• Title/Summary/Keyword: flexible substrate

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Multifunctional Fire Sensor Fabricated on a Flexible Substrate (플렉서블 기판상에 제작한 다기능 화재센서에 관한 연구)

  • Seo, JoonYoung;Ko, Dongwan;Choi, Junseck;Noh, JaeHa;Jung, Jung-Yeul;Lee, MoonJin;Lee, Sangtae;Chang, Jiho
    • Journal of Sensor Science and Technology
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    • v.29 no.1
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    • pp.40-44
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    • 2020
  • An integrated multifunctional sensor, capable of raising an early electric-fire warning, was fabricated. An arc-light, temperature, and humidity sensor was fabricated on a flexible substrate using a printed thin film of indium tin oxide. A polyethylene terephthalate (PET) substrate was used as the flexible substrate. The sensor was fabricated on a PET substrate, and its operating characteristics were tested. The operating performances of the sensor when serving as an arc-light, a temperature, and a humidity sensor were estimated to be 0.6247 Ω/W, 80.6 Ω/K, and -4.08 Ω/RH, respectively. The feasibility of the proposed fire sensor was demonstrated; it costs low and offers multiple functionalities.

Fabrication of thin Film Transistor on Plastic Substrate for Application to Flexible Display (Flexible 디스플레이로의 응용을 위한 플라스틱 기판 위의 박막트랜지스터의 제조)

  • 배성찬;오순택;최시영
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.40 no.7
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    • pp.481-485
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    • 2003
  • Amorphous silicon (a-Si:H) based TFT process has been studied at the maximum temperature of 15$0^{\circ}C$ with 25${\mu}{\textrm}{m}$ thick flexible and adhesive tape type polyimide foil substrate, which has benefit on handling a rugged, flexible plastic substrate trough sticking simply it to glass. This paper summarize the process procedure of the TFT on the plastic substrate and shows its electrical characteristics in comparison with glass substrate using primarily the ON/OFF current ratio and the field effect mobility as the quality criterion. The a-SiN:H coating layer played an important role in decreasing surface roughness of plastic substrate, so leakage current of TFT was decreased and mobility was increased. The results show that high quality a-Si:H TFTs can be fabricated on the plastic substrates through coating a rough plastic surface with a-SiN:H.

Fabrication of Flexible CIGS thin film solar cells using STS430 substrate (STS430 기판을 이용한 Flexible CIGS 박막 태양전지 제조)

  • Jung, Seung-Chul;Ahn, Se-Jin;Yun, Jae-Ho;Yoon, Kyung-Hoon
    • 한국신재생에너지학회:학술대회논문집
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    • 2008.05a
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    • pp.436-437
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    • 2008
  • Flexible CIGS thin film solar cell was fabricated using STS430 plate as a flexible substrate in this work. A diffusion barrier layer of $SiO_2$ thin film was deposited on STS430 substrate by PECVD followed by deposition of double layered Mo back contact. After depositing CIGS absorber layer by co-evaporation, CdS buffer layer by chemical bath deposition, ZnO window layer by RF sputtering and Al electrode by thermal evaporation, the solar cell fabrication processes were completed and its performance was evaluated. Corresponding solar cell showed an conversion efficiency of 8.35 % with $V_{OC}$ of 0.52 V, $J_{SC}$ of 26.06 mA/$cm^2$ and FF of 0.61.

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Graphene Field-effect Transistors on Flexible Substrates

  • So, Hye-Mi;Kwon, Jin-Hyeong;Chang, Won-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.578-578
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    • 2012
  • Graphene, a flat one-atom-thick two-dimensional layer of carbon atoms, is considered to be a promising candidate for nanoelectronics due to its exceptional electronic properties. Most of all, future nanoelectronics such as flexible displays and artificial electronic skins require low cost manufacturing process on flexible substrate to be integrated with high resolutions on large area. The solution based printing process can be applicable on plastic substrate at low temperature and also adequate for fabrication of electronics on large-area. The combination of printed electronics and graphene has allowed for the development of a variety of flexible electronic devices. As the first step of the study, we prepared the gate electrodes by printing onto the gate dielectric layer on PET substrate. We showed the performance of graphene field-effect transistor with electrohydrodynamic (EHD) inkjet-printed Ag gate electrodes.

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Flexible Module Packaging using MEMS technology (MEMS 기술을 이용한 Flexible Module Packaging)

