• Title/Summary/Keyword: high vacuum pump

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Air-tightness Evaluation of Tube Structures for Super-speed Tube Railway Systems: I. Analytical Modeling and Material Test (초고속 튜브철도 시스템을 위한 튜브 구조물의 기밀성 평가 : I. 해석모델 수립 및 재료 기밀성)

  • Park, Joo-Nam;Nam, Seong-Won;Kim, Lee-Hyeon;Yeo, In-Ho
    • Journal of the Korean Society for Railway
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    • v.14 no.2
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    • pp.143-150
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    • 2011
  • This paper presents a preliminary study for air-tightness evaluation of vacuum tube structures for super-speed tube railway systems. The formula for flow rate of the air caused by the pressure difference of the inside and outside of the tube structure is derived based on Darcy's law. A test is then performed to measure the air-permeability of concrete with various compressive strengths, the result of which is used for analytical simulation of the air intrusion for a tube structure with a preliminarily defined section. It has been shown that concrete with the compressive strength of at least more than 50MPa is recommended for effective operation and maintenance of the vacuum pump systems, as the air-permeability of concrete is inversely proportional to the exponent of its compressive strength.

Development of the Filterable Water Sampler System for eDNA Filtering and Performance Evaluation of the System through eDNA Monitoring at Catchment Conduit Intake-Reservoir (eDNA 포집용 채수 필터시스템 개발과 집수매거 취수지 내에서의 성능평가)

  • Kwak, Tae-Soo;Kim, Won-Seok;Lee, Sun Ho;Kwak, Ihn-Sil
    • Korean Journal of Ecology and Environment
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    • v.54 no.4
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    • pp.272-279
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    • 2021
  • A pump-type eDNA filtering system that can control voltage and hydraulic pressure respectively has been developed, and applied a filter case that can filter out without damaging the filter. The filtering performance of the developed system was evaluated by comparing the eDNA concentration with the conventional vacuum-pressured filtering method at the catchment conduit intake reservoir. The developed system was divided into a voltage control (manual pump system) method and a pressure control (automatic pump system) method, and the pressure was measured during filtering and the pressure change of each system was compared. The voltage control method started with 65 [KPa] at the beginning of the filtering, and as the filtering time elapsed, the amount of filtrate accumulated in the filter increased, so the pressure gradually increased. As a result of controlling the pressure control method to maintain a constant pressure according to the designed algorithm, there was a difference in the width of the hydraulic pressure fluctuation during the filtering process according to the feedback time of the hydraulic pressure sensor, and it was confirmed that the pressure was converged to the target pressure. The filtering performance of the developed system was confirmed by measuring the eDNA concentration and comparing the voltage control method and the hydraulic control method with the control group. The voltage control method obtained similar results to the control group, but the hydraulic control method showed lower results than the control group. It is considered that the low eDNA concentration in the hydraulic control method is due to the large pressure deviation during filtering and maintaining a constant pressure during the filtering process. Therefore, rather than maintaining a constant pressure during filtering, it was confirmed that a voltage control method in which the pressure is gradually increased as the filtrate increases with the lapse of filtering time is suitable for collecting eDNA. As a result of comparing the average concentration of eDNA in lentic zone and lotic zone as a control group, it was found to be 96.2 [ng µL-1] and 88.4 [ng µL-1l], respectively. The result of comparing the average concentration of eDNA by the pump method was also high in the lentic zone sample as 90.7 [ng µL-1] and 74.8 [ng µL-1] in the lentic zone and the lotic zone, respectively. The high eDNA concentration in the lentic zone is thought to be due to the influence of microorganisms including the remaining eDNA.

Carbon tip growth by electron beam deposition (전자빔 조사에 의한 탄소상 탐침의 성장)

  • 김성현;최영진
    • Journal of the Korean Vacuum Society
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    • v.12 no.2
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    • pp.144-149
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    • 2003
  • Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.

