• Journal of the Korean Society for Precision Engineering
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• v.26 no.7
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• pp.127-133
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• 2009

We present a $3-{\underline{P}}RS$ compliant parallel manipulator actuated by PZTs. The motion ranges are $400-{\mu}m$ translation to the z-direction and 5.7-mrad rotation about any axis on the x-y plane. A mechanical amplifier whose advantage is approximately 5.5 is designed and integrated with flexure revolute and spherical joints in a monolithic way. We evaluated the performance of the system: kinematic and dynamic characteristics. In kinematic point of view, the flexures play the roles of conventional mechanism but any nonlinearity such as dead-zone and backlash, which make it possible to achieve the steady-state resolution less than $0.1{\mu}m$. The system shows resonance near 86 Hz with high magnitude and, therefore, poor transient response. But the settling is faster when the flexures are strained higher.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.344.1-344
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• 2002

A newly devised linear flexures bearing (KIMM-LFB) for reciprocating machines is disclosed having improved reliability for long lift. KIMM-LFB is an integrated device comprising a axially moving diaphragm with circumferentially arranged arc-shaped flexure blades secured between rim and hub spacers, which turn out to have higher radial stiffness and lower Von-Mises peak stresses than the one with circumferential tangent cantilever flexure blades. (omitted)

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• Journal of Astronomy and Space Sciences
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• v.29 no.3
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• pp.321-328
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• 2012

We have designed a 30 cm cryogenic space infrared telescope for astronomical observation. The telescope is designed to observe in the wavelength range of 0.5~2.1 ${\mu}m$, when it is cooled down to 77 K. The result of the preliminary design of the support structure and support method of the mirror of a 30 cm cryogenic space infrared telescope is shown in this paper. As a Cassegrain prescription, the optical system of a 30 cm cryogenic space infrared telescope has a focal ratio of f/3.1 with a 300 mm primary mirror (M-1) and 113 mm secondary mirror (M-2). The material of the whole structure including mirrors is aluminum alloy (Al6061-T6). Flexures that can withstand random vibration were designed, and it was validated through opto-mechanical analysis that both primary and secondary mirrors, which are assembled in the support structure, meet the requirement of root mean square wavefront error < ${\lambda}/8$ for all gravity direction. Additionally, when the M-1 and flexures are assembled by bolts, the effect of thermal stress occurring from a stainless steel bolt when cooled and bolt torque on the M-1 was analyzed.

• The korean journal of orthodontics
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• v.22 no.1
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• pp.229-239
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• 1992

This study was performed to define the adaptation patterns of each skeletal components to the flexures of cranial bases, using 91 males from the ages of 17 to 36 and 64 females from the ages of 16 to 34, without orthodontic or prosthetic treatment experiences and with pleasant profiles as subjects. The conclusions are as follow: 1. When considering the changes of flexure of cranial base (Ba-SE-FMN) in both sexes, changes in the anterior cranial base angle to the PM Vertical line (SE-FMN/PMV) were greater than the changes in the posterior cranial base angle to the PM Vertical line (Ba-SE/PMV). Subsequently the nasomaxillary complex showed antero-superior rotating effect as the cranial base angles were increased and postero-inferior rotating effect as they were decreased. 2. Horizontal mandibular angle (Ba-SE-Me) was increased in both sexes as cranial base angle increases (Ba-SE-FMN) and it decreased as the latter was decreases. There by indicating compensatory effects. 3. Maxillary angle (SE-FMN-A) was decreased in both sexes as cranial base angle (Ba-SE-FMN) increases and it increased as the latter was decreased. There by indicating compensatory effects. 4. Mandibular ramus angle to posterior cranial base was decreased in both sexes as cranial base angle increases. There by indicating compensatory effect to anteriorly displaced maxilla and the mandibular ramus angle was increased as the cranial base angle decreases. There by indicating compensatory effect to posteriorly displace maxilla. 5. The length of posterior upper facial height was decreased in both sexes as the cranial base angle increases and it increased as the latter was decreased.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.5
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• pp.30-37
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• 1996

The objective of this research is to explore the analysis and test method for the reliable design and fabrication of a high precision dynamically tuned gyroscope. The tuning frequency is decided by the calculation of mass moment of inertia of rotor and gimbal and the stiffness of flexures. Due to the complex geometry of the flexure, calculation of the stiffness of the suspension flexure is difficult. In this paper, three analytical methods for obtaining the stiffness of the flexure are porposed and a special testing method is used for checking the accuracy of the computed results.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• Journal of the Korean Society for Aviation and Aeronautics
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• v.15 no.3
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• pp.6-14
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• 2007

In this research, vibration reduction and aeroelastic stability of a composite hingeless rotor hub flexure with viscoelastic constrained layer damping treatment(CLDT) were investigated. The composite flexures with viscoelastic CLDT were applied to hingeless rotor system to improve the in-plane stability of the lead-lag motion causing resonance. The modal test was performed and dynamic properties(natural frequency and loss factor) were acquired. Also, complex eigenvalue analysis(SOLlO7) in the NASTRAN structural analysis module was performed and compared with results of the modal test. To insure aeroelastic stability, damping ratio analyses of the hingeless rotor system with CLDT were accomplished at hovering condition due to collective pitch angle changes. Satisfactory results of increasing structural damping and stability were obtained.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.9
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• pp.546-551
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• 2000

A micromechanical switch that can be used as a logic gate is described in this paper. This switch consists of fixed input electrodes an output electrode Vcc/GND electrodes and movable plates suspended by crab-leg flexures. for mechanical switching of an electrical signal a parallel plate actuator which comes in contact with output electrode was used. Provided that movable plates are connected to Vcc and a low input voltage(ground signal) is applied to the fixed input electrodes the movable plates are pulled by an electrostatic force between the fixed input electrodes and the movable plates. the proposed micromechanical switch was fabricated by surface micromachining technology with$2\mum$ -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23.5V.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.1
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• pp.25-32
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• 2012

In this study, we present a gripping mechanism that is inspired by caterpillar's proleg. A caterpillar's proleg has planta that gives compliance to the proleg by greatly deforming its shape. In the bio-inspired gripper, the planta is implemented by flexure joints. The flexures buckle when end force and end moment is applied on the joint in opposite direction. Using this characteristic, the gripping structure is designed so that the flexure buckling can occur. Flexure buckling increases the region where gripping force is constant and this region leads to increasing in gripping range. At the same time, flexure buckling decouples all spines and therefore all spines can move differentially and independently. With this simple but effective mechanism, the bioinspire gripper can achieve adaptive gripping on rough and rugged surfaces. A prototype is built to demonstrate adaptive gripping on rough and rugged surfaces such as cement block, brick.