• Tribology and Lubricants
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• v.32 no.2
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• pp.61-66
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• 2016

Total thickness variation (TTV), BOW, and surface roughness are essential characteristics for high quality sapphire substrates. Many researchers have attempted to increase removal rate by controlling the key process parameters like pressure and velocity owing to the high cost of consumables in sapphire chemical mechanical polishing (CMP). In case of the pressure approach, increased pressure owing to higher deviation of pressure over the wafer leads to significant degradation of the TTV. In this study, the authors focused on reducing TTV under the high-pressure conditions. When the production equipment polishes multiple wafers attached on a carrier, higher loads seem to be concentrated around the leading edge of the head; this occurs because of frictional force generated by the combination of table rotation and the height of the gimbal of the polishing head. We believe the skewed pressure distribution during polishing to be the main reason of within-wafer non-uniformity (WIWNU). The insertion of a hub ring between the polishing head and substrate carrier helped reduce the pressure deviation. Adjusting the location of the hub ring enables tuning of the pressure distribution. The results indicated that the position of the hub ring strongly affected the removal profile, which confirmed that the position of the hub ring changes the pressure distribution. Furthermore, we analyzed the deformation of the head via finite element method (FEM) to verify the pressure non-uniformity over the contact area Based on experiment and FEM results, we determined the optimal position of hub ring for achieving uniform polishing of the substrate.

• Journal of Mechanical Science and Technology
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• v.16 no.10
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• pp.1187-1200
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• 2002

This paper is concerned with the design or an LMI (Linear Matrix Inequality) -based H$\infty$ controller for a line of sight (LOS) stabilization system and with its robustness performance. The linearization of the system is necessary to analyze various nonlinear characteristics, but the linearization entails modeling uncertainties which reduce its performance. In addition, the stability of the LOS can be adversely affected by angular velocity disturbances while the vehicle is moving. As the vehicle accelerates, all the factors that are Ignored and simplified for the linearization tend to Inhibit the performance of the system. The robustness in the face of these uncertainties needs to be assured. This paper employs H$\infty$ control theory to address these problems and the LMI method to provide a suitable controller with minimal constraints for the system. Even though the system matrix does not have a full rank, the proposed method makes it possible to design a H$\infty$ controller and to deal with R and S matrices for reducing the system order. It can be also shown that the proposed robust controller has a better disturbance attenuation and tracking performance. The LMI method is also used to enhance the applicability of the proposed reduced-order H$\infty$ controller for the system given. The LMI-based H$\infty$ controller has superior disturbance attenuation and reference input tracking performance, compared with that of the conventional controller under real disturbances.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.5
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• pp.517-526
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• 2015

This paper presents the results of study for improving the reliability of quadrotor attitude control by applying a multi-sensor along with a data fusion algorithm. First, a mathematical model of the quadrotor dynamics was developed. Then, using the quadrotor mathematical model, simulations were performed using the improved reliability multi-sensor data as the inputs. From the simulation results, we designed a Gimbal-equipped quadrotor system. With the quadrotor in a hover state, we performed experiments according to the angle change of the user's specifications. We then calculated the attitude control data from the actual experimental data. Furthermore, with additional simulations, we verified the performance of the designed quadrotor attitude control system with multiple sensors.

• Proceedings of KOSOMES biannual meeting
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• 2003.05a
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• pp.125-134
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• 2003

This paper describes on the design of Passive-type Radar Reflector for small Ship (PRR-S) based on the newly revised 2000 SOLAS regulations. The design idea, adopted in the study, is to hold PRR-S in the proper ‘catch rain’ position to avoid fluctuations of Radar Cross Section (RCS) due to ship's heeling. The PRR-S consists of octahedral-type radar reflector with circular plates and three-axis gimbaled stabilizer with weight on the bottom of outer gimbal ring. Performance test for the PRR is carried out in an anechoic chamber. The test results show that the reflected radar signal from PRR-S is more uniformly distributed than the reference model (Davis Echomaster).

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.42 no.11
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• pp.988-995
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• 2014

Two axis gimbal type X-band antenna system has been widely used to effectively transmit the real time image data from the observation satellite to the ground station. The micro-vibration generated by stepping motor actuation and imperfect intermeshed gear configuration of the antenna is one of the sources to degrade the image quality. To guarantee a high quality image of high resolution observation satellite, micro-vibration isolation of X-band antenna is required. In this paper, the X-band antenna vibration isolation system using pseudoelastic SMA(Shape Memory Alloy) mesh washer has been newly suggested. The basic characteristics of the SMA mesh washer isolator proposed in this study has been measured through static load tests and its effectiveness has been demonstrated by the micro-vibration isolation test of the X-band antenna.