Growth of ZnTe Thin Films by Oxygen-plasma Assisted Pulsed Laser Deposition

  • Pak, Sang-Woo;Suh, Joo-Young;Lee, Dong-Uk;Kim, Eun-Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.185-185
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    • 2011
  • ZnTe semiconductor is very attractive materials for optoelectronic devices in the visible green spectral region because of it has direct bandgap of 2.26 eV. The prototypes of ZnTe light emitting diodes (LEDs) have been reported [1], showing that their green emission peak closely matches the most sensitive region of the human eye. Another application to photovoltaics proved that ZnTe is useful for the production of high-efficiency multi-junction solar cells [2,3]. By using the pulse laser deposition system, ZnTe thin films were deposited on ZnO thin layer, which is grown on (0001) Al2O3substrates. To produce the plasma plume from an ablated ZnO and ZnTe target, a pulsed (10 Hz) YGA:Nd laser with energy density of 95 mJ/$cm^2$ and wavelength of 266 nm by a nonlinear fourth harmonic generator was used. The laser spot focused on the surface of the ZnO and ZnTe target by using an optical lens was approximately 1 mm2. The base pressure of the chamber was kept at a pressure around $10^{-6}$ Torr by using a turbo molecular pump. The oxygen gas flow was controlled around 3 sccm by using a mass flow controller system. During the ZnTe deposition, the substrate temperature was $400^{\circ}C$ and the ambient gas pressure was $10^{-2}$ Torr. The structural properties of the samples were analyzed by XRD measurement. The optical properties were investigated by using the photoluminescence spectra obtained with a 325 nm wavelength He-Cd laser. The film surface and carrier concentration were analyzed by an atomic force microscope and Hall measurement system.

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건식 진공펌프의 상태진단을 위한 PMS 프로그램 개발

  • Jeong, Wan-Seop;Im, Jong-Yeon;Nam, Seung-Hwan;Kim, Hak-Seung;No, Myeong-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.106.2-106.2
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    • 2013
  • 본 논문은 반도체 및 평판 디스플레이 생산공정에서 가동되고 있는 건식 진공펌프들의 정밀 상태진단 및 예지 보수를 위한 pump monitoring system (PMS)의 제품화에 필요한 프로그램의 개발 내용을 소개한다. 본 연구에서 소개하는 건식 진공펌프들의 정밀 상태진단 및 예지보수기법은 PCT 특허 2 건으로 이미 등록된 내용이며, 본 논문은 이들 기법의 실제 구현에서 직면하는 기술적 문제점과 극복 방안을 제시한다. 본 논문에서는 현재 반도체 공정에 사용되고 있는 건식 진공펌프들로부터 측정하는 다중 상태변수들의 조사 결과를 소개한다. 이들 상태변수 측정치들이 갖는 개략적 특성을 통계적 분포함수로 분석한 결과를 우선 보인다. 특히 펌프 구동모터들의 소비 전류신호는 두 평균값에 대한 분포 즉 두 종의 분포함수를, 그리고 온도, purge gas 유량, 배기구 압력 등은 정상적 평균값에 대한 한나의 분포를 보였다. 따라서 구동모터들의 소비전류의 분포 즉 두 상하 수준('low and high' current level)에 따라 batch data를 구분하는 방법의 개발이 필요하였다. 본 연구에서는 step 함수형 eigenvector를 적용하여 소비전류 신호의 상하수준 천이 영역과 방향을 동시에 인식할 수 있는 기법을 개발 적용하였으며, 3300회의 배출가스 부하에 변화에 대한 천이 영역과 방향을 인식에 하나의 실패도 보이지 않음을 확인하였다. 기존의 측정 상태변수에는 회전기계류의 정밀 상태진단 및 예지보수에 핵심적인 기계진동 측정용 진동센서를 포함하고 있지 않은 기술적 문제점이 발견되었다. 기존 진동센서들의 높은 가격 뿐 아니라 진동센서의 출력신호를 저/중/고역 주파수 대역의 실효치로 환산하는 기술적 한계 때문에 진공펌프 상태진단에 아직 사용하고 있지 않고 있다. 본 연구에서는 진동선서 비용의 저감화 방안뿐 아니라 로터 회전 대역(250Hz 이하 저주파 영역), 베어링 진동 대역(250 Hz~2.5 kHz의 중간 주파수 영역), 그리고 기어 진동 대역(2.5 kHz~10 kHz 주파수 영역)별 실효치를 실 시간 측정할 수 있는 진동측정 모듈의 제품화 모델을 개발하였다. 개발 제품의 성능 뿐 아니라 현장 시험결과를 소개한다. 마지막으로 본 연구팀이 개발한 PCT 특허 2 건에 포함된 건식 진공펌프들의 정밀 상태진단 및 예지보수기법에 대한 현장 시험결과를 간략히 소개한다.

