• Electrical & Electronic Materials
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• v.8 no.1
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• pp.77-82
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• 1995

PTCR(Positive Temperature Coefficient of Resistivity) thermistor in thin film BaTiO$_{3}$ system was prepared by using radio frequency(13.56 MHz) and DC magnetron sputter equipment. Polycrystalline, surface structure, and R-T(Resistivity-Temperature) characteristics of the specimens were measured by X-ray diffraction(D-Max3, Rigaku, Japan), SEM(Scanning Electron Microscopy: M.JSM84 01, Japan), and insulation resistance measuring system (Keithley 719), respectively. Thin films characteristics of the thermistor showed different properties depending on the substrate even with the same sputtering condition. The thin film formed on the A1$_{2}$O$_{3}$ substrate showed a good crystalline and a low resistivity at below curie point. However, the thin films prepared on slide glass and Si wafer were amorphous. The thicknesses of the three samples prepared under the same process conditions were 700[.angs.], 637.75[.angs.], and 715[.angs.], respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.205-205
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• 2010

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystem fields because of its very good electrical and mechanical properties, high stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of on $O_2$ annealing treatment on the electrical properties of Pb(ZrTi)$O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. The change of the crystallization of the films were investigated under various atmosphere. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) and secondary ion mass spectrometry (SIMS).

• Journal of the korean academy of Pediatric Dentistry
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• v.24 no.3
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• pp.518-536
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• 1997

The purpose of the present study was to analyze the pulpal tissue reactions to several capping materials. 8 adult Mongrel dogs and 4 different capping materials (G I : Calcium hydroxide, G II : Bonding resin, G III : Glass ionomer liner, G IV : Bioactive ceramic) we-reused in the study. The results can be summarized as follows : 1. The formation of hard tissue barrier was observed to begin after 2 weeks in all groups with various forms or positions. 2. According to the result of statistical analysis, G I and G IV showed significantly higher degree of inflammation than G II, G III in 1-week samples(p<.05). And in 2-week samples, G I showed higher degree of inflammation than G II, G IV with statistical significance(p<.05). Howere, these inflammatory reactions have gradually dimiished with time resulting in negligible difference between groups. 3. No bacterial penetration was observed in any group. 4. Hard tissue formation was evident in all groups after 2 weeks regardless of material type in this experiment. Conclusion can be drawn from the above-mentioned results that the perfect marginal sealing after pulp capping procedure is thought to be the most important factor in determining the propgnosis of direct pulp capping.

• Journal of the Korea Institute of Military Science and Technology
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• v.8 no.4 s.23
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• pp.130-135
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• 2005

This paper presents application possibility of Lightweight Piezoceramic Composite Actuator(LIPCA) to suppress vibration of dynamic structures as an actuator. LIPCA is composed of a piezoelectric layer, a carbon/epoxy layer and glass/epoxy layers. When compared to the bare piezoelectric ceramic(PZT), LIPCA has advantages such as high performance, durability and reliability. In this study, performances of LIPCA have been estimated in an active vibration control system. Experiments were performed on an aluminum beam with cantilever configuration. In this test, strain gages and single LIPCA are attached on the aluminum beam with epoxy resin. Digital ON-OFF control algorithm is applied into the system to exhibit performance of LIPCA as actuator in active vibration control system. First, we performed static actuation test of bare PZT and LIPCA in order to show the superiority of LIPCA. Secondly, we carried out beam vibration control test using LIPCA. The results showed LIPCA could suppress free vibration of the aluminum beam, which means that LIPCA can be applied as an actuator to control vibration of dynamic structures.

