• Title/Summary/Keyword: hole transport

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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대졸자들의 취업 여부에 따른 정신건강의 변화

  • Jang, Jae-Yun;Jang, Eun-Yeong
    • Proceedings of the Korean Association for Survey Research Conference
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    • 2005.12a
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    • pp.91-113
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    • 2005
  • 본 연구는 청년들의 취업 및 실업 경험이 정신건강에 어떠한 영향을 미치는지 종단적으로 알아보는 데 목적이 있다. 구체적으로 대학을 졸업하고 난 이후에 지속적으로 미취업 상태로 남아있는 사람들의 정신건강의 문제 그리고 취업에 성공하는 경험이 정신건강에 미치는 영향을 미치는지 알아보고자 한다. 이를 위해서 국내 대학교 4학년생들을 대상으로 1차 조사를 실시하고 이후 약 6개월 간격으로 2차 조사, 3차 및 4차 조사를 실시하였다. 네 시점에서 모두 응답자들의 취업여부와 정신건강 수준을 측정하였다. 4차 조사까지 모두 응답한 560명 중에서 2차, 3차, 및 4차 시점의 취업여부에 의해서 집단을 다음과 같이 나누었다: 2차, 3차 및 4차 시점 순서대로, 모두 취업 상태인 집단('취업-취업-취업 집단'), 3차 시점에서 취업에 성공한 집단('미취업-취업-취업 집단'), 4차 집단에서 취업에 성공한 집단('미취업-미취업-취업집단') 그리고 모두 미취업 상태인 집단('미취업-미취업-미취업 집단'). 그 결과를 보면, 취업-취업-취업 집단의 경우에는 취업에 성공한 2차 시점에서 정신건강 수준이 상당히 좋아졌다가 3차 및 4차 시점에서 다시 본래 수준으로 돌아가는 경향을 보였다. 미취업-취업-취업 집단의 경우에는 취업에 성공한 3차 시점 이후로, 미취업-미취업-취업 집단의 경우에는 취업에 성공한 4차 시점에서 정신건강 수준이 좋아지는 경향을 보였다. 지속적으로 미취업 상태였던 집단에서는 3차 시점에서 정신건강 수준이 상당히 나빠졌다가 여전히 미취업 상태인 4차 시점에서 오히려 완화되는 경향을 보였다. 본 연구의 시사점과 제한점 및 장래 연구의 과제가 논의되었다.iments and numerical analysis of luminescence efficiency in the hole carrier transport layer's thicknes. 나아갈 것이며, 아울러 향후에도 아직 미흡한 분야인 IT 아웃소싱에서 적정수준의 대가지급 방안 및 바람직한 Relationship 에 영향을 미치는 여러 가지 요인에 대해서도 살펴 봄으로써 IT분야의 Outsourcing을 검토하거나, 추진할 때 도움이 될 수 있도록 하고자 한다.개의 총 297개의 데이터를 추출하여 사용하였다. 실험과는 좌측공격 91.7%, 우측공격 100%, 중앙공격 87.5%, 코너킥 97.4%, 프리킥 75%로서 매우 양호한 인식율을 보였다. 사용경험정도가 가입직후 해지에만 영향을 미치는 요인임을 보여준다. 또한 매체의 정보전달 풍부성 (media richness)이 상대적으로 높은 소매점이나 웹사이트를 통해 서비스에 가입한 소비자일수록 가입 직후뿐만 아니라 서비스사용 이후에도 낮은 해지성향을 나타냈다. 이러한 분석결과를 바탕으로 인터넷전화 서비스에 적합한 고객지원 프로그램 설계와 마케팅 매체선정과 관련한 전략적 시사점을 도출한다. 그리고 국내에서 최근 이슈가 되고 있는 차세대 무선인터넷 서비스인 와이브로 출시에 따른 마케팅 및 고객관리와 관련된 시사점을 논의한다.는 교합면에서 2, 3, 4군이 1군에 비해 변연적합도가 높았으며 (p < 0.05), 인접면과 치은면에서는 군간 유의차를 보이지 않았다 이번 연구를 통하여 복합레진을 간헐적 광중합시킴으로써 변연적합도가 향상될 수 있음을 알 수 있었다.시장에 비해 주가가 비교적 안정적인 수준을 유지해 왔다고 볼

