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Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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Effect of Yijin-tang on Gastric Motility between Normal Intact and Partial Pyloric Obstructed Rats (이진탕(二陳湯)이 정상 및 위 유문부가 부분폐색된 흰 쥐의 위 운동성에 미치는 효과)

  • Han, Soak-Young;Yoon, Sang-Hyub
    • The Journal of Internal Korean Medicine
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    • v.30 no.1
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    • pp.107-118
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    • 2009
  • Objectives : This study was aimed to investigated the effect of Yijin-tang on gastric motility and its mechanism of action in normal intact and partial pyloric obstructed rats. Methods : Gastric emptying was measured by the number of glass beads expelled from the stomach (containing one hundred of glass beads. ${\phi}1mm$) in 1 hour or 2 hours after glass beads and test drugs (normal saline. Yijin-tang 90mg/kg. Yijin-tang 270mg/kg) administration in normal intact and partial pyloric obstructed rats. In another series of experiments to evaluate the mechanism of Yijin-tang 270mg/kg under delayed conditions, normal intact rats were treated with atropine sulfate (1mg/kg,s.c.), cisplatin (10mg/kg,i.p.), quinpirole HCI (0.3mg/kg,i.p.) and NAME (NG-nitro-L-arginine methyl ester. 75mg/ kg,s.c.), respectively. Partial pyloric obstructed rats were modified by wrapping the nonabsorbable rubber ring (D :6mm, W:4mm, T: 1mm) around the 1st portion of the duodenum for 8 weeks. The myoelectrical activity of the gastric smooth muscle was recorded by a bipolar electrode placed at the abdominal surface in normal intact and partial pyloric obstructed rats. The gastric myoelectrical activity was measured for 30 minutes before and after orogastric administration of each solution (normal saline, Yijin-tang 270mg/kg) and expressed as dominant frequency, percent of normogastria and power ratio. Results : Yijin-tang improved gastric emptying more than normal saline in normal intact(p<0.001) and partial pyloric obstructed rats(p=0.002). Under the delayed gastric emptying induced by atropine sulfate, cisplatin, quinpirole HCI and NAME. Yijin-tang enhanced gastric emptying significantly in the cisplatin treated group(p<0.001). but didn't in other treated groups. Administration of Yijin-tang 270mg/kg has no significant effect on the myoelectrical activity of the gastric smooth muscle in both normal intact rats and partial pyloric obstructed rats. Conclusions : Yijin-tang seems to stimulate the gastric motility through suppressing the 5HT3 receptor and promoting the antroduodenal flow. We expect that Yijin-tang would be effective especially in dysmotility-like functional dyspepsia with partial pyloric obstruction or the side effects of cisplatin such as nausea, vomiting, abdominal discomfort, and delay of gastric emptying.

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Design and Configuration of 200kW Organic Rankine Cycle Turbine (200kW ORC 터빈 개발 및 구성)

  • Han, Sangjo;Seo, JongBeom
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.38 no.12
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    • pp.1057-1064
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    • 2014
  • Recently, there has been a growing interest in sustainable energy. One method that has been used is an organic Rankine cycle using conventional turbine technology with a low-temperature waste heat source. A 200-kW organic Rankine cycle (ORC) system was designed for a waste heat recovery application using R245fa as the working fluid. A radial turbine running at 15,000 rpm was employed to generate more than 200 kW with an expansion ratio of nine. Because an ORC turbine uses a refrigerant as the working fluid, the ideal gas law was not employed to design the turbine. In addition, the complexity of the molecular structure of R245fa made it difficult to design the turbine. Because R245fa has an Ma value of one at a low velocity for the working fluid (about 1/3 of the speed of sound in air) at about $100^{\circ}C$, it easily reaches a supersonic flow condition with a small pressure expansion. To increase the efficiency of the turbine, a dual stage radial-type turbine with a subsonic speed was suggested. This paper will describe the design procedure and performance evaluation of the ORC turbine using R245fa.

Preparation and Characterization of Porous Filters from Ca(OH)2 and CaCO3 for SO2 Removal in Dry-FGD Process (건식 FGD 공정에서 SO2 제거를 위한 Ca(OH)2 및 CaCO3 원료의 다공성 필터 제조 및 특성)

  • Han, Yo-Seop;Kim, Hyun-Jung;Park, Young-Goo;Park, Jai-Koo
    • Applied Chemistry for Engineering
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    • v.16 no.6
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    • pp.772-777
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    • 2005
  • Porous hydrated lime and limestone filters were prepared by foaming and gelcasting method, and their physical properties were evaluated. Through these analyses, it has been found that with the increased porosity and pore size of the filters, majority of pores in the filters were inter-connected by windows. Also, $SO_2$ removal efficiency for the filters was investigated. As the porosity and the reaction temperature increased, $SO_2$ removal efficiency also increased. Especially, unlike the variation of entrance concentration, the entrance flow rate had great influence on the removal efficiency. In case of the filters with an equal porosity, the hydrated lime filter had superior removal efficiency compared to the limestone filter. From these results, it was shown that the high conversion ratio to CaO from the hydrated lime filter was a result of facilitated formation of $CaSO_4$ by $SO_2$.