• Journal of Mechanical Science and Technology
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• v.18 no.3
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• pp.388-394
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• 2004

Composites of Si$_3$N$_4$-SiC containing up to 30 wt% of dispersed SiC particles were fabricated via hot-pressing with an oxynitride glass. To determine the effect of sintering time and SiC content on the mechanical properties and the cutting performance, the composites with fixed 8hr-sintering time and 20 wt% SiC content were fabricated and tested. Fracture toughness of the composites increased with increasing sintering time, while the hardness increased as the SiC content increased up to 20 wt%. The hardness of the composites was relatively independent of the grain size and the sintered density. For machining heat-treated AISI4140, the insert with 20 wt% SiC sintered for 8hr showed the longest tool life while the insert with 20 wt% SiC sintered for 12hr showed the longest tool life for machining gray cast iron. An effort was made to relate the mechanical properties, such as hardness, fracture toughness and wear resistance coefficient with the tool life. However, no apparent relationship was found between them. It may be stated that tool life is affected by not only the mechanical properties but also other properties such as surface roughness, density, grian size and the number of the inherent defects in the inserts.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.99-99
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• 2010

Recently, amorphous transparent oxide semiconductors (TOS) have been widely studied for many optoelectronic devices such as AM-OLED (active-matrix organic light emitting diodes). The TOS TFTs using a-IGZO channel layers exhibit a high electron mobility, a smooth surface, a uniform deposition at a large area, a high optical transparency, a low-temperature fabrication. In spite of many advantages of the sputtering process such as better step coverage, good uniformity over large area, small shadow effect and good adhesion, there are not enough researches about characteristics of a-IGZO thin films. In this study, therefore, we focused on the electrical properties of a-IGZO thin films as a channel layer of TFTs. TFTs with the a-IGZO channel layers and Y2O3 gate insulators were fabricated. Source and drain layers were deposited using ITO target. TFTs were deposited on unheated non-alkali glass substrates ($5cm{\times}5cm$) with a sintered ceramic IGZO disc (3 inch $\varnothing$, 5mm t), Y2O3 disc (3 inch $\varnothing$, 5mm t) and ITO disc (3 inch $\varnothing$, 5mm t) as a target by magnetron sputtering method. The O2 gas was used as the reactive gas. Deposition was carried out under various sputtering conditions to investigate the effect of sputtering process on the characteristics of a-IGZO thin films. Correlation between sputtering factors and electronic properties of the film will be discussed in detail.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1559-1561
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• 2002

적외선 확산반사형 결정화유리를 응용한 레이저 여기용 공진기를 제작하여 미세구조 분석 및 레이저 여기 효율특성을 조사하였다. 출발물질로는 Cordierite를 주결정상으로 하는 MAS(MgO, $Al_2O_3$, $SiO_2$) 3성분계 조성에 결정화 유도용 조핵제로 $TiO_2$를 첨가하였으며, 형성된 유리 용융물을 흑연제 몰드에 부어 공진기를 제조하였다. 용융물 중 일부를 2단계 열처리를 행하여 상분석을 실시한 결과 Cordierite($2MgO{\cdot}2Al_2O_3{\cdot}5SiO_2$)와 Rutile($TiO_2$)이 주결정상으로 관찰되었으며, 열처리 온도를 변화시켜 생성된 입자의 크기에 따른 확산반사율간의 관계를 조사한 결과, $1100{\sim}1200nm$에서 열처리된 시편의 경우 $500{\sim}2200nm$의 영역에서 95% 이상의 확산반사율을 나타내었다. 대표적인 고체레이저인 Nd:YAG의 경우, $700{\sim}900nm$ 파장이 주흡수대이며, 이를 결정화유리로 제조된 공진기의 레이저 효율특성실험에 이용하였다. 수냉 및 단일 펄스의 조건에서 $1.7{\sim}1.9%$의 효율을 나타내었다.

• Journal of the Korean institute of surface engineering
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• v.41 no.4
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• pp.142-146
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• 2008

Trivalent ions(Ga, Al, In) doped ZnO films were deposited by DC magnetron sputtering on non-alkali glass substrate at substrate temperature of $300^{\circ}C$. We used the different three types of high density($95%{\sim}$) ceramic sintered disks(doped with $Ga_2O_3$; 6.65 wt%, $Al_2O_3$; 3.0 wt%, $In_2O_3$; 9.54 wt%). This study examined the effect of different dopants(Ga, Al, In) on the electrical, structural, and optical properties of the films. The lowest resistivity of $5.14{\times}10^{-4}{\Omega}cm$ and the highest optical band gap of 3.74 eV were obtained by Ga doped ZnO(GZO) film. All the films had a preferred orientation along the(002) direction, indicating that the growth orientation has a c-axis perpendicular to the substrate surface. The average transmittance of the films was more than 85% in the visible range.