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Fabrication and Characterization of Polymer Light Emitting Diodes by Using PFO/PFO:MEH-PPV Double Emitting Layer (PFO/PFO:MEH-PPV 이중 발광층을 이용한 고분자 유기발광다이오드의 제작과 특성 연구)

  • Chang, Young-Chul;Shin, Sang-Baie
    • Journal of the Microelectronics and Packaging Society
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    • v.15 no.2
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    • pp.23-28
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    • 2008
  • To improve the external quantum efficiency by means of the optimization of the polymer light emitting diodes(PLEDs) structure, the PLED with ITO/PEDOT:PSS/(PFO)/PFO:MEH-PPV/LiF/Al structure were fabricated and investigated the electrical and optical properties for the prepared devices. ITO(indium tin oxide) and PEDOT:PSS [poly (3,4-ethylenedioxythiophene): poly(styrene sulfolnate)] were used as transparent anode film and hole transport materials, respectively. PFO[poly(9,9-dioctylfluorene)] and MEHPPV[poly(2-methoxy-5(2-ethylhe xoxy)-1,4-phenylenevinyle)] were used as the light emitting host and dopant materials. The doping concentration of MEH-PPV was 9wt% with thickness of about $400{\AA}$. We investigated the dependence of the PFO thickness ranging from $200{\AA}$ to $300{\AA}$ on the electrical, optical properties of PLEDs. Among prepared PLED devices with different PFO thicknesses, the highest value of the luminance was obtained for the PLED device with $250{\AA}$ in thickness. As a result, the current density and luminance ware found to be about $400mA/cm^2$ and $1500cd/m^2$ at 13V, respectively. In addition, the luminance and current efficiency of PLED device with double emitting layer (PFO/PFO:MEH-PPV) were improved about 3 times compared with the one with single emitting layer (PFO:MEH-PPV).

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Enhanced Light Harvesting by Fast Charge Collection Using the ITO Nanowire Arrays in Solid State Dye-sensitized Solar Cells

  • Han, Gill Sang;Yu, Jin Sun;Jung, Hyun Suk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.463-463
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    • 2014
  • Dye-sensitized solar cells (DSSCs) have generated a strong interest in the development of solid-state devices owing to their low cost and simple preparation procedures. Effort has been devoted to the study of electrolytes that allow light-to-electrical power conversion for DSSC applications. Several attempts have been made to substitute the liquid electrolyte in the original solar cells by using (2,2',7,7'-tetrakis (N,N-di-p-methoxyphenylamine)-9-9'-spirobi-fluorene (spiro-OMeTAD) that act as hole conductor [1]. Although efficiencies above 3% have been reached by several groups, here the major challenging is limited photoelectrode thickness ($2{\mu}m$), which is very low due to electron diffusion length (Ln) for spiro-OMeTAD ($4.4{\mu}m$) [2]. In principle, the $TiO_2$ layer can be thicker than had been thought previously. This has important implications for the design of high-efficiency solid-state DSSCs. In the present study, we have fabricated 3-D Transparent Conducting Oxide (TCO) by growing tin-doped indium oxide (ITO) nanowire (NWs) arrays via a vapor transport method [3] and mesoporous $TiO_2$ nanoparticle (NP)-based photoelectrodes were prepared using doctor blade method. Finally optimized light-harvesting solid-state DSSCs is made using 3-D TCO where electron life time is controlled the recombination rate through fast charge collection and also ITO NWs length can be controlled in the range of over $2{\mu}m$ and has been characterized using field emission scanning electron microscopy (FE-SEM). Structural analyses by high-resolution transmission electron microscopy (HRTEM) and X-Ray diffraction (XRD) results reveal that the ITO NWs formed single crystal oriented [100] direction. Also to compare the charge collection properties of conventional NPs based solid-state DSSCs with ITO NWs based solid-state DSSCs, we have studied intensity modulated photovoltage spectroscopy (IMVS), intensity modulated photocurrent spectroscopy (IMPS) and transient open circuit voltages. As a result, above $4{\mu}m$ thick ITO NWs based photoelectrodes with Z907 dye shown the best performing device, exhibiting a short-circuit current density of 7.21 mA cm-2 under simulated solar emission of 100 mW cm-2 associated with an overall power conversion efficiency of 2.80 %. Finally, we achieved the efficiency of 7.5% by applying a CH3NH3PbI3 perovskite sensitizer.

