• Title/Summary/Keyword: high density energy beam

Search Result 147, Processing Time 0.028 seconds

Improvement of Conductive Micro-pattern Fabrication using a LIFT Process (레이저 직접묘화법을 이용한 미세패턴 전도성 향상에 관한 연구)

  • Lee, Bong-Gu
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.18 no.5
    • /
    • pp.475-480
    • /
    • 2017
  • In this paper, the conductivity of the fine pattern is improved in the insulating substrate by laser-induced forward transfer (LIFT) process. The high laser beam energy generated in conventional laser induced deposition processes induces problems such as low deposition density and oxidation of micro-patterns. These problems were improved by using a polymer coating layer for improved deposition accuracy and conductivity. Chromium and copper were used to deposit micro-patterns on silicon wafers. A multi-pulse laser beam was irradiated on a metal thin film to form a seed layer on an insulating substrate(SiO2) and electroless plating was applied on the seed layer to form a micro-pattern and structure. Irradiating the laser beam with multiple scanning method revealed that the energy of the laser beam improved the deposition density and the surface quality of the deposition layer and that the electric conductivity can be used as the microelectrode pattern. Measuring the resistivity after depositing the microelectrode by using the laser direct drawing method and electroless plating indicated that the resistivity of the microelectrode pattern was $6.4{\Omega}$, the resistance after plating was $2.6{\Omega}$, and the surface texture of the microelectrode pattern was uniformly deposited. Because the surface texture was uniform and densely deposited, the electrical conductivity was improved about three fold.

Design of optical transmitter system for high-speed wireless optical communication (초고속 무선 광통신을 위한 송신광학계의 설계)

  • 권영훈;임천석
    • Korean Journal of Optics and Photonics
    • /
    • v.15 no.2
    • /
    • pp.158-170
    • /
    • 2004
  • Wireless optical communication is expected for high-speed optical communication in the areas of saturated optical fiber communication and low population density. In this paper, we present an optical transmitter system for wireless optical communication with new design concepts different from the usual optical imaging system. The specifications are the following: the source is a laser diode(LD) of wavelength 830 nm in which the divergent angle from the tangential plane differs from that from the sagittal plane. Here, the requested transmission distances are very long range such as 500 m to 1500 m and beam diameter is 3 m at the receiver with symmetrical energy distribution. For the evaluation characteristics of this kind of non-imaging system, two optical quantities, the relative illumination distribution and energy transfer efficiency, are numerically calculated through lots of ray tracing.

Effective Interdiffusion of Co/Pd multilayers

  • Kim, Jai-Young;Jan E. Evetts
    • Journal of Magnetics
    • /
    • v.2 no.3
    • /
    • pp.86-92
    • /
    • 1997
  • An artificially modulated magnetic Co/Pd multilayer is one of the promising candidates for high density magneto-optic (MO) recording media in the wavelength of a blue laser beam, due to large Kerr rotation angle. However, since the Co/Pd multilayer is a non-equilibrium state in terms of free energy and MO recording is a kind of thermal recording which is conducted around Curie temperature (Tc) of the recording media, the assessment of the thermal stability in the Co/Pd multilayer is crucially important both for basic research and applications. As the parameter of the thermal stability in this research, effective interdiffusion coefficients (Deff) perpendicular to the interface of the Co/Pd multilayers are measured in terms of Ar sputtering pressure and heat treatment temperature. From the results of the research, we find out that the magnetic exchange energy between Co and Pd sublayers strongly affects Deff of the Co/Pd multilayers. This discovery will provide the understanding of the magnetic exchange energy in the effective interdiffusion process of a magnetic multilayer structure and suggest the operating temperature range for MO recording in the Co/Pd multilayer for the basic research and applications, respectively.

  • PDF

Effects of surface modification of $Nafion^{(R)}$ Membrane on the Fuel Cell Performance

  • Prasanna, M.;Cho, E.A.;Ha, H.Y.;Hong, S.A.;Oh, I.H.
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
    • /
    • 2004.11a
    • /
    • pp.133-138
    • /
    • 2004
  • Proton exchange membrane fuel cell (PEMFC) is considered as a clean and efficient energy conversion det ice for mobile and stationary applications. Anions all the components of the PEMFC, the interface between the electrolyte ,and electrode catalyst plays an important role in determining tile cell performance since the electrochemical reactions take place at the interface in contact with tile reactant gases. Therefore, to increase the interface area and obtain a high-performance PEMFC, surface of the electrolyte membrane was roughened by Ar$^{+}$ beam bombardment. The results imply that by modifying surface of the electrolyte membrane, platinum loading can be reduced significantly without performance loss. To optimize the surface treatment condition, effects of ion dose density on characteristics of the membrane/electrode interface were examined by measuring the cell performance, impedance spectroscopy, and cyclic voltammograms. Surface of the modified membranes were characterized using scanning electron microscopy and FT-IR.R.

