• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.10
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• pp.2418-2425
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• 1993

A two-dimensional transient heat transfer model for reactive gas assisted laser cutting process with a moving Gaussian heat source is developed using a numerical finite difference technique. The kerf width, melting front shape and temperature distribution were calculated by using the boundary-fitted coordinate system to handle the ejection of workpiece material and heat input from reaction and evaporation. An analytical solution for cutting front movement was adopted and numerical simulation was performed to calculate the temperature distribution and melting front thickness. To calculate the moving velocity of cutting front, the normal distribution of the cutting gas velocity was used. The kerf width was revealed to be dependent on the cutting velocity, laser power and cutting gas velocity.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1243-1245
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• 1994

SiN films were deposited in $Si_2H_6$(99.9%), $NH_3$(99.99%) gas mixture with carrier gas $N_2$ on Si substrate by ArF Excimer Laser CVD. SiN film deposition conditions that are substrate temperature and Laser average power were varied in order to investigate the dependence of SiN film on the condition. A post-deposition anneal was performed to examine variation of fixed charge density in the films. The deposition rate was increased as the substrate temperature and Laser power were increased during film deposition. The refractive index was increased with increasing substrate temperature, but it didn't have the dependence on Laser power. The fixed charge density was decreased when a post-deposition anneal was performed.

• Journal of Welding and Joining
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• v.35 no.3
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• pp.28-34
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• 2017

The authors derived the criteria on the process parameters of laser depositions with metal powers(SUS316L & IN718) by evaluating the surface and cross-section properties of the deposition layers. The surface characteristics of the deposition layer are investigated through optical microscopy by controlling the process parameters of laser output, powder feeding rate and gas feeding rate. The cross-section characteristics were also analyzed after polishing and chemical etching process. As the gas feeding rate increased, the amount of powder loss increased and the difference in the dilution ratio and heat affected zone depending on laser outputs was observed. In addition, the powder feeding rate used in the experiment did not interfere with the energy absorption of the base material.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.11a
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• pp.128-132
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• 2006

Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355nm and 80MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow rate, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repetition rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20{\mu}m$ and $10{\mu}m$ at more than 500mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed of laser material process.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1301-1303
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• 1997

This study was performed to investigate the deposition mechanism of $SiO_2$ by ArF excimer Laser(193nm) CVD with $Si_2H_6$ and $N_2O$ gas mixture and evaluate Laser CVD quantitatively by modeling. In this study, new model of $SiO_2$ deposition process by Laser CVD is introduced and deposition rates are simulated by computer with the basis on this modeling. And simulation results are compared with experimental results measured at various conditions such as reaction gas ratio, chamber pressure, substrate temperature and laser beam intensity.

• Journal of Welding and Joining
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• v.22 no.1
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• pp.58-64
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• 2004

The control of the weld bead shape is important in laser welding of the small parts. The effects of laser welding parameters on the weld bead shape in the pulsed Nd:YAG laser welding of STS 304L material were investigated. Shielding gas type, flow rate, pumping voltage, pulse frequency, pulse width, focal position and overlap distance were selected as laser welding parameters. Experiments were designed and conducted using the Taguchi method which was a statistical experimental method. The weld bead width, penetration, area and aspect ratio were measured and analysed as the weld bead shape properties and the welding parameters were optimized to maximize the weld aspect ratio. Weld aspect ratio were greatly affected by the pulse width, pumping voltage and pulse frequency, and somewhat by the overlap distance, and little by the shielding gas type, flow rate and focal position. A confirmation experiment were conducted using the optimized welding parameters.

• Laser Solutions
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• v.2 no.3
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• pp.11-18
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• 1999

This paper describes the weldability of carbon steel and stainless steel using 5㎾ $CO_2$ laser system with nearly multi-mode beam and a parabolic focusing mirror. In the laser welding of steels, major welding parameters are focal point, travel speed, beam power, shield gas and gap tolerance, etc.. Two kinds of gases(Ar, He) were used as a assist gas and supplied through the external nozzle. It is very important for optimum condition to remove plasma plume which absorbs laser beam and to obtain deep penetration and sound weld bead. Bead-on-plate welding tests were carried out for the experiments. Penetration data were obtained with various welding parameters and the effects of welding parameters were discussed. Butt welding tests were performed with various conditions. Only the optimum laser parameters assured good weld quality As a result of this study, We achieve the fundamental weldabilities using a high power $CO_2$ laser for carbon steel and stainless steel.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.11-15
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• 2007

Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355 nm and 80 MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using a laser with UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repletion rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20\;{\mu}m$ and $10\;{\mu}m$ at more than 500 mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed in laser material process.

• Journal of Welding and Joining
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• v.20 no.3
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• pp.109-115
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• 2002

In this study high power Nd:YAG laser welding of structural steel was investigated. For the test steel blocks of $50{\times}50{\times}200mm$ were cut and machined, and bead-on-plate weld was made on the machined surface. Argon, nitrogen, helium, dry air or mixed gases were used to find the effect of shielding conditions on the bead formation. Results demonstrated that there were Fe I rich region and Fe II rich region in the laser induced plasma column based on the spectral analysis with S-2000 field spectrometer The Fe I region was located at the root of the column near keyhole opening. On the other hand, Fe II region was found at the middle of the plasma column. In the Nd:YAG laser welding, Fe I region emitted continuum which had peak value at wave length of around 710nm, and Fe II region had the peak at 580nm. In the welding of steel by $CO_2$ laser, however, no continuum was observed. There showed two groups of strong spikes in the $CO_2$ laser welding; the first group was displayed at the wave band of 450-560nm. This spike group emitted stronger intensity of light and sharper peaks than those group at 680-800nm.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1999.11a
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• pp.67-70
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• 1999

This paper describes preliminary discussions on manufacture of a He-Ne laser and investigation of output characteristics. The He-Ne laser which is to be manufactured is what is the most common wavelength λ=632.8[nm] transition in the red portion of the spectrum. The output characteristics as various parameters, such as gas mixture ratio, gas pressure, discharge current, resonator, resonator length, and the efficiency characteristics as a input power will be investigated.