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Preparation of Polymer Light Emitting Diodes with PFO-poss Organic Emission Layer on ITO/Glass Substrates (ITO/Glass 기판위에 PFO-poss 유기 발광층을 가지는 고분자 발광다이오드의 제작)

  • Yoo, Jae-Hyouk;Chang, Ho-Jung
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.4
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    • pp.51-56
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    • 2006
  • Polymer light emitting diodes (PLEDs) with ITO/EDOT:PSS/PVK/PFO-poss/LiF/Al structures were prepared by the spin coating method on ITO(indium tin oxide)/glass substrates. PFO-poss[Poly(9,9-dioctylfluorenyl-2,7-diyl) end capped with poss] was used as light emitting polymer. PVK[poly(N-vinyl carbazole)] and PEDOT:PSS [poly(3,4-ethylenedioxythiophene):poly(styrene sulfolnate)] polymers were used as the hole injection and transport materials. The effect of PFO-poss concentration and the heating temperatures on the electrical and optical properties of the devices were investigated. At the same concentration of PFO-poss solution, the current density and luminance of PLED device tend to increase as the annealing temperature increase from $100^{\circ}C$ to $200^{\circ}C$. The maximum luminance was found to be about 958 cd/m2 at 13V for the PLED device with 1.0 wt% PFO-poss at the annealing temperature of $200^{\circ}C$. In addition, the PLED device showed bluish white emission through the strong greenish peak with 523 nm in wavelength. As the concentration of PFO-poss increase from 0.5 wt% to 1.0 wt% and temperature of PLEDs increase from $100^{\circ}C$ to $200^{\circ}C$, the emission color tend to be shifted from blue with (x, y) = (0.17,0.14) to bluish white with (x, y) : (0.29,0.41) in CIE color coordinate.

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Dependence of $O_2$ Plasma Treatment of ITO Electrode on Electrical and Optical Properties of Polymer Light Emitting Diodes (ITO 투명전극의 $O_2$ 플라즈마 처리가 고분자 유기발광다이오드의 전기.광학적 특성에 미치는 영향)

  • Gong, Su-Cheol;Back, In-Jea;Yoo, Jea-Huyk;Lim, Hun-Sung;Yang, Sin-Huyk;Shin, Sang-Bea;Shin, Ik-Seup;Chang, Gee-Keun;Chang, Ho-Jung
    • Journal of the Korean institute of surface engineering
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    • v.39 no.3
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    • pp.93-97
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    • 2006
  • Polymer light emitting diodes (PLEDs) are expected to be commercialized as next generation displays by advantages of the fast response time, low driving voltage and easy manufacturing process for large sized flexible display. Generally, the electrical and optical properties of PLEDs are affected by the surface conditions of transparent electrode. The PLED devices with ITO/PEDOT:PSS/PVK/PFO-poss/LiF/Al structures were prepared by using the spin coating method. For this, PEDOT:PSS(poly(3,4-ethylenedioxythiophene):poly(styrene sulfolnate)) Al 4083 and PVK(N-vinylcabozole) were used as hole injection and transport layers. The PFO-poss(poly(9,9-dioctylfluorene)) was used as the emitting layer. The dependence of $O_2$ plasma treatment of ITO electrode on the electrical and optical properties of PLEDs were investigated. The sheet resistances increased slightly with an improved surface roughness of ITO electrode as the RF power increased during $O_2$ plasma treatment. The PLED devices prepared on the ITO/Glass substrates, which were plasma-treated at 40 watt in RF power for 30 seconds under 40 mtorr $O_2$ pressure, showed the maximum external emission efficiency of 0.86 lm/W and the maximum luminance of $250\;cd/m^2$, respectively. The CIE color coordinates are ranged $X\;=\;0.13{\sim}0.18$ and $Y\;=\;0.10{\sim}0.16$, showing blue color. emission.

