• Journal of the Korean Institute of Gas
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• v.27 no.2
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• pp.79-85
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• 2023

Recently, in the semiconductor process, large companies are seeking process changes from memory semiconductors to the foundry due to the increase in demand due to the 4th industry. industry is expanding. The characteristics of special gases and precursors, which are raw materials used to produce these semiconductor chips, are toxic, pyrophoric, inflammable, and corrosive. These semiconductor raw materials are operated in a closed system and do not leak to the outside during normal times, but when leaked, they spread to the inside of the gas box, and when proper ventilation is not provided inside the gas box, they spread to the outside, causing fires, explosions, or toxic substances. It can lead to major accidents such as leakage. Recently, there have been cases of accidents in which hazardous materials leaked from the closed system of the semi conductor process and spread to the inside and outside of the gas box. . In this study, we propose preventive measures based on the case of an accident in which raw material leaked from the VCR fitting, which is the connection part of the semiconductor raw material transfer pipe, and spread to the outside of the gas box.

• Analytical Science and Technology
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• v.21 no.2
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• pp.148-157
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• 2008

To describe the lifetime prediction of gas turbine core parts serviced in some ten thousands rpms at over $1,000^{\circ}C$, the Larson-Miller Creep Curves, which are formed by creep rupture tests as the destructive experiment with parameters of stress and temperature, are used often, but not exact and reliable with errors of over some tens. On the other hand, this study shows a non-destructive method with increased accuracy and reliability. The SEM and TEM specimens were extracted by replica after polishing the local airfoil and root surfaces of the first stage scraped blade (bucket), serviced for 18,000 hours at $1,280^{\circ}C$ in Gas Turbines of Boryong. The observed TEM and SEM precipitates were digitalized for calculation of the average size. Here we could find the precipitate size grown from $0.45{\mu}m$ to $0.6{\mu}m$ during service and the grown precipitates to be still sound. From these results we could conclude that the scraped balde can be used for ten thous and hours additionally and for twenty thousand hours by additional heat treatments on the scraped blade.