• 제목/요약/키워드: hole diameter

검색결과 759건 처리시간 0.023초

Susceptor design by numerical analysis in horizontal CVD reactor

  • Lee, Jung-Hun;Yoo, Jin-Bok;Bae, So-Ik
    • 한국결정성장학회지
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    • 제15권4호
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    • pp.135-140
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    • 2005
  • Thermal-fluid analysis was performed to understand the thermal behavior in the horizontal CVD reactor thereby to design a susceptor which has a uniform deposition rate during silicon EPI growing. Four different types of susceptor designs, standard (no hole susceptor), hole $\sharp$1 (240 mm), hole $\sharp$2 (150 mm) and hole $\sharp$3 (60 mm), were simulated by CFD (Computational Fluid Dynamics) tool. Temperature, gas flow, deposition rate and growth rate were calculated and analyzed. The degree of flatness of EPI wafer loaded on the susceptor was computed in terms of silicon growth rate. The simulation results show that the temperature and thermal distribution in the wafer are greatly dependent on inner diameter of hole susceptor and demonstrate that the introduction of hole in the susceptor can degrade wafer flatness. Maximum temperature difference appeared around holes. As the diameter of the hole decreases, flatness of the wafer becomes poor. Among the threes types of susceptors with the hole, optimal design which resulted a good uniform flatness ($5\%$) was obtained when using hole $\sharp$1.

고강도 열연재의 홀 플랜징시 립 형상이 플랜정성에 미치는 효과 (Effect of Lip Shape on the Hole Flangeability of High Strength Steel Sheets)

  • 김정운;김봉준;문영훈
    • 대한기계학회논문집A
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    • 제26권1호
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    • pp.147-152
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    • 2002
  • Effect of lip shape on the hole flangeability of high strength steel sheets is investigated. Circular plates of various hole sizes are tested and the variation of lip length as well as the variation of thickness on the sectional views of the finished lip were studied. The conventional hole flanging process is limited to a certain limit hole diameter below which failure will ensue during the hole expansion. The intention of this work is to examine the effect of lip shape on the flangeability of TRIP steel and Ferrite-Bainite duplex steel and find out major parameters which can affect flanging shape of high strength hot rolled steels. Over the ranges of conditions investigated, the minimum hole diameter of F+B steel is better than TRIP steel. while, the lip-shape accuracy of TRIP steel is better than that of F+B steel. although the tensile strength and elongation of %P steel are superior than those of Ferrite-Bainite duplex steel, the flangeability is found to be not so strongly sensitive to the tensile properties but sensitive to displacement on the circumferential direction of hole edge.

원형구멍 정밀 내경측정을 위한 영상처리 개선에 관한 연구 (A Study on Improvement of Image Processing for Precision Inner Diameter Measurement of Circular Hole)

  • 박창용;권현규;이정화;장화신
    • 반도체디스플레이기술학회지
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    • 제16권3호
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    • pp.8-13
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    • 2017
  • In this paper, the measurement of the inner diameter dimension of the circular hole by using a machine vision system was studied. This paper was focused on the theory and key technologies of machine vision inspection technology for the improvement of measurement accuracy and speed of the micro circular holes. A new method was proposed and was verified through the experiments on Gray conversion, binarization, edge extraction and Hough transform in machine vision system processes. Firstly, the Hough transform was proposed in order to improve the speed increase and implementation ease, it demonstrated the superiority of Hough transform and improvement through a comparative experiment. Secondly, we propose a calibration method of the system in order to obtain exactly the inner diameter of the circular hole. Finally, we demonstrate the reliability of the entire system as a MATLAB-based implementation of the GUI program, measuring the inner diameter of the circular hole through the circular holes of different dimensions measuring experiment.