Ordinary Magnetoresistance of an Individual Single-crystalline Bi Nanowire (자발 성장법으로 성장된 단결정 Bi 단일 나노선의 정상 자기 저항 특성)

  • Shim, Woo-Young;Kim, Do-Hun;Lee, Kyoung-Il;Jeon, Kye-Jin;Lee, Woo-Young;Chang, Joon-Yeon;Han, Suk-Hee;Jeung, Won-Young;Johnson, Mark
    • Journal of the Korean Magnetics Society
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    • v.17 no.4
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    • pp.166-171
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    • 2007
  • We report the magneto-transport properties of an individual single crystalline Bi nanowire grown by a spontaneous growth method. We have successfully fabricated a four-terminal device based on an individual 400-nm-diameter nanowire using plasma etching technique to remove an oxide layer forming on the outer surface of the nanowire. The transverse MR (2496% at 110 K) and longitudinal MR ratios (38% at 2 K) for the Bi nanowire were found to be the largest known values in Bi nanowires. This result demonstrates that the Bi nanowires grown by the spontaneous growth method are the highest-quality single crystalline in the literatures ever reported. We find that temperature dependence of Fermi energy ($E_F$) and band overlap (${\triangle}_0$) leads to the imbalance between electron concentration ($n_e$) and hole concentration ($n_h$) in the Bi nanowire, which is good agreement with the calculated $n_e\;and\;n_h$ from the respective density of states, N(E), for electrons and holes. We also find that the imbalance of $n_e\;and\;n_h$ plays a crucial role in determining magnetoresistance (MR) at T<75 K for $R_T$ and at T<205 K for $R_L$, while mean-free path is responsible for MR at T>75 K for $R_T$ and T>205 K for $R_L$.

A study on alluvial deposits of tributaries of Yungsan river, near Damyang. (담양지역 영산강 지류 하천 퇴적층의 특성에 대한 연구)

  • Kim, Jong Yeon;Hong, Se Sun
    • Journal of The Geomorphological Association of Korea
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    • v.20 no.4
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    • pp.51-70
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    • 2013
  • The characteristics of deposits formed by the Daejon-cheon and Soobuk-cheon, dissecting the mountains such as Byungpung Mt. and Samin Mt. in western part of Damyang county, Jeonmam province. Results from field survey and bore hole logging by KIGAM are used in interpreting depositional environment, in this study. By the result of deposits near of the channels Daejon-cheon and Soobuk-cheon, and main channel of Youngsan River, the depth of sediment layers in this area is 4~7m, far thinner than formerly estimated. Weathered material of local rocks forms the base of the sedimentary layers. It can be assumed that the location channel of the Youngsan river has been stable ever since the start of the sedimentary events. Sediment particles of tributaries are angular than those of Youngsan River. Particles are larger and sorting is poor. It is interpreted as mount flash flood deposits. Main sources of sediments at the valley bottom or deposition dominated area are the terrace deposits or slope deposits over the gentle foot-slope or front of surrounding mountains. Some particles show polygonal cracking on the surface originated from the strong chemical weathering, while most of these has high angularity. It means various geomorphic processes operate to produce and transport the particles in this area.Isolated hills within the sedimentary plains are made with weathered materials of local bedrock. In the case of foot-slope of the hills, thin sedimentary layers are found. So it can be concluded that surface features of deposition zone of the Daejon-cheon and Soobuk-cheon is formed by the filling of lower part of the valley and its feature partly controlled by the relief of the weathering front.

