• Title/Summary/Keyword: gas monitoring

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Multiple-inputs Dual-outputs Process Characterization and Optimization of HDP-CVD SiO2 Deposition

  • Hong, Sang-Jeen;Hwang, Jong-Ha;Chun, Sang-Hyun;Han, Seung-Soo
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.11 no.3
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    • pp.135-145
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    • 2011
  • Accurate process characterization and optimization are the first step for a successful advanced process control (APC), and they should be followed by continuous monitoring and control in order to run manufacturing processes most efficiently. In this paper, process characterization and recipe optimization methods with multiple outputs are presented in high density plasma-chemical vapor deposition (HDP-CVD) silicon dioxide deposition process. Five controllable process variables of Top $SiH_4$, Bottom $SiH_4$, $O_2$, Top RF Power, and Bottom RF Power, and two responses of interest, such as deposition rate and uniformity, are simultaneously considered employing both statistical response surface methodology (RSM) and neural networks (NNs) based genetic algorithm (GA). Statistically, two phases of experimental design was performed, and the established statistical models were optimized using performance index (PI). Artificial intelligently, NN process model with two outputs were established, and recipe synthesis was performed employing GA. Statistical RSM offers minimum numbers of experiment to build regression models and response surface models, but the analysis of the data need to satisfy underlying assumption and statistical data analysis capability. NN based-GA does not require any underlying assumption for data modeling; however, the selection of the input data for the model establishment is important for accurate model construction. Both statistical and artificial intelligent methods suggest competitive characterization and optimization results in HDP-CVD $SiO_2$ deposition process, and the NN based-GA method showed 26% uniformity improvement with 36% less $SiH_4$ gas usage yielding 20.8 ${\AA}/sec$ deposition rate.

Attractiveness of Plautia stali (Hemiptera: Pentatomidae) Aggregation Pheromone Produced in Korea (국산 갈색날개노린재 집합페로몬의 유인력)

  • Jang, Sin-Ae;Cho, Jin-Hoon;Park, Chung-Gyoo
    • The Korean Journal of Pesticide Science
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    • v.14 no.2
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    • pp.164-169
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    • 2010
  • Methyl (E,E,Z)-2,4,6-decatrienoate is the aggregation pheromone of brown-winged stink bug Plautia stali (Hemiptera: Pentatomidae). Attractiveness of the pheromone synthesized in Korea was compared with that of synthesized in Japan in the field. A lure filled with hexane was used as a control treatment. Catches in trap baited with Korean pheromone was significantly higher than that baited with Japanese one only in one orchard out of three sweet persimmon orchards in 2008. However there was no difference in trap catches between Korean and Japanese pheromones at three sites in 2009. Gas chromatography analysis showed that the components of both pheromones were not different each other. Monitoring of P. stali seasonal fluctuation using Korean pheromone showed that the bugs were most captured in August, 2008 and in September, 2009.

Determination of 25 EDs in Frog and Fish Tissue by GC-MS (SIM)

  • Shin, Ueon-Sang;Shin, Ho-Sang
    • Bulletin of the Korean Chemical Society
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    • v.24 no.4
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    • pp.413-420
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    • 2003
  • A gas chromatography/mass spectrometric assay method was developed for the simultaneous determination of neutral and bacis twenty-five disruptors $(ED_S)$ in frog and fish. Afther homogenization and sonication of 5 g of sample, purification was achieves in one step with a solid phase extraction procedure using silica gelflorisl. Eluton was performed with 50mL of acetone : n-hexane (1 : 9) solution. The eluate was concentrated to approximately 10uL and dissolves with 100 uL of hexane and analyzed by GC-MS (SIM). The peaks had good chromatographic properties and the extraction of these compounds from sample also gave relatively high recoveries with small variatoins. Detection limits were 0.1 ng/g for 4-nitrotoluene, benzophenone, hexachlorobenzene, atrazine, malathion, o,p-DDT, o,p-DDT and permethrin, and 0.2 ng/g for heptachlor epoxide, γ-chlordane, α-chlordane, p,p'-DDE, p,p'-DDD, cypermethrin and fenvalerate, and 0.3 ng/g for trifluralin, metribuzin, alachlor, dieldrin and p,p'-DDT, and 0.5 ng/g for heptachlor, aldrin and parathion, and 0.7 ng/g for endrin, and 0.8 ng/g for nitrofen. The recoveries were between 33 and 109%. The method was used to analyze twenty-five frogs and forty-six fishes fishes samples caught from various regions in Korea. Benzophenone was detected at concentration of up to 17.2 ng/g in frog or fish. Heptachlor, aldrin, γ-chlordane, p,p'-DDE, p,p'-DDD, endrin and o,p-DDD were detected at concentrations of 0.7-12.5 ng/g in frog or fish. Also significant leveles of dieldrin (up to 22.5 ng/g) were observed. The developed method may be valuable to be used to the national monitoring project of EDS in biota samples.

