxide pellets simulated for the spent PWR fuels with burnup values of 20,000~60,000 MWd/MtU were prepared by mixing $UO_2$ powder and oxides of fission product elements, pelleting the powder mixture and sintering it at $1,700^{\circ}C$ under a hydrogen atmosphere. For wet chemical analysis, the simulated spent fuels were dissolved with mixed acid (10 M HCl : 8 M $HNO_3$, 2.5 : 1, v/v) using acid digestion bomb technique. The total amount of uranium and fission products added in the simulated spent fuels were measured using inductively coupled plasma atomic emission spectrometry. Weight change of the simulated fuel during its oxydation was measured by thermogravimetry and then the O/M ratio result was compared to that obtained by wet chemical analysis. Influence of $Mo_{0.4}-Ru_{0.4}-Rh_{0.1}-Pd_{0.1}$, quaternary alloy, on the determination of O/M ratio was investigated.

PAF Contributes to Intestinal Ischemia/Reperfusion-Induced Acute Lung Injury through Neutrophilic Oxidative Stress

  • Lee, Young-Man;Park, Yoon-Yub
    • The Korean Journal of Physiology and Pharmacology
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    • v.3 no.4
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    • pp.405-414
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    • 1999
  • The role of platelet-activating factor (PAF) was investigated in intestinal ischemia/reperfusion (I/R) induced acute lung injury associated with oxidative stress. To induce acute lung injury following intestinal I/R, superior mesenteric arteries were clamped with bulldog clamp for 60 min prior to the 120 min reperfusion in Sprague-Dawley rats. Acute lung injury by intestinal I/R was confirmed by the measurement of lung leak index and protein content in bronchoalveolar lavage (BAL) fluid. Lung leak and protein content in BAL fluid were increased after intestinal I/R, but decreased by WEB 2086, the PAF receptor antagonist. Furthermore, the pulmonary accumulation of neutrophils was evaluated by the measurement of lung myeloperoxidase (MPO) activity and the number of neutrophils in the BAL fluid. Lung MPO activity and the number of neutrophils were increased (p<0.001) by intestinal I/R and decreased by WEB 2086 significantly. To confirm the oxidative stress induced by neutrophilic respiratory burst, gamma glutamyl transferase (GGT) activity was measured. Lung GGT activity was significantly elevated after intestinal I/R (p<0.001) but decreased to the control level by WEB 2086. On the basis of these experimental results, phospholipase $A_2\;(PLA_2),$ lysoPAF acetyltransferase activity and PAF contents were measured to verify whether PAF is the causative humoral factor to cause neutrophilic chemotaxis and oxidative stress in the lung following intestinal I/R. Intestinal I/R greatly elevated $PLA_2$ activity in the lung as well as intestine (p<0.001), whereas WEB 2086 decreased $PLA_2$ activity significantly (p<0.001) in both organs. LysoPAF acetyltransferase activity, the PAF remodelling enzyme, in the lung and intestine was increased significantly (p<0.05) also by intestinal I/R. Accordingly, the productions of PAF in the lung and intestine were increased (p<0.001) after intestinal I/R compared with sham rats. The level of PAF in plasma was also increased (p<0.05) following intestinal I/R. In cytochemical electron microscopy, the generation of hydrogen peroxide was increased after intestinal I/R in the lung and intestine, but decreased by treatment of WEB 2086 in the lung as well as intestine. Collectively, these experimental results indicate that PAF is the humoral mediator to cause acute inflammatory lung injury induced by intestinal I/R.

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Bond Strength of Wafer Stack Including Inorganic and Organic Thin Films (무기 및 유기 박막을 포함하는 웨이퍼 적층 구조의 본딩 결합력)

  • Kwon, Yongchai;Seok, Jongwon
    • Korean Chemical Engineering Research
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    • v.46 no.3
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    • pp.619-625
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    • 2008
  • The effects of thermal cycling on residual stresses in both inorganic passivation/insulating layer that is deposited by plasma enhanced chemical vapor deposition (PECVD) and organic thin film that is used as a bonding adhesive are evaluated by 4 point bending method and wafer curvature method. $SiO_2/SiN_x$ and BCB (Benzocyclobutene) are used as inorganic and organic layers, respectively. A model about the effect of thermal cycling on residual stress and bond strength (Strain energy release rate), $G_c$, at the interface between inorganic thin film and organic adhesive is developed. In thermal cycling experiments conducted between $25^{\circ}C$ and either $350^{\circ}C$ or $400^{\circ}C$, $G_c$ at the interface between BCB and PECVD $ SiN_x $ decreases after the first cycle. This trend in $G_c$ agreed well with the prediction based on our model that the increase in residual tensile stress within the $SiN_x$ layer after thermal cycling leads to the decrease in $G_c$. This result is compared with that obtained for the interface between BCB and PECVD $SiO_2$, where the relaxation in residual compressive stress within the $SiO_2$ induces an increase in $G_c$. These opposite trends in $G_cs$ of the structures including either PECVD $ SiN_x $ or PECVD $SiO_2$ are caused by reactions in the hydrogen-bonded chemical structure of the PECVD layers, followed by desorption of water.