• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.1
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• pp.113-122
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• 1996

As integrity of semiconductor device is increased, accurate and efficient modeling and recipe generation of semiconductor fabrication procsses are necessary. Among the major semiconductor manufacturing processes, dry etc- hing process using gas plasma and accelerated ion is widely used. The process involves a variety of the chemical and physical effects of gas and accelerated ions. Despite the increased popularity, the complex internal characteristics made efficient modeling difficult. Because of difficulty to determine the control input for the desired output, the recipe generation depends largely on experiences of the experts with several trial and error presently. In this paper, the optimal control of the etching is carried out in the following two phases. First, the optimal neural network models for etching process are developed with genetic algorithm utilizing the input and output data obtained by experiments. In the second phase, search for optimal control inputs in performed by means of using the optimal neural network developed together with genetic algorithm. The results of study indicate that the predictive capabilities of the neural network models are superior to that of the statistical models which have been widely utilized in the semiconductor factory lines. Search for optimal control inputs using genetic algorithm is proved to be efficient by experiments. (author). refs., figs., tabs.

• Proceedings of the Korean Society for Quality Management Conference
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• 1998.11a
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• pp.696-704
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• 1998

Artificial neural networks (ANN) have successfully applied into various areas. But, How to effectively established network is the one of the critical problem. This study will focus on this problem and try to extensively study. Firstly, four different learning algorithms ANNs were constructed. The learning algorithms include backpropagation, simulated annealing, genetic algorithm, and tabu search. The experimental results of the above four different learning algorithms were tested by statistical analysis. The training RMS, training time, and testing RMS were used as the comparison criteria.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 1997.10a
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• pp.105-108
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• 1997

Previous studies in stock market predictions using artificial intelligence techniques such as artificial neural networks and case-based reasoning, have focused mainly on spot market prediction. Korea launched trading in index futures market (KOSPI 200) on May 3, 1996, then more people became attracted to this market. Thus, this research intends to predict the daily up/down fluctuant direction of the price for KOSPI 200 index futures to meet this recent surge of interest. The forecasting methodologies employed in this research are the integration of genetic algorithm and artificial neural network (GAANN) and the integration of genetic algorithm and case-based reasoning (GACBR). Genetic algorithm was mainly used to select relevant input variables. This study adopts the categorical data preprocessing based on expert's knowledge as well as traditional data preprocessing. The experimental results of each forecasting method with each data preprocessing method are compared and statistically tested. Artificial neural network and case-based reasoning methods with best performance are integrated. Out-of-the Model Integration and In-Model Integration are presented as the integration methodology. The research outcomes are as follows; First, genetic algorithms are useful and effective method to select input variables for Al techniques. Second, the results of the experiment with categorical data preprocessing significantly outperform that with traditional data preprocessing in forecasting up/down fluctuant direction of index futures price. Third, the integration of genetic algorithm and case-based reasoning (GACBR) outperforms the integration of genetic algorithm and artificial neural network (GAANN). Forth, the integration of genetic algorithm, case-based reasoning and artificial neural network (GAANN-GACBR, GACBRNN and GANNCBR) provide worse results than GACBR.

• Transactions of Materials Processing
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• v.9 no.6
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• pp.644-652
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• 2000

Tube hydroforming is recently drawing attention of automotive industries due to its several advantages over conventional methods. It can produce wide range of products such as subframes, engine cradles, and exhaust manifolds with cheaper production cost by reducing overall number of processes. h successful tube hydroforming depends on the reasonable combination of the internal pressure and axial load at the tube ends. This paper deals with the optimal process design of hydroforming process using the genetic algorithm and neural network. An optimization technique is used in order to minimize the tube thickness variation by determining the optimal loading path in the tube expansion forming and the tube T-shape forming process.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.1 no.1
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• pp.87-94
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• 2001

Silicon nitride films grown by plasma-enhanced chemical vapor deposition (PECVD) are useful for a variety of applications, including anti-reflecting coatings in solar cells, passivation layers, dielectric layers in metal/insulator structures, and diffusion masks. PECVD systems are controlled by many operating variables, including RF power, pressure, gas flow rate, reactant composition, and substrate temperature. The wide variety of processing conditions, as well as the complex nature of particle dynamics within a plasma, makes tailoring SiN film properties very challenging, since it is difficult to determine the exact relationship between desired film properties and controllable deposition conditions. In this study, SiN PECVD modeling using optimized neural networks has been investigated. The deposition of SiN was characterized via a central composite experimental design, and data from this experiment was used to train and optimize feed-forward neural networks using the back-propagation algorithm. From these neural process models, the effect of deposition conditions on film properties has been studied. A recipe synthesis (optimization) procedure was then performed using the optimized neural network models to generate the necessary deposition conditions to obtain several novel film qualities including high charge density and long lifetime. This optimization procedure utilized genetic algorithms, hybrid combinations of genetic algorithm and Powells algorithm, and hybrid combinations of genetic algorithm and simplex algorithm. Recipes predicted by these techniques were verified by experiment, and the performance of each optimization method are compared. It was found that the hybrid combinations of genetic algorithm and simplex algorithm generated recipes produced films of superior quality.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2000.05a
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• pp.126-129
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• 2000