SDN based Discrimination Mechanism for Control Command of Industrial Control System (SDN 기반 산업제어시스템 제어명령 판별 메커니즘)

  • Cho, Minjeong;Seok, Byoungjin;Kim, Yeog;Lee, Changhoon
    • Journal of Digital Contents Society
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    • v.19 no.6
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    • pp.1185-1195
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    • 2018
  • Industrial Control System (ICS) is a system that carry out monitoring and controls of industrial control process and is applied in infrastructure such as water, power, and gas. Recently, cyber attacks such as Brutal Kangaroo, Emotional Simian, and Stuxnet 3.0 have been continuously increasing in ICS, and these security risks cause damage of human life and massive financial losses. Attacks on the control layer among the attack methods for ICS can malfunction devices of the field device layer by manipulating control commands. Therefore, in this paper, we propose a mechanism that apply the SDN between the control layer and the field device layer in the industrial control system and to determine whether the control command is legitimate or not and we show simulation results on a simply composed control system.

Gibberellins Production and Identification of Endophytic Fungi Isolated from Aquatic Plant in Fresh Water (담수에 자생하는 수생식물에서 분리된 내생균류의 지베렐린 생산과 동정)

  • You, Young-Hyun;Kang, Sang-Mo;Choi, Yu-Mi;Lee, Myung-Chul;Kim, Jong-Guk
    • The Korean Journal of Mycology
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    • v.43 no.1
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    • pp.71-76
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    • 2015
  • Aquatic plant Hydrocharis dubia (Blume) Backer was collected from the Dalsung wetland in Daegu. Sixteen endophytic fungi with different colony morphologies were isolated from the roots of aquatic plants. Waito-c rice (WR) seedlings were treated with fungal culture filtrates (FCF) for screening plant growth-promoting activity. In the results, HD1008 strain isolated from aquatic plant showed highest plant growth-promoting activity. The FCF of HD1008 strain was analyzed using gas chromatography mass spectrometry (GC/MS) with selected ion monitoring (SIM). Analysis of the FCF of HD1008 strain found that it contained gibberellins (GA) ($GA_1$, 1.2 ng/100 mL; $GA_4$, 5 ng/100 mL). Phylogenetic tree of HD1008 strain was constructed by partial internal transcribed spacer (ITS) region and partial beta-tubulin gene sequences. Therefore, we describe HD1008 strain as a new gibberellin-producing Penicillium trzebinskii based on morphological and molecular characteristics.

Analysis of Produced By-products Due to Oil/Paper Degradation on Power Transformers (전력용 변압기의 열화에 의해 생성된 부산물의 분석)

  • Kim, Jae-Hoon;Han, Sang-Ok
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.9
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    • pp.1561-1565
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    • 2007
  • According to thermal degradation on power transformers, it is known that electrical, mechanical and chemical characteristics for power transformer's oil-paper are changed. In the chemical property, especially, when the kraft paper is aged, the cellulose polymer chains break down into shorter lengths. It causes decrease in both tensile strength and degree of polymerization of paper insulation. Also the paper breakdown is accompanied by an increase in the content of various furanic compounds within the dielectric liquid. It is known that furanic components in transformer oil come only from the decomposition of insulating paper rather than from the oil itself. Therefore the analysis of furanic degradation products provides a complementary technique to dissolved gas analysis for monitoring transformers when we evaluate the aging of insulating paper by the total concentration of carbon monoxide and carbon dioxide dissolved in oil only. Recently, the analysis of furanic compounds by high performance liquid chromatography(HPLC) using IEC 61198 method for estimating degradation of paper insulation in power transformers has been used more conveniently for assessment of oil-paper. It is know that the main products which is produced by aging are 2-furfuryl alcohol, 2-furaldehyde(furfural), 2-furoic acid, 2-acetylfuran, 5-methyl-2-furaldehyde, and 5-hydroxymethyl-2-furaldehyde. For investigating the accelerated aging process of oil-paper samples we manufactured accelerating aging equipment and we estimated variation of insulations at $140^{\circ}C$ temp. during 500 hours. Typical transformer proportions of copper, silicon steel and iron have been added to oil-paper insulation during the aging process. The oil-paper insulation samples have been measured at intervals of 100 hours. Finally we have analyzed that 2-furoic acid and 2-acetylfuran products of furanic compounds were detected by HPLC, and their concentrations were increased with accelerated aging time.

Toxicokinetics of 4-tert-octylphenol in rats (Rat에서의 Octylphenol의 독성동태 연구)