• Journal of the Korea Institute of Military Science and Technology
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• v.20 no.2
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• pp.181-186
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• 2017

Synthetic aperture radar(SAR) has been widely used for reconnaissance. It provides high-resolution, day-and-night and weather-independent images for a multitude of applications. Because SAR coherently combines many viewing angles to effectively create a large aperture(narrow beam) radar, the test-bed should be capable of moving straightly SAR sensor for the integration angle to meet resolution. This paper describes the test-bed developed to test and evaluate the SAR performance. It forms high-quality images in real time and saves the raw data for the purpose of post processing on the ground.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.25 no.5
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• pp.313-320
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• 2015

A 2-axis gimbal-type X-band antenna has been widely used to effectively transmit the high resolution image data from the observation satellite to the desired ground station. However, a discontinuous stepper motor activation for rotating the pointing mechanism in azimuth and elevation directions induces undesirable micro-vibration disturbances which can result in the image quality degradation of a high-resolution observation satellite. To enhance the image quality of the observation satellite, attenuating the micro-vibration induced by an activation of the stepper motor for rotational movements of the antenna is important task. In this study, we proposed a low-rotational-stiffness blade gear applied to the output shaft of the stepper motor to obtain the micro-vibration isolation performance. The design of the blade gear was performed through the structure analysis such that this gear is satisfied with the margin of safety rule under the derived torque budget. In addition, the micro-vibration isolation performance of the blade gear was verified through the micro-vibration measurement test using the dedicated micro-vibration measurement device proposed in this study.

• Journal of Electrical Engineering and Technology
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• v.8 no.1
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• pp.190-196
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• 2013

This paper proposes a new guidance law, which considers the Field of View (FOV) of the seeker when a missile has a strapdown seeker mounted instead of a gimbal seeker. When a strapdown seeker, which has a narrow FOV, is used for tracking a target, the FOV of the seeker is an important consideration for guidance performance metrics such as miss distance. We propose a new guidance law called hybrid guidance (HG) to address the shortcomings of conventional guidance laws such as proportional navigation guidance (PNG), which cannot maintain lock-on conditions against high speed targets due to the narrow FOV of the strapdown seeker. The aim of the HG law is to null miss distance and to maintain the look angle within the FOV of the strapdown seeker. In order to achieve this goal, we combine two guidance laws in the HG law. One is a PNG law to null the LOS rate, and the other is a sliding mode guidance (SMG) law derived to keep the look angle within the FOV by employing a Lyapunov-like function with a sliding mode control methodology. We also propose a method to switch these two guidance laws at certain look angles for better guidance performance.

• Journal of the Korean Institute of Intelligent Systems
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• v.27 no.2
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• pp.89-98
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• 2017

The control moment gyroscope(CMG) can be used for essential balancing control of a one-wheeled mobile robot. A single-gimbal CMG has a simple structure and can supply strong restoring torque against external disturbances. However, the CMG generates unwanted directional torque also besides the restoring torque; the unwanted directional torque causes instability in the one-wheeled robot control system that has high rotational degrees of freedom. This study proposes a control system for a one-wheeled mobile robot by using a CMG scissored pair to eliminate the unwanted directional torque. The well-known LQR control algorithm is designed for robustness against modeling error in the dynamic motion equations of a one-wheeled robot. Computer simulations for 3D nonlinear dynamic equations are carried out to verify the proposed control system with the CMG scissored pair and the LQR control algorithms.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.32 no.5
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• pp.65-73
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• 2004

CMG(Control Momentum Gyro) is a control device being used for spacecraft attitude control constructing relatively large amount of torque compared to conventional body-fixed reaction wheels. The CMG produces gyroscopic control torque by continuously varying the angular momentum vector direction with respect to the spacecraft body. The VSCMG(Variable Speed Control Momentum Gyro) has favorable advantages with variable speed to lead to better control authority as well as singularity avoidance capability. Attitude dynamics with a VSCMG mounted on a two-axis gimbal system are derived in this study. The dynamic equation may be considered as an extension of the single-axis counterpart. Also, a feedback control law design is addressed in conjunction with the dynamic equations of motion.