  • PDF

Surface Reaction Modeling for Plasma Etching of SiO2 Thin Film (실리콘 산화막의 플라즈마 식각에 대한 표면반응 모델링)

  • Im, YeonHo
    • Korean Chemical Engineering Research
    • /
    • v.44 no.5
    • /
    • pp.520-527
    • /
    • 2006
  • A realistic surface model is presented for prediction of various surface phenomena such as polymer deposition, suppression and sputtering as a function of incidence ion energy in high density fluorocarbon plasmas. This model followed ion enhanced etching model using the "well-mixed" or continuous stirred tank reactor (CSTR) assumption to the surface reaction zone. In this work, we suggested ion enhanced polymer formation and decomposition mechanisms that can capture $SiO_2$ etching through a steady-state polymer film on $SiO_2$ under the suppression regime. These mechanisms were derived based on experimental data and molecular dynamic simulation results from literatures. The model coefficients are obtained from fits to available beam and plasma experimental data. In order to show validity of our model, we compared the model results to high density fluorocarbon plasma etching data.

Fabrication of 2-layer Flexible Copper Clad Laminate by Vacuum Web Coater with a Low Energy Ion Source for Surface Modification (저 에너지 표면 개질 이온원이 설치된 진공 웹 공정을 이용한 2층 flexible copper clad laminate 제작)

  • Choi, Hyoung-Wook;Park, Dong-Hee;Choi, Won-Kook
    • Korean Journal of Materials Research
    • /
    • v.17 no.10
    • /
    • pp.509-515
    • /
    • 2007
  • In order to fabricate adhesiveless 2-layer flexible copper clad laminate (FCCL) used for COF (chip on film) with high peel strength, polyimide (PI; Kapton-EN, $38\;{\mu}m$) surface was modified by reactive $O_2^+$ and $N_2O^+$ ion beam irradiation. 300 mm-long linear electron-Hall drift ion source was used for ion irradiation with ion current density (J) higher than $0.5\;mA/cm^2$ and energy lower than 200 eV. By vacuum web coating process, PI surface was modified by linear ion source and then 10-20 nm thick Ni-Cr and 200 nm thick Cu film were in-situ sputtered as a tie layer and seed layer, respectively. Above this sputtered layer, another $8-9{\mu}m$ thick Cu layer was grown by electroplating and subsequently acid and base resistance and thermal stability were tested for examining the change of peel strength. Peel strength for the FCCLs treated by both $O_2^+$ and $N_2O^+$ ion irradiation showed similar magnitudes and increased as the thickness of tie layer increased. FCCL with Cu (200 nm)/Ni-Cr (20 nm)/PI structure irradiated with $N_2O^+$ at $1{\times}10^{16}/cm^2$ ion fluence was proved to have a strong peel strength of 0.73 kgf/cm for as-received and 0.34 kgf/cm after thermal test.

Development of Remote Laser Welding-Cutting Process for Maintenance of Hydraulic Connection Module on ITER Project (핵융합 발전로 냉각수 연결모듈의 원격 유지보수를 위한 레이저 용접-절단 공정개발)

  • Kim, Yong;Park, Ki-Young;Lee, Kyoung-Don
    • Journal of Welding and Joining
    • /
    • v.30 no.1
    • /
    • pp.51-58
    • /
    • 2012
  • To assess hydraulic connections between sub-components of the International Thermonuclear Experimental Reactor (ITER) diagnostic port plug, the laser welding and ablation cutting process were investigated in order to be applied the remote handling maintenance. In this study, laser ablation cutting, which vaporizes a small amount of solid material directly into gas by focusing a laser beam of high density energy, is adopted in order to overcome the limitation of the normal laser cutting technology that the head should be placed as close to the work piece as possible to blow out melt metal at a distance. Complete cutting of a work piece is obtained by repetitive multi-passes of the laser beam. The welding and cutting process were tested on the sample work pieces and finally on a prototype of a hydraulic connection module for remote handling. The results showed that this process can be a promising candidate for hydraulic connections by remote handling.

