A Study on Etching of Si3N4 Thin Film and the Exhausted Gas Using C3F6 Gas for LCD Process |
Jeon, S.C.
(School of Electrical Engineering and Computer Science, Kyungpook National University)
Kong, D.Y. (School of Electrical Engineering and Computer Science, Kyungpook National University) Pyo, D.S. (School of Electrical Engineering and Computer Science, Kyungpook National University) Choi, H.Y. (Wonik Materials Co. Ltd.) Cho, C.S. (School of Electrical Engineering, Kyungpook National University) Kim, B.H. (Electronic Engineering, Catholic University of Daegu) Lee, J.H. (School of Electrical Engineering and Computer Science, Kyungpook National University) |
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