• 한국정밀공학회지
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• 제26권2호
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• pp.78-85
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• 2009

High performance functional fibers are demanded increasingly in the modern industries, while the inorganic fibers such as carbon fibers, glass fibers, and metal fibers are representative among them in that they have high strength, consistent properties in a broad temperature change, etc.. This paper reports on the experimental trial to apply the microwave furnace on melting the natural basalt rock that spreads overall on the global surface and is supposed to be used as the raw material for the inorganic high performance fiber. Results showed that the new method to use the microwave as the heating source to melt the basalt rock was feasible. The crucible spinning could effectively applied for producing the basalt fibers up to 10 micrometer diameter, when the crushed basalt rocks were used. For drawing the molten basalt the drawing roller surface feature was a very important factor.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.125-125
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• 2003

PZT(Pb(Zr,Ti)O3)는 우수한 강유전 특성을 가지기 때문에 FRAM (Ferroelectric Random Access Memory) 소자에 응용하기 위해 많은 연구가 진행되고 있다. 스퍼터에 의해 증착된 PZT는 처음에 pyrochlore상으로 존재하다가 후 열처리를 통해 이력 특성을 나타내는 perovskite상으로 천이된다. 일반적인 furnace열처리 방법은 고온에서의 장시간 열처리가 요구되고 Pb-loss현상이나 TiO2와 같은 이차상의 생성 그리고 하부 Pt전극의 roughness증가 및 crack과 같은 문제점이 있다. 최근 들어 후 열처리를 RTA로 이용하는 연구가 진행되고 있는데 이는 열처리 시간이 짧기 때문에 위와 같은 문제점을 개선할 수 있었다. 하지만 RTA방법 또한 어느 정도의 thermal budget이 존재하고 추가적 장비가 필요하며 기판의 전체적 가열공정이므로 다른 CMOS공정과 compatibility가 떨어진다. 따라서 본 실험에서는 위와 같은 문제를 해결하고자 노력을 집중하였고 이를 위한 새로운 열처리 방법을 개발하였다. 즉 Pt 하부전극에 전압(전류)을 인가하여 순간적으로 고온으로 결정화시키는 새로운 공정을 모색하였는데 이와 같은 방법은 열처리를 위한 추가적인 장비가 필요없고 국부적으로 순간적인 가열이기 때문에 glass기판에도 적합하며 RTA보다 승온시간 및 열처리 시간이 짧기 때문에 thermal budget도 줄일 수 있었다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2007년도 춘계학술대회
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• pp.326-329
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• 2007

$CuInS_{2}$ thin films were synthesized by sulpurization of Cu/In Stacked elemental layer deposited onto glass Substrates by vacuum furnace annealing at temperature 200[$^{\circ}C$]. And structural and electrical properties were measured in order to certify optimum conditions for growth of the ternary compound semiconductor $CuInS_{2}$ thin films with non-stoichiometry composition. $CuInS_{2}$ thin film was well made at the heat treatment 200[$^{\circ}C$] of SLG/Cu/ln/S stacked elemental layer which was prepared by thermal evaporator, and chemical composition of the thin film was analyzed nearly as the proportion of 1 : 1 : 2. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM and Hall measurement system. At the same time, carrier concentration, hall mobility and resistivity of the thin films was $9.10568{\times}10^{17}$ [$cm^{-3}$], 312.502 [$cm^{2}/V{\cdot}s$] and $2.36{\times}10^{-2}$ [${\Omega}{\cdot}cm$], respectively.

• 한국세라믹학회지
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• 제15권3호
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• pp.157-167
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• 1978

The batch compositions and physical properties of slag-ceramics were studied with respect to their formability from the molten state and conditions of nucleation and crystal growth treatment. The selected batch compositions for nucleation and growth studies were slag, 56%; silica sand, 28%; $Na_2O＋MgO$, 8% and $TiO_2＋$chromite, 8%. The optimum nucleation condition was the temperature of 75$0^{\circ}C$ with 6 hrs. holding time and the optimum growth condition was the temperature 975$^{\circ}C$ with zero holding time. The slag-ceramics prepared under the above conditions showed the best developed microtexture. The grown crystals were identified as diopside with the average grain size of 5.7$\mu\textrm{m}$, and the amount of crystal grown were about 53% by weight. The prepared specimens of slag-ceramics showed the microhardness, 793kg/$\textrm{mm}^2$; MOR, 1,050 kg/$\textrm{cm}^2$ and thermal expansion coefficient, $85{\div}10^{-7}$cm/cm/$^{\circ}C$($25^{\circ}C$~$700^{\circ}C$).