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유체 누출에서의 음향방출 신호분석 (Analysis of Acoustic Emission Signals from Fluid Leakage)

  • 김용민;윤용구;김호철
    • 대한기계학회논문집
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    • 제14권2호
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    • pp.413-421
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    • 1990
  • Acoustic emission signals due to leak from circular holes of 0.4, 1, 2 and 4mm diameter and rectangular slits of different geometry having the same cross section as 4mm diameter hole was studied both analytically and experimentally. Acoustic emission signals from a wide-band type transducer were transformed to digital signals through a digital oscilloscope, and $V_{rms}$ and frequency spectrum were obtained by processing digital signals. Relationships between acoustic parameters and fluid mechanical parameters were derived analytically. A quadrapole aerodynamic model was applied in the analysis of leak from the circular holes and $V_{rms}$ was found to be proportional to the root square of leak rate through the circular hole. A modified model based on dipole source mechanism and laminar equivalent diameter was applied in the analysis of leak signals from the rectangular slits. In the case of constant pressure, $V_{rms}$ increased as the laminar equivalent diameter of slit decreased. In the case of constant laminar equivalent diameter, however the result was similar to that for leak from the circular hole. The frequency spectra of leak signals shows the same frequency characteristics irrespective of the pressure difference.rence.

강건설계법을 이용한 스웨덴식 벤치발파의 설계 인자 분석 (Parameter Analysis of Swedish Bench Blast Design using Robust Design Method)

  • 양형식
    • 화약ㆍ발파
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    • 제31권2호
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    • pp.1-5
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    • 2013
  • 스웨덴 식 벤치발파 설계방식에 대하여 실험계획법을 이용하여 설계인자를 분석하였다. 분석에 사용된 직교배열은 $L_9(3^4)$이었고 변수는 각각 3수준의 값을 갖는 천공직경, 화약의 종류, 공의 경사와 암석의 종류로 하였다. 분석결과 저항선 결정 영향요소는 천공직경, 화약의 종류, 암석의 종류 그리고 공의 경사 순이었으며 비장약량 영향요소는 암석의 종류, 화약의 종류 그리고 비천공장에 영향을 미치는 요소는 천공직경과 화약의 종류순이었다. 또 강건설계를 이용한 경제성 검토에서 최적인자 선택이 가능함을 확인하였다.

충돌면과 노즐의 형상이 원형충돌제트에 의한 충돌순음 발생에 미치는 영향 (Effect of Nozzle Configuration and Impinging Surface on the Impinging Tone Generation by Circular Jets)

  • 임정빈;권영필
    • 대한기계학회논문집B
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    • 제27권6호
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    • pp.693-700
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    • 2003
  • The effect of the configuration of the nozzle and the impinging surface on the characteristics of the hole-tones has been experimentally investigated. It is found that the plate-tone is a special case of hole-tones, where the hole diameter is zero. The jet velocity range for hole-tones is divided into the low velocity region associated with laminar jet and the high velocity region with turbulent jet. The frequency of the tone is that for the shear layer instability at the nozzle exit or that attainable by a cascade of vortex pairing process with increase of the impinging distance. When the distance is longer than one diameter the frequency decreases to the terminal value near the preferred frequency of the column mode instability, in the range 0.23< $St_d$<0.53, where $St_d$ is the Strouhal number defined by $fd/U_J$, f the frequency, d the nozzle diameter, and $U_J$ the exit velocity. While the convection speed of the downstream vortex, in the present study, is almost constant at low-speed laminar jet, it increases with distance at high-speed turbulent jet. As the frequency increases, the convection speed decreases in the low frequency range corresponding to the preferred mode, in agreement with the existing experimental data for a free jet.

마이크로 펀칭용 미세축, 미세구멍의 가공 (Micro-shaft and Micro-hole Machining for Micro Punching)

  • 류시형;조필주;이강희;주종남
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2002년도 금형가공 심포지엄
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    • pp.239-244
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    • 2002
  • In this study, we developed the manufacturing technology of micro-hole and micro-shaft for micro punching system using micro electrical discharge machining and micro electro chemical machining. Micro punching dies of tungsten carbide with $55\;{\mu}m\;and\;110\;{\mu}m$ diameter and $250\;{\mu}m$ depth were made by micro electrical discharge machining. The form accuracy and surface roughness of die hole were pretty good and it was shown that the punched hole quality was fine. WC micro-shaft with $30\;{\mu}m$ diameter was made by the multistep micro electro chemical machining. The developed technologies can be effectively used in precision manufacturing of micro punching die and mass production of micro-shaft.