Optimum Mix Proportions of High Fluidity Antiwashout Underwater Concrete Using Ground Granulated Blast Furnace Slag (고로슬래그 미분말을 사용한 고유동 수중불분리성 콘크리트의 최적배합비 도출)

  • Kim, Sung-Wook;Park, Jung-Jun;Bae, Su-Ho;Park, Jae-Im
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.8
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    • pp.3704-3712
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    • 2012
  • Recently, antiwashout underwater concrete has been increasingly used for marine foundations of long span bridges. However, to shorten the construction period of antiwashout underwater concrete used in marine foundations, high fluidity antiwashout underwater concrete should be manufactured largely improving fluidity than the previous one. Thus, the objective of this experimental research is to suggest optimum mix proportions of high fluidity antiwashout underwater concrete. For this purpose, concrete specimens containing ground granulated blast furnace slag were manufactured according to the dosage of antiwashout admixture for unit binder contents of 550 and 600kg/$m^3$, respectively. And then, their quality performances such as slump flow, setting time, underwater segregation resistance, and ratio of compressive strength were evaluated according to the related specification of Korea Concrete Institute. It was observed from the test results that the minimum dosage of antiwashout admixture was necessary to satisfy the related specification.

Study on the Applicability Analysis of HPLC for Fuel Marker (Unimark 1494DB) in Petroleum Products (석유제품의 식별제(Unimark 1494DB) 분석을 위한 HPLC 적용가능성 분석 연구)

  • Hwang, In-ha;Youn, Ju-min;Doe, Jin-woo;Park, Tae-seong;Kang, Hyung-kyu;Ha, Jong-han;Na, Byung-gi
    • Journal of the Korean Applied Science and Technology
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    • v.34 no.4
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    • pp.1076-1084
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    • 2017
  • For analyzing the qualitative and quantitative analysis of fuel marker in petroleum products, the applicability of HPLC was studied. For the qualitative analysis of fuel marker in kerosene and automotive diesel, optimal analytical conditions(ratio of mobile phase solvent, flow rate, etc) in HPLC were selected and calibration curve for quantitative analysis of fuel marker was prepared based on the result of qualitative analysis. In particular, the correlation coefficient of calibration curve in kerosene and automotive diesel was shown to be 0.999 in a certain concentration range and it could be applied to the quantitative analysis. The results of analysis using the UV/Vis spectrometer, which is the current analysis method of fuel marker, were compared with the analysis results using the HPLC. The kerosene showed a low deviation of about 7 % and the automotive diesel showed a somewhat large deviation of about 20 %.

MTHFR 3'-untranslated region polymorphisms contribute to recurrent pregnancy loss risk and alterations in peripheral natural killer cell proportions

  • Kim, Eun Sun;Kim, Jung Oh;An, Hui Jeong;Sakong, Jung Hyun;Lee, Hyun Ah;Kim, Ji Hyang;Ahn, Eun Hee;Kim, Young Ran;Lee, Woo Sik;Kim, Nam Keun
    • Clinical and Experimental Reproductive Medicine
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    • v.44 no.3
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    • pp.152-158
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    • 2017
  • Objective: To identify the associations between polymorphisms of the 3'-untranslated region (UTR) of methylenetetrahydrofolate reductase (MTHFR) gene, which codes for an important regulatory enzyme primarily involved in folate metabolism, and idiopathic recurrent pregnancy loss (RPL) in Korean women. Methods: The study population comprised 369 RPL patients and 228 controls. MTHFR 2572C > A, 4869C > G, 5488C > T, and 6685T > C 3'-UTR polymorphisms were genotyped by polymerase chain reaction-restriction fragment length polymorphism analysis or by TaqMan allelic discrimination assays. Natural killer cell proportions were determined by flow cytometry. Results: The MTHFR 2572-5488-6685 (A-C-T) haplotype had an adjusted odds ratio of 0.420 (95% confidence interval, 0.178-0.994; p= 0.048) for RPL. Analysis of variance revealed that MTHFR 4869C > G was associated with altered $CD56^+$ natural killer cell percentages (CC, $17.91%{\pm}8.04%$; CG, $12.67%{\pm}4.64%$; p= 0.024) and folate levels (CC, $12.01{\pm}7.18mg/mL$; CG, $22.15{\pm}26.25mg/mL$; p= 0.006). Conclusion: Variants in the 3'-UTR of MTHFR are potential biomarkers for RPL. However, these results should be validated in additional studies of ethnically diverse groups of patients.

