• Journal of the Korean institute of surface engineering
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• v.55 no.6
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• pp.353-362
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• 2022

Recently, transmittance of photomasks for ultra-violet (UV) region is getting more important, as the light source wavelength of an exposure process is shortened due to the demand for technologies about high integration and miniaturization of devices. Meanwhile, such problems can occur as damages or the reduction of yield of photomask as electrostatic damage (ESD) occurs in the weak parts due to the accumulation of static electricity and the electric charge on chromium metal layers which are light shielding layers, caused by the repeated contacts and the peeling off between the photomask and the substrate during the exposure process. Accordingly, there have been studies to improve transmittance and antistatic performance through various functional coatings on the photomask surface. In the present study, we manufactured antireflection films of Nb₂O₅, | SiO₂ structure and antistatic films of ITO designed on 100 × 100 × 3 mmt sodalime glass by DC magnetron sputtering system so that photomask can maintain high transmittance at I-line (365 nm). ITO thin film deposited using In/Sn (10 wt.%) on sodalime glass was optimized to be 10 nm-thick, 3.0 × 103 𝛺/☐ sheet resistance, and about 80% transmittance, which was relatively low transmittance because of the absorption properties of ITO thin film. High average transmittance of 91.45% was obtained from a double side antireflection and antistatic thin films structure of Nb₂O₅ 64 nm | SiO₂ 41 nm | sodalime glass | ITO 10 nm | Nb₂O₅ 64 nm | SiO₂ 41 nm.

• Journal of the Optical Society of Korea
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• v.18 no.6
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• pp.783-787
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• 2014

This paper presents an improved vertical alignment nematic liquid crystal mode characterized by the protrusions or slits of the top substrate and additional stripe type common electrodes with polarity switching of the bottom substrate to improve multi-domain vertically aligned (MVA) and patterned vertically aligned (PVA) nematic modes. MVA and PVA modes have disadvantages such as an LC disclination in the vicinity of the middle region of electrodes between the top and bottom protrusions in MVA mode or the top and bottom slits in PVA mode. Therefore, the stripe type common electrode generating a horizontal electric field and the protrusion or slit producing some pretilt of liquid crystals (LCs) were used to improve the LC disclination, which influences the transmittance and response speed. The simulation results showed that the proposed VA mode has higher transmittance than the MVA and PVA modes. As a result, the proposed VA mode can improve the response speed and transmittance remarkably, which makes it useful for upgrading the LCD display quality.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.498-501
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• 2003

We investigated response characteristics of twisted nematic (TN) cell with different nematic liquid crystals (NLCs) and cell gap d on a rubbed polyimide (PI) surface. High transmittance and fast response time of the TN cell on the rubbed PI surface were achieved by using high birefringence (${\Delta}n$) and low cell gap d. The transmittance and response time of the TN cell on the rubbed PI surface decreased with decreasing ${\Delta}nd$. The fast response time of TN cell using high birefringence with ${\Delta}nd=0.363$ on the rubbed PI surface was measured 5.1 ms.

• Journal of the Korean Ceramic Society
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• v.42 no.6 s.277
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• pp.399-404
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• 2005

Anti-reflection film was coated by using spherical silica nano colloidal particles and fumed silica particles. Silica colloid sol was reserved between two inclined slide glasses by capillary force, and particles were stacked to form a film onto the substrate as the upper glass was sliding. The deposition processes were studied to enhance the wavelength dependency of the light transmittance and to control the effective refractive index of the film. Both of the spherical and fumed silica particles showed an enhancement of $4.0-4.4\%$ in light transmittance by one step coating. The dependence of the transmittance on wavelength was largely improved at the longer wavelength by partial coating of fumed particles on the film of spherical particles. The effective refractive index of the film was controlled by removing latex particles that were co-deposited with silica particles. Using this process the light reflectance from one side of the glass substrate could be reduced from $4.2\%$ to $0.6\%$ although zero reflectance was not achieved due to the agglomeration of the latex particles.