Priority Area Prediction Service for Local Road Packaging Maintenance Using Spatial Big Data (공간 빅데이터를 활용한 지방도 포장보수 우선지역 예측 서비스)

  • Minyoung Lee;Jiwoo Choi;Inyoung Kim;Sujin Son;Inho Choi
    • Journal of Intelligence and Information Systems
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    • v.29 no.3
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    • pp.79-101
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    • 2023
  • The current status of local road pavement management in Jeollabuk-do only relies on the accomplishments of the site construction company's pavement repair and is only managed through Microsoft Excel and word documents. Furthermore, the budget is irregular each year. Accordingly, a systematic maintenance plan for local roads is necessary. In this paper, data related to road damage and road environment were collected and processed to derive possible areas which could suffer from road damage. The effectiveness of the methodology was reviewed through the on-site inspection of the area. According to the Ministry of Land, Infrastructure and Transport, in 2018, the number of damages on general national roads were about 47,000. In 2019, it reached around 38,000. Furthermore, the number of lawsuits regarding the road damages were about 93 in 2018 and it increased to 119 in 2019. In the case of national roads, the number of damages decreased compared to 2018 due to pavement repairs. To measure the priorities in maintenance of local roads at Jeollabuk-do, data on maintenance history, local port hole occurrence site, overlapping business section, and emergency maintenance section were transformed into data. Eventually, it led to improvements in maintenance of local roads. Furthermore, spatial data were constructed using various current status data related to roads, and finally the data was processed into a new form that could be utilized in machine learning and predictions. Using the spatial data, areas requiring maintenance on pavement were predicted and the results were used to establish new budgets and policies on road management.

Design of a Dual Band-pass Filter Using Fork-type Open Stubs and SIR Structure (포크 형태의 개방형 스터브 및 SIR 구조를 이용한 이중대역 대역통과 여파기의 설계)

  • Tae-Hyeon Lee
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.22 no.1
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    • pp.252-264
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    • 2023
  • This paper proposes a design of a dual-band band-pass filter that integrates a λg/2 open SIR structure, a transmission line, and a fork-type structure with symmetric and asymmetric open stubs. To obtain the dual-band effect, the proposed filter uses the SIR structure and adjusts the impedance ratio of the SIR structure. Therefore, the position of the harmonics of the filter is shifted through the adjustment of the impedance ratio, and this can obtain a double-band effect. In order to obtain the dual-band characteristics, the dual-band effect is obtained by inserting a open stub between the SIR structures with the SIR structure divided in half. In addition, the second frequency response is obtained by adjusting the length of the open symmetrical stub in the fork-shaped structure. The asymmetrical open stub in the fork form achieves optimum bandwidth by adjusting the length. Therefore, the first center frequency of the proposed band-pass filter is 5.896 GHz and the bandwidth is 13.6 %. At this time, the measurement results are 0.13 dB and 33.6 dB. The second center frequency is 5.906 GHz and the bandwidth is 13.6 %. At this time, the measurement results are 0.15 dB and 19.8 dB. The reason is that when the impedance ratio (Δ) is higher than 1, the position of the harmonic is shifted to a lower frequency band. However, if the impedance ratio (Δ) is lowered by one step, the position of harmonics will move to a higher frequency band. The function of the filter designed using these characteristics can be obtained from the measurement result. The proposed band-pass filter has no coupling loss and no via energy concentration loss because there is no coupling structure of input/output and no via hole. Therefore, system integration is possible due to its excellent performance, and it is expected that dedicated short-range communication (DSRC) system applications used in traffic communication systems will be possible.