• 약학회지
• /
• 제37권1호
• /
• pp.76-83
• /
• 1993

The changes in discharge current, emission and/or oscillation frequency of the electric oscillation of a glow discharge are the potential sensitive measure of the concentration of an impurity in the argon plasma supporting gas. A single jet enhanced glow discharge has been interfaced with the gas chromatograph via 1/8" O.D. tube with a heating pad to study the changes in discharge current. To investigate the optimum operating conditions of the glow discharge system as detector for gas chromatography, pressure, gas flow rate, discharge current, distance between the anode and the cathode have been studied.

• 한국진공학회지
• /
• 제21권4호
• /
• pp.199-204
• /
• 2012

$SF_6$ 가스는 반도체 및 디스플레이 제조공정 중 건식식각 공정에서 널리 사용되는 가스이다. 하지만 $SF_6$ 가스는 대표적인 온실가스로서 지구 온난화에 큰 영향을 끼치기 때문에 반도체 및 디스플레이 공정에서 $SF_6$ 가스를 대체할 수 있는 가스의 연구가 필요한 상황이다. 그 후보군으로 떠오르고 있는 가스 중의 하나가 바로 $C_3F_6$ 가스이다. 이 가스를 이용하여 $Si_3N_4$ 박막을 건식식각 방법인 Reactive Ion Etching 공정을 수행하여 식각 특성에 관하여 연구하였으며, 흡착제 Zeolite 5A를 이용하여 식각공정 중 배출되는 가스 성분을 감소시켰다. Plasma Enhanced Chemical Vapor Deposition 장비를 이용하여 500 nm 두께의$Si_3N_4$ 박막을 증착하였으며, 노광 공정을 통해 패터닝을 한 후 Reactive Ion Etching 공정을 수행하였다. 그리고 Scanning Electron Microscope 장비를 이용하여 $Si_3N_4$ 박막의 식각된 단면과 식각율을 확인하였다. 또한 공정 후 흡착제 Zeolite 5A를 통과하기 전과 후에 배출되는 가스를 포집하여 Gas Chromatograph-Mass Spectrophotometry 장비를 이용하여 가스 성분을 측정 및 비교하였다.

• Korean Chemical Engineering Research
• /
• 제62권1호
• /
• pp.70-79
• /
• 2024

라만분석기는 분자가 가지는 고유 진동에 빛을 조사하여 발생하는 빛의 산란이 생기는 "라만효과"를 이용하여 분자 구분과 성분 분석을 할 수 있는 분석기로, 천연가스 산업에서도 LNG(액화천연가스) 수출 및 수입 기지 외에 벙커링 및 탱크로리 분야에서도 폭 넓게 사용 중이다. 본 연구에서는 실제 현장 조건하에서, LNG 성분 분석 및 주요 물성(발열량, 기준밀도 등)을 산출하기 위해 LNG 수입기지에 라만분석기를 설치, 운영하였으며, 측정된 LNG 성분 및 발열량을 기존 검증되어 운영 중인 가스분석기에 의해 분석된 성분 및 발열량과 비교하였다. 시험 결과 라만분석기는 매우 빠르고 안정되게 LNG 성분 및 발열량을 측정하였으며, LNG 거래의 기준이 되는 발열량을 기존 가스분석기 결과값과 비교시에도 적정 오차 기준 내에 있는 것을 확인하였다. 추가적으로 본 연구를 통해 얻은 측정 결과는 관련 표준(ASTM D7940-14)의 정확도 기준을 만족하였고, 국외 대규모 실증 사례와의 비교 시에도 유사한 결과를 산출하였다.

• Bulletin of the Korean Chemical Society
• /
• 제34권6호
• /
• pp.1703-1707
• /
• 2013

A fast and simple sampling and sample preparation device, (NTD) has been developed and applied to sample and analyze volatile components from ground coffee beans. Coffee fragrances and other volatile organic compounds (VOCs) were sampled by the NTD and then analyzed by gas chromatograph-mass spectrometry (GC/MS). Divinylbenzene (DVB) particles (80/100 mesh size) were the sorbent bed of the NTD. More than 150 volatile components were first identified based on the database of the mass library and then finally 30 fragrances including caffeine were further confirmed by comparing experimental retention indices (i.e. Kovat index) with literature retention indices. Total sampling time was 10 minutes and no extra solvent extraction and/or reconstitution step need. Straight n-alkanes (C6-C20) were used as retention index probes for the calculation of experimental retention indices. In addition, this report suggests that an empty needle can be an alternative platform for analyzing polymers by pyrolysis-GC/MS.