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Design of Fault-Tolerant Inductive Position Sensor (고장 허용 유도형 위치 센서 설계)

  • Paek, Sung-Kuk;Park, Byeong-Cheol;Noh, Myoung-Gyu D.
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.3
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    • pp.232-239
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    • 2008
  • The position sensors used in a magnetic bearing system are desirable to provide some degree of fault-tolerance as the rotor position is necessary for the feedback control to overcome the open-loop instability. In this paper, we propose an inductive position sensor that can cope with a partial fault in the sensor. The sensor has multiple poles which can be combined to sense the in-plane motion of the rotor. When a high-frequency voltage signal drives each pole of the sensor, the resulting current in the sensor coil contains information regarding the rotor position. The signal processing circuit of the sensor extracts this position information. In this paper, we used the magnetic circuit model of the sensor that shows the analytical relationship between the sensor output and the rotor motion. The multi-polar structure of the sensor makes it possible to introduce redundancy which can be exploited for fault-tolerant operation. The proposed sensor is applied to a magnetically levitated turbo-molecular vacuum pump. Experimental results validate the fault-tolerance algorithm.

A Study on Heat and Mass Transfer Characteristics of LiBr-$H_2$O Solution with a Sufactant Flowing over a Cooled Horizontal Tube (계면활성제 첨가시 수평 냉각관 외부를 흘러내리는 LiBr수용액의 열 및 물질전달 특성에 관한 연구)

  • 김경희;설신수;이상용
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.4
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    • pp.341-349
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    • 2002
  • Heat and mass transfer characteristics of a surfactant-added LiBr-$H_2O$ solution flowing over a single horizontal tube were examined experimentally. The parameters considered were surfactant (2-ethyl-1-hexanol) concentration, solution temperature at the top of the tube and absorber pressure. Even with an amount of the surfactant below the solubility limit, heat and mass transfer performances were enhanced tremendously. The Nusselt and Sherwood numbers increased by about 70% and 340%, respectively, when 10 ppm of the surfactant was added. However, an excess amount of the surfactant in the solution did not bring a further enhancement. The absorption performance deteriorated when the non-condensable gases were extracted from the system (by a vacuum pump) since the vaporized surfactant was also extracted during the process. Therefore, it is desirable to add a sufficient amount of the surfactant (more than 10 ppm) to maintain high performance of absorption.

Flow of Soluble Non-ammonia Nitrogen in the Liquid Phase of Digesta Entering the Omasum of Dairy Cows Given Grass Silage Based Diets

