• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.74-74
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• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• Nuclear Engineering and Technology
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• 제55권7호
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• pp.2678-2686
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• 2023

This work demonstrates the results of full-scale numerical experiments of a hybrid thorium-containing fuel plant operating in a state close to critical due to a controlled source of D-T neutrons. The proposed facility represented a level of generated power (~10-100 MW_t) in a small pilot. In this work, the simulation of the D-T neutron plasma source operation in conjunction with the facility blanket was performed. The fission of fuel nuclei and the formation of spatial-energy release were studied in this simulation, in pulsed and stationary modes of the facility operation. The optimization results of neutronic and fluid dynamics studies to level the emerging offsets of the radial energy formed in the volume of the facility multiplying part due to the pulsed operation of the D-T neutron plasma source were presented. The results will be useful in improving the power control-based subcriticality monitoring method in coupled systems of the "pulsed neutron source-subcritical fuel assembly" type.

• 조명전기설비학회논문지
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• 제28권9호
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• pp.89-98
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• 2014

A diagnostic fluoroscopy X-ray system uses a 32kW or greater X-ray generator for obtaining real-time moving images and high-resolution images. Fluoroscopy X-ray systems have to use a high-capacity AC power source to perform long-time low-power fluoroscopy and short-time high-power spot exposure. In this paper, we propose a hybrid type X-ray generator for fluoroscopy X-ray system which can perform fluoroscopy and spot exposure with a low-capacity AC power source and an energy storage device. The characteristics of energy storage devices are compared and each energy storage device is modelled to equivalent circuit. And the characteristics of available energy are analyzed as a function of output voltage and power. A 32kW class hybrid X-ray generator with EDLC as an energy storage device for fluoroscopy X-ray system was constructed, and its validity was verified by means of simulations and experiments.

• Journal of Electrical Engineering and Technology
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• 제13권1호
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• pp.270-279
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• 2018

This paper elucidates a hysteresis current controller for enhancing the performance of static synchronous compensator (STATCOM) using cascaded H-bridge multilevel inverter. Due to the rising power demand and growing conventional generation costs a new alternative in renewable energy source is gaining popularity and recognition. A five level single phase cascaded multilevel inverter with two separated dc sources, which is energized by photovoltaic - wind hybrid energy source. The voltages across the each dc source is balanced and standardized by the proposed hysteresis current controller. The performance of STATCOM is analyzed by connecting with grid connected system, under the steady state & dynamic state. To reduce the Total Harmonic Distortion (THD) and to improve the output voltage, closed loop hysteresis current control is achieved using PLL and PI controller. The performance of the proposed system is scrutinized through various simulation results using matlab/simulink and hardware results are also verified with simulation results.

• 전력전자학회논문지
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• 제22권1호
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• pp.36-43
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• 2017

This paper describes a hybrid multi-output three-level DC/DC converter suitable for a wide, high-input voltage range of an auxiliary power supply for a high-power photovoltaic generating system. In a high-power photovoltaic generating system, the solar panel output voltage depends on solar radiation quantity and varies from 450Vdc to 1100Vdc. The proposed hybrid multi-output three-level DC/DC converter, which is an auxiliary power supply, would be used as power source for control printed circuit boards and relay and cooling fans in a high-power photovoltaic generating system. The proposed multi-output ($24V_{DC}/30A$, $230V_{DC}/5A$) hybrid three-level boost converter, which uses an energy recovery snubber, is controlled by variable-frequency and phase-shifted modulations and can achieve zero-voltage switching with all operating conditions of input voltage and load range. Experimental results of a 2kW prototype are evaluated and implemented to verify the performance of the proposed converter.

• 전기학회논문지
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• 제62권1호
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• pp.63-69
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• 2013

In recent years, technology for storing a preliminary power or a surplus of photovoltaic energy is required. This technique, as well as store a preliminary energy and improve the reliability of the gird safety. This system can plan a efficient power generation through the flexibility of the power supply from the perspective of not only provider but also user. Accordingly, the realization of the smart grid can be expected. This paper proposes a hybrid PCS using a photovoltaic and a lithium-polymer battery with the characteristics of high density energy. The main energy source of a hybrid PCS is a photovoltaic, grid and the auxiliary energy source is a lithium-polymer battery. The operation of a proposed system in this paper is verified with simulation and experimental results.

• 한국추진공학회지
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• 제26권3호
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• pp.1-9
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• 2022

본 연구에서 대상으로 삼은 비행체는 4~5인승급 수직이착륙기이며, 해당 비행체용 추진시스템은 가스터빈엔진과 배터리팩을 주 전력원으로 사용하여 다수의 모터가 필요로 하는 요구전력을 공급하는 분산 하이브리드 추진시스템이다. 본 연구에서는 기본설계 결과를 바탕으로 MATLAB/Simulink 프로그램을 사용하여 하이브리드 추진시스템용 설계/해석 플랫폼을 개발하였다. 시뮬레이션 해석을 통해 비행 시나리오에 따른 각 전력원별 출력 거동 및 운용 범위를 확인하였고, 이를 통해 기본설계 결과의 실현가능성을 확인하였다.

• Journal of Power Electronics
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• 제15권6호
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• pp.1438-1445
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• 2015

A new DC-DC power converter is researched for renewable energy and battery hybrid power supplies systems in this paper. At the charging mode, a renewable energy source provides energy to charge a battery via the proposed converter. The operating principle of the proposed converter is the same as the conventional DC-DC buck converter. At the discharging mode, the battery releases its energy to the DC bus via the proposed converter. The proposed converter is a non-isolated high step-up DC-DC converter. The coupled-inductor technique is used to achieve a high step-up voltage gain by adjusting the turns ratio. Moreover, the leakage-inductor energies of the primary and secondary windings can be recycled. Thus, the conversion efficiency can be improved. Therefore, only one power converter is utilized at the charging or discharging modes. Finally, a prototype circuit is implemented to verify the performance of the proposed converter.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2002년도 추계학술대회 논문집
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• pp.199-202
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• 2002

This paper suggests the control algorithm of a 3-phase 3-wire series active power filters which have harmonic voltage source and harmonic current source This suggested control algorithm can compensate harmonics which are generated by nonlinear load such as diode or thyristor converter and reactive power in 3-phase 3-wire power distribution system This control algorithm extracts a compensation voltage reference from performance function without phase transformation Therefore this control algorithm is simpler than any other conventional control algorithm. 3-phase 3-wire series active power filter and hybrid active power filter is manufactured and experiments are carried out for harmonic voltage source and harmonic current source to verify the effectiveness of presented control algorithm Experimental results are presented in this Paper, as well.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2000년도 전력전자학술대회 논문집
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• pp.262-265
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• 2000

This paper presents analysis of control characteristics of high power hybrid multilevel PWM rectifier without bulky and heavy isolation transformers. It will be shown that the DC voltages for multilevel output generation may be directly built up from AC utility source. The multilevel PWM rectifier is analyzed by using the circuit DQ transformation whereby the static and dynamic characteristics and some useful design equations are obtained. Finally to confirm the validity of the analysis MATLAB simulation are carried out.