Heterogeneous Photocatalytic Decomposition of Organics in Water Phase ($TiO_2$ 광촉매를 활용한 수용액 내의 유기물질의 광분해반응)

  • Lee, Tai-K.;Kim, Dong-H.;Kim, Kyung-N.;Auh, P. Chung-Moo
    • Solar Energy
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    • v.15 no.2
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    • pp.65-75
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    • 1995
  • We have summarised some important aspects of our recent basic and applied studies in the area of photocatalytic detoxifcation with Degussa P25 titanium dioxide($TiO_2$) being the photocatalyst. Heterogeneousphotocatalytic decompositions of two components such as TCE-chloroform, TCE-phenol and TCE-benzene as well as single component organic, TCE, chloroform and $CCl_4$ were carried out to investigate the effect of additional compound on the TCE decomposition rate. In laboratory experiments, the optimum flow rate of TCE solution was $200cm^3/min$ with annular photoreactor in the presence of 0.1 wt% $TiO_2$ powder under illumination. It was observed that the second compound such as $CHCl_3$, phenol and benzene has a negative effect on the TCE decomposition rate. Result presented that TCE decomposition ratio was increased at low pH in the TCE-phenol two component solution. It could be shown that the photocatalytic reactor exhibits technical feasibility of detoxifying the multicomponent under proper experimental conditions.

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The Study of Efficient Estimation of GPS Photogrammetry (GPS 항공사진측량의 효율성 평가에 관한 연구)

  • Kim, Young-Suk;Shon, Ho-Woong
    • Journal of the Korean Geophysical Society
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    • v.9 no.2
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    • pp.121-128
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    • 2006
  • Recently, spillways are need to control stable water level for supporting main dams because of floods by unusual change of weather such as Typhoon Rusa. This study has been focused on the amount of leakage through the rock mass distributed fractures and joints under the opened emergency spillway. It is very important to evaluate the amount of leakage as these affect stability of spillway by interaction between effective stress and pore pressure. The commercial program MAFIC has been used for analyzing groundwater flow in fractured rock mass. The results showed that the values of range, average and deviation of leakage were 2.85∼ 3.79×10-1, 3.32×10-1 and 1.70×10-2 m3/day/m2 respectively. Secondary, we have estimated the effect of grouting after the transmissivity(Tf) of joint 1 as main pathway of leakage known from above results was changed from 1.78×10-7 to 1.59×10-9 m2/s. The results showed that the values of range, average and deviation of leakage were 7.80×10-4∼1.53×10-3, 1.18×10-3 and 1.32×10-4 m3/day/m2 respectively. As the result, the amount of leakage after grouting has been decreased by a ratio of 1 to 277.

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Determination of Optimum Capacity Rainwater Utilizing Facilities by Analysis of the Water Supply by Land Use Scenario (토지이용 시나리오별 용수공급 분석에 따른 빗물이용시설 최적 용량 결정)

  • Lim, Seok Hwa;Kim, Byung Sung;Ryoo, Kyong Sik;Lee, Sang Jin
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.41 no.4
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    • pp.387-397
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    • 2021
  • Most of Korea's agricultural water is supplied by reservoirs, so dependence on them is very high. Accordingly, it is important to reduce this dependence and provide a stable agricultural water supply by utilizing an applicable alternative water source. Therefore, in this work, scenarios for different land uses were constructed, and an optimal water supply plan using rainwater and reused sewage water - which are alternative water sources - was created. A study was also conducted to determine the optimal capacity of a rainwater facility. From the analysis, a stable water supply was achieved in the scenario of maximum utilization of rainwater by changing an existing paddy area to a greenhouse area, and about 0.82 ton of flow capacity was required for 1 mm of rainfall on farms utilizing rainwater. As a result of analyzing the optimal scenario to derive the ratio of the storage capacity per unit water collection area, the rainwater storage capacity determined through MODSIM and the storage capacity determined through actual monitoring showed similar results, about 31 and 32 %, respectively, and the optimal capacity of rainwater facilities was calculated to be about 5,796,000-6,182,400 ton.