• Journal of the Semiconductor & Display Technology
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• v.15 no.3
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• pp.35-39
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• 2016

Extreme Ultraviolet Lithography (EUVL) is the most promising technique in the field of Next Generation Lithography (NGL) expected to be used in the 1x-nm node for High Volume Manufacturing (HVM). But there exits remaining challenges for proper defect control of EUV mask. It was considered development of EUV pellicle for protecting the EUV mask has many obstacles due to high extinction coefficient of EUV wavelength. Recently researchers in the industry of semiconductor argue about the necessity of EUV pellicle and make effort to achieve it. In this paper, we investigated that the relationship between imaging performance and transmittance of EUV pellicle quantitatively. We made in-house EUV pellicle and analyzed its imaging performance of the dependence of pellicle transmittance using Coherent Scattering Microscopy(CSM). The imaging performance of EUV mask with pellicle is affected by its transmittance and we found that the performance of EUV mask improved with higher transmittance pellicle.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.11 no.9
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• pp.1724-1728
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• 2007

In this paper we propose a novel electrode structure for high transmittance in the Patterned Vertical Alignment (PVA) LC cell. We use the 'TechWiz LCD' for calculation of the director configuration and optical characteristics. We studied the area decreasing the transmittance through the electrode structure for wide viewing angle and proposed new electrode design to change LC director configuration in the area. We show the comparison of the calculated optical transmittance between the conventional PVA mode and the proposed PVA mode. From the results, we confirm that the optical transmittance of the proposed structure of the PVA cell becomes higher.

• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.1-4
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• 2000

We have developed a high performance vertical alignment TFT-LCD, that shows a high light transmittance, and wide viewing angle characteristics with an unusually high contrast ratio. In order to optimize the electro-optical properties we have studied the effect of cell parameters, multi-domain structure and retardation film compensation. With the optimized cell parameters and process conditions, we have achieved a 24" wide UXGA TFT-LCD monitor (16:10 aspect ratio 1920X1200) showing a contrast ratio over 500:1, panel transmittance near 4.5%, response time near 27 ms, and viewing angle higher than 80 degree in all directions.

• Polymer(Korea)
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• v.36 no.5
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• pp.662-667
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• 2012

Poly(ethylene terephthalate) (PET) base films with high light transmittance have been used for the substrate of various functional films in the flat panel display. The effects of the reflective index of coated films, the roughness of the film surface and the content of inorganic silica particles on the light transmittance were studied in this article. Light transmittance was increased by coating a water soluble resin with a low reflective index at an optimum thickness. The roughness of the film did not affect light transmittance when the Ra of the film surface was less than a quarter of the wavelength of incident light. Inorganic silica particles decreased light transmittance due to their absorbance and scattering of the incident light.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.548-551
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• 2004

For the improvements in high transmittance, one of the most important factors of transparent dielectric is pore contents and pore size. This study have investigated the effect of frit size on the transmittance of zinc-boric system with a Pb-free composition. A mixed glass paste was used for thick films, which were made by screen printing methods on a glass substrate (PD200). These dielectric layers were measured for surface roughness, pores content and transmittance. The results show that increase of pore size and content have detrimental effects on the transmittance of films compared to those found in the PbO system.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.63 no.2
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• pp.119-123
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• 2014

In this study, four kinds of specimens of PE(polyethylene)-based insulating materials were prepared for selecting the optimum insulation materials in a wet environment. The specimens were tested by various methods, the anti tracking test, the transmittance test in the water vapor transmittance(WVT) and the abrasion resistive test, etc. The HDPE(high-density polyethylene) specimen was showed excellent property in the tracking resistance test and the lowest transmittance in water vapor transmittance test. In the abrasion resistive test, the LLDPE(linear low-density polyethylene) and MDPE(medium-density Polyethylene) were showed excellent mechanical properties. The value of cut-through resistance for MDPE and HDPE were superior to that for LLDPE and LDPE(low-density polyethylene).