• 한국대기환경학회지
• /
• 제16권3호
• /
• pp.265-275
• /
• 2000

By using thermal desorption/gas chromatograph/flame ionization detector(TD/GC/FID), this study was carried out to evalute an accuracy and a precision on Benzene(B), Toluene(T), o-Xylene(X) analysis in an industrial hygiene laboratory. Limits of detection of TD/GC/FID on B, T, X were showed 13.75ng/sample or less. For the accuracy of the method by concentration levels, overall bias was showed 7.7% as an absolute value, and the pooled coefficient of variation showed 3.51%. For the precision on repeatability of peak area and retention time between within-run and between-run of analytical system, it is showed the results of within-run gave better than those of between-run. Also the accuracy by sorbents(Tenax TA and Chromosorb 106)was evaluated, and the precision on reproducibility between MDHS72 and this study was compared. It is showed it is possible for TD/GC/FID to evaluate accurately B, T, X concentration levels of less than 1ppm at indoor or outdoor of workplaces in Korea.

• 한국산업보건학회지
• /
• 제4권1호
• /
• pp.25-32
• /
• 1994

Arylmethyl halides(benzyl chloride, BZYC; benzal chloride, BZYA; benzotrichloride, BZTC) and related compounds(benzyl alcohol, BZYA; benzoyl chloride, BZOC) were determined by GC using capillary column. Detailed results are as follows. 1. Stability In methanol benzotrichloride slowly transferred to benzoyl chloride by hydrolysis(ca. 7.5% for 5 days), but the others were stable. Therefore, benzotrichloride solution should be prepared just before analysis. 2. GC analysis Tenax-GC was used to absorbent and desorption solvents were $CCl_4$ and MeOH. Arylmethyl halides were analyzed within 7.5min without interference with related compounds. The calibration curve(ca. 15-80 ppm in soln), repeatability(n=10) and the desorption efficiency were good. Limit of detection by NIOSH method was about 0.003 ppm for arylmethyl halide, respectively. To analyze arylmethyl halides and related compounds in working places GC using capillary column is anticipated to be used effectively.

• Nuclear Engineering and Technology
• /
• 제4권1호
• /
• pp.35-38
• /
• 1972

고체전분이 방사선에 조사될때 생성되는 carbonyl 물질이 gas chromatograph에 의하여 검파되었는데 2,4-dinitrophenylhydrazine으로 침전시켜 얻은 hydrazones을 분석하였다. Carbonyl groups의 생성은 선량이 2$\times$$10^{21}$ eV/g될때까지 직선으로 증가하며 form-aldehyde와 acetaldehyde가 검파되었다. 이외에 최소한 미상의 3개의 peak가 발견되었다.

• 한국식품영양과학회지
• /
• 제31권3호
• /
• pp.543-545
• /
• 2002

Solid phase microextraction(SPME)을 사용하여 김치 중의 향기성분이 매우 용이하게 포집할 수 있었으며 dimethyl-sulfide등 25종의 휘발성성분이 분석되었다. 질량분석기로 동정된 몇몇 성분을 AED로 확신하였을 때 황과 질소를 함유하는 성분임을 명확히 알 수 있어 GC-AED를 사용하면 그 물질의 구성원소를 쉽게 분석할 수 있다.

• 약학회지
• /
• 제26권2호
• /
• pp.117-121
• /
• 1982

This investigation was intended to develope the quantitative gas liquid chromatographic method for quercetin. The method involves derivatization of the sample with trimethylsilylimidazole containing cholesterol as an internal standard and injection into a gas chromatograph with 3% OV-17 column. The calibration curve for the quercetin was linear over a sample in the range of 4-16.mu.g. The minimum detectable amount using FID in $1.6{\times}10^{-10}$ a.f.s. was determined to be $6.64{\times}10^{-10}mol$.

• Bulletin of the Korean Chemical Society
• /
• 제14권1호
• /
• pp.127-131
• /
• 1993

Laser optoacoustic technique has been employed to obtain the gas phase absorption spectra of 1-chloronaphthalene, 3-chlorobiphenyl, and 2,5,2'-trichlorobiphenyl in conjunction with a gas chromatograph and a Helmholtz resonator at the various $CO_2$ laser wavelengths. Raman spectra of 1-chloronaphthalene, 4-chlorobiphenyl, and 4,4'-dichlorobiphenyl in condensed phase have been also obtained. The optoacoustic measurement of the infrared absorption in gas phase has been shown to be of value in monitoring the environmental pollutants.