  • 손수정;강현구;이선우;서수경;박인숙;안미령;최홍석;조재민;손동환
    • Environmental Mutagens and Carcinogens
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    • v.21 no.2
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    • pp.122-127
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    • 2001
  • 4-tert-octylphenol (OP) is a surfactant additive widely used in the manufacture of a variety of detergents and plastic products. Also, OP is known to have estrogenic activity by interacting with development and functions of endocrine system. This study was carried out to obtain toxicokinetic parameters of OP in male Sprague-Dawley rats. Male rats were administered OP, by either single oral (gavage) applications of 50, 100 or 200 mg/kg body weight. or a single intravenous injections of 1, 5 or 10 mg/kg body weight. Blood samples taken at several time intervals after administration were obtained from the femoral artery. Analysis of blood samples for OP was performed by gas chromatography mass spectrometry (GC/MS). The detection limit of OP was 1.9 ng/$m\ell$ at SIM (selected ion monitoring) mode of GC/MS. Calibration curve for analysis of the concentrations of OP in plasma was (OP/butylphenol peak area ratio) = 0.0294 $\times$ (plasma cone.) + 0.028 ($r^2$= 0.9991). The OP plasma concentration was 3921 ng/$m\ell$ immediately after single intravenous application, decreased rapidly within 45 min, and was detectable at low concentration up to 6 hr after application. When administered orally in rats (50, 100 and 200 mg/kg), OP was detected in the blood early after gavage administration, indicating the rapid initial uptake from gastrointestinal tract, with Tmax obtained from 0.67~0.83 hr. Using the AUC (area under the curve) of plasma concentration vs. time, low oral bioavailabilities of 1.2, 5.0 and 5.3% were calculated for the 50, 100 and 200 mg/kg groups, respectively.

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Development and research of gas sensor for monitoring sulfur compounds (황화물 측정용 가스센서의 연구개발)

  • Kim, Ki-Young;Kim, Jong-Min;Ham, Young-Hwan;Chang, Yong-Keun;Kim, Jong-Deuk;Chang, Sang-Mok
    • Journal of Sensor Science and Technology
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    • v.3 no.2
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    • pp.33-39
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    • 1994
  • A quartz crystal microbalance (QCM) sensor system for the detection of odorants, especially environmental pollutant, has been constructed by depositing various phospholipids, activated carbon and lead compound pigment onto the surface of the QCM. The characteristics of a QCM operating at 9 MHz deposited with phosphatidyl- choline were analysed. An explanation is given for different odorant affinities based on the monolayer properties of phospholipids. The identification of odorants is discussed in terms of a comparison of their normalized resonant frequency shift patterns and relative response intensities calculated from the response areas. Applying the lead compound pigment coated QCM, it was possible to detect sulfur compound specifically. Using a number of different lipid-coated QCMs, odorants could be identified by comparing the response patterns.

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Simultaneous Analysis of Triazines and Phenoxyalkanoic Acids by GC/MS (GC/MS를 이용한 트리아진 및 페녹시산류의 동시 분석)

  • Park, Song-Ja;Kim, Yun Je;Pyo, Hee Soo;Park, Kyung Soo;Park, Jongsei
    • Analytical Science and Technology
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    • v.7 no.1
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    • pp.65-78
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    • 1994
  • The herbicide mixture of 7 triazines and 9 phenoxyalkanoic acid esters was simultaneously separated and determinated with the selected ion monitoring by using gas chromatography/mass spectrometry. The extraction recoveries of those herbicides from the reagent water were studied for the organic solvent extraction(LLE) with methylene chloride. The calibration curves of them showed good linearity over the concentration range of 0.2~0.5ng/ml and the detection limits were 0.2~0.5ng/ml for 100ml of water. This analytical method could be applied to the drinking water and biological sample.

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Detection and Quantitation of Residual Antibiotics and Antibacterial Agents in Foods

  • Ryu, Jae-Chun;Seo, Ja-Won;Song, Yun-Seon;Park, Jong-Sei
    • Journal of Food Hygiene and Safety
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    • v.5 no.3
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    • pp.159-164
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    • 1990
  • To detect and quantitation residual antibiotics and antibacterial agents in meats, we performed a biological assay employing the three microorganisms Bacillus subtilis ATCC 6633, Micrococcus luteus ATCC 9341, and Bacillus cereus var. mycoides ATCC 11778 for the screening purpose and developed a Gas Chromatography-mass Spectrometry(GC/MS) analysis for the confirmation and quantiation. In the biological assay (paper disk method), three test solution are used depending on the character of the residual antibiotics and antibacterial agents, follow by a simple clean up procedure which includes homogenization with Mcilvaine buffer, defatting with includes homogenization with Mcilvaine buffer, defatting with hexane, extraction with chloroform, clean-up by Sep-Pak $C_{18}$ and Bakerbond SPE carboxylic acid column. The chloroform layer is used for the analysis of sulfa agents. macrolides antibiotics and antibacterial agents, Adsorbed materials in the Sep-Pak $C_{18}$ were also employed for th analysis of penicillins and tetracyclines. Effluents from the Sep-Pak $C_{18}$ were cleaned-up one more by Bakerbond 10 SPE COOH column and employed for the analysis of aminoglycosides. In the instrumental analysis by using the GC/MSD, residual antibiotics and antibacterial agent were quantitated by selected ion monitoring (SIM) mode after derivatization. A simultaneous analysis of six residual antibiotic and antibacterial agent such as oxytetracycline, penicillin, ampicillin, choliraphenicol and thiamphenicol was developed with simple cleanup procedures revealing good recovery and reproducibility. Also, simultaneous detection of macrolides antibiotics such as erythromycin, spiramycin, and oleandomycin was developed after acid hydrolysis due to their large molecular structures. Because of the high reproducibility and selectivity of these two methods, it is very desirable that the combination of the two methods be used in the bioassay for the screening of residual antibiotics and antibacterial agent and that GC/MSD analysis be used for the confirmation and quantitation.

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