• 제목/요약/키워드: humdity sensor

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실란 바인더에 따른 탄소나노튜브 박막의 감습 특성 (Response Characteristics of CNT Thin Film on Humidity by Silane Binders)

  • 김성진;이호중
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.196-196
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    • 2010
  • In this work, we deposited SWNTs/silane hybrid thin films by multiple spray-coating on glass substrate, and examined their electrical response for humidity. Generally silane binders which are often used in CNT solution to adhere CNTs to substrate well can be easily functionalized to each own group on the surface of CNTs after they are hardened by way of the hydrolysis reaction. We investigated how silane binders (TEOS,, MTMS and VTMS) in SWNTs hybrid thin films make effect to their electrical response on humidity. As the result, we observed that the resistance in the sample using TEOS was changed dramatically while it was almost invariant in the samples using MTMS and VTMS for increasing humidity.

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