In order to approximate a nonlinear function, wavelet neural networks combining wavelet theory and neural networks have been proposed as an alterantive to coventional multi-layered neural networks. Wavelet neural networks provide better approximating performance than conventional neural networks. In this paper, an effective method to construct an optimal wavelet neural network is proposed using genetic algorithm. This is verified through experimental results.

• Journal of Advanced Marine Engineering and Technology
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• v.25 no.2
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• pp.383-394
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• 2001

The stabilization control of inverted pendulum (IP) system is difficult because of its nonlinearity and structural unstability. In this paper, an Evolving Neural Network Controller (ENNC) without Error Back Propagation (EBP) is presented. An ENNC is described simply by genetic representation using an encoding strategy for types and slope values of each active functions, biases, weights and so on. By an evolutionary programming which has three genetic operation; selection, crossover and mutation, the predetermine controller is optimally evolved by updating simultaneously the connection patterns and weights of the neural networks. The performances of the proposed ENNC(PENNC)are compared with the one of conventional optimal controller and the conventional evolving neural network controller (CENNC) through the simulation and experimental results. And we showed that the finally optimized PENNC was very useful in the stabilization control of an IP system.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2001.05a
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• pp.243-248
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• 2001

The stabilization control of Inverted Pendulum(IP) system is difficult because of its nonlinearity and structural unstability. Thus, in this paper, an Evolving Neural Network Controller(ENNC) without Error Back Propagation(EBP) is presented. An ENNC is described simply by genetic representation using an encoding strategy for types and slope values of each active functions, biases, weights and so on. By an evolutionary programming which has three genetic operation; selection, crossover and mutation, the predetermine controller is optimally evolved by updating simultaneously the connection patterns and weights of the neural networks. The performances of the proposed ENNC(PENNC) are compared with the ones of conventional optimal controller and the conventional evolving neural network controller(CENNC) through the simulation and experimental results. And we showed that the finally optimized PENNC was very useful in the stabilization control of an IP system.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.6 no.1
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• pp.33-38
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• 2006

In this paper, we propose a new architecture of Fuzzy Polynomial Neural Networks(FPNN) by means of genetically optimized Fuzzy Polynomial Neuron(FPN) and discuss its comprehensive design methodology involving mechanisms of genetic optimization, especially Genetic Algorithms(GAs). The conventional FPNN developed so far are based on mechanisms of self-organization and evolutionary optimization. The design of the network exploits the extended Group Method of Data Handling(GMDH) with some essential parameters of the network being provided by the designer and kept fixed throughout the overall development process. This restriction may hamper a possibility of producing an optimal architecture of the model. The proposed FPNN gives rise to a structurally optimized network and comes with a substantial level of flexibility in comparison to the one we encounter in conventional FPNNs. It is shown that the proposed advanced genetic algorithms based Fuzzy Polynomial Neural Networks is more useful and effective than the existing models for nonlinear process. We experimented with Medical Imaging System(MIS) dataset to evaluate the performance of the proposed model.

• Journal of Korean Institute of Industrial Engineers
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• v.39 no.5
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• pp.361-366
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• 2013

Prediction of process parameters is very important in parameter design. If predictions are fairly accurate, the quality improvement process will be useful to save time and reduce cost. The concept of dual response approach based on response surface methodology has widely been investigated. Dual response approach may take advantages of optimization modeling for finding optimum setting of input factor by separately modeling mean and variance responses. This study proposes an alternative dual response approach based on machine learning techniques instead of statistical analysis tools. A hybrid neural network-genetic algorithm has been proposed for the purpose of parameter design. A neural network is first constructed to model the relationship between responses and input factors. Mean and variance responses correspond to output nodes while input factors are used for input nodes. Using empirical process data, process parameters can be predicted without performing real experimentations. A genetic algorithm is then applied to find the optimum settings of input factors, where the neural network is used to evaluate the mean and variance response. A drug formulation example from pharmaceutical industry has been studied to demonstrate the procedures and applicability of the proposed approach.