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신경회로망기법을 사용한 원통형 막냉각 홀의 최적설계 (Design Optimization of a Cylindrical Film-Cooling Hole Using Neural Network Techniques)

  • 이기돈;김광용
    • 대한기계학회논문집B
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    • 제32권12호
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    • pp.954-962
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    • 2008
  • This study presents a numerical procedure to optimize the shape of cylindrical cooling hole to enhance film-cooling effectiveness. The RBNN method is used as an optimization technique with Reynolds-averaged Navier-Stokes analysis of fluid flow and heat transfer with shear stress transport turbulent model. The hole length-to-diameter ratio and injection angle are chosen as design variables and film-cooling effectiveness is considered as objective function which is to be maximized. Twelve training points are obtained by Latin Hypercube Sampling for two design variables. In the sensitivity analysis, it is found that the objective function is more sensitive to the injection angle of hole than the hole length-to diameter ratio. Optimum shape gives considerable increase in film-cooling effectiveness.

초단펄스 전해 국부화를 이용한 미세구멍 가공 (Localized Electro-chemical Micro Drilling Using Ultra Short Pulses)

  • 안세현;류시형;최덕기;주종남
    • 한국정밀공학회지
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    • 제20권8호
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    • pp.213-220
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    • 2003
  • By the localization of electro-chemical dissolution region, we succeeded in a few micrometer size hole drilling on stainless steel with the radial machining gap of about 1 ${\mu}{\textrm}{m}$. Tens of nanosecond duration voltage pulses were applied between WC micro-shaft and stainless steel in the 0.1 M $H_2SO_4$ solution. Pt balance electrode was used to drill the high aspect ratio micro-hole without generation of Cr oxide layer on the machined surface. The effects of applied voltage, pulse duration, and pulse period on localization distance were investigated according to machining time. We suggested the taper reduction technique especially brought up on blind-hole machining. High quality micro-holes with 8 ${\mu}m$ diameter with 20 ${\mu}m$ depth and 12 ${\mu}m$ diameter with 100 ${\mu}m$ depth were drilled on 304 stainless steel foil. The various hole shapes were also produced including stepped holes and taper free holes.

Effect of the Hole on the Tensile Fatigue Properties of CFRP Laminates

  • Lee, Yeon-Soo;Ben, Goichi;Lee, Se-Hwan
    • Advanced Composite Materials
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    • 제18권1호
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    • pp.43-59
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    • 2009
  • The current study assessed the effect of a bolt hole on tensile fatigue properties of CFRP laminates. Two specimens, i.e. $[(0/90)_3]S$, $[(0/45/90/-45)_2]_S$, were analyzed using a finite element method and were experimentally tested for cases, both with and without a hole, whose diameter corresponded to 0.12 times the specimen width. Delamination positions predicted by a 3-dimensional static finite element analysis were matched well to those observed by an ultrasonic imaging system in the middle of fatigue test. A hole whose diameter corresponds to 0.12 times the specimen width caused the fatigue strength to decrease by 9% and 11% under 5 Hz loading frequency, and by 22% and 25% under 10 Hz loading frequency for $[(0/90)_3]_S$ and $[(0/45/90/-45)_2]_S$, respectively. Because the decrease in sectional area due to the hole was normalized in calculation of the tensile strength, a stress concentration around the hole is believed to induce the strength degradation of fatigue specimens. From the finite element analyses, the stress concentration factor around a hole was expected as 8.8 and 9.5 for $[(0/90)_3]_S$ and $[(0/45/90/-45)_2]_S$, respectively.