  • Choi, C.W.;Choi, C.B.
    • Asian-Australasian Journal of Animal Sciences
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    • v.16 no.10
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    • pp.1460-1468
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    • 2003
  • An experiment was conducted to quantify the flow of soluble non-ammonia nitrogen (SNAN) in the liquid phase of ruminal (RD) and omasal digesta (OD), and to investigate diurnal pattern in SNAN flow in OD. Five ruminally cannulated Finnish-Ayrshire dairy cows in a $5{\times}5$ Latin square design consumed a basal diet of grass silage and barley grain, and that supplemented with four protein feeds (kg/d DM basis) as follows: skimmed milk powder (2.1), wet distiller' solubles (3.0), untreated rapeseed meal (2.1) and treated rapeseed meal (2.1). Ruminal digesta was sampled using a vacuum pump, whereas OD was collected using an omasal sampling system at 1.0 h interval during a 12 h feeding cycle. Both RD and OD were acidified, centrifuged to remove microbes and precipitated with trichloroacetic acid followed by centrifugation. The SNAN fractions (free amino acid (AA), peptide and soluble protein) in RD and OD were assessed using ninhydrin assay. Free AA, peptide and soluble protein averaged 60.0, 89.4 and 2.1 g/d, respectively, for RD, and 81.8, 121.5 and 2.5 g/d, respectively, for OD. Although free AA flow was relatively high, mean peptide flow was quantitatively the most important fraction of SNAN, indicating that degradation of peptide to AA rather than hydrolysis of soluble protein to peptide or deamination may be the most limiting step in rumen proteolysis. Diurnal pattern in flow of peptide including free AA in OD during a 12 h feeding cycle peaked 1 h post-feeding, decreased by 3 h post-feeding and was relatively constant thereafter. Protein supplementation showed higher flow of peptide including free AA immediately after feeding compared with no supplemented diet. There were no differences among protein supplements in diurnal pattern in flow of peptide including free AA in OD.

Soluble Non-ammonia Nitrogen in Ruminal and Omasal Digesta of Korean Native Steers Supplemented with Soluble Proteins

  • Choi, Chang-Weon;Kim, K.H.;Chang, S.S.;Choi, N.J.
    • Asian-Australasian Journal of Animal Sciences
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    • v.25 no.9
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    • pp.1269-1275
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    • 2012
  • An experiment was conducted to study the effect of soluble protein supplements on concentration of soluble non-ammonia nitrogen (SNAN) in the liquid phase of ruminal (RD) and omasal digesta (OD) of Korean native steers, and to investigate diurnal pattern in SNAN concentration in RD and OD. Three ruminally cannulated Korean native steers in a $3{\times}3$ Latin square design consumed a basal diet of rice straw and corn-based concentrate (control), and that supplemented (kg/d DM basis) with intact casein (0.24; IC) or acid hydrolyzed casein (0.46; AHC). Ruminal digesta was sampled using a vacuum pump, whereas OD was collected using an omasal sampling system at 2.0 h intervals after a morning feeding. The SNAN fractions (free amino acid (AA), peptide and soluble protein) in RD and OD were assessed using the ninhydrin assay. Concentrations of free AA and total SNAN in RD were significantly (p<0.05) lower than those in OD. Although free AA concentration was relatively high, mean peptide was quantitatively the most important fraction of total SNAN in both RD and OD, indicating that degradation of peptide to AA rather than hydrolysis of soluble protein to peptide or deamination may be the most limiting step in rumen proteolysis of Korean native steers. Diurnal variation in peptide concentration in OD for the soluble protein supplemented diets during the feeding cycle peaked 2 h post-feeding and decreased thereafter whereas that for the control was relatively constant during the entire feeding cycle. Diurnal variation in peptide concentration was rather similar between RD and OD.

Performance Evaluation of a Bidirectional Piezoelectric Hybrid Actuator (양방향 압전-유압 하이브리드 구동장치의 성능 시험)

  • Jin, Xiaolong;Ha, Ngocsan;Goo, Namseo;Bae, Byungwoon;Kim, Taeheun;Ko, Hanseo;Lee, Changseop
    • Journal of the Korea Institute of Military Science and Technology
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    • v.18 no.3
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    • pp.213-219
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    • 2015
  • Piezoelectric-based hydraulic actuator is a hybrid device consisting of a hydraulic pump driven by piezoelectric stacks that is coupled to a conventional hydraulic cylinder via a set of fast-acting valves. Nowadays, such hybrid actuators are being researched and developed actively in many developed countries by requirement of high performance and compact flight system. In this research, a piezoelectric hybrid actuator has been designed and tested. To achieve bi-directional capabilities in the actuator, solenoid valves were used to control the direction of output fluid. The experimental testing of the actuator in uni-directional and bi-directional modes was performed to examine performance issues related to the solenoid valves. The results showed that the bi-directional performance was slightly lower than uni-directional performance due to air bubble developed in the valve system. A new design to solve the vacuum problem has been proposed to improve the performance of the hybrid actuator.