• Journal of Environmental Science International
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• v.27 no.8
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• pp.621-629
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• 2018

Many chemically active species such as ${\cdot}H$, ${\cdot}OH$, $O_3$, $H_2O_2$, hydrated $e^-$, as well as ultraviolet rays, are produced by Dielectric Barrier Discharge (DBD) plasma in water and are widely use to remove non-biodegradable materials and deactivate microorganisms. As the plasma gas containing chemically active species that is generated from the plasma reaction has a short lifetime and low solubility in water, increasing the dissolution rate of this gas is an important challenge. To this end, the plasma gas and water within reactor were mixed using the air-automizing nozzle, and then, water-gas mixture was injected into water. The dissolving effect of plasma gas was indirectly confirmed by measuring the RNO (N-Dimethyl-4-nitrosoaniline, indicator of the formation of OH radical) solution. The plasma system consisted of an oxygen generator, a high-voltage power supply, a plasma generator and a liquid-gas mixing reactor. Experiments were conducted to examine the effects of location of air-automizing nozzle, flow rate of plasma gas, water circulation rate, and high-voltage on RNO degradation. The experimental results showed that the RNO removal efficiency of the air-automizing nozzle is 29.8% higher than the conventional diffuser. The nozzle position from water surface was not considered to be a major factor in the design and operation of the plasma reactor. The plasma gas flow rate and water circulation rate with the highest RNO removal rate were 3.5 L/min and 1.5 L/min, respectively. The ratio of the plasma gas flow rate to the water circulation rate for obtaining an RNO removal rate of over 95% was 1.67 ~ 4.00.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.65-65
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• 1999

Dry etching technique provides more easy controllability on the etch profile such as anisotropic etching than wet etching process and the results of lots of researches on the characterization of various plasmas or ion beams for semiconductor etching have been reported. Chlorine-based plasmas or chlorine ion beam have been often used to etch several semiconductor materials, in particular Si-based materials. We have studied the effect of He flow rate on the Si and SiO2 dry etching using chlorine-based plasma. Experiments were performed using reactive ion etching system. RF power was 300W. Cl2 gas flow rate was fixed at 58.6 sccm, and the He flow rate was varied from 0 to 120 sccm. Fig. 1 presents the etch depth of si layer versus the etching time at various He flow rate. In case of low He flow rate, the etch rate was measured to be negligible for both Si and SiO2. As the He flow increases over 30% of the total inlet gas flow, the plasma state becomes stable and the etch rate starts to increase. In high Ge flow rate (over 60%), the relation between the etch depth and the time was observed to be nearly linear. Fig. 2 presents the variation of the etch rate depending on the He flow rate. The etch rate increases linearly with He flow rate. The results of this preliminary study show that Cl2/He mixture plasma is good candidate for the controllable si dry etching.

• Journal of computational fluids engineering
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• v.17 no.1
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• pp.86-93
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• 2012

A numerical investigation is conducted to search for the optimal flow rate for a rotating-disk chemical vapor decomposition reactor operating at a high temperature and a low pressure. The flow of a gas mixture supplied into the reactor is modeled by a laminar flow of an ideal gas obeying the kinetic theory. The axisymmetric two-dimensional flow in the reactor is simulated by employing a CFD package FLUENT. With operating pressure and temperature fixed, numerical computations are performed by varying rotation rate and flow rate. Examination of the structures of flow and thermal fields leads to a flow regime diagram illustrating that there are a stable plug-like flow regime and a few unfavorable flow regimes induced by mass unbalance or buoyancy. The criterion for sustaining a plug-like flow regime is discussed based on a theoretical scaling argument. Interpretation of the flow regime map suggests that a favorable flow is attainable with a minimum flow rate at the smallest rotation rate guaranteeing the dominance of rotation effects over buoyancy.

• Journal of the Korean Institute of Gas
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• v.18 no.2
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• pp.21-27
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• 2014

A MILD(Moderate and Intense Low oxygen Dilution) combustion, which is effective in the reduction of NOx, is considerably affected by the recirculation flow rate of hot exhaust gas to the combustion furnace. The present study used a coanda nozzle for the exhaust gas recirculation in a MILD combustor. A numerical analysis was accomplished to elucidate the effect of exhaust gas entrainment toward the furnace with or without a coaxial contractor. The result of the present CFD analysis showed that the entrainment mass flow rate without a coaxial contractor had 18% larger than that with a coaxial contractor when the mixed gas outlet pressure was ambient pressure. On the other hand, if the outlet pressure increased, the mass flow rate with a contractor was larger than that without a contractor. It could be analysed by the entrainment driving force composed with the nozzle throat pressure, inlet and outlet pressures and flow cross sectional area.