Temperature dependence of Heteroeptaxial $Y_2O_3$ films grown on Si by ionized cluster beam deposition

  • Cho, M.-H.;Ko, D.-H.;Whangbo, S.W.;Kim, H.B.;Jeong, K.H.;Whang, C.N.;Choi, S.C.;Cho, S.J.
    • Journal of the Korean Vacuum Society
    • /
    • v.7 no.s1
    • /
    • pp.57-77
    • /
    • 1998
  • Heteroepitaxial $Y_2O_3$ films were grown on a Si(111) substrate by ionized cluster beam deposition(ICBD) in ultra high vacuum, and its qualities such as crystllitnity, film stress, and morphological characteristics were investigated using the various measurement methods. The crystallinity was investigated by x-ray diffraction (XRD) and reflection high energy electron diffraction (RHEED). Interface crystallinity was also examined by Rutherford backscattering spectroscopy(RBS) channeling, transmission electron microscopy(TEM). The stress of the films was measured by RBS channeling and XRD. Surface and interface morphological characteristics were investigated by atomic force microscopy (AFM) and x-ray scattering method. Comparing the interface with the surface characteristics, we can conclude that many defects at the interface region were generated by interface reaction between the yttrium metal and SiO2 layer and by ion beam characteristic such as shallow implantation, so that they influenced the film qualities. The film quality was dominantly depended on the characteristic temperature range. In the temperature range from $500^{\circ}C$ to $600^{\circ}C$, the crystallinity was mainly improved and the surface roughness was drastically decreased. On the other hand, in the temperature range from $600^{\circ}C$ to $700^{\circ}C$, the compressive stress and film density were dominantly increased, and the island size was more decreased. Also the surface morphological shape was transformed from elliptical shape to triangular. The film stress existed dominantly at the interface region due to the defects generation.

  • PDF

The high repetition operating characteristics of pulsed Nd:YAG laser by parallel mesh and alternating charge-discharge system (병렬 메쉬 및 교번 충.방전 방식에 의한 펄스형 Nd:YAG 레이저의 고반복 동작특성에 관한 연구)

  • Park, K.R.;Kim, B.G.;Hong, J.H.;Kim, W.Y.;Kim, H.J.;Cho, J.S.
    • Proceedings of the KIEE Conference
    • /
    • 1999.11d
    • /
    • pp.1060-1062
    • /
    • 1999
  • Pulsed Nd:YAG laser is used widely for materials processing and instrumentation. It is very important to control the laser energy density in materials processing by a pulsed Nd:YAG laser. A pulse repetition rate and a pulse width are regarded as the most dominant factors to control the energy density of laser beam. In this study, the alternating charge-discharge system was designed to adjust a pulse repetition rate. And the parallel mesh is added to increase laser output power. This system is controlled by one chip microprocessor and allows to replace an expensive condenser for high frequency to a cheap condenser for low frequency. In addition, we have investigated the current pulse shape of flashlamp and the operating characteristics of a pulsed Nd:YAG laser. As a result, it is found that the laser output of the power supply using the parallel mesh and the alternating charge-discharge system is not less than that of typical power supply. As the pulse repetition rate rises from 10pps to 110pps by the step of 20pps at 1000V and 1200V, it is found that the laser efficiency decreases but the laser output power increases about 5W at each step.

  • PDF

The high repetition operating characteristics of pulsed Nd:YAG laser by alternating charge-discharge system (펄스형 Nd:YAG 레이저의 교번 충.방전 방식에 의한 고반복 동작특성)

  • Kim, W.Y.;Park, K.R.;Kim, B.G.;Hong, J.H.;Kang, U.;Kim, H.J.
    • Proceedings of the KIEE Conference
    • /
    • 1999.07e
    • /
    • pp.2204-2206
    • /
    • 1999
  • Pulsed Nd:YAC laser is used widely for materials processing and instrumentation. It is very important to control the laser energy density in materials processing by a pulsed Nd:YAG laser. A pulse repetition rate and a pulse width are regarded as the most dominant factors to control the energy density of laser beam. In this study, the alternating charge-discharge system was designed to adjust a pulse repetition rate. This system is controlled by one chip microprocessor and allows to replace an expensive condenser for high frequency to a cheap condenser for low frequency. In addition. we have investigated the current pulse shape of flashlamp and the operating characteristics of a pulsed Nd:YAG laser. As a result, it is found that the laser output of the power supply using the alternating charge-discharge system is not less than that of typical power supply. As the pulse repetition rate rises from 30pps to 120pps by the step of 30pps at 1200V, it is found that the laser efficiency decreases but the laser output power increases about 6W at each step.

  • PDF