• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1476-1481
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• 2003

Kinematic calibration enhances absolute accuracy by compensating for the fabrication tolerances and installation errors. Effectiveness of calibration procedures depends greatly on the measurements performed. This paper investigates identifiable parameters and optimum postures for four different calibration procedures - measuring postures completely with inverse kinematic residuals, measuring postures completely with forward kinematics residuals, measuring only the three position components, and restraining the mobility of the end-effector using a constraint link. The study is performed for a six degree-of-freedom fully parallel HexaSlide type parallel manipulator, HSM. Results verify that all parameters are identifiable with complete posture measurements. For the case of position measurements, one and for the case of constraint link, three parameters were found non-identifiable. Selecting postures for measurement is also an important issue for efficient calibration procedure. Typically, the condition number of the identification Jacobian is minimized to find optimum postures. Optimal postures showed the same trend of orienting themselves on the boundaries of the search space.

• Journal of Institute of Control, Robotics and Systems
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• v.16 no.12
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• pp.1233-1240
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• 2010

In the flat panel display and semiconductor industries, the visual alignment system is considered as a core technology which determines the productivity of a manufacturing line. It consists of the vision system to extract the centroids of alignment marks and the stage control system to compensate the alignment error. In this paper, we develop a Kalman filter algorithm to estimate the alignment mark postures and propose a coarse-fine alignment control method which utilizes both original fine images and reduced coarse ones in the visual feedback. The error compensation trajectory for the distributed joint servos of the alignment stage is generated in terms of the inverse kinematic solution for the misalignment in task space. In constructing the estimation algorithm, the equation of motion for the alignment marks is given by using the forward kinematics of alignment stage. Secondly, the measurements for the alignment mark centroids are obtained from the reduced images by applying the geometric template matching. As a result, the proposed Kalman filter based coarse-fine alignment control method enables a considerable reduction of alignment time.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.4
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• pp.51-58
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• 2008

This paper presents a new design of the precision stage for the reticle in lithography process and a low hunting control method for the stage. The stage has three axes for X, Y, ${\theta}_z$ those actuated by three voice coil motors individually. The designed reticle stage system has three gap sensors and voice coil motors, and supported by four air bearings and the forward/inverse kinematics of the stage were solved to get an accurate reference position. When a stage is in regulating control mode, there always exist small fluctuations(stage hunting) in the stage movement. Because the low stage hunting characteristic is very important in recent lithography and nano-level applications, a special regulating controller for ultra low hunting is proposed in this paper. Also this research proposed the 2-step transmission system for preventing the noise infection from environmental devices. The experimental results showed the proposed regulating control system reduced hunting noise as 35nm(rms) when a conventional PID generates 77nm(rms) in the same mechanical system. Besides the reticle stage has 100nm linear accuracy and $1{\mu}rad$ rotation accuracy at the control frequency of 8kHz.

• The Journal of Korea Robotics Society
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• v.6 no.3
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• pp.263-273
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• 2011

This paper analyzes the motion of a horseback riding robot which has two actuators and three joints. It is impossible to control the saddle to get to any position and orientation using the two motors because the robot has less degrees of freedom than the number of joints. Therefore it is required to know the possible location and orientation along with the velocity characteristics of each pose prior to motion planning. For this purpose, this paper analyzes the characteristics of the robot motion. The authors derive the forward and inverse kinematics of the robot motion and developed the trajectory editor for motion planning. Also, Jacobian of the robot is analyzed. It reveals that one of the actuator has little influence to the speed of the saddle motion while the other affects the speed of the saddle motion dominantly. The approach of the paper can be applied for the analysis of characteristics of a robot which has less number of actuators than that of joints.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.2
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.7 s.250
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• pp.741-749
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• 2006

For last couple of decades, uses of TFI-LCDs have been expanded to many FPD(Flat Panel Display) applications including mobile displays, desktop monitors and TVs. Furthermore, there has been growing demand for increasingly larger LCD TVs. In order to meet this demand as well as to improve productivity, LCD manufactures have continued to install larger-generation display fabrication facilities which are capable of producing more panels and larger displays per mother glass(substrate). As the size of mother glass becomes larger, a robot required to handle the glass becomes bigger accordingly, and its end effectors(arms) are extended to match the glass size. With this configuration, a considerable static deflection occurs at the end of the robot arms. In order to stack maximum number of mother glasses on a given footprint, the static deflection should be compensated. This paper presents a novel static deflection compensation algorithm. This algorithm requires neither measurement instrument nor additional vertical axis on the robot. It is realized by robot controller software. The forward and inverse kinematics considering compensation always guarantees a unique solution, so the proposed algorithm can be applied to an arbitrary robot position. The algorithm reduced static deflection by 40% in stationary robot state experiment. It also improved vertical path accuracy up to 60% when the arm was running at its maximum speed. This algorithm has been commercialized and successfully applied to a seventh-generation LCD glass-handling robot.