• Journal of the Korean Society for Railway
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• v.10 no.5
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• pp.563-568
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• 2007

A separate triangular bar type differential pressure flow meter was developed for measuring exhaust gas flow rate from Diesel engine. Three kinds of the separate triangular bar flow meters whose aerodynamic angles are different one another are made and evaluated, respectively. The experimental results show that an aerodynamic shape has a effect on the pressure difference between upstream and downstream at the flow meter, that is, the thinner the shape of the separate triangular bar flow meter is, the smaller the pressure difference at the flow meter is. The separate triangular bar type flow meter was calibrated at both cold and high temperature of the gas flow. A burner system was designed for raising the gas temperature and it was well operated in controlling the gas temperature. An empirical correlation between mass flow rate and differential pressure at the separate triangular bar flow meter was obtained and the empirical correlation was also corrected by the gas temperature.

• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.91-96
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• 2018

In this study temperature distribution and gas flow inside a planetary type reactor in which a number of satellites on a spinning susceptor were rotating were analyzed using numerical simulation. Effects of flow rates on gas flow and temperature distribution were investigated in order to obtain design parameters. The commercial computational fluid dynamics software CFD-ACE+ was used in this study. The multiple-frame-of-reference was used to solve continuity, momentum and energy conservation equations which governed the transport phenomena inside the reactor. Kinetic theory was used to describe the physical properties of gas mixture. Effects of the rotation speed of the satellites was clearly seen when the inlet flow rate was small. Thickness of the boundary layer affected by the satellites rotation became very thin as the flow rate increased. The temperature field was little affected by the incoming flow rate of precursors.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.10
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• pp.1327-1339
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• 1999

Characteristics of two-phase flow and heat transfer were numerically investigated in a submerged gas Injection system. Effects of both the gas flow rate and bubble size were investigated. In addition, heat transfer characteristic and effects of heat transfer were investigated when temperature of the injected gas was different from that of the liquid. The Eulerian approach was used for the formulation of both the continuous and the dispersed phases. The turbulence in the liquid phase was modeled by the use of the standard $k-{\varepsilon}$ turbulence model. The interphase friction and heat transfer coefficient were calculated by means of correlations available in the literature. The turbulent dispersion of the phases was modeled by introducing a "dispersion Prandtl number". The plume region and the axial velocities are increased with increases in the gas flow rate and with decreases in the bubble diameter. The turbulent flow field grows stronger with the increases in the gas flow rate and with the decreases in the bubble diameter. In case that the heat transfer between the liquid and the gas is considered, the axial and the radial velocities are decreased in comparison with the case that there is no temperature difference between the liquid and the gas when the temperature of the injected gas is higher than the mean liquid temperature. The results in the present research are of interest in the design and the operation of a wide variety of material and chemical processes.

• Journal of the Korea Society for Simulation
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• v.7 no.2
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• pp.17-32
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• 1998

The flow fields in Gas Bubble Driven Circulation Systems were numerically analyzed. In various gas flow rate and bubble size, the flow characteristics were predicted. Eulerian-Eulerian approach was used for the formulation of both the continuous and dispersed phases. The modification of the general purpose computer program PHOENICS code was employed to predict the mean flow fields, turbulent characteristics, gas dispersion, volume fraction. The predicted shows very satisfactory agreement with experimental results for all regions of ladle. The results are of interest in the design and operation of wide variety of material processing.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.175-179
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• 2000

A combustion project was completed regarding the development of a high-flow-rate purge burner in cooperation with three city gas companies(Pusan, Taegu, Samchulli). The project, started in May 1991, aimed at purging the line-packed-gas safely and quickly before getting into gas pipe working or relocation. According to the results, the purging noise is less than 80dB due to silencer screen. multi-nozzle and outlet inserted tube employed. In addition, the developed burner shows an increased work efficiency of 40-50% more as compared to the performance of conventional purge equipments. The project result is regarded as the first high-flow-rate purge burner developed within Korea. contributing to shortening purge hours, safe field work and easiness of purge site selection.

• Journal of the Korean Vacuum Society
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• v.22 no.3
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• pp.111-118
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• 2013

The influence of gas flow on the plasma generation in the atmospheric plasma jet is described with the theory of hydrodynamics. The plasma discharge is affected by the gas-flow streams with Reynolds number (Re) as well as the gas pressure with Bernoulli's theorem according to the gas flow rate inserted into the glass tube. The length of plasma column is varied with the flow types such as the laminar flow of Re<2,000 and the turbulent flow of Re>4,000 as it has been known in a general fluid experiments. In the laminar flow, the plasma column length is increased as the increase of flow rate. Since the pressure in the glass tube becomes low as the increase of flow velocity by the Bernoulli's theorem, the breakdown voltage of plasma discharge is reduced by the Paschen's law. Therefore, the plasma length is increased as the increasing flow rate with the fixed operation voltage. In the transition of laminar and turbulent flows, the plasma length is decreased. When the flow becomes turbulent as the flow rate is increasing, the plasma length becomes short and the discharge is shut down ultimately. In the discharge of laminar flow, the diameter of plasma beam exposed on the substrate surface is kept less than the glass diameter, since the gas flow is kept to the distinct distance from the nozzle of glass tube.