• 한국디지털건축인테리어학회논문집
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• 제11권4호
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• pp.21-27
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• 2011

These materials in architecturally glass or metal have weaknesses such as inadequate insulating quality, combustibility and toxic gases in fires substance. However, Autoclaved Lightweight Concrete(ALC) has excellent thermal insulation properties and seem to possess the superb insulating quality as substitute of existing exterior materials. This research is to compare experimentally to the kind of the strength properties of ALC materials which mixed with blast furnace slag pounder and silica fume. For the purpose of increasing the strength, the plastic states of ALC evaluate the physical characteristics as microstructure and strength according to various specific gravity. According to the quicklime quantity the compressive strength is proportionate depend on the absolute dried specific gravity. When not putting in 10% quicklime, the compressive strength appeared most lowly with 14.0MPa. When putting in the quicklime, the strength appeared higher with 15.1MPa. And strength of specimen containing 2.25% silica fume is 15.6MPa increased 10.3% than reference specimen 14.0MPa.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.17-17
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• 2010

Polycrystalline $CuInS_2$ thin films were performed from S/In/Cu Stacked elemental layer(SEL) method with post annealing. In thin method, the thin films were annealed in Vacuum of $10^{-3}$ torr or in S ambient. $CuInS_2$ thin films were manufctured by using the evaporation and the annealing with vacuum quartz furnace of sulfurization process was used in the vacuum chamber to the substrate temperature on the glass substrate the annealing temperature and characteristics thereof were investigated. The physical properties of the thin film were investigated under various fabrication conditions including the substrate temperature annealing time by XRD, FE-SEM, and Hall measurement system.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2010년도 춘계 학술대회 제22권1호
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• pp.247-248
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• 2010

본 연구는 산업폐기물을 이용한 인공경량골재의 제조에 관한 실험적 연구이다. 실험결과, 산화슬래그를 부원료로 사용한 경우, 소성온도 $1,150^{\circ}C$에서 낮은 절건밀도와 낮은 흡수율을 나타내었고 유리연마슬러지의 경우는 본 연구에서 사용한 범위 이상을 사용하여야 경량화가 가능할 것으로 판단된다. 그러나 고로슬래그 미분말은 경량골재 원료로 사용하기에는 부적합한 것으로 판단된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.480.1-480.1
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• 2014

In this study, we suggest the new emitter formation applied solid phase epitaxy (SPE) growth process using rapid thermal process (RTP). Preferentially, we describe the SPE growth of intrinsic a-Si thin film through RTP heat treatment by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD). Phase transition of intrinsic a-Si thin films were taken place under $600^{\circ}C$ for 5 min annealing condition measured by spectroscopic ellipsometer (SE) applied to effective medium approximation (EMA). We confirmed the SPE growth using high resolution transmission electron microscope (HR-TEM) analysis. Similarly, phase transition of P doped a-Si thin films were arisen $700^{\circ}C$ for 1 min, however, crystallinity is lower than intrinsic a-Si thin films. It is referable to the interference of the dopant. Based on this, we fabricated 16.7% solar cell to apply emitter layer formed SPE growth of P doped a-Si thin films using RTP. We considered that is a relative short process time compare to make the phosphorus emitter such as diffusion using furnace. Also, it is causing process simplification that can be omitted phosphorus silicate glass (PSG) removal and edge isolation process.

• 한국분말재료학회지
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• 제21권6호
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• pp.454-459
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• 2014

In this study, the porous ceramic filter was developed to be able to remove both dust and hazardous gas contained in fuel gas at high temperature. The porous ceramic filters were fabricated and used as a catalyst support. And the effects have been investigated such as the mean particle size, organic content and addition of foaming agent on the porosity, compressive strength and pressure drop of ceramic filters. With the increase of mean powder size and the organic content for the cordierite filter, the porosity was increased, but the compressive strength and pressure drop were decreased. From the results of the research, the optimum condition for the fabrication of ceramic filters could be acquired and they had the porosity of 58%, the compressive strength of 13.4 MPa and the pressure drop of 250 Pa. It was expected that this ceramic filter was able to be applied to the glass melting furnace, combustor, and dust/toxic gas removal filter.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.224-224
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• 2011

OLED (Organic Light-Emitting Diode) 디스플레이에서는 반사율이 가장 높은 silver (Ag)가 쓰이고 있지만, 소자에서 요구되는 일함수의 불일치 때문에 전극과 유기물간에 에너지 장벽이 발생하여 발광효율을 낮추는 요인이 되고 있다. 본 논문에서는 Ag 전극의 work function을 조절하기 위한 연구를 진행하였다. Ag를 rf magnetron sputter를 이용해 glass위에 증착한 후 furnace에서 300$^{\circ}C$, 30분간 공기중에서 열처리 하였고. 또 다른 샘플은 산소분위기에서 표면에 상압플라즈마로 처리 시간(30, 60, 90, 120 sec)을 각기 다르게 하여 샘플을 제조하였다. Ag전극은 Nanoindentation을 통해 국부 영역에 대한 물리적 특성의 변화를 측정하였고 Kelvin Probe Force Microscopy (KPFM)을 이용해 샘플의 포텐셜을 측정했다. 그 결과 열처리한 샘플은 포텐셜값은 가장 커졌지만 균일도가 낮아졌다. 30 sec, 120 sec 플라즈마 처리한 샘플은 탄성계수, 경도값, 및 Weibull modulus를 극히 낮게 만들었지만 60s, 90s 플라즈마 처리는 샘플의 경도값 균일도를 증가시켰다.