  • 황은수;최석문;주병권
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2002.05a
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    • pp.74-78
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    • 2002
  • MEMS공정을 이용하여 폴리실리콘의 piezoresistivity를 이용한 스트레인 센서어레이를 제작하였고, 이 센서 어레이를 flexible substrate에 패키징하는 공정을 개발하였다. 실리콘 웨이퍼에 표면 가공(surface micromachining)된 센서는 폴리이미드 코팅, release-etch 방법을 통해 웨이퍼로부터 분리되어 폴리이미드를 기판으로 하는 flexible sensor array module을 완성할 수 있었다. 공정은 희생층과 절연층을 증착하고 폴리실리콘 0.5 $\mu\textrm{m}$을 증착, 도핑 및 패터닝하여 센서 어레이를 구성하였다. 이 센서어레이를 flexible substrate에 패키징 하기 위해서 폴리이미드를 코팅하여 15 $\mu\textrm{m}$의 막을 구성하였고, 100% $O_2$RIE를 이용한 선택적 식각 방법으로 via hole을 구성하였다. 이후 전기도금을 통해 회로를 구성하여 1단계 패키징(die to chip carrier)과 2단계 패키징(chip to substrate)을 웨이퍼 레벨에서 완성하였다. 희생층을 제거함으로서 웨이퍼로부터 센서어레이 모듈을 분리하였다. 제작되어진 센서 모듈은 임의의 곡면에 실장이 가능하도록 충분한 flexibility를 얻을 수 있었다.

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Mechanically Flexible and Transparent Zinc Oxide Thin Film Transistor on Plastic Substrates (Plastic 기판 상의 투명성과 유연성을 지닌 Zinc Oxide 박막 트랜지스터)

  • Park, Kyung-Yea;Ahn, Jong-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.10-10
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    • 2009
  • We have fabricated transparent and flexible thin film transistor(TFT) on polyethylene terephthalate(PET) substrate using Zinc Oxide (ZnO) and Indium Tin Oxide (ITO) film as active layer and electrode. The transfer printing method was used for printing the device layer on target plastic substrate at room temperature. This approach have an advantage to separate the high temperature annealing process to improve the electrical properties of ZnO TFT from the device process on plastic substrate. The resulting devices on plastic substrate presented mechanical and electrical properties similar with those on rigid substrate.

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Dependence of contrast ratio on rib structure in flexible toner type EPD

  • Ryu, Gi-Seong;Lee, Chang-Bin;Han, Sang-Kwuon;Chun, Seung-Hee;Song, Chung-Kun
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.886-888
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    • 2009
  • We fabricated flexible electronic paper display(EPD) by using toner particles on plastic (PC) substrate. We observed the relationship between contrast ratio and changes of rib structures. One is a fabrication of ribs on bottom substrate. The display with ribs on bottom substrate had higher contrast ratio about 46% than display with ribs on top substrate. The other is a change of density of rib. The less density of ribs fabricated, the higher the contrast ratio become.

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Characteristics of amorphous IZO anode based flexible organic light emitting diodes (비정질 IZO 애노드 박막을 이용한 플렉서블 유기발광소자 특성)

  • Moon, Jong-Min;Bae, Jung-Hyeok;Jeong, Soon-Wook;Kim, Han-Ki;Kang, Jae-Wook
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.491-492
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    • 2006
  • We report on the fabrication of organic-based flexible display using an amorphous IZO anode grown at room temperature. The IZO anode films were grown by a conventional DC reactive sputtering on polycarbonate (PC) substrate at room temperature using a synthesized IZO target in a Ar/$O_2$ ambient. X-ray diffraction examination results show that the IZO anode film grown at room temperature is complete amorphous structure due to low substrate temperature. It is shown that the $Ir(ppy)_3$ doped flexible organic light emitting diode (OLED) fabricated on the IZO anode exhibit comparable current-voltage-luminance characteristics to OLED fabricated on conventional ITO/glass substrate. These findings indicate that the IZO anode film grown on PC substrate is a promising anode materials for the fabrication of organic based flexible displays.

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Plastic Substrate for Flexible Display

  • Kim, In-Sun;Hwang, Hee-Nam;Choi, Jae-Moon;Yeom, Eun-Hee;Park, Yong-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.995-997
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    • 2005
  • A plastic substrate for flexible display is developed. The gas barrier and optical properties of the substrate is improved through depositing silicon oxide/nitride layer and coating polymer layer on plastic film by sputtering process and wet coating process. Roll to roll processes will guarantee the productivity in the whole production process of the plastic substrate.

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Ag Electrode Strain Sensor Fabrication Using Laser Direct Writing Process

  • Kim, Hyeonseok;Shin, Jaeho;Hong, Sukjoon;Ko, Seung Hwan
    • Journal of Sensor Science and Technology
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    • v.24 no.4
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    • pp.215-218
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    • 2015
  • As several innovative technologies for flexible electric devices are being realized, demand for in-situ strain monitoring for flexible electric devices is being emphasized. Because flexible devices are commonly influenced by substrate strain, suitable strain sensors for flexible devices are essential for the sophisticated maneuvering of flexible devices. In this study, a flexible strain sensor based on an Ag electrode is prepared on a polyimide substrate using the LDW (laser direct writing) process. In this process, first, the Ag nanoparticles are coated on the substrate and selectively sintered using a focused laser. Because of the advantages of the LDW process (such as being mask-less, using low temperatures, and having non-vacuum characteristics), the entire fabrication process has been dramatically simplified; as a final outcome, a highly reliable strain sensor has been fabricated. Using this strain sensor, various strain conditions that arise from different bending radii can be detected